CN207581927U - Plated film testing machine vacuum pump exempts to shut down obturator - Google Patents

Plated film testing machine vacuum pump exempts to shut down obturator Download PDF

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Publication number
CN207581927U
CN207581927U CN201721592513.1U CN201721592513U CN207581927U CN 207581927 U CN207581927 U CN 207581927U CN 201721592513 U CN201721592513 U CN 201721592513U CN 207581927 U CN207581927 U CN 207581927U
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China
Prior art keywords
vacuum pump
valve
connecting rod
valve plate
vacuum
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CN201721592513.1U
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Chinese (zh)
Inventor
胡凡
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Henan Kangyao Electronic Co Ltd
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Henan Kangyao Electronic Co Ltd
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Priority to CN201721592513.1U priority Critical patent/CN207581927U/en
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Publication of CN207581927U publication Critical patent/CN207581927U/en
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Abstract

Plated film testing machine vacuum pump exempts to shut down obturator; coating machine inner cylinder including coating machine body and on the inside of coating machine body; the outside of the coating machine body is fixedly connected with by the first vacuum connection tube equipped with valve chamber; the lower part of valve chamber is connected with vacuum pump; the outside of valve chamber is connected with valve cylinder by the second vacuum connection tube; first and two vacuum connection tube it is horizontally disposed, vacuum pump is vertically arranged;Vacuum separation valve is equipped in the valve chamber, vacuum separation valve includes valve plate, the air inlet of vacuum pump is known as vacuum pump port, valve plate is located at vacuum pump port and valve plate forms sealed connection with vacuum pump port when closing vacuum pump port, bearing is vertically equipped at valve cylinder in valve chamber and in vacuum pump port, the utility model drives rising for link control valve plate open and close by cylinder, when closed, vacuum pump is not needed to shut down and is again started up, valve plate can be opened rapidly by being installed after electronic glass starts plated film in coating machine, it carries out vacuumizing operation, startup without again waiting for vacuum pump.

