CN207488234U - A kind of gas-detecting device based on dot matrix piezoelectric film sensor - Google Patents
A kind of gas-detecting device based on dot matrix piezoelectric film sensor Download PDFInfo
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- CN207488234U CN207488234U CN201721609830.XU CN201721609830U CN207488234U CN 207488234 U CN207488234 U CN 207488234U CN 201721609830 U CN201721609830 U CN 201721609830U CN 207488234 U CN207488234 U CN 207488234U
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- gas
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- film sensor
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Abstract
The utility model provides a kind of gas-detecting device based on dot matrix piezoelectric film sensor, including dot matrix piezoelectric film sensor, signal generator and signal processing and analysis processing module, the signal generator and signal processing and analysis processing module are connect with dot matrix piezoelectric film sensor, the dot matrix piezoelectric film sensor has at least one gas passage, each gas passage has multiple piezoelectric membranes, the multiple piezoelectric membrane integration is arranged in substrate to form a dot matrix sensor group, the piezoelectric membrane is made of phonon crystal material, and the sensitive material that can adsorb under test gas is coated in its inner surface.The utility model carrys out the resonance wave of focus signal generator generation by using the piezoelectric film sensor of dot matrix structure, the amplitude and frequency that amplified signal generator generates, improve the accuracy of detection, and can be applied to the detection of the different classes of gas of different field, its high sensitivity, has a wide range of application.
Description
Technical field
The utility model is related to gas self-action detection technique fields, more particularly to a kind of to automatically detect particular space
The gas-detecting device based on dot matrix piezoelectric film sensor of middle object gas classification.
Background technology
Gas sensor is the ingredient for detection gas, classification and concentration, and by measured signal be converted to its into
The device or device of the electricity output of certain relationship.Chinese utility model patent application No. is 201410478481.7 provides
A kind of corrosive pipeline monitoring device based on array piezoelectric film sensor, the corrosive pipeline monitoring device functionally can
Meet corrosive pipeline monitoring, but its piezoelectric film sensor is formed using array architecture, which is difficult by signal
The focusing ultrasonic wave generated is encouraged, and flase drop is easily generated for associated amplitude and the smaller signal of frequency.Furthermore Patent No.
The Raman spectrum gas detecting system that the Chinese utility model patent of CN203894167U provides is by setting two Raman gas
Body analytical equipment and different optical sensor groups can make tester while obtain more detection datas, although the Raman light
Spectrum gas detecting system meets the demand of complicated gas componant detection, but its size is larger, sensitivity and integration degree
It is relatively low.For another example the Chinese utility model patent of Patent No. CN203083915U discloses a kind of CO gas detection sensing
Device, the accuracy of detection of the carbon monoxide gas body detecting sensor is high, and stable and reliable in work, carbonomonoxide concentration is excessively high in mine
Alarm lays the foundation for Safety of Coal Mine Production kind gas；But application range has certain limitation.
Utility model content
In view of the foregoing, it is necessary to a kind of gas-detecting device based on dot matrix piezoelectric film sensor is provided, it should
Gas-detecting device carrys out the resonance wave of focus signal generator generation by using the piezoelectric film sensor of dot matrix structure, puts
The amplitude and frequency that big signal generator generates, improve the accuracy of detection, and can be applied to the different classes of gas of different field
Detection, high sensitivity has a wide range of application.
In order to achieve the above objectives, technical solution is used by the utility model：One kind is passed based on dot matrix piezoelectric membrane
The gas-detecting device of sensor, including dot matrix piezoelectric film sensor, signal generator and signal processing and analysis processing module,
The signal generator and signal processing and analysis processing module are connect with dot matrix piezoelectric film sensor, the dot matrix pressure
Conductive film sensor has at least one gas passage, and each gas passage has multiple piezoelectric membranes, and the multiple piezoelectricity is thin
Film integration is arranged in substrate to form a dot matrix sensor group, and the piezoelectric membrane is made of phonon crystal material,
And the sensitive material that can adsorb under test gas is coated in its inner surface.
Further, when the gas passage setting quantity on the dot matrix piezoelectric film sensor is more than one, own
Gas passage be arranged side by side.
Further, the sensitive material that piezoelectric membrane is smeared in same gas passage is same type of sensitive material,
And same type of under test gas can be adsorbed；The type of sensitive material that gas with various in-passage pressure conductive film is smeared is not
Together.
