CN207474432U - Two-way blowning installation - Google Patents
Two-way blowning installation Download PDFInfo
- Publication number
- CN207474432U CN207474432U CN201721716185.1U CN201721716185U CN207474432U CN 207474432 U CN207474432 U CN 207474432U CN 201721716185 U CN201721716185 U CN 201721716185U CN 207474432 U CN207474432 U CN 207474432U
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- China
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- tube body
- way
- regulating mechanism
- blowning installation
- pedestal
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Abstract
Two-way blowning installation.It is related to semiconductor processing technology field more particularly to a kind of two-way blowning installation for reducing chip and weighing wounded.It provides a kind of compact-sized, chip pick-up to stablize, chip surface white residue cleaning efficiency and a kind of high two-way blowning installation of effect.Including pedestal, tube body and a pair of of regulating mechanism；The tube body is the hollow body of top seal, and is vertically provided at the top surface of the pedestal；The top surface of the pedestal is equipped with air inlet, and the air inlet is communicated with the inner cavity of the tube body；A pair of regulating mechanism is connected to close to the position of the top surface of the tube body, and the tail portion of the regulating mechanism is equipped with the blowing nozzle being fixedly connected.The features such as there is the utility model compact-sized, chip pick-up to stablize, chip surface white residue cleaning efficiency and high effect.
Description
Technical field
The utility model is related to semiconductor processing technology field more particularly to a kind of two-way air blowing dresses for reducing chip and weighing wounded
It puts.
Background technology
It at present for chip of the surface without passivation layer, be easy to cause and weighs wounded in die bond process, wherein about 60% is suction nozzle foreign matter
It stains and suction nozzle surface silicon slag muck is manufactured into.Traditional ameliorative way：Brilliant position is taken to blow using single tracheae alignment soldering tip.It is raw
Chip surface white residue not easy-clear, and chip rotates, and influences soldering tip and normally picks up chip during production；Chip is seriously affected
Quality and processing efficiency.
Utility model content
The utility model is stablized in view of the above problems, providing a kind of compact-sized, chip pick-up, and chip surface white residue is clear
Manage efficiency and a kind of high two-way blowning installation of effect.
The technical solution of the utility model is：Including pedestal, tube body and a pair of of regulating mechanism；The tube body is top seal
Hollow body, and be vertically provided at the top surface of the pedestal；The top surface of the pedestal be equipped with air inlet, the air inlet with
The inner cavity of the tube body communicates；A pair of regulating mechanism is connected to close to the position of the top surface of the tube body, the tune
The tail portion of section mechanism is equipped with the blowing nozzle being fixedly connected.
The regulating mechanism includes universal joint tracheae.
The regulating mechanism includes the guide pipe of multi-directional ball and V-shaped structure, and the multi-directional ball is movably arranged on the pipe
On body, the guide pipe, which is fixed on, to be arranged in the multi-directional ball, and the guide pipe is hollow tube, passes through the multi-directional ball and institute
State tube body perforation.
Throttle valve is equipped with close to the position of the bottom of the tube body.
Flowmeter is equipped between the throttle valve and regulating mechanism.
Auxiliary scrub body is further included, the auxiliary scrub body includes screw, loop bar, cylinder, motor and rotating brush, institute
It states screw to be vertically fixed on the pedestal, the loop bar adaptation is movably connected on the screw, and the cylinder is consolidated
Surely the top of the loop bar is arranged on, the rotating brush is fixed in the rotary shaft of the motor, and the motor fixation is set
It puts on the telescopic rod of the cylinder.
High pressure gas from the through-hole that air inlet enters pedestal, hence into tube body, is passed through tube body by the utility model
Tube body both sides regulating mechanism is respectively enterd, is blown out from blowing nozzle.By a pair of of regulating mechanism, blowing direction is adjusted, is greatly improved
Foreign matter stains situation, prevents suction nozzle white residue from accumulating, and caused chip weighs wounded.The utility model has compact-sized, chip pick-up
The features such as stabilization, chip surface white residue cleaning efficiency and high effect.
Description of the drawings
Fig. 1 is the structure diagram of the utility model embodiment one；
Fig. 2 is the structure diagram of the utility model embodiment two；
Fig. 3 is the structure diagram of the utility model embodiment three；
Fig. 4 is the left view of Fig. 3；
1 is pedestal in figure, and 11 be air inlet, and 2 be tube body, and 3 be regulating mechanism, and 31 be universal joint tracheae, and 321 be universal
Ball, 322 be guide pipe, and 4 be blowing nozzle, and 5 be throttle valve, and 6 be flowmeter, and 7 be auxiliary scrub body, and 71 be screw, and 72 be set
Bar, 73 be cylinder, and 74 be motor, and 75 be rotating brush, and 8 be silicon wafer stage, and 81 be to take brilliant mouth.
