CN207562556U - A kind of pumping fluid separator of plasma processing - Google Patents
A kind of pumping fluid separator of plasma processing Download PDFInfo
- Publication number
- CN207562556U CN207562556U CN201721587759.XU CN201721587759U CN207562556U CN 207562556 U CN207562556 U CN 207562556U CN 201721587759 U CN201721587759 U CN 201721587759U CN 207562556 U CN207562556 U CN 207562556U
- Authority
- CN
- China
- Prior art keywords
- cylinder body
- filter core
- vacuum pump
- interior
- plasma processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The utility model discloses a kind of pumping fluid separators of plasma processing, including cylinder body, the upper end of the cylinder body is equipped with exhaust outlet, lower end is equipped with air inlet, the cylinder interior is equipped with filter core, filter core is fixed on cylinder interior by a center axis rotation, it is mounting flange at the top of cylinder body, brute spring is equipped between the filter core and mounting flange, the cylinder base side is equipped with oil discharge outlet, circumscribed solenoid valve is installed on the connecting line of oil discharge outlet, the air inlet connects vacuum pump exhaust port.The pumping fluid separator of the plasma processing of the utility model is used at vacuum pump exhaust port, is matched with vacuum equipment overhead gage valve, can be realized and be automatically drained out filter interior trapped fuel.When vacuum pump extracts vacuum tank chamber interior gas, close circumscribed solenoid valve, realization vacuumizes purpose, when not vacuumizing, opens circumscribed solenoid valve, filter interior trapped fuel is drawn into vacuum pump, it reduces because filter interior trapped fuel is excessive, to added burden caused by filter core, so as to improve clean-up effect and filter core service life, time, the expense that artificial cleaning tape comes are saved, improves working efficiency.
Description
Technical field
The utility model is related to Surface Treatment with Plasma technical field, more particularly to a kind of vacuum of plasma processing
Pump oil separator.
Background technology
Plasma surface processor is widely used to PCB manufactures, electronic circuit, electronic apparatus, automobile making, half
The industries such as conductor manufacture, packaging, printing, coating, high molecular material, plastic cement hardware, medical instrument, sterilizing, have become at present
The vacuum plasma treatment equipment production technical field of Largest In China, product face be related to it is extremely wide, at plasma surface
Reason equipment intermediate pump oil water separator is indispensable device, and plain filter cannot effectively be filled into oil pump exclusion
Oil gas, for a long time using many waste oil can be retained inside after-filter, can only artificial cleaning replacement, it is time-consuming and laborious.Trapped fuel mistake
Filter can be also sprayed after more, pollutes environment.
Invention content
In order to overcome drawbacks described above, the utility model provides a kind of vacuum pump water-oil separating of plasma processing
Device can be realized and be automatically drained out filter interior trapped fuel, improve clean-up effect and filter core service life, save artificial cleaning tape
Come time, expense, improve working efficiency.
The utility model in order to solve its technical problem used by technical solution be：A kind of plasma processing it is true
Empty pump oil separator, including cylinder body, the upper end of the cylinder body is equipped with exhaust outlet, and lower end is equipped with air inlet, the cylinder interior
Equipped with filter core, filter core is fixed on cylinder interior by a center axis rotation, is mounting flange, the filter core and fixation at the top of cylinder body
Brute spring is equipped between flange, the cylinder base side is equipped with oil discharge outlet, is installed on the connecting line of oil discharge outlet external
Formula solenoid valve, the air inlet connect vacuum pump exhaust port.
As further improvement of the utility model, the junction of the mounting flange and cylinder body is sealed equipped with waterproof
Circle.
The beneficial effects of the utility model are：The pumping fluid separator of the plasma processing of the utility model
At vacuum pump exhaust port, matched with vacuum equipment overhead gage valve, can realize and be automatically drained out filter interior trapped fuel.
When vacuum pump extracts vacuum tank chamber interior gas, circumscribed solenoid valve is closed, realization vacuumizes purpose, when not vacuumizing, beats
Circumscribed solenoid valve is opened, filter interior trapped fuel is drawn into vacuum pump, is reduced because filter interior trapped fuel is excessive, to filter core
Caused by added burden, so as to improve clean-up effect and filter core service life, save artificial cleaning tape come time, expense,
Improve working efficiency.
