CN207486978U - A kind of electronic chemical product production cleaning project workshop - Google Patents

A kind of electronic chemical product production cleaning project workshop Download PDF

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Publication number
CN207486978U
CN207486978U CN201721612302.XU CN201721612302U CN207486978U CN 207486978 U CN207486978 U CN 207486978U CN 201721612302 U CN201721612302 U CN 201721612302U CN 207486978 U CN207486978 U CN 207486978U
Authority
CN
China
Prior art keywords
workshop
ontology
exhaust fan
discharge pipe
chemical product
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201721612302.XU
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Chinese (zh)
Inventor
卢星文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Eyre Purification Engineering Co Ltd
Original Assignee
Suzhou Eyre Purification Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Eyre Purification Engineering Co Ltd filed Critical Suzhou Eyre Purification Engineering Co Ltd
Priority to CN201721612302.XU priority Critical patent/CN207486978U/en
Application granted granted Critical
Publication of CN207486978U publication Critical patent/CN207486978U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model is related to a kind of electronic chemical product production cleaning project workshops, it includes workshop ontology, it is set to the intrinsic multiple operation consoles in the workshop, be set in the workshop ontology and with the corresponding suspended hood of the operation console, one end is connected with the suspended hood and the other end extends to the external discharge pipe of the workshop sheet, mounted on the exhaust fan of the discharge pipe other end, mounted on the intrinsic warm and humid inductor in the workshop, multiple air-out nozzles in the workshop ontology and above the operation console, mounted on the workshop bodies top and by motor-driven air blower and respectively with the exhaust fan, the microcontroller that the warm and humid inductor is connected with the regulating valve.It can reduce to workshop intrinsic disturbance as far as possible in this way, it is simple in structure, cost is relatively low, it disclosure satisfy that the clean requirement in cleaning project workshop.

Description

A kind of electronic chemical product production cleaning project workshop
Technical field
The utility model is related to a kind of workshops, and in particular to a kind of electronic chemical product production cleaning project workshop.
Background technology
Ultra-clean and high pure chemical reagent product is the reagent manufacture that a kind of granulometric impurity has strict demand, as dilute in microelectronic industry It releases the electronic chemical products such as agent, stripper, cleaning agent, etchant and belongs to this kind of reagent.These reagents are produced it then becomes necessary to seek survival The workshop of product can avoid dust in the external environment of workshop etc. from entering workshop, pollute;Workshop temperature is maintained constant temperature, with Temperature is avoided to impact the physical parameters such as the dissolved click of substance.Existing engineering workshop is complicated, and energy consumption is even more It is huge, it is difficult to meet increasingly harsh environmental requirement.
Invention content
The utility model aim is to provide a kind of electronic chemical product production purification work for overcome the deficiencies in the prior art Journey workshop.
In order to achieve the above objectives, the technical solution adopted in the utility model is:A kind of electronic chemical product produces cleaning project Workshop, it include workshop ontology, be set to the intrinsic multiple operation consoles in the workshop, be set in the workshop ontology and with The corresponding suspended hood of the operation console, one end be connected with the suspended hood and the other end to extend to the workshop sheet external Discharge pipe, mounted on the exhaust fan of the discharge pipe other end, mounted on the intrinsic warm and humid inductor in the workshop, be mounted on Multiple air-out nozzles in the workshop ontology and above the operation console, mounted on the workshop bodies top and by electricity Machine driving air blower, be connected with the air blower and be built-in with the second adsorption stuffing blast pipe, be connected to it is multiple described in Even air pipe line between air-out nozzle and the air blower, the regulating valve on the even air pipe line and respectively with it is described The microcontroller that exhaust fan, the warm and humid inductor are connected with the regulating valve.
Optimally, it further includes the mistake in the discharge pipe and between the exhaust fan and the suspended hood Strainer and the first adsorption stuffing in the discharge pipe and between the exhaust fan and the filter screen.
Since above-mentioned technical proposal is used, the utility model has following advantages compared with prior art:The utility model Electronic chemical product production cleaning project workshop, by the cooperation of air blower and exhaust fan to realize the stream of this inside and outside air-flow of workshop It is logical, to ensure the intrinsic constant temperature and humidity in workshop;And air-flow can be reduced as far as possible in this way by the input of multiple air-out nozzles The intrinsic disturbance to workshop, it is simple in structure, cost is relatively low, it disclosure satisfy that the clean requirement in cleaning project workshop.
Description of the drawings
Fig. 1 is the structure diagram that the utility model electronic chemical product produces cleaning project workshop.
Specific embodiment
The utility model preferred embodiment is described in detail below in conjunction with attached drawing:
Electronic chemical product production cleaning project workshop as shown in Figure 1, mainly includes workshop ontology 1, operation console 2, air draught Cover 3, discharge pipe 4, exhaust fan 7, microcontroller 8, warm and humid inductor 9, air blower 10 and regulating valve 11 etc..
Wherein, operation console 2 has more, they are disposed in workshop ontology 1;Suspended hood 3 is arranged in workshop ontology 1 And with operation console 2 corresponding 3;One end of discharge pipe 4 is connected with suspended hood 3 and the other end is extended to outside workshop ontology 1, takes out Wind turbine 7 is then mounted on 4 other end of discharge pipe;Warm and humid inductor 9 is mounted in workshop ontology 1, for detecting in workshop ontology 1 Temperature and humidity;Air-out nozzle 14 have it is multiple, they uniformly be mounted on workshop ontology 1 in and positioned at operation console 2 top.Air blast Machine 10 is mounted on the top of workshop ontology 1, it is connected to input fresh air to workshop ontology 1 with motor 13;Blast pipe 12 with Air blower 10 is connected and is built-in with the second adsorption stuffing 121, can be used for being adsorbed and removed particle and excess water in air. Even air pipe line 15 is connected between multiple air-out nozzles 14 and air blower 10, it includes pair being connected with multiple air-out nozzles 14 Answer root branch pipe and the supervisor being connected with more branch pipes;Mounted on even air pipe line 15(Mounted on supervisor)On regulating valve 11 with And the microcontroller 8 being connected respectively with exhaust fan 7, warm and humid inductor 9 and regulating valve 11, such microcontroller 8 can be turned by A/D Change circuit to receive the electric signal that warm and humid inductor 9 generates and then control exhaust fan 7 and regulating valve 11 by load circuit.
In the present embodiment, electronic chemical product production cleaning project workshop is further included in discharge pipe 4 and positioned at pumping Filter screen 5 between wind turbine 7 and suspended hood 3 and the in discharge pipe 4 and between exhaust fan 7 and filter screen 5 One adsorption stuffing 6, the first adsorption stuffing 6 mainly adsorb electronic chemical product to prevent external boundary from generating pollution.
Above-described embodiment is only the technical concepts and features for illustrating the utility model, and its object is to allow be familiar with technique Personage can understand the content of the utility model and implement according to this, can not the scope of protection of the utility model be limited with this, It is all according to the spirit of the present invention substantially equivalent change or modification for being made, should all cover the scope of protection of the utility model it It is interior.

