CN207472973U - A kind of measuring apparatus of mass spectrum multi-pole capacitance - Google Patents
A kind of measuring apparatus of mass spectrum multi-pole capacitance Download PDFInfo
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- CN207472973U CN207472973U CN201721603548.0U CN201721603548U CN207472973U CN 207472973 U CN207472973 U CN 207472973U CN 201721603548 U CN201721603548 U CN 201721603548U CN 207472973 U CN207472973 U CN 207472973U
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Abstract
The utility model discloses a kind of mass spectrum measuring apparatus of multi-pole capacitance, including：Signal processing module, internal clocking module, power amplifier module, isolation transformer module, multi-pole assembly, feedback control module；By using the frequency source of DDS connection radio frequencies, the frequency of high pressure that radio frequency exports can be made to change in wide range, find out the frequency of tuning current minimum, then the high standard capacitance of service precision is connect with radio frequency, in the case where not changing the other parameters such as radio frequency inductive, reach with radio-frequency power supply in the standard capacitance of identical frequency low-resonance tuning state be exactly multi-pole distribution capacity, with at low cost, system stability is strong, it is efficient, it is repeated strong, can high quality solution technical problem the advantages that.
Description
Technical field
The utility model is related to chemical analysis technology fields, are set more particularly, to a kind of mass spectrum with the measurement of multi-pole capacitance
It is standby.
Background technology
As one kind of chemical analysis instrument, analytical instrument of quality is because the molecular weight letter of chemical substance can be directly given
Breath, increasingly becomes a kind of most important chemical analysis means.Wherein, multi-pole mass spectrograph has high-throughput, high dynamic range,
Easy care operation becomes the Mass Spectrometer Method instrument of mainstream.
Multi-pole and its radio-frequency power supply are the mass spectrometric core components of multi-pole.Multi-pole is usually pressed by multiple columnar electrodes
Specific spatial distribution composition.Such as quadrupole rod, two of which electrode stem partner positive pole bar, other two electrode stem composition
A pair of of cathode bar.During work, voltage V1=U+Vcos (ω t) need to be applied in positive pole bar, while apply voltage on cathode bar
V2=- (U+Vcos (ω t)), wherein U are DC DC voltages, and V is high-frequency ac voltage.By adjusting the size and ratio of U and V
Example can make the ion of specific charge-mass ratio pass through the central passage of quadrupole rod and reach detector, screen to obtain so as to fulfill ion
Mass spectrometric data.Wherein, ion, which is selected, makes precision with the assembling of radio frequency and quadrupole rod and determines mass spectrographic resolution ratio, sensitivity,
The mass spectrographic main performance index such as mass range, mass accuracy.
According to Marhieu equation, multi-pole mass spectrograph is the more metallic rods assembled by more Precision Machinings（Object is one
Group）And the Alternate and direct electric field loaded thereon, the electric field that the ion that selecting charge-mass ratio needs is formed by multi-pole reach chemistry
The purpose of substance detection.According to purpose is used, external radio-frequency power supply output high pressure is loaded on multi-pole, is not limited to select
The ion of unique mass-to-charge ratio passes through, and further includes the fixed ion for accumulating selection, and the ion of selection and other gas collisions simultaneously generate
The operations such as new ion.Wherein radio-frequency power supply output radio-frequency voltage and DC voltage, export secondary coil amount, in radio-frequency power supply
Under frequency, inductance is equivalent to, and multi-pole is equivalent to capacitance under identical frequency.When capacitance and inductance are in defined frequency
Under when completing resonance, the radio frequency system power of consumption is minimum, and the sine wave exported is more simple, the resolution ratio of spectral peak,
The indexs such as intensity are more superior.
But since multi-pole size is larger, the capacitance of formation belongs to spatial distribution capacitance, complex-shaped, it is difficult to it calculates,
And the higher numerical value of accuracy, and the precision of common LCR electric bridges cannot be provided using common LCR bridge tests, frequency
The use of rate point etc. is also limited by LCR electric bridges, influences accurately to measure capacitance, and the size of multi-pole space capacitance is design
One of mass spectrometric important parameter of multi-pole, its accurate measure is to realize the chemical analysis instruments such as mass spectrum and mass spectrometer
The necessary process of autonomous Design.Between usually there was only 10-50pF due to the load capacitance of multi-pole, and its capacitance is by sky
Between distribution capacity influence, usually have minor change, it is accurate to measure multi-pole capacitance, calculate matching radio-frequency power supply
Parameter is very important.