Specific embodiment
Embodiment one
The present embodiment is as shown in Figure 1, including pedestal 1, tube body 2 and a pair of of regulating mechanism 3；The tube body 2 is top seal
Hollow body 2, and be vertically provided at the top surface of the pedestal 1；The top surface of the pedestal 1 be equipped with air inlet 11, it is described into
Gas port 11 is communicated with the inner cavity of the tube body 2；A pair of regulating mechanism 3 is connected to close to the top surface of the tube body 2
Position, the tail portion of the regulating mechanism 3 are equipped with the blowing nozzle 4 being fixedly connected.High pressure gas is entered the logical of pedestal 1 from air inlet 11
Kong Zhong hence into tube body 2, respectively enters 2 both sides regulating mechanism 3 of tube body by tube body 2, is blown out from blowing nozzle 4.Pass through one
To regulating mechanism 3, blowing direction is adjusted, greatly improves foreign matter and stains situation, prevent suction nozzle white residue from accumulating, caused chip pressure
Wound.
The regulating mechanism 3 includes universal joint tracheae 31.Universal joint tracheae 31 adjusts air blowing angle and position, adjusts a pair of
Universal joint tracheae 31 avoids rotating during chip manufacture.
Throttle valve 5 is equipped with close to the position of the bottom of the tube body 2.Pass through throttle valve 5, the size of control tracheae air blowing.
Flowmeter 6 is equipped between the throttle valve 5 and regulating mechanism 3.Real-time gas flow is monitored by flowmeter 6.
Embodiment two
The present embodiment is as shown in Fig. 2, the regulating mechanism 3 includes the guide pipe 322 of multi-directional ball 321 and V-shaped structure, institute
It states multi-directional ball 321 to be movably arranged on the tube body 2, the guide pipe 322, which is fixed on, to be arranged in the multi-directional ball 321, institute
Guide pipe 322 is stated as hollow tube, is penetrated through by the multi-directional ball 321 and the tube body 2.Gas flows into multi-directional ball out of tube body 2
In 321 through-hole, cocurrent is into guide pipe 322.Multi-directional ball 321 adjusts the blowing direction of guide pipe 322；Guide pipe 322 uses
Stainless steel tube, be welded and fixed it is V-shaped, manufacture it is at low cost, be less prone to the situation of bending section breakage gas leakage.
Embodiment three
The present embodiment as shown in Figure 3-4, further include auxiliary scrub body 7, it is described auxiliary scrub body 7 include screw 71,
Loop bar 72, cylinder 73, motor 74 and rotating brush 75, the screw 71 are vertically fixed on the pedestal 1, the loop bar 72
Adaptation is movably connected on the screw 71, and the cylinder 73 is fixed at the top of the loop bar 72, the rotating brush
75 are fixed in the rotary shaft of the motor 74, and the motor 74 is fixed on the telescopic rod of the cylinder 73.
Assist scrub body 7 before blowing nozzle 4 blows slag, on silicon wafer stage 8 take brilliant mouth 81 carry out rotation wash away；Pass through
The cooperation of loop bar 72 and screw 71, adjusts the height of rotating brush 75, and cylinder 73 realizes the elastic function of rotating brush 75.Rotation
Several gas holes can be equipped on brush 75, gas hole is communicated with the inner cavity of tube body 2, improves the effect and efficiency of scarfing cinder.
Claims (6)
1. two-way blowning installation, which is characterized in that including pedestal, tube body and a pair of of regulating mechanism；The tube body is top seal
Hollow body, and be vertically provided at the top surface of the pedestal；The top surface of the pedestal be equipped with air inlet, the air inlet with
The inner cavity of the tube body communicates；A pair of regulating mechanism is connected to close to the position of the top surface of the tube body, the tune
The tail portion of section mechanism is equipped with the blowing nozzle being fixedly connected.
2. two-way blowning installation according to claim 1, which is characterized in that the regulating mechanism includes universal joint tracheae.
3. two-way blowning installation according to claim 1, which is characterized in that the regulating mechanism includes multi-directional ball and in V
The guide pipe of type structure, the multi-directional ball are movably arranged on the tube body, the guide pipe be fixed on be arranged on it is described universal
On ball, the guide pipe is hollow tube, is penetrated through by the multi-directional ball and the tube body.
4. two-way blowning installation according to claim 1, which is characterized in that be equipped with close to the position of the bottom of the tube body
Throttle valve.
5. two-way blowning installation according to claim 4, which is characterized in that be equipped between the throttle valve and regulating mechanism
Flowmeter.
6. two-way blowning installation according to claim 1, which is characterized in that further include auxiliary scrub body, the auxiliary
Scrub body includes screw, loop bar, cylinder, motor and rotating brush, and the screw is vertically fixed on the pedestal, described
Loop bar adaptation is movably connected on the screw, and the cylinder is fixed at the top of the loop bar, and the rotating brush is consolidated
Surely it is arranged in the rotary shaft of the motor, the motor is fixed on the telescopic rod of the cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721716185.1U CN207474432U (en) | 2017-12-10 | 2017-12-10 | Two-way blowning installation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721716185.1U CN207474432U (en) | 2017-12-10 | 2017-12-10 | Two-way blowning installation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207474432U true CN207474432U (en) | 2018-06-08 |
Family
ID=62257980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721716185.1U Active CN207474432U (en) | 2017-12-10 | 2017-12-10 | Two-way blowning installation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207474432U (en) |
-
2017
- 2017-12-10 CN CN201721716185.1U patent/CN207474432U/en active Active
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