Description

Plated film testing machine vacuum pump exempts to shut down obturator
Technical field
The utility model is related to filming equipment, more particularly, to a kind of coating machine.
Background technology
Coating machine needs to extract out air in coating machine body before plated film is started, and is evacuated.Outside coating machine body On wall, it is connected with vacuum pump.Vacuum pump starts needs 5 minutes in the running, and shutdown is also required to waiting could stall for 5-10 minutes. The startup and stopping of vacuum pump are required for long time, at the trial, if waiting so could open coating machine for a long time The time will very be expended by taking out electronic glass.Working efficiency is very low, seriously affects experiment progress.And if beating vacuum pump Operating is kept when opening coating machine gate, but not continues to extract vacuum, it will greatly reduces vacuum pump startup and influences experiment Time.How to ensure not continue to extract vacuum during vacuum pump operating, be a problem to be solved.
Utility model content
Exempt to shut down obturator the purpose of this utility model is to provide plated film testing machine vacuum pump, solve vacuum pump and continue Operating extracts vacuum without plated film testing machine is continued.
The technical solution of the utility model is:
Plated film testing machine vacuum pump exempts to shut down obturator, the plating including coating machine body and on the inside of coating machine body Film machine inner cylinder, the outside of the coating machine body are fixedly connected with by the first vacuum connection tube equipped with valve chamber, the lower part of valve chamber Be connected with vacuum pump, the outside of valve chamber is connected with valve cylinder by the second vacuum connection tube, first and two vacuum connection tube it is equal Horizontally disposed, vacuum pump is vertically arranged;Vacuum separation valve is equipped in the valve chamber, vacuum separation valve includes valve plate, vacuum pump Air inlet is known as vacuum pump port, and valve plate is located at vacuum pump port and valve plate forms sealing with vacuum pump port when closing vacuum pump port Connection is vertically equipped with bearing in valve chamber and in vacuum pump port at valve cylinder, horizontal first turn is equipped on bearing Axis is equipped with connecting rod in first rotating shaft, and connecting rod includes the angle of the left connecting rod and right connecting rod of integrally connected, left connecting rod and right connecting rod More than 90 °, left linkages junction is equipped with rotation hole, and first rotating shaft is threaded through in rotation hole, and left end and the valve plate of left connecting rod turn Dynamic connection;The right end of right connecting rod and the piston rod end of valve cylinder are rotatablely connected.
The left end of left connecting rod and the right end of valve plate are rotatablely connected.
Connecting seat is equipped with close to the right end of bearing on valve plate, connecting seat is equipped with the second shaft, and the left end of left connecting rod passes through Second shaft is rotatablely connected with connecting seat.
Second shaft is higher than the upper side of valve.
First rotating shaft is parallel with the second shaft;The axis of first rotating shaft and the second shaft with left connecting rod or the axis of right connecting rod Line is vertical.
Valve plate one end and the edge of vacuum pump port are rotatablely connected, and the other end of valve plate and the left end rotation of left connecting rod connect It connects, the line at the rotation connection of valve plate both ends and plane where left linkages are in the same plane.
The end face of vacuum pump port is equipped with the first seal groove, and sealing ring, the downside pair of valve plate are equipped in the first seal groove The position of the first seal groove is answered to be equipped with the first protrusion, the first protrusion snaps onto the first sealing in valve plate seal vacuum pump mouth In slot.
When vacuum pump port is closed by valve plate, left connecting rod is in horizontality.
Valve chamber is vertically arranged cylinder.
The utility model is open and close by rising for cylinder drive link control valve plate, and when closed, vacuum pump does not need to It shuts down and is again started up, valve plate can be opened rapidly by being installed after electronic glass starts plated film in coating machine, be vacuumized Operation, the startup without again waiting for vacuum pump.It saves the time and reduces electric energy loss caused by the startup of vacuum pump. And vacuum pump can be vertically arranged, is connected on coating machine body without transverse horizontal, makes entire coating machine more compact structure, Easily connect vacuum-pumping pipeline.
Description of the drawings
Fig. 1 is the structure diagram of the utility model.
Specific embodiment
Embodiment one
As shown in Figure 1, the utility model includes coating machine body 1 and the coating machine inner cylinder positioned at 1 inside of coating machine body 2, the outside of coating machine body 1 is fixedly connected with by the first vacuum connection tube 3 equipped with valve chamber 4, and valve chamber 4 is vertically arranged circle Cylindricality.The lower part of valve chamber 4 is connected with vacuum pump 5, and the outside of valve chamber 4 is connected with valve cylinder 7 by the second vacuum connection tube 6, First and two vacuum connection tube 3,6 it is horizontally disposed, vacuum pump 5 is vertically arranged and lower section positioned at valve chamber 4;It is equipped in valve chamber 4 Vacuum separation valve, vacuum separation valve include valve plate 8, and the air inlet of vacuum pump 5 is known as vacuum pump port 9, and valve plate 8 is located at vacuum pump port Valve plate 8 forms sealed connection with vacuum pump port 9 at 9 and when closing vacuum pump port 9, in valve chamber 4 and close in vacuum pump port 9 Bearing 10 is vertically equipped at valve cylinder 7, is equipped with horizontal first rotating shaft 11 on bearing 10,11 companies of being equipped in first rotating shaft Bar, connecting rod include the left connecting rod 13 of integrally connected and right connecting rod 14, and the angle α of left connecting rod 13 and right connecting rod 14 is more than 90 °, left and right Connecting rod junction is equipped with rotation hole 15, and first rotating shaft 11 is threaded through in rotation hole 15, the left end of left connecting rod 13 and the right end of valve plate 8 Rotation connection;The right end of right connecting rod 14 is rotatablely connected with the piston rod end of valve cylinder 7.It is closed in vacuum pump port 9 by valve plate When, left connecting rod 13 is in horizontality.
Better using effect in order to obtain is equipped with connecting seat 16, connecting seat 16 on valve plate 8 close to the right end of bearing 10 The second shaft 12 is equipped with, the left end of left connecting rod 13 is rotatablely connected by the second shaft 12 with connecting seat 16.Second shaft 17 is high In the upper side of valve 8.First rotating shaft 11 is parallel with the second shaft 12;The axis of 11 and second shaft 12 of first rotating shaft with a left side The axis of connecting rod 13 or right connecting rod 14 is vertical.Just can guarantee in this way can raise when valve plate 8 rotates upwards.
In order to further increase sealing effect, the end face of vacuum pump port 9 is equipped with the first seal groove 17, the first seal groove 17 Interior to be equipped with sealing ring, the position of downside the first seal groove 17 of correspondence of valve plate 8 is equipped with the first protrusion 18, is sealed in valve plate 8 First protrusion 18 is snapped onto in the first seal groove 17 during vacuum pump port 9.
Embodiment two
The difference lies in, 8 one end of valve plate and the edge of vacuum pump port 9 to be rotatablely connected with embodiment one, valve plate 8 it is another One end and the left end of left connecting rod 13 are rotatablely connected, the line at 8 both ends rotation connection of valve plate and left linkages 13,14 place planes It is in the same plane.Start one end of valve plate 8 upwards in left connecting rod 13 in this way, the other end is to provide rotating fulcrum, makes opening Easily.Due at the rotation connection of valve plate 8 and line and left linkages 13,14 place planes it is in the same plane, this Sample open when, there is no left connecting rod 13 8 rotational plane of rotational plane valve plate it is inconsistent the problem of, and lead to not beat It opens.
It should be noted that:The left end of left connecting rod 13 can also be rotatablely connected with the left end of valve plate 8, can also be by valve plate 8 It starts.Such approximate variation all falls within the protection scope of the present utility model.
The course of work:Needing to enter in coating machine body 1 vacuumize state when, vacuum pump 5 works, valve cylinder 7 to Right pulling right connecting rod 14, right connecting rod 14, which rotates clockwise, drives left connecting rod 13 to rotate clockwise therewith, and then start valve plate upwards 8.When needing to vacuumize state in pause coating machine body 1, vacuum pump 5 works on, and valve cylinder 7 pushes right connecting rod to the left 14, right connecting rod 14, which rotates counterclockwise, drives left connecting rod 13 to rotate counterclockwise therewith, and then be pressed downward valve plate 8 so that valve plate 8 covers In vacuum pump port 9.