Description of the drawings
FIG. 1 is a schematic structural view of the utility model；
Fig. 2 is the vertical view of Fig. 1；
Fig. 3 is the sectional view of Fig. 1；
It is indicated in figure：1- cylinder bodies；2- exhaust outlets；3- air inlets；4- filter cores；5- central shafts；6- mounting flanges；7- strength bullets
Spring；8- oil discharge outlets；9- circumscribed solenoid valves；10- sealing rings.
Specific embodiment
In order to deepen the understanding to the utility model, the utility model is made below in conjunction with embodiment and attached drawing further
It is described in detail, which is only used for explaining the utility model, does not form the restriction to scope of protection of the utility model.
Fig. 1-3 shows a kind of pumping fluid separator of plasma processing of the utility model, a kind of implementation
Mode, including cylinder body 1, the upper end of the cylinder body 1 is equipped with exhaust outlet 2, and lower end is equipped with air inlet 3, and the cylinder body 1 is internally provided with filter
Core 4, filter core 4 are fixed on by a central shaft 5 rotation inside cylinder body 1, and the top of cylinder body 1 is mounting flange 6, the filter core 4 with it is solid
Determine to be equipped with brute spring 7 between flange 6,1 bottom side of cylinder body is equipped with oil discharge outlet 8, on the connecting line of oil discharge outlet 8 pacifies
Circumscribed solenoid valve 9 is filled, the air inlet 3 connects vacuum pump exhaust port.The junction of the mounting flange 6 and cylinder body 1 is equipped with
Waterproof sealing ring 10.When vacuum pump extracts vacuum tank chamber interior gas, circumscribed solenoid valve is closed, realization vacuumizes mesh
, when not vacuumizing, circumscribed solenoid valve is opened, filter interior trapped fuel is drawn into vacuum pump, is reduced because in filter
Portion's trapped fuel is excessive, to added burden caused by filter core, so as to improve clean-up effect and filter core service life, saves artificial cleaning
Time for bringing, expense improve working efficiency.
Claims (2)
1. a kind of pumping fluid separator of plasma processing, it is characterised in that：Including cylinder body (1), the cylinder body (1)
Upper end be equipped with exhaust outlet (2), lower end is equipped with air inlet (3), and the cylinder body (1) is internally provided with filter core (4), and filter core (4) passes through
One central shaft (5) rotation is fixed on cylinder body (1) inside, is mounting flange (6), the filter core (4) and fixation at the top of cylinder body (1)
Brute spring (7) is equipped between blue (6), cylinder body (1) bottom side is equipped with oil discharge outlet (8), the connecting tube in oil discharge outlet (8)
Road installation circumscribed solenoid valve (9), the air inlet (3) connect vacuum pump exhaust port.
2. a kind of pumping fluid separator of plasma processing according to claim 1, it is characterised in that：It is described
The junction of mounting flange (6) and cylinder body (1) is equipped with waterproof with sealing ring (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721587759.XU CN207562556U (en) | 2017-11-24 | 2017-11-24 | A kind of pumping fluid separator of plasma processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721587759.XU CN207562556U (en) | 2017-11-24 | 2017-11-24 | A kind of pumping fluid separator of plasma processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207562556U true CN207562556U (en) | 2018-07-03 |
Family
ID=62692022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721587759.XU Expired - Fee Related CN207562556U (en) | 2017-11-24 | 2017-11-24 | A kind of pumping fluid separator of plasma processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207562556U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110141912A (en) * | 2019-06-20 | 2019-08-20 | 台州市南风真空设备制造厂 | Auto-manual oil return oil mist filter |
-
2017
- 2017-11-24 CN CN201721587759.XU patent/CN207562556U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110141912A (en) * | 2019-06-20 | 2019-08-20 | 台州市南风真空设备制造厂 | Auto-manual oil return oil mist filter |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180703 Termination date: 20201124 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |