CN207540360U - A kind of automatic tube furnace of wafer - Google Patents
A kind of automatic tube furnace of wafer Download PDFInfo
- Publication number
- CN207540360U CN207540360U CN201721587390.2U CN201721587390U CN207540360U CN 207540360 U CN207540360 U CN 207540360U CN 201721587390 U CN201721587390 U CN 201721587390U CN 207540360 U CN207540360 U CN 207540360U
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- furnace body
- heating chamber
- pipe
- temperature
- feed
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Abstract
The utility model discloses a kind of automatic tube furnaces of wafer, including supporting rack, one end of support frame as described above is provided with console, the other end bottom of support frame as described above is provided with feed pipe, feed device is provided at the top of the feed pipe, furnace body is provided with above the feed device, the furnace body is fixedly mounted on supporting rack, the bottom of the furnace body is connect by feed inlet with feed device, the furnace body is internally provided with heating chamber, ring heater is provided on the outside of the heating chamber, insulating layer is provided on the outside of the ring heater, the interior side of the heating chamber is provided with air inlet pipe, the inside opposite side of the heating chamber is provided with temperature tube.The utility model on feed pipe by being provided with feed device so that the present apparatus can realize automatic charging, and ring heater is provided on the outside of the heating chamber of furnace body so that the present apparatus can realize Omnidirectional heating, improve the working efficiency of the present apparatus.
Description
Technical field
The utility model is related to wafer stove correlative technology field, more particularly to a kind of automatic tube furnace of wafer.
Background technology
Wafer is prepared at present to be sintered using batch-type furnace mostly, the once sintered sample of batch-type furnace is more, but due to burner hearth
Interior space increases, and in-furnace temperature distribution is very uneven, and sample can not be sufficiently heated, and cannot in batch-type furnace internal protection gas
Fully circulation, therefore atmosphere is not pure in stove, the quality that the two factors result in the wafer of preparation is generally relatively low.Therefore, it sends out
A kind of bright automatic tube furnace of wafer is necessary to solve the above problems.
Utility model content
It is mentioned above in the background art to solve the purpose of this utility model is to provide a kind of automatic tube furnace of wafer
Problem.
To achieve the above object, the utility model provides following technical solution：A kind of automatic tube furnace of wafer, including support
Frame, one end of support frame as described above are provided with console, and the other end bottom of support frame as described above is provided with feed pipe, the feed pipe
Top be provided with feed device, furnace body is provided with above the feed device, the furnace body is fixedly mounted on supporting rack,
The bottom of the furnace body is connect by feed inlet with feed device, and the furnace body is internally provided with heating chamber, the heating chamber
Outside be provided with ring heater, insulating layer, the interior side of the heating chamber are provided on the outside of the ring heater
Air inlet pipe is provided with, the inside opposite side of the heating chamber is provided with temperature tube, and the side of the insulating layer is provided with temperature control heat
Even, the temperature-controlling thermal couple is connect by heat conducting bar with ring heater, and another side bottom of the insulating layer is provided with air-cooler,
The air-cooler is connect by air hose with ring heater, and the top of the heating chamber is provided with exhaust pipe, and the exhaust pipe is remote
One end from furnace body is provided with cooler, and exhaust outlet is provided on the cooler, and the top of the ring heater is provided with
Cool down exhaust outlet.
Preferably, for the feed device using mobile slipway mechanism, slipway mechanism is no bar electric cylinders.
Preferably, the outside of the furnace body uses stainless steel outer sleeve, and the heating chamber is Quartz stove tube, and the insulating layer is set
It is set to ceramic fiber layer.
Preferably, the temperature-controlling thermal couple is provided with multiple, and multiple temperature-controlling thermal couples linearly arrange, and adjacent two temperature controls
Thermocouple spaced set.
Preferably, multiple branch pipes, multiple linear vertical distributions of branch pipe, and adjacent two branch are provided on the air hose
Pipe spaced set.
