CN207515401U - A kind of silicon chip drying device - Google Patents
A kind of silicon chip drying device Download PDFInfo
- Publication number
- CN207515401U CN207515401U CN201721502744.9U CN201721502744U CN207515401U CN 207515401 U CN207515401 U CN 207515401U CN 201721502744 U CN201721502744 U CN 201721502744U CN 207515401 U CN207515401 U CN 207515401U
- Authority
- CN
- China
- Prior art keywords
- silicon chip
- mounting surface
- main body
- shaft
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Drying Of Solid Materials (AREA)
Abstract
The utility model is related to a kind of silicon chip drying devices, including stent, shaft, adsorbent equipment, fan, motor and gear, the shaft both ends are arranged on stent, gear is arranged in shaft, motor is engaged with gear, the adsorbent equipment is arranged in shaft, adsorbent equipment includes main body, air exhaust head, connecting hole, gas channel, more suction pipes and multiple mounting surfaces, the connecting hole is arranged on body side, air exhaust head is connected with connecting hole, the gas channel is arranged in main body and by mounting surface, the suction pipe is arranged on mounting surface, suction pipe includes suction inlet and connector, connector is arranged on mounting surface and is connected with gas channel, the suction inlet is towards body exterior, each mounting surface is equipped with more suction pipes, it more suction pipe intervals and is arranged in parallel, the fan is arranged on above main body.The utility model rotates silicon chip, so as to make different silicon chips that can be come into full contact with silicon chip, promotes drying efficiency.
Description
Technical field
The utility model is related to silicon wafer processing equipment, more particularly to a kind of silicon chip drying device.
Background technology
Silicon chip in process, needs to dry silicon chip after over cleaning, and silicon chip is put into sealing by existing drying equipment
After in babinet, air by dryer air inlet by circulating fan is pumped into, silicon chip is dried.But existing drying
The static placement of silicon chip in machine, the silicon chip drying effect difference of different location is larger, cause the time required to all silicon chip dryings compared with
Long, drying efficiency is relatively low.
Utility model content
For the utility model in order to solve problem of the prior art, it is higher to provide a kind of drying efficiency, is positioned convenient for silicon chip
Silicon chip drying device.
Specific technical solution is as follows：A kind of silicon chip drying device, including stent, shaft, adsorbent equipment, fan, motor and
Gear, the shaft both ends are arranged on stent, and gear is arranged in shaft, and motor is engaged with gear, and the adsorbent equipment is set
It puts in shaft, adsorbent equipment includes main body, air exhaust head, connecting hole, gas channel, more suction pipes and multiple mounting surfaces, described
Connecting hole is arranged on body side, and air exhaust head is connected with connecting hole, and the gas channel is arranged in main body and passes through mounting surface,
The suction pipe is arranged on mounting surface, and suction pipe includes suction inlet and connector, and connector is arranged on mounting surface and and gas channel
Connection, for the suction inlet towards body exterior, each mounting surface is equipped with more suction pipes, more suction pipe intervals and is arranged in parallel, described
Fan is arranged on above main body.
It is the attached technical scheme of the utility model below.
Preferably, storing apparatus is equipped with below the adsorbent equipment, storing apparatus opening is corresponding with mounting surface.
Preferably, the rectangular cross-section of the main body, there are four the mounting surfaces.
Preferably, the suction inlet shape is horn-like.
Preferably, there are two the stents, two stents are arranged on main body both sides.
The technique effect of the utility model：A kind of silicon chip drying device of the utility model can rotate silicon chip, so as to
Make different silicon chips that can be come into full contact with silicon chip, promote drying efficiency；In addition, silicon chip can be adsorbed in main body, Neng Goushi
Existing primary drying polylith silicon chip, silicon chip positioning are more convenient.
Description of the drawings
Fig. 1 is a kind of schematic diagram of silicon chip drying device of the utility model embodiment.
Fig. 2 is a kind of another schematic diagram of silicon chip drying device of the utility model embodiment.
Specific embodiment
In the following, the substantive distinguishing features and advantage of the utility model are further described with reference to example, but this practicality is new
Type is not limited to listed embodiment.
As depicted in figs. 1 and 2, a kind of silicon chip drying device of the present embodiment includes stent 1, shaft 2, adsorbent equipment 3, wind
Fan 4, motor 5 and gear 6,2 both ends of shaft are arranged on stent 1, and gear 6 is arranged in shaft 2, and motor 5 is nibbled with gear
It closes.The adsorbent equipment 3 is arranged in shaft 2, and adsorbent equipment 3 includes main body 31, air exhaust head 32, connecting hole 33, gas channel
34, more suction pipes 35 and multiple mounting surfaces 36, the connecting hole 33 are arranged on body side, and air exhaust head 32 connects with connecting hole 33
It is logical.The gas channel 34 is arranged in main body 1 and passes through mounting surface 36, and the suction pipe 35 is arranged on mounting surface, suction pipe 35
Including suction inlet 351 and connector 352, connector 353 is arranged on mounting surface and is connected with gas channel, and the suction inlet direction is main
Outside body, each mounting surface is equipped with more suction pipes, more suction pipe intervals and is arranged in parallel, and the fan 4 is arranged on above main body.
In above-mentioned technical proposal, the gas in gas channel is extracted out by air exhaust head, so as to which suction inlet be enable to adsorb silicon chip；Pass through
Motor-driven gear, so as to which shaft 2 be driven to rotate so that main body 31 rotates, and the suction pipe on multiple mounting surfaces can be blown by fan
The pneumatic conveying drying gone out.Through the above technical solutions, silicon chip drying device is enable to dry polylith silicon chip simultaneously, silicon chip is improved
Drying efficiency.Skilled person will appreciate that the fan of multiple and different positions can be set in above-mentioned technical proposal, so as into one
Step promotes drying efficiency.