Further, the signal processing and analysis processing module includes sequentially connected laser vibrometer, lock-in amplifier
With Wave data analysis software, wherein, the laser vibrometer connects dot matrix piezoelectric film sensor, the Wave data point
It analyses software and uses LabVIEW softwares.
Further, the gas-detecting device based on dot matrix piezoelectric film sensor, which further includes storage, described treat
The under test gas tank of gas is surveyed, the under test gas tank connects dot matrix piezoelectric film sensor so that the under test gas to be passed through
In gas passage.
Further, the gas-detecting device based on dot matrix piezoelectric film sensor, which further includes storage, nitrogen
Nitrogen gas tank, the nitrogen gas tank connect dot matrix piezoelectric film sensor, the nitrogen are passed through in gas passage, the nitrogen
It is staggered and is passed through in gas passage under test gas.
Further, the gas-detecting device based on dot matrix piezoelectric film sensor further includes mixed air vessel, institute
It states mixed air vessel and connects dot matrix piezoelectric film sensor, under test gas tank and nitrogen gas tank respectively, to mix the gas to be measured
The mixed gas being mixed to get simultaneously is passed through in gas passage by body and nitrogen；It is provided between the nitrogen gas tank and mixed air vessel
First flow controller is provided with second flow controller between the nitrogen gas tank and dot matrix piezoelectric film sensor.
Further, openable and closable mixing exhaust hole is provided in the mixed air vessel.
Further, openable and closable air flue gas vent, the air flue are provided on the dot matrix piezoelectric film sensor
Gas vent is connected with gas passage all on dot matrix piezoelectric film sensor.
Compared with prior art, the utility model has the advantages that：
1st, gas-detecting device provided by the utility model is detected using dot matrix piezoelectric film sensor,
In, piezoelectric film sensor uses dot matrix structure, to improve the detection of the gas-detecting device by dot matrix structure
Efficiency, while the popularity of the gas-detecting device application is improved, and the sensitive material of piezoelectric membrane surface smear, it can improve
The sensitivity of piezoelectric film sensor detection and sound wave conversion efficiency, in addition, piezoelectric membrane is made of phonon crystal, can make humorous
Vibration wave is propagated in piezoelectric membrane interior orientation, and has the function of that regulation and control are focused on to resonance wave, so as to which piezoelectric membrane be made to generate bigger
Amplitude and frequency, reduce the loss of power.
2nd, gas-detecting device described in the utility model is also using resonance wave detection technique, with according to different amplitude versus frequency charactes
It detects the gas classification contained by under test gas, improves the accuracy of detection.
Description of the drawings
Fig. 1 is that a kind of system structure of gas-detecting device based on dot matrix piezoelectric film sensor of the utility model connects
Connect block diagram.
Fig. 2 is the array of figure that dot matrix sensor group is arranged in dot matrix piezoelectric film sensor.
Fig. 3 is local layout viewing of the piezoelectric membrane in gas passage in single dot matrix sensor group.
Main element symbol description
In figure：Under test gas tank 1, nitrogen gas tank 2, mixed air vessel 3, mixing exhaust hole 31, first flow controller 4, second
Flow controller 5, signal generator 6, dot matrix piezoelectric film sensor 7, gas passage 71, dot matrix sensor group 72, pressure
Conductive film 721, air flue gas vent 73, laser vibrometer 8, lock-in amplifier 9 and Wave data analysis software 10.
Following specific embodiment will further illustrate the utility model with reference to above-mentioned attached drawing.
Specific embodiment
It please refers to Fig.1 to Fig.3, in a kind of better embodiment of the utility model, one kind is thin based on dot matrix piezoelectricity
The gas-detecting device of film sensors 7, at dot matrix piezoelectric film sensor 7, signal generator 6 and signal processing and analysis
Manage module.
Wherein, the dot matrix piezoelectric film sensor 7 has at least one gas passage 71, and each gas passage 71 has
There are multiple piezoelectric membranes 721, the multiple integration of piezoelectric membrane 721 is arranged in substrate to form a dot matrix sensor group
72, the piezoelectric membrane 721 is made of phonon crystal material, and is coated in its inner surface and can be adsorbed the quick of under test gas
Feel material.
