CN207542556U - Discharge excitation formula gas laser apparatus - Google Patents
Discharge excitation formula gas laser apparatus Download PDFInfo
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- CN207542556U CN207542556U CN201721638011.8U CN201721638011U CN207542556U CN 207542556 U CN207542556 U CN 207542556U CN 201721638011 U CN201721638011 U CN 201721638011U CN 207542556 U CN207542556 U CN 207542556U
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- laser apparatus
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Abstract
The utility model provides a kind of discharge excitation formula gas laser apparatus, including：Laser chamber has the discharge electrode kept by the holding member of electric conductivity；The first component is formed on surface towards the first internal hole；Second component is formed with recess portion and the second hole on surface；Second hole penetrates through second component from the bottom surface of recess portion and is connected with the first hole；And bolt, it is configured at the first hole and the second hole, second component is fixed on the first component；Second component has the electrode side opposed with discharge electrode and the chamber-side opposed with laser chamber, and a part for the recess portion is formed on chamber-side.Thereby, it is possible to reduce or even avoid to generate situation about losing at mounting hole.
Description
Technical field
The utility model is related to semiconductor applications more particularly to a kind of discharge excitation formula gas laser apparatus.
Background technology
Along with being made fine of semiconductor integrated circuit, highly integrated, requirement, which improves, in semiconductor exposure device differentiates
Rate.Semiconductor exposure device is referred to as " exposure device " below.Therefore, the wavelength of the light exported from exposure light source is becoming
It is short.Existing mercury vapor lamp is replaced in exposure light source and has used gas laser apparatus.For example, use output wavelength 248nm
Ultraviolet light KrF excimer laser apparatus and output wavelength 193nm ultraviolet light ArF excimer laser apparatus, as
The gas laser apparatus of exposure.
In the prior art, such as in discharge excitation formula gas laser chamber a pair of discharge electrodes is configured with, the pair of
It can be discharged between discharge electrode and carry out exciting laser gas；In addition damped part is can be configured with, to electric discharge production
Raw sound wave is absorbed.
Patent document 1：WO2015/125631A
It should be noted that the introduction of background technology is intended merely to above it is convenient the technical solution of the application is carried out it is clear,
Complete explanation, and facilitate the understanding of those skilled in the art and illustrate.Cannot merely because these schemes the application's
Background technology part is expounded and thinks that above-mentioned technical proposal is known to those skilled in the art.
Utility model content
Inventor has found：There are multiple notches on the damped part, dry between the wiring of discharge electrode for avoiding
It disturbs；But these notches and mounting hole is closer to the distance, it is easy at mounting hole when being assembled, being decomposed and being cleaned when processing
Generate situation about losing.
To solve the above-mentioned problems, the utility model provides a kind of discharge excitation formula gas laser apparatus.Second component has
There is the electrode side opposed with discharge electrode and detached with the electrode side and the chamber-side opposed with laser chamber, it is recessed
The part in portion is formed on the chamber-side.
According to the utility model embodiment in a first aspect, provide a kind of discharge excitation formula gas laser apparatus, including：
Laser chamber has the discharge electrode kept by the holding member of electric conductivity；
The first component is set side by side along the length direction and the discharge electrode of the discharge electrode；Wherein exist
It is formed on the surface of the first component towards the first internal hole；
Second component is configured on the first component, and recess portion and the are formed on the surface of the second component
Two holes；Second hole penetrates through the second component from the bottom surface of the recess portion, and is connected with first hole；And
Bolt is configured at first hole and second hole, and the second component is fixed to described first
On part；
Wherein, the second component has the electrode side opposed with the discharge electrode and divides with the electrode side
It is formed on the chamber-side from and with the opposed chamber-side of the laser chamber, a part for the recess portion.
According to the second aspect of the utility model embodiment, wherein, the recess portion is sized to that institute can be accommodated
State the head of bolt.
According to the third aspect of the utility model embodiment, wherein, discharge excitation formula gas laser apparatus further includes：
Wiring, one end are electrically connected by the holding member with the discharge electrode, the other end and the laser chamber
Inner wall electrical connection.