Preferably, exhaust pipe is provided on the outside of the exhaust pipe and mends warm layer, the exhaust pipe mends warm layer and is set as ceramics
Filled layer.
The technique effect and advantage of the utility model：The utility model is made by being provided with feed device on feed pipe
Automatic charging can be realized by obtaining the present apparatus, be provided with ring heater on the outside of the heating chamber of furnace body so that the present apparatus can be real
Existing Omnidirectional heating improves the working efficiency of the present apparatus；Insulating layer is provided on the outside of ring heater, insulating layer can
Thermal loss is prevented, improves the heating effect of the present apparatus；Temperature-controlling thermal couple and air-cooler are respectively arranged in the both sides of insulating layer,
The present apparatus accurately regulates and controls the temperature in heating chamber, further improves the working efficiency of the present apparatus.
Description of the drawings
FIG. 1 is a schematic structural view of the utility model.
Fig. 2 is the utility model furnace structure diagrammatic cross-section.
In figure：Supporting rack 1, console 2, feed pipe 3, feed device 4, furnace body 5, feed inlet 6, ring heater 7, heat preservation
Layer 8 holds buck 9, is air inlet pipe 10, temperature tube 11, temperature-controlling thermal couple 12, heat conducting bar 13, air-cooler 14, air hose 15, exhaust pipe 16, cold
But device 17, exhaust outlet 18, exhaust pipe mend warm layer 19, cooling exhaust outlet 20.
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
It clearly and completely describes, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work
All other embodiments obtained shall fall within the protection scope of the present invention.
The utility model provides the automatic tube furnace of a kind of wafer as shown in Figs. 1-2, including supporting rack 1, the support
One end of frame 1 is provided with console 2, and the other end bottom of support frame as described above 1 is provided with feed pipe 3, the top of the feed pipe 3
Feed device 4 is provided with, the top of the feed device 4 is provided with furnace body 5, and the furnace body 5 is fixedly mounted on supporting rack 1,
The bottom of the furnace body 5 is connect by feed inlet 6 with feed device 4, and the furnace body 5 is internally provided with heating chamber, it is described plus
Be provided with ring heater 7 on the outside of hot chamber, the outside of the ring heater 7 is provided with insulating layer 8, the heating chamber it is interior
Portion side is provided with air inlet pipe 10, and the inside opposite side of the heating chamber is provided with temperature tube 11, and the side of the insulating layer 8 is set
Be equipped with temperature-controlling thermal couple 12, the temperature-controlling thermal couple 12 is connect by heat conducting bar 13 with ring heater 7, the insulating layer 8 it is another
Side bottom is provided with air-cooler 14, and the air-cooler 14 is connect by air hose 15 with ring heater 7, the top of the heating chamber
Exhaust pipe 16 is provided with, the described one end of exhaust pipe 16 far from furnace body 5 is provided with cooler 17, is provided on the cooler 17
Exhaust outlet 18, the top of the ring heater 7 are provided with cooling exhaust outlet 20.
For the feed device 4 using mobile slipway mechanism, slipway mechanism is no bar electric cylinders；It adopts the outside of the furnace body 5
With stainless steel outer sleeve, the heating chamber is Quartz stove tube, and the insulating layer 8 is set as ceramic fiber layer；The temperature-controlling thermal couple 12
It is provided with multiple, multiple temperature-controlling thermal couples 12 linearly arrangement, and adjacent two 12 spaced sets of temperature-controlling thermal couple；The air hose
Multiple branch pipes, multiple linear vertical distributions of branch pipe, and adjacent two branch pipe spaced sets are provided on 15；The exhaust
The outside of pipe 16 is provided with exhaust pipe and mends warm layer 19, and the exhaust pipe mends warm layer 19 and is set as ceramic filler layer.