The signal generator 6 connects the dot matrix piezoelectric film sensor 7, and is passed to the dot matrix piezoelectric membrane
Sensor 7, which is sent out, to encourage so that dot matrix piezoelectric film sensor 7 generates resonance wave.
The signal processing and analysis processing module connects the dot matrix piezoelectric film sensor 7, to obtain the point
The electric signal that configuration piezoelectric film sensor 7 is formed due to the generation of resonance wave, and the electric signal is amplified, filter with
And multichannel scanning processing, rear applied waveforms Data Analysis Software 10 obtain the amplitude-versus-frequency curve of resonance wave, it is described to know
The information of under test gas.
The utility model realizes multiple regions or a certain by the way that piezoelectric film sensor is arranged to dot matrix structure
Multimetering in large area, so that piezoelectric film sensor is capable of the resonance wave of the generation of focus signal generator 6, and
The amplitude and frequency that amplified signal generator 6 generates improve the accuracy of the gas-detecting device detection；Furthermore piezoelectricity
Film 721 is made of phonon crystal material, is caused in piezoelectric membrane 721 using band gap properties possessed by phonon crystal
Resonance wave direction propagation, and being propagated towards piezoelectric film sensor test sensitizing range, i.e., towards place's propagation where sensitive material,
So that the gas absorption being adapted under test gas with sensitive material is on sensitive material, so that piezoelectric film sensor
The electric signal of output changes, which also causes the amplitude-versus-frequency curve acquired in signal processing and analysis processing module to occur
Therefore variation, would know that under test gas whether contain and sensitive material in the gas passage 71 according to amplitude-versus-frequency curve
Adaptable gas, that is, the gas classification contained under test gas can be analyzed, and may according to advance judgement under test gas
The classification that contains smears corresponding sensitive material on piezoelectric membrane 721 further according to the advance judgement and can detect that gas to be measured
Body whether the gas containing the category, so, the utility model is by changing the classification of sensitive material on piezoelectric membrane 721
The gas-detecting device is made to be applied to different fields and detects different classes of gas, application range is wider, practicability
Preferably；In addition, the utility model used sensitive material on piezoelectric membrane 721 can adsorb the gas adaptable with it,
Improve the sensitivity of piezoelectric film sensor detection and resonance wave conversion efficiency.
Further, the gas passage 71 on dot matrix piezoelectric film sensor 7 described in the utility model sets quantity not
It is limited to one, to detect the under test gas with multiple gases classification by the setting of multiple gas passages 71, and works as dot matrix
When gas passage 71 on formula piezoelectric film sensor 7 sets quantity more than one, all gas passages 71 are arranged side by side, with
The plurality of classes of under test gas is detected simultaneously.Further, the sensitive material that piezoelectric membrane 721 is smeared in same gas passage 71
Expect for same category of sensitive material, and the other under test gas of one species can be adsorbed；Piezoelectricity is thin in gas with various channel 71
The classification for the sensitive material that film 721 is smeared is different.
Further, the signal processing and analysis processing module described in the utility model is responsible for passing dot matrix piezoelectric membrane
Electric signal amplification, filtering caused by sensor 7, the afterwards amplitude of application corresponding software analysis resonance wave and propagation time, and obtain
To corresponding amplitude-versus-frequency curve, the then gas according to contained by analysis gained amplitude-versus-frequency curve can calculate under test gas
The concentration of same category gas can also be calculated in classification, and the amplitude according to amplitude-versus-frequency curve, therefore,
In the utility model, the information of under test gas that the signal processing and analysis processing module is known is included including under test gas
The classification of gas and the corresponding concentration of each gas.In addition, in the utility model, the signal processing and analysis processing module is specific
Including sequentially connected laser vibrometer 8, lock-in amplifier 9 and Wave data analysis software 10, wherein, the laser vibrometer
8 connection dot matrix piezoelectric film sensors 7, to pass through the amplitude versus frequency characte of electric signal described in laser detection, the lock-in amplifier 9
Amplitude versus frequency characte acquired in laser vibrometer 8 is amplified, transmits signal to Wave data analysis software 10 after filtering process,
The Wave data analysis software 10 uses LabVIEW softwares, to obtain the amplitude-versus-frequency curve of resonance wave, and according to described
Amplitude-versus-frequency curve knows the information of under test gas.