According to the fourth aspect of the utility model embodiment, wherein, it is formed with notch section at the electrode side.
According to the 5th of the utility model embodiment aspect, wherein, the wiring by the notch section and with the guarantor
Hold component connection.
According to the 6th of the utility model embodiment aspect, wherein, the notch section along the discharge electrode length
Direction is formed with multiple.
According to the 7th of the utility model embodiment aspect, wherein, the recess portion along the discharge electrode length side
It is multiple to being formed with.
The beneficial effects of the utility model are：Second component have the electrode side opposed with discharge electrode and with institute
It states electrode side separation and the chamber-side opposed with laser chamber, a part for recess portion is formed on the chamber-side.By
This, when being assembled, being decomposed and being cleaned when processing, can reduce or even be avoided to generate situation about losing at mounting hole.
With reference to following explanation and attached drawing, the particular implementation of the utility model is disclosed in detail, specifies this practicality
Novel principle can be in a manner of adopted.It should be understood that the embodiment of the utility model in range not thus by
Limitation.In the range of the spirit and terms of appended claims, the embodiment of the utility model includes many changes, modifications
With it is equivalent.
Description of the drawings
Included attached drawing is used for providing being further understood from the utility model embodiment, and which constitute specifications
A part for illustrating the embodiment of the utility model, and with word description comes together to illustrate the principle of the utility model.It is aobvious
And easy insight, the accompanying drawings in the following description are only some embodiments of the utility model, for those of ordinary skill in the art
For, without having to pay creative labor, it can also be obtained according to these attached drawings other attached drawings.In the accompanying drawings：
Fig. 1 is the diagrammatic cross-section of the discharge excitation formula gas laser apparatus of the utility model；
Fig. 2 is the close-up schematic view of dotted line frame A in Fig. 1.
Specific embodiment
With reference to attached drawing, by following explanation, the aforementioned and other feature of the utility model will be apparent.Illustrating
In book and attached drawing, the particular implementation of the utility model is specifically disclosed, which show the utility model wherein may be used
Principle some embodiments, it will thus be appreciated that the utility model is not limited to described embodiment, on the contrary, this practicality
Novel whole modifications, modification and equivalent including falling within the scope of the appended claims.
In the utility model embodiment, term " first ", " second " etc. are used to carry out area from appellation to different elements
Point, it is not intended that the space arrangement of these elements or time sequencing etc., these elements should not be limited by these terms.Term
"and/or" includes one kind of the associated term listed or any one of multiple and all combinations.Term "comprising", " packet
Include ", " having " etc. refer to the presence of stated feature, element, element or component, but be not precluded presence or addition one or
Other multiple features, element, element or component.
In the utility model embodiment, singulative " one ", "the" etc. can include plural form, be broadly interpreted
The meaning of "one" is not defined as " one kind " or " one kind "；In addition term " described " is interpreted as both including singular shape
Formula also includes plural form, unless the context clearly indicates otherwise.In addition term " according to " is interpreted as " at least part root
According to ... ", term "based" is interpreted as " being at least partially based on ... ", unless the context clearly indicates otherwise.
In the description below of the utility model, for convenience of description, will with along axis (such as drive shaft of fan)
The direction that the direction of extension is parallel is known as " axial direction ", and the radial direction centered on axis is known as " radial direction ", will be centered on axis
Encirclement radial outside direction be known as " circumferential direction ".It will be appreciated, however, that these simply to illustrate that convenience, do not limit
Direction when the discharge excitation formula gas laser apparatus is used and manufactured.
In the description below of the utility model, for convenience of description, the side where electrode can be known as " on
Either the side where fan or heat exchanger is known as " downside " or " lower section " by " top " for side ".It will be appreciated, however, that
These simply to illustrate that convenience, do not limit the direction when discharge excitation formula gas laser apparatus is used and manufactured.
The embodiment of the utility model is illustrated with reference to the accompanying drawings.
The utility model embodiment provides a kind of discharge excitation formula gas laser apparatus.