Claims (2)

1. a kind of electronic chemical product production cleaning project workshop, it is characterised in that:It includes workshop ontology(1), be set to it is described Workshop ontology(1)Interior multiple operation consoles(2), be set to the workshop ontology(1)It is interior and with the operation console(2)It is corresponding Suspended hood(3), one end and the suspended hood(3)It is connected and the other end extends to the workshop ontology(1)Outer discharge pipe (4), mounted on the discharge pipe(4)The exhaust fan of the other end(7), mounted on the workshop ontology(1)Interior warm and humid inductor (9), mounted on the workshop ontology(1)It is interior and positioned at the operation console(2)Multiple air-out nozzles of top(14), mounted on institute State workshop ontology(1)Top and by motor(13)The air blower of driving(10)And the air blower(10)It is connected and is built-in with Second adsorption stuffing(121)Blast pipe(12), be connected to multiple air-out nozzles(14)With the air blower(10)Between Even air pipe line(15), mounted on the even air pipe line(15)On regulating valve(11)And respectively with the exhaust fan(7), institute State warm and humid inductor(9)With the regulating valve(11)The microcontroller being connected(8).
2. electronic chemical product production cleaning project workshop according to claim 1, it is characterised in that:It, which is further included, is mounted on The discharge pipe(4)It is interior and positioned at the exhaust fan(7)With the suspended hood(3)Between filter screen(5)And mounted on institute State discharge pipe(4)It is interior and positioned at the exhaust fan(7)With the filter screen(5)Between the first adsorption stuffing(6).
CN201721612302.XU 2017-11-28 2017-11-28 A kind of electronic chemical product production cleaning project workshop Expired - Fee Related CN207486978U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721612302.XU CN207486978U (en) 2017-11-28 2017-11-28 A kind of electronic chemical product production cleaning project workshop

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721612302.XU CN207486978U (en) 2017-11-28 2017-11-28 A kind of electronic chemical product production cleaning project workshop

Publications (1)

Publication Number Publication Date
CN207486978U true CN207486978U (en) 2018-06-12

Family

ID=62471861

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721612302.XU Expired - Fee Related CN207486978U (en) 2017-11-28 2017-11-28 A kind of electronic chemical product production cleaning project workshop

Country Status (1)

Country Link
CN (1) CN207486978U (en)

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Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180612

Termination date: 20211128

CF01 Termination of patent right due to non-payment of annual fee