Further, the gas-detecting device described in the utility model based on dot matrix piezoelectric film sensor 7 further includes
Storage has the under test gas tank 1 of the under test gas, storage to have the nitrogen gas tank 2 of nitrogen and mixed air vessel 3.Wherein, it is described to be measured
Gas tank 1 connects dot matrix piezoelectric film sensor 7, and the under test gas is passed through in gas passage 71.The nitrogen gas tank 2
Dot matrix piezoelectric film sensor 7 is connected, the nitrogen is passed through in gas passage 71, the nitrogen and under test gas are staggered
Be passed through in gas passage 71, with the stability using nitrogen chemical property under room temperature come drain test before the gas-detecting device
Other interior gases, so as to improve the accuracy of the gas-detecting device detection.The mixed air vessel 3 connects dot matrix respectively
Piezoelectric film sensor 7, under test gas tank 1 and nitrogen gas tank 2, to mix the under test gas and nitrogen and will be mixed to get
Mixed gas be passed through in gas passage 71, with after the gas in gas passage 71 is drained using nitrogen recycle nitrogen will treat
Gas is surveyed to bring into gas passage 71；Preferably, it is provided with first flow controller between the nitrogen gas tank 2 and mixed air vessel 3
4, second flow controller 5 is provided between the nitrogen gas tank 2 and dot matrix piezoelectric film sensor 7, to pass through first flow
The setting of controller 4 and second flow controller 5 controls the nitrogen to be passed through gas passage 71 and mixed air vessel 3.Further, institute
It states and openable and closable mixing exhaust hole 31 is provided in mixed air vessel 3；Being provided on the dot matrix piezoelectric film sensor 7 can open
The air flue gas vent 73 of conjunction, the air flue gas vent 73 are equal with gas passage 71 all on dot matrix piezoelectric film sensor 7
Connection.
Gas-detecting device described in the utility model is used for the classification and concentration of detection gas, and detection test process is such as
Under：First, first flow controller 4, second flow controller 5, mixing exhaust hole 31 and air flue gas vent 73 are opened, so
Afterwards, nitrogen is passed through in the gas passage 71 and mixed air vessel 3 of dot matrix piezoelectric film sensor 7 by nitrogen gas tank 2, waits to drain described
Nitrogen gas tank 2, first flow controller 4, mixing exhaust hole 31 and air flue exhaust are closed after other gases in gas-detecting device
Hole 73；Then, nitrogen gas tank 2 and under test gas tank 1, nitrogen and under test gas are opened and inputs dot matrix after mixing in mixed air vessel 3
In formula piezoelectric film sensor 7, meanwhile, signal generator 6 generates excitation, which makes to generate resonance wave in gas passage 71,
Resonance wave direction propagation under the action of piezoelectric membrane 721, and be directed in piezoelectric film sensor at sensitive material place
Sensitizing range, and resonance wave roundtrip in multiple times between 721 upper and lower electrode of piezoelectric membrane reflects the back wave quilt of generation
The probe of dot matrix piezoelectric film sensor 7, which receives, forms electric signal, and dot matrix piezoelectric film sensor 7 arrives the electric signal output
In signal processing and analysis processing module；Laser vibrometer 8 emits laser detection electric signal in signal processing and analysis processing module
Amplitude versus frequency characte, after transport in lock-in amplifier 9 be amplified, filtering process, obtained signal obtains by LabVIEW softwares,
LabVIEW softwares convert the signal into again to be exported, and obtain corresponding amplitude-versus-frequency curve with its signal into certain relationship；
Finally, under test gas tank 1 is closed, opens first flow controller 4, second flow controller 5, mixing exhaust hole 31 and air flue row
Nitrogen is filled in dot matrix piezoelectric film sensor 7 and mixed air vessel 3 by stomata 73, nitrogen gas tank 2, excludes dot matrix piezoelectric membrane
Residual gas in sensor 7 and mixed air vessel 3 completes detection test.
In the utility model, piezoelectric membrane 721 is arranged on a flexible substrate in each gas passage 71, and rule of arranging
It is adjustable, specifically carried out according to the actual requirement of measurand.
Above description is the detailed description for the preferable possible embodiments of the utility model, but embodiment is not limited to
The patent claim of the utility model, the equal variation or modification completed under the technical spirit suggested by all the utility model
Change, should all belong to the utility model and cover the scope of the claims.
