CN207558763U

CN207558763U - Fountain moisturizing is from robot walking

Info

Publication number: CN207558763U
Application number: CN201721696738.1U
Authority: CN
Inventors: 吴功; 张庆
Original assignee: Shanghai Great Fortune Technology Co Ltd
Current assignee: Shanghai Han's Fuchuang Technology Co ltd
Priority date: 2017-12-08
Filing date: 2017-12-08
Publication date: 2018-06-29
Anticipated expiration: 2027-12-08

Abstract

The utility model discloses a kind of fountain moisturizing from robot walking, including trolley body, sink, mechanical arm and spray equipment, sink is located in trolley body, and for placing substrate sheet, mechanical arm is located in trolley body, for carrying substrate sheet, spray equipment includes nozzle, for being sprayed to substrate sheet, effectively prevent wafer in transportational process, residual powder drying hardening on wafer, and reduce yield rate.

Description

Fountain moisturizing is from robot walking

Technical field

The utility model is related to a kind of fountain moisturizings from robot walking.

Background technology

In semiconductor either other relevant industries (such as PVD CVD techniques) after the completion of certain manufacturing process, need Crystal column surface is done into mechanical lapping (such as chemical mechanical polishing processes), control surface film thickness or Flatness.After mechanical lapping is finished, after milling apparatus first does surface clean, then wafer is sent to next equipment and does depth Cleaning, in this transmission process, the remaining dust of grinding process can dry hardening on a wafer, and influence wafer into Product rate.

Utility model content

The utility model provides a kind of fountain moisturizing from robot walking, overcomes the difficulty of the prior art, starts It is a kind of to ensure moist fountain moisturizing from robot walking in wafer transmission process.

The utility model provides a kind of fountain moisturizing from robot walking, including：

Trolley body；

Sink, the sink is located in the trolley body, for placing substrate sheet；

Mechanical arm, the mechanical arm is located in the trolley body, for carrying the substrate sheet；

Spray equipment, the spray equipment includes nozzle, for being sprayed to the substrate sheet.

Further, the substrate sheet is placed on by box body inside sink.

Further, the height of water level in the sink is less than the height of the box body.

Further, filter device is further included, the filter device is located at the lower part of the sink, and the filter device includes First valve, water pump, the second valve, filter and third valve, first valve, the water pump, second valve, the filter and The third valve is sequentially connected, and first valve connects the nozzle by outlet pipe, and the third valve is connected by water inlet pipe The sink.

Further, the quantity of the nozzle is multiple, and is separately positioned on the both sides of the sink；

The quantity of first valve is two, and corresponding with the nozzle of the sink both sides respectively.

Further, filter material is further included, the filter material is located inside the sink.

Further, the filter is respectively with second valve and the third valve to be flexibly connected.

Further, discharge outlet is further included, the discharge outlet is arranged on the bottom of the sink.

Further, level alarm for water is further included, the level alarm for water is located in the sink.

As a result of above-mentioned technology, the utility model has the following advantages：

The fountain moisturizing of the utility model is combined from robot walking by trolley body and mechanical arm, realize transport and Wafer is carried, in addition, also adding sink and spray equipment, makes wafer that can ensure humidity in transportational process, prevents Residual powder drying hardening on wafer, and reduce yield rate.

The utility model is further illustrated with reference to the accompanying drawings and embodiments.

Description of the drawings

Fig. 1 is stereogram of the fountain moisturizing described in the utility model from robot walking；

Fig. 2 is the schematic diagram of filter device described in the utility model；

Fig. 3 is the schematic diagram of box body described in the utility model.

Specific embodiment

As shown in Figure 1, the fountain moisturizing includes trolley body 100, sink 200, mechanical arm 300 from robot walking With spray equipment 400, which can arrive corresponding position for walking according to corresponding telecommand or manually walking, Sink 200 is located in trolley body 100, for placing wafer, but not limited to this, can also be other specific to humidity etc. has It is required that substrate sheet, below in order to illustrate referring only to wafer, mechanical arm 300 is located in trolley body 100, for removing Wafer is transported, spray equipment 400 is located in trolley body 100, for being sprayed to wafer, can ensure that wafer is being transported Humidity during defeated prevents the residual powder on wafer from hardening.It is worth noting that, wafer is put by box body 500 It puts in sink 200, as shown in figure 3, being provided with multiple card slots 501 and an opening 501, wafer on the box body 500 It is inserted into corresponding card slot 501 by the opening 501, which can place multiple wafers, in addition, in sink 200 Height of water level no more than box body 500 height because mechanical arm 300 can be carried out to being exposed at 500 part of box body outside water Crawl, and without reach it is underwater carry out crawl box body 500, effective protection mechanical arm 300, at this point, being exposed at the crystalline substance outside the water surface Disk sprays it by spray equipment 400, prevents residual powder thereon from hardening.