Fig. 1 is the diagrammatic cross-section of the discharge excitation formula gas laser apparatus 100 of the utility model, shows discharge excitation
A part of component that formula gas laser apparatus 100 is broken away.As shown in Figure 1, the discharge excitation formula gas laser apparatus 100 can be with
Including：
Laser chamber 101, inside is encapsulated in by laser gas；
First discharge electrode 102 is arranged on the top of laser chamber 101；And
Second discharge electrode 103, be provided in the laser chamber 101 with first discharge electrode 102 that
This is opposite.
As shown in Figure 1, the discharge excitation formula gas laser 100 can also include：
Fan 104 makes laser gas in 101 internal circulation flow of laser chamber；As illustrated by the arrows in fig. 1.
As shown in Figure 1, electric insulation part 1033 and pulse power can also be set in the discharge excitation formula gas laser 100
Module (PPM, Pulse Power Module) 1034.Second discharge electrode 103 can be arranged in laser chamber 101
Portion is kept by arc-spark stand 1035, and gas guide portion 1036 and heat can also be set in the discharge excitation formula gas laser 100
Exchanger 1037.
It is worth noting that, Fig. 1 has only carried out schematic theory to the discharge excitation formula gas laser apparatus of the utility model
It is bright, but the utility model is without being limited thereto.About other component possessed by general discharge excitation formula gas laser apparatus, specifically may be used
With reference to the relevant technologies, to omit the description herein.In addition, the component or element that are not specialized in Fig. 1, can refer to related skill
Art, the utility model are limited not to this.
Fig. 2 is the close-up schematic view of dotted line frame A in Fig. 1, is shown at second discharge electrode 103 of the utility model
Situation.As shown in Fig. 2, there is laser chamber 101 discharge electrode 202 kept by the holding member 201 of electric conductivity (to scheme
The second discharge electrode 103 in 1).As shown in Fig. 2, the discharge excitation formula gas laser apparatus 100 further includes：
The first component 203, along the length direction (such as direction vertical with paper) of the discharge electrode 202 and institute
Discharge electrode 202 is stated to set side by side；It is wherein formed on the surface of the first component 203 towards the first internal hole
204；
Second component 205 is configured on the first component 203, is formed on the surface of the second component 205
206 and second hole 207 of recess portion；Second hole 207 penetrates through the second component 205 from the bottom surface of the recess portion 206, and with
First hole 204 connects；And
Bolt 208 is configured at first hole 204 and second hole 205, the second component 205 is fixed
Onto the first component 203.
As shown in Fig. 2, the second component 205 have the electrode side 2051 opposed with the discharge electrode 202 and
It is detached with the electrode side 2051 and the chamber-side 2052 opposed with the laser chamber 101, one of the recess portion 206
Divide and be formed on the chamber-side 2052.
In the utility model, a part for recess portion 206 is formed on the chamber-side 2052, therefore is carrying out group
Dress is decomposed and is cleaned when processing, can reduce or even avoid to generate situation about losing at mounting hole.
In the utility model, the recess portion 206 is sized to accommodate the head of the bolt 208.By
The second component 205, can be easily fixed on the first component 203 by this using bolt 208.
As illustrated in fig. 1 and 2, discharge excitation formula gas laser apparatus 100 can also include：
Wiring 209, one end are electrically connected by the holding member 201 with the discharge electrode 202, the other end with it is described
The inner wall electrical connection of laser chamber 101.
As shown in Fig. 2, it is formed with notch section 210 at the electrode side 2051.
As shown in Fig. 2, the wiring 209 by (or via, across) described notch section 210 and with the holding member
201 connections.Steadily discharge electrode 202 can not only be kept as a result, and can be avoided as possible between each component
Interference.
It is worth noting that, Fig. 2 has only carried out schematic theory to the discharge excitation formula gas laser apparatus of the utility model
It is bright, but the utility model is without being limited thereto.Wherein Fig. 2 basically illustrates the right part of discharge electrode 202, can for left part
Similarly to set, omit the description herein.In addition, the component or element that are not specialized in Fig. 2, can refer to the relevant technologies,
The utility model is limited not to this.