Claims (9)
1. a kind of gas-detecting device based on dot matrix piezoelectric film sensor, it is characterised in that：It is thin including dot matrix piezoelectricity
Film sensors, signal generator and signal processing and analysis processing module, the signal generator and signal processing and analysis processing mould
Block is connect with dot matrix piezoelectric film sensor, and the dot matrix piezoelectric film sensor has at least one gas passage,
Each gas passage has multiple piezoelectric membranes, and the multiple piezoelectric membrane integration is arranged in substrate to form a dot matrix
Sensor group, the piezoelectric membrane are made of phonon crystal material, and are coated in its inner surface and can be adsorbed under test gas
Sensitive material.
2. the gas-detecting device as described in claim 1 based on dot matrix piezoelectric film sensor, it is characterised in that：It is described
When gas passage setting quantity on dot matrix piezoelectric film sensor is more than one, all gas passages are arranged side by side.
3. the gas-detecting device as described in claim 1 based on dot matrix piezoelectric film sensor, it is characterised in that：It is same
The sensitive material that piezoelectric membrane is smeared in gas passage is same type of sensitive material, and can be adsorbed same type of
Under test gas；The type for the sensitive material that gas with various in-passage pressure conductive film is smeared is different.
4. the gas-detecting device as described in claim 1 based on dot matrix piezoelectric film sensor, it is characterised in that：It is described
Signal processing and analysis processing module includes sequentially connected laser vibrometer, lock-in amplifier and Wave data analysis software,
In, the laser vibrometer connects dot matrix piezoelectric film sensor, and the Wave data analysis software is soft using LabVIEW
Part.
5. the gas-detecting device as described in claim 1 based on dot matrix piezoelectric film sensor, it is characterised in that：Also wrap
Including storage has the under test gas tank of the under test gas, and the under test gas tank connection dot matrix piezoelectric film sensor is with by institute
Under test gas is stated to be passed through in gas passage.
6. the gas-detecting device as claimed in claim 5 based on dot matrix piezoelectric film sensor, it is characterised in that：Also wrap
Including storage has the nitrogen gas tank of nitrogen, and the nitrogen gas tank connects dot matrix piezoelectric film sensor, the nitrogen is passed through gas
In channel, the nitrogen and under test gas are staggered and are passed through in gas passage.
7. the gas-detecting device as claimed in claim 6 based on dot matrix piezoelectric film sensor, it is characterised in that：Also wrap
Mixed air vessel is included, the mixed air vessel connects dot matrix piezoelectric film sensor, under test gas tank and nitrogen gas tank respectively, to mixed
It closes the under test gas and nitrogen and the mixed gas being mixed to get is passed through in gas passage；The nitrogen gas tank and gaseous mixture
First flow controller is provided between room, second flow is provided between the nitrogen gas tank and dot matrix piezoelectric film sensor
Controller.
8. the gas-detecting device as claimed in claim 7 based on dot matrix piezoelectric film sensor, it is characterised in that：It is described
Openable and closable mixing exhaust hole is provided in mixed air vessel.
9. the gas-detecting device based on dot matrix piezoelectric film sensor as described in claim 5-8 is any, feature exist
In：Openable and closable air flue gas vent, the air flue gas vent and dot matrix are provided on the dot matrix piezoelectric film sensor
All gas passages connect on piezoelectric film sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721609830.XU CN207488234U (en) | 2017-11-27 | 2017-11-27 | A kind of gas-detecting device based on dot matrix piezoelectric film sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721609830.XU CN207488234U (en) | 2017-11-27 | 2017-11-27 | A kind of gas-detecting device based on dot matrix piezoelectric film sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107741455A (en) * | 2017-11-27 | 2018-02-27 | 桂林电子科技大学 | A kind of gas-detecting device based on dot matrix piezoelectric film sensor |
| CN114324569A (en) * | 2022-01-05 | 2022-04-12 | 森霸传感科技股份有限公司 | Gas detection device based on dot-matrix piezoelectric film sensor |
-
2017
- 2017-11-27 CN CN201721609830.XU patent/CN207488234U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107741455A (en) * | 2017-11-27 | 2018-02-27 | 桂林电子科技大学 | A kind of gas-detecting device based on dot matrix piezoelectric film sensor |
| CN114324569A (en) * | 2022-01-05 | 2022-04-12 | 森霸传感科技股份有限公司 | Gas detection device based on dot-matrix piezoelectric film sensor |
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