Claims (9)

1. plated film testing machine vacuum pump exempts to shut down obturator, it is characterised in that:Including coating machine body and positioned at coating machine machine The coating machine inner cylinder of internal side, the outside of the coating machine body are fixedly connected with by the first vacuum connection tube equipped with valve chamber, The lower part of valve chamber is connected with vacuum pump, and the outside of valve chamber is connected with valve cylinder by the second vacuum connection tube, and first and two very Empty connecting tube is horizontally disposed, and vacuum pump is vertically arranged;Vacuum separation valve is equipped in the valve chamber, vacuum separation valve includes valve Plate, the air inlet of vacuum pump are known as vacuum pump port, and valve plate is located at vacuum pump port and valve plate and vacuum when closing vacuum pump port Pumping hole, which is formed, to be tightly connected, and bearing is vertically equipped at valve cylinder in valve chamber and in vacuum pump port, is equipped on bearing Horizontal first rotating shaft, is equipped with connecting rod in first rotating shaft, and connecting rod includes the left connecting rod and right connecting rod of integrally connected, left connecting rod with The angle of right connecting rod is more than 90 °, and left linkages junction is equipped with rotation hole, and first rotating shaft is threaded through in rotation hole, left connecting rod Left end is rotatablely connected with valve plate;The right end of right connecting rod and the piston rod end of valve cylinder are rotatablely connected.
2. plated film testing machine vacuum pump according to claim 1 exempts to shut down obturator, it is characterised in that:A left side for left connecting rod End and the right end of valve plate are rotatablely connected.
3. plated film testing machine vacuum pump according to claim 1 exempts to shut down obturator, it is characterised in that:It is close on valve plate The right end of bearing is equipped with connecting seat, and connecting seat is equipped with the second shaft, and the left end of left connecting rod is turned by the second shaft and connecting seat Dynamic connection.
4. plated film testing machine vacuum pump according to claim 3 exempts to shut down obturator, it is characterised in that:Second shaft is high In the upper side of valve.
5. plated film testing machine vacuum pump according to claim 3 exempts to shut down obturator, it is characterised in that:First rotating shaft with Second shaft is parallel;First rotating shaft is vertical with the axis of left connecting rod or right connecting rod with the axis of the second shaft.
6. plated film testing machine vacuum pump according to claim 1 exempts to shut down obturator, it is characterised in that:Valve plate one end with The edge rotation connection of vacuum pump port, the other end of valve plate and the left end of left connecting rod are rotatablely connected, the rotation connection of valve plate both ends The line at place and plane where left linkages are in the same plane.
7. plated film testing machine vacuum pump according to claim 1 exempts to shut down obturator, it is characterised in that:Vacuum pump port End face is equipped with the first seal groove, and sealing ring is equipped in the first seal groove, and the downside of valve plate corresponds to the position of the first seal groove Equipped with the first protrusion, in valve plate seal vacuum pump mouth, the first protrusion is snapped onto in the first seal groove.
8. plated film testing machine vacuum pump according to claim 1 exempts to shut down obturator, it is characterised in that:In vacuum pump port When being closed by valve plate, left connecting rod is in horizontality.
9. plated film testing machine vacuum pump according to claim 1 exempts to shut down obturator, it is characterised in that:Valve chamber is vertical The cylinder of setting.
CN201721592513.1U 2017-11-24 2017-11-24 Plated film testing machine vacuum pump exempts to shut down obturator Active CN207581927U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721592513.1U CN207581927U (en) 2017-11-24 2017-11-24 Plated film testing machine vacuum pump exempts to shut down obturator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721592513.1U CN207581927U (en) 2017-11-24 2017-11-24 Plated film testing machine vacuum pump exempts to shut down obturator

Publications (1)

Publication Number Publication Date
CN207581927U true CN207581927U (en) 2018-07-06

Family

ID=62733266

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721592513.1U Active CN207581927U (en) 2017-11-24 2017-11-24 Plated film testing machine vacuum pump exempts to shut down obturator

Country Status (1)

Country Link
CN (1) CN207581927U (en)

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