In the utility model, avoid interference notch and mounting hole it is distant, therefore assembled, decompose and
Cleaning can be further reduced or even avoid to generate situation about losing at mounting hole when processing.
In the utility model, the notch section 210 along the discharge electrode 202 length direction (such as with paper
Vertical direction) could be formed with it is multiple.The recess portion 206 could be formed with along the length direction of the discharge electrode 202
It is multiple.For example, multiple (such as 6) above-mentioned recess portion 206 can be formed on a row.Thereby, it is possible to further to electric discharge
Electrode 202 carries out stable holding.
It is worth noting that, above each embodiment has only carried out the utility model exemplary illustration, but this practicality
It is novel without being limited thereto, appropriate modification can also be carried out on the basis of above each embodiment.For example, it can incite somebody to action above each
One or more in a embodiment combine.
The utility model is described above in association with specific embodiment, but those skilled in the art should be clear
Chu, these descriptions are all exemplary, and are not the limitation to scope of protection of the utility model.Those skilled in the art can root
Various variants and modifications are made to the utility model according to the spirit and principle of the utility model, these variants and modifications are also in this reality
With in novel range.
The preferred embodiment of the utility model is described above by reference to attached drawing.Many features of these embodiments and excellent
Point according to the detailed description is clear, thus appended claims be intended to cover these embodiments to fall into it true
All these feature and advantage in spirit and scope.Further, since those skilled in the art be readily apparent that many modifications and
Change, therefore be not meant to the embodiment of the utility model being limited to illustrated and description precision architecture and operation, but can
To cover all suitable modifications and the equivalent that fall into the range of it.
Claims (7)
1. a kind of discharge excitation formula gas laser apparatus, including：
Laser chamber has the discharge electrode kept by the holding member of electric conductivity；
The first component is set side by side along the length direction and the discharge electrode of the discharge electrode；Wherein described
It is formed on the surface of the first component towards the first internal hole；
Second component is configured on the first component, recess portion and the second hole is formed on the surface of the second component；
Second hole penetrates through the second component from the bottom surface of the recess portion, and is connected with first hole；And
Bolt is configured at first hole and second hole, and the second component is fixed on the first component；
It is characterized in that, the second component have the electrode side opposed with the discharge electrode and with the electrode side
It detaches and the chamber-side opposed with the laser chamber, a part for the recess portion is formed on the chamber-side.
2. discharge excitation formula gas laser apparatus according to claim 1, wherein, the recess portion is sized to energy
Enough accommodate the head of the bolt.
3. discharge excitation formula gas laser apparatus according to claim 1, wherein, discharge excitation formula gas laser apparatus is also
Including：
Wiring, one end are electrically connected by the holding member with the discharge electrode, and the other end is interior with the laser chamber
Wall is electrically connected.
4. discharge excitation formula gas laser apparatus according to claim 3, wherein, it is formed at the electrode side scarce
Oral area.
5. discharge excitation formula gas laser apparatus according to claim 4, wherein, the wiring by the notch section simultaneously
And it is connect with the holding member.
6. discharge excitation formula gas laser apparatus according to claim 4, wherein, the notch section is along the electric discharge electricity
The length direction of pole is formed with multiple.
7. discharge excitation formula gas laser apparatus according to any one of claims 1 to 6, wherein, the recess portion is along institute
State discharge electrode length direction be formed with it is multiple.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721638011.8U CN207542556U (en) | 2017-11-30 | 2017-11-30 | Discharge excitation formula gas laser apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721638011.8U CN207542556U (en) | 2017-11-30 | 2017-11-30 | Discharge excitation formula gas laser apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207542556U true CN207542556U (en) | 2018-06-26 |
Family
ID=62616321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721638011.8U Active CN207542556U (en) | 2017-11-30 | 2017-11-30 | Discharge excitation formula gas laser apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207542556U (en) |
-
2017
- 2017-11-30 CN CN201721638011.8U patent/CN207542556U/en active Active
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