This practicality operation principle：The present apparatus on feed pipe 3 by being provided with feed device 4 so that the present apparatus can be real
Existing automatic charging, is provided with ring heater 7 on the outside of the heating chamber of furnace body 5 so that and the present apparatus can realize Omnidirectional heating,
Improve the working efficiency of the present apparatus；Insulating layer 8 is provided in the outside of ring heater 7, insulating layer 8 can prevent heat from damaging
It loses, improves the heating effect of the present apparatus；Temperature-controlling thermal couple 12 and air-cooler 14 are respectively arranged in the both sides of insulating layer 8 so that
The present apparatus can accurately regulate and control the temperature in furnace body 5, further improve the working efficiency of the present apparatus.
Finally it should be noted that：The above descriptions are merely preferred embodiments of the present invention, is not limited to this
Utility model, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art
For, it can still modify to the technical solution recorded in foregoing embodiments or to which part technical characteristic
Equivalent replacement is carried out, within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on,
It should be included within the scope of protection of this utility model.
Claims (6)
1. a kind of automatic tube furnace of wafer, including supporting rack（1）, it is characterised in that：Support frame as described above（1）One end be provided with control
Platform processed（2）, support frame as described above（1）Other end bottom be provided with feed pipe（3）, the feed pipe（3）Top be provided with and give
Expect device（4）, the feed device（4）Top be provided with furnace body（5）, the furnace body（5）It is fixedly mounted on supporting rack（1）
On, the furnace body（5）Bottom pass through feed inlet（6）With feed device（4）Connection, the furnace body（5）Be internally provided with plus
Hot chamber is provided with ring heater on the outside of the heating chamber（7）, the ring heater（7）Outside be provided with insulating layer
（8）, the interior side of the heating chamber is provided with air inlet pipe（10）, the inside opposite side of the heating chamber is provided with temperature tube
（11）, the insulating layer（8）Side be provided with temperature-controlling thermal couple（12）, the temperature-controlling thermal couple（12）Pass through heat conducting bar（13）With ring
Shape heater（7）Connection, the insulating layer（8）Another side bottom be provided with air-cooler（14）, the air-cooler（14）Pass through
Air hose（15）With ring heater（7）Connection, the top of the heating chamber is provided with exhaust pipe（16）, the exhaust pipe（16）Far
From furnace body（5）One end be provided with cooler（17）, the cooler（17）On be provided with exhaust outlet（18）, the annular-heating
Device（7）Top be provided with cooling exhaust outlet（20）.
2. a kind of automatic tube furnace of wafer according to claim 1, it is characterised in that：The feed device（4）Using shifting
Dynamic formula slipway mechanism, slipway mechanism are no bar electric cylinders.
3. a kind of automatic tube furnace of wafer according to claim 1, it is characterised in that：The furnace body（5）External use
Stainless steel outer sleeve, the heating chamber be Quartz stove tube, the insulating layer（8）It is set as ceramic fiber layer.
4. a kind of automatic tube furnace of wafer according to claim 1, it is characterised in that：The temperature-controlling thermal couple（12）It is provided with
It is multiple, multiple temperature-controlling thermal couples（12）Linear arrangement, and adjacent two temperature-controlling thermal couples（12）Spaced set.
5. a kind of automatic tube furnace of wafer according to claim 1, it is characterised in that：The air hose（15）On be provided with it is more
A branch pipe, multiple linear vertical distributions of branch pipe, and adjacent two branch pipe spaced sets.
6. a kind of automatic tube furnace of wafer according to claim 1, it is characterised in that：The exhaust pipe（16）Outside set
It is equipped with exhaust pipe and mends warm layer（19）, the warm layer of exhaust pipe benefit（19）It is set as ceramic filler layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721587390.2U CN207540360U (en) | 2017-11-24 | 2017-11-24 | A kind of automatic tube furnace of wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721587390.2U CN207540360U (en) | 2017-11-24 | 2017-11-24 | A kind of automatic tube furnace of wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207540360U true CN207540360U (en) | 2018-06-26 |
Family
ID=62614913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721587390.2U Active CN207540360U (en) | 2017-11-24 | 2017-11-24 | A kind of automatic tube furnace of wafer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207540360U (en) |
-
2017
- 2017-11-24 CN CN201721587390.2U patent/CN207540360U/en active Active
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