As depicted in figs. 1 and 2, in the present embodiment, 3 lower section of adsorbent equipment is equipped with storing apparatus 7, storing apparatus 7
Opening 71 is corresponding with mounting surface.Silicon chip can be set in storing apparatus, and drying can be sucked in silicon chip by adsorbent equipment.
In the present embodiment, the rectangular cross-section of the main body 31, there are four the mounting surfaces.The suction inlet shape is loudspeaker
Shape, consequently facilitating suction inlet adsorbs, there are two the stents, and two stents are arranged on main body both sides, so as to enhance to adsorbent equipment
Support, make its rotation more stable.
A kind of silicon chip drying device of the present embodiment can rotate silicon chip, so as to make different silicon chips that can be filled with silicon chip
Tap is touched, and promotes drying efficiency；In addition, silicon chip can be adsorbed in main body, primary drying polylith silicon chip can be realized, silicon chip is fixed
Position is more convenient.
It should be pointed out that above-mentioned preferred embodiment is only to illustrate the technical concepts and features of the utility model, purpose
It is the content for allowing person skilled in the art that can understand the utility model and implements according to this, can not this reality be limited with this
With novel protection domain.All equivalent change or modifications substantially made according to the spirit of the present invention, should all cover in this reality
Within novel protection domain.
Claims (5)
1. a kind of silicon chip drying device, which is characterized in that described including stent, shaft, adsorbent equipment, fan, motor and gear
Shaft both ends are arranged on stent, and gear is arranged in shaft, and motor is engaged with gear, and the adsorbent equipment is arranged on shaft
On, adsorbent equipment includes main body, and air exhaust head, connecting hole, gas channel, more suction pipes and multiple mounting surfaces, the connecting hole are set
It puts in body side, air exhaust head is connected with connecting hole, and the gas channel is arranged in main body and by mounting surface, the suction pipe
It is arranged on mounting surface, suction pipe includes suction inlet and connector, and connector is arranged on mounting surface and is connected with gas channel, described
For suction inlet towards body exterior, each mounting surface is equipped with more suction pipes, more suction pipe intervals and is arranged in parallel, and the fan is arranged on
Above main body.
2. a kind of silicon chip drying device as described in claim 1, which is characterized in that be equipped with below the adsorbent equipment and accommodate dress
It puts, storing apparatus opening is corresponding with mounting surface.
3. a kind of silicon chip drying device as claimed in claim 2, which is characterized in that the rectangular cross-section of the main body, it is described
There are four mounting surfaces.
4. a kind of silicon chip drying device as claimed in claim 3, which is characterized in that the suction inlet shape is horn-like.
5. a kind of silicon chip drying device as claimed in claim 4, which is characterized in that there are two the stents, and two branch are set up
It puts in main body both sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721502744.9U CN207515401U (en) | 2017-11-13 | 2017-11-13 | A kind of silicon chip drying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721502744.9U CN207515401U (en) | 2017-11-13 | 2017-11-13 | A kind of silicon chip drying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207515401U true CN207515401U (en) | 2018-06-19 |
Family
ID=62537423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721502744.9U Active CN207515401U (en) | 2017-11-13 | 2017-11-13 | A kind of silicon chip drying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207515401U (en) |
-
2017
- 2017-11-13 CN CN201721502744.9U patent/CN207515401U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207970632U (en) | A kind of anti-suck exhaust gas processing device | |
| CN208466719U (en) | A kind of multiduty exhausting-dusting device | |
| CN207515401U (en) | A kind of silicon chip drying device | |
| CN206612172U (en) | A kind of net formula capsicum conveying device | |
| CN203599161U (en) | Suction cup conveyer belt type sheet cleaning device | |
| CN208653181U (en) | A kind of high-efficient activated clay drying discharging conveyor belts magnetic impurity removing device | |
| CN108379935A (en) | A kind of air conditioner filter screen cleaning device | |
| CN208499587U (en) | A kind of movable bugduster apparatus for industrial enzyme production | |
| CN205245762U (en) | Novel grain drier is with removing dust device | |
| CN207540299U (en) | A kind of Eider down processing drying unit | |
| CN207463631U (en) | A kind of paddy cleaning machine | |
| CN205863145U (en) | Plug-in sheet machine | |
| CN107869126A (en) | Road cleaning device | |
| CN210320860U (en) | Medicinal material drying device for pharmacy | |
| CN106299029B (en) | A kind of solar energy film pick device based on stainless steel base | |
| CN204582813U (en) | A kind of circulated air Environmental-protection dust removal device | |
| CN205288038U (en) | Absorption formula drying device | |
| CN206029610U (en) | Dustproof brick cutting machine | |
| CN109499199A (en) | A kind of suction nozzle device for disk filter | |
| CN205490648U (en) | Clean moisture -resistant insulating processing system of network switch inner member | |
| CN205358981U (en) | Display system is deposited to computer network server components and parts | |
| CN107120919A (en) | A kind of Production of Ceramics finished product dry dehumidification device | |
| CN205383868U (en) | Corn weathers device | |
| CN207949344U (en) | A kind of project management data holding device fo | |
| CN214620517U (en) | Water-based pressure-sensitive adhesive is with drying equipment with higher speed |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 214203 11 Jincheng Road, Yixing economic and Technological Development Zone, Wuxi, Jiangsu Patentee after: Wuxi dike electronic material Limited by Share Ltd Address before: 214203 11 Jincheng Road, Yixing economic and Technological Development Zone, Wuxi, Jiangsu Patentee before: Wuxi Dike Electronic Material Technology Co., Ltd. |
|
| CP01 | Change in the name or title of a patent holder |