Utility model content
In view of this, it needs to overcome at least one of drawbacks described above of the prior art.The utility model proposes one kind
Can steadily, high-precision, be achieved at low cost the measuring apparatus of mass spectrum multi-pole capacitance, including signal processing module, inside
Clock module, power amplifier module, isolation transformer module, multi-pole assembly, feedback control module.（Wherein " multi-pole is total
Into " including multi-poles assemblies such as quadrupole rod assembly, sextupole bar assembly, octupole bar assemblies）
For generate changeable frequency signal and output transmit signals to the signal processing module of power amplifier module with
The power amplifier module is connected, and including signal generator, signal occurrence frequency controller and power amplifier module amplitude
Controller；
Fixed frequency signal is provided for the power amplifier module and is used to adjust the internal clocking mould of resonant frequency
Block is connected with the power amplifier module；
For amplifying the signal processing module output signal and providing driving voltage for the isolation transformer module
It is the power amplifier module and the signal processing module, the isolation transformer module, the internal clocking module, described anti-
Feedback control module is connected
From the power amplifier module get voltage carry out transformation and for drive multi-pole assembly work described in every
It is connected from transformer module with the power amplifier module, multi-pole assembly；
The multi-pole assembly for screening particle is connected with the isolation transformer module, feedback control module；
For detecting the feedback that the isolation transformer module is output to the multi-pole assembly operating voltage in real time
Control module is connected with the power amplifier module, the multi-pole assembly.
It is performed a scan, found and the multi-pole assembly tune using signal generator module output scanning signal
Humorous radio-frequency power supply frequency F, in the case of not changing radio-frequency power supply frequency F and inductance L, selection criteria capacitance replaces the multi-pole
Assembly, capacitance value, string and/or parallel connection by capacitance make standard capacitance be tuned with the radio-frequency power supply, are resonated according to LC
Formula：F=1/ [2 π × √ (L × C)], the capacitance being calculated are the distribution capacity of the multi-pole assembly.
In addition, according to disclosed in the utility model mass spectrum multi-pole capacitance measuring apparatus, also there is additional skill as follows
Art feature：
Further, the signal processing module output DDS signals.
Further, the power amplifier module amplitude controller can control the signal for inputting the power amplifier module.
Further, the power amplifier module includes DA conversions, I2C, SPI control mode.
Further, the multi-pole assembly holds for a pair of of spatial distribution of cylinder multi-pole bar assembly or arbitrary shape
Property load.
Further, the feedback control module is had the device group of isolation features by optical coupled switch or mutual inductor etc.
Into.
Further, the scanning that the scanning signal of the signal generator module output is 0 ~ 10V of the precision at 16 is believed
Number.
The additional aspect of the utility model and advantage will be set forth in part in the description, partly will be from following description
In become apparent or recognized by the practice of the utility model.
Description of the drawings
The above-mentioned and/or additional aspect and advantage of the utility model from the following description of the accompanying drawings of embodiments will
Become apparent and be readily appreciated that, wherein：
Fig. 1 is the operation principle schematic diagram of the measuring apparatus of mass spectrum multi-pole capacitance according to the present utility model.
In Fig. 1,1 is signal processing module, and 2 be internal clocking module, and 3 be power amplifier module, and 4 be isolating transformer mould
Block, 5 be multi-pole assembly, and 6 be feedback control module.
Specific embodiment
The embodiment of the utility model is described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning
Same or similar element is represented to same or similar label eventually or there is the element of same or like function.Below by ginseng
The embodiment for examining attached drawing description is exemplary, and is only used for explaining the utility model, and cannot be construed to the utility model
Limitation.
In the description of the present invention, it is to be appreciated that indicating position or position relationship are based on shown in the drawings
Orientation or position relationship are for only for ease of description the utility model and simplify description rather than instruction or imply signified dress
It puts or element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that the utility model
Limitation.