As shown in Figure 1, the spray equipment 400 includes nozzle 410 and outlet pipe 420, which is located at sink 200 On, the quantity of the nozzle 410 can be multiple, be selected according to actual conditions.In one embodiment, in sink 200 Two rows of box bodys 500 are placed with, 200 both sides of sink are both provided with nozzle 410, in such manner, it is possible to ensure that each box body 500 there can be water Stream spray wafer.The nozzle 410 can be the nozzle of nozzle or two nozzles there are four tools, wherein, there are four nozzles for tool Nozzle can be sprayed to two box bodys 500, and mounted on the centre position of 200 side of sink, and tool can be sprayed there are two the nozzle of nozzle A box body 500 is poured, and mounted on the both ends of 200 side of sink.

As depicted in figs. 1 and 2, the fountain moisturizing further includes filter device from robot walking, for will be in sink 200 Water filtration after recycle and used to spray equipment 400.With reference to figure 2, the sink 200 is L-shaped, and filter device is located at sink 200 Downside is additionally provided with protective cover 700 on the outside of the filter device.Filter device includes the first valve 810, water pump 820, the second valve 830th, filter 840 and third valve 850, the first valve 810, water pump 820, the second valve 830, filter 840 and third valve 850 are successively Therefore connection, the both sides of the filter 840, can be opened respectively with the second valve 830 and third valve 850 to be flexibly connected by rotation It closes and replaces the filter 840, which can be mutually isostructural valve with third valve 850, in addition, first valve 810 passes through Outlet pipe 420 connects nozzle 410, and the quantity of the first valve 810 is two, and correspond to the nozzle 410 of 200 both sides of sink respectively, In, 410 quantity of nozzle of 200 side of sink is five, corresponding, which is five-way valve, people in the art Member selects the first valve 810 of the switching port of respective numbers, third valve it is understood that according to the quantity of respective nozzle 410 850 by water inlet pipe connection water channel 200, because under the effect of gravity, impurity can be deposited on 200 bottom of sink in sink 200, In this way, third valve 850, filter 840, the second valve 830, water pump 820, the first valve 810 should be passed through successively in water with impurity It after water pipe 420, is sprayed by nozzle 410, the water sprayed at this time is the water after the filtering of filter 840.

The fountain moisturizing further includes filter material from robot walking, and filter material is located in sink 200, to maintain in sink 200 The cleaning of water.

To sum up, the fountain moisturizing includes filter device and/or filter material from the filter type of robot walking, further carries Strainability is risen.

As shown in Figure 1, the waste in sink 200 can be excluded by discharge outlet 600, which is located at the sink 200 bottom.

The fountain moisturizing further includes level alarm for water from robot walking, when the water in sink 200 is less than required Water level when, which sends out warning, prevent certain wafers on box body can not by the water in sink 200 and Spray equipment 400 carries out moisturizing.

Embodiment described above is merely to illustrate the technological thought and feature of the utility model, and its object is to make ability Technical staff in domain can understand the content of the utility model and implement according to this, it is impossible to only limit this practicality with the present embodiment Novel patent uses range, i.e., all equal variations or modification made according to the revealed spirit of the utility model are still fallen at this In the scope of the claims of utility model.

Claims

1. a kind of fountain moisturizing is from robot walking, which is characterized in that including：

Trolley body；

Sink, the sink is located in the trolley body, for placing substrate sheet；

2. fountain moisturizing as described in claim 1 is from robot walking, which is characterized in that the substrate sheet is placed by box body Inside sink.

3. fountain moisturizing as claimed in claim 2 is from robot walking, which is characterized in that the height of water level in the sink is low In the height of the box body.

4. fountain moisturizing as claimed in claim 3 is from robot walking, which is characterized in that further includes filter device, the mistake Filter device is located at the lower part of the sink, and the filter device includes the first valve, water pump, the second valve, filter and third valve, institute It states the first valve, the water pump, second valve, the filter and the third valve to be sequentially connected, first valve is by going out Water pipe connects the nozzle, and the third valve connects the sink by water inlet pipe.

5. fountain moisturizing as claimed in claim 4 is from robot walking, which is characterized in that the quantity of the nozzle be it is multiple, And it is separately positioned on the both sides of the sink；

6. fountain moisturizing as claimed in claim 4 is from robot walking, which is characterized in that further includes filter material, the filter material position Inside the sink.

7. fountain moisturizing as claimed in claim 4 is from robot walking, which is characterized in that the filter is respectively with described Two valves and the third valve are flexible connection.

8. fountain moisturizing as described in claim 1 is from robot walking, which is characterized in that further includes discharge outlet, the draining Mouth is arranged on the bottom of the sink.

9. fountain moisturizing as described in claim 1 is from robot walking, which is characterized in that further includes level alarm for water, institute Level alarm for water is stated to be located in the sink.