The design of the utility model is as follows, by using the frequency source of signal processing module connection radio frequency, can make radio frequency
The frequency of the high pressure of output changes in wide range, finds out the frequency of tuning current minimum, then the high standard of service precision
Capacitance is connect with radio frequency, in the case where not changing the other parameters such as radio frequency inductive, is reached with radio-frequency power supply under identical frequency
The standard capacitance of resonance tuning state is exactly the distribution capacity of multi-pole, have it is at low cost, system stability is strong, efficient, weight
Renaturation is strong, can high quality solution technical problem the advantages that.
The utility model is described below with reference to accompanying drawings, wherein Fig. 1 is mass spectrum multi-pole according to the present utility model
The measuring apparatus schematic diagram of capacitance.
According to one kind to described in the prior art, being commercially as chemical analysis instrument in this patent background technology, quality
Analytical instrument increasingly becomes a kind of most important chemical analysis hand because the molecular weight information of chemical substance can be directly given
Section, wherein, multi-pole mass spectrograph has high throughput, high dynamic range, and easy care operation becomes the Mass Spectrometer Method instrument of mainstream, and
Ion is selected determines mass spectrographic resolution ratio, sensitivity, mass range, quality standard with the assembling making precision of radio frequency and multi-pole
The mass spectrographic main performance index such as true property, the high frequency voltage output of radio-frequency power supply in the tuning state, disappear with multi-pole load
The power of consumption is minimum, and system work is most stable, is conducive to the quality of its mass spectra peak, because the load capacitance of multi-pole is led to
Often only between 10-50pF, and its capacitance is influenced by spatial distribution capacitance, usually has minor change, accurate to measure
Multi-pole capacitance calculates matching radio-frequency power supply parameter, is very important；And mass spectrum disclosed in the utility model is used
The measuring apparatus of multi-pole capacitance is by using the frequency source of signal processing module connection radio frequency, the high pressure that can export radio frequency
Frequency change in wide range, find out the frequency of tuning current minimum, then the high standard capacitance of service precision and radio frequency
Connection in the case where not changing the other parameters such as radio frequency inductive, reaches and tunes shape in identical frequency low-resonance with radio-frequency power supply
The standard capacitance of state is exactly the distribution capacity of multi-pole, has at low cost, and system stability is strong, efficient, and repeatability is strong, can be high
The advantages that solution technical problem of quality.
Here during measurement standard capacitance, interference is generated to distribution capacity to avoid, it is impossible to directly be positioned over standard capacitance
Table surface, needs to be separated with Teflon plate or vacantly, and capacitance need to be NPO capacitances（It is maintained in 30ppm/ DEG C）.
In addition, the measuring apparatus of mass spectrum multi-pole capacitance also has following supplementary technology according to disclosed in the utility model
Feature：
Some embodiments according to the present utility model, the signal processing module export DDS signals.
DDS signal frequencies are 0 ~ 5MHZ, wherein, the approach that can generate DDS signals is FPGA, DSP, DDS chip.
Some embodiments according to the present utility model, the signal processing module include signal generator, and frequency occurs for signal
Rate controller, power amplifier module amplitude controller.
Signal generator can be SDG6000X, Tyke AFG3101.
Some embodiments according to the present utility model, the power amplifier module can control signal according to amplitude controller.
Some embodiments according to the present utility model, the power amplifier module include DA conversions, I2C, SPI controlling party
Formula.
Some embodiments according to the present utility model, the feedback control module are had by optical coupled switch or mutual inductor etc.
The device composition of isolation features.
Some embodiments according to the present utility model, a pair of the multi-pole for cylinder multi-pole bar or arbitrary shape
Spatial distribution electrode.
Some embodiments according to the present utility model, it is described to use the scanning signal that signal generator module exports as precision
In the scanning signal of the 0 ~ 10V of 16.
The technical program is applicable not only to cylinder multi-pole bar, is equally applicable to a pair of of spatial distribution electricity of arbitrary shape
Pole, such as sextupole bar, octupole bar, ion funnel etc.；Suitable for the high-precision of other similar spatial distribution capacitances essence in its principle
Really measure.
The technical program suitably adjusts the inductance value of radio frequency, can be in arbitrary setpoint frequency, DC voltage and alternating voltage
Under measure the capacitance of multi-pole.
It is any to refer to that " one embodiment ", " embodiment ", " illustrative examples " etc. mean to combine embodiment description
Specific component, structure or feature are contained at least one embodiment of the utility model.Show in this specification everywhere this
The statement of meaning property is not necessarily referring to identical embodiment.Moreover, when describing specific component, structure or spy with reference to any embodiment
During point, advocated, component, structure or feature with reference to as being realized other embodiments all fall within people in the art
Within the scope of member.
Although multiple illustrative examples with reference to the utility model carry out specific embodiment of the present utility model
Detailed description, it must be understood that those skilled in the art can be designed that various other improvement and embodiment, these change
It will be fallen within the spirit and scope of the utility model principle into embodiment.Specifically, in aforementioned disclosure, attached drawing and power
Within the scope of profit requirement, make rational modification in terms of the arrangement that can be laid out in parts and/or sub-combination and change
Into without departing from the spirit of the utility model.In addition to the variations and modifications in terms of parts and/or layout, range is by institute
Attached claim and its equivalent limit.
Claims (5)
1. a kind of mass spectrum measuring apparatus of multi-pole capacitance, which is characterized in that including：Signal processing module, internal clocking mould
Block, power amplifier module, isolation transformer module, multi-pole assembly, feedback control module;
For generate changeable frequency signal and output transmit signals to the signal processing module of power amplifier module with it is described
Power amplifier module is connected, and is controlled including signal generator, signal occurrence frequency controller and power amplifier module amplitude
Device；
For the power amplifier module provide fixed frequency signal and for adjust the internal clocking module of resonant frequency with
The power amplifier module is connected；
For amplifying the signal processing module output signal and being provided described in driving voltage for the isolation transformer module
Power amplifier module is controlled with the signal processing module, the isolation transformer module, the internal clocking module, the feedback
Molding block is connected；
Voltage, which is got, from the power amplifier module carries out transformation and for the isolation of multi-pole assembly work to be driven to become
Depressor module is connected with the power amplifier module, multi-pole assembly；
The multi-pole assembly for screening particle is connected with the isolation transformer module, feedback control module；
For detecting the feedback control that the isolation transformer module is output to the multi-pole assembly operating voltage in real time
Module is connected with the power amplifier module, the multi-pole assembly.
2. the measuring apparatus of a kind of mass spectrum multi-pole capacitance according to claim 1, which is characterized in that at the signal
The scanning signal for managing module output is scanning signal of the precision in the 0 ~ 10V of 16.
3. the measuring apparatus of a kind of mass spectrum multi-pole capacitance according to claim 1, which is characterized in that the power is put
Big module amplitude controller can control the signal for inputting the power amplifier module.
A kind of 4. measuring apparatus of mass spectrum multi-pole capacitance according to claim 1, which is characterized in that the multi-pole
A pair of of spatial distribution capacitive load of the assembly for cylinder multi-pole bar assembly or arbitrary shape.
A kind of 5. measuring apparatus of mass spectrum multi-pole capacitance according to claim 1, which is characterized in that the feedback control
Molding block includes optical coupled switch and/or mutual inductor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721603548.0U CN207472973U (en) | 2017-11-27 | 2017-11-27 | A kind of measuring apparatus of mass spectrum multi-pole capacitance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721603548.0U CN207472973U (en) | 2017-11-27 | 2017-11-27 | A kind of measuring apparatus of mass spectrum multi-pole capacitance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207472973U true CN207472973U (en) | 2018-06-08 |
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|---|---|---|---|
| CN201721603548.0U Active CN207472973U (en) | 2017-11-27 | 2017-11-27 | A kind of measuring apparatus of mass spectrum multi-pole capacitance |
Country Status (1)
| Country | Link |
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| CN (1) | CN207472973U (en) |
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2017
- 2017-11-27 CN CN201721603548.0U patent/CN207472973U/en active Active
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