CN207465578U - A kind of reel device for semiconductor dedicated equipment - Google Patents
A kind of reel device for semiconductor dedicated equipment Download PDFInfo
- Publication number
- CN207465578U CN207465578U CN201721199700.3U CN201721199700U CN207465578U CN 207465578 U CN207465578 U CN 207465578U CN 201721199700 U CN201721199700 U CN 201721199700U CN 207465578 U CN207465578 U CN 207465578U
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- Prior art keywords
- baffle
- shaft
- cylindrical structure
- inversing
- diameter
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model discloses a kind of reel device for semiconductor dedicated equipment, its structure includes baffle, rot, nut, shaft, Anti-inversing device, conduit, installing plate, coiling wheel body, the baffle outer wall outer wall is strong and the cylindrical structure of hollow out, inner surface center is flexibly connected using interference fit type with coiling wheel body both side surface and forms drum, Weir Plate Thickness is 50mm, the shaft is the cylindrical structure that both side surface is equal and is mutually parallel, outer surface is located at baffle inner surface center and forms convex, shaft diameter is 3cm 4.5cm.The utility model is equipped with Anti-inversing device, shaft makes the set rotation of steel ball mating band moving axis through rot, when axle sleeve drives steel ball to take a turn for the worse, Anti-inversing device main body makes spring stack pop-up that fixture block be driven to block steel ball, control axle sleeve stops operating, it avoids reversing and the coiling of reel is impacted, effectively improve winding efficiency.
Description
Technical field
The utility model is a kind of reel device for semiconductor dedicated equipment, belongs to semiconductor manufacturing equipment field.
Background technology
Semiconductor refers to material of the electric conductivity between conductor and insulator under room temperature.Semiconductor is in radio, TV
It has a wide range of applications on machine and thermometric.If diode is exactly the device using semiconductor fabrication.Semiconductor refers to that one kind is led
It can electrically be controlled, range can be from insulator to the material between conductor.
Prior art discloses application No. is：A kind of semiconductor manufacturing equipment of CN200920104636.5 is filled with reel
It puts, it includes main shaft, guide wheel, spacer, two bearings and dustproof cover, and described two bearings are set between main shaft and spacer, two
Cone spacer and outer ring spacer are equipped between bearing, outboard bearing is equipped with bearing outside gland fixed with spacer and equipped with being locked by locknut
Fixed bearing inner sleeve gland, locknut are connect with spindle thread, and guide wheel and dustproof cover are fixed with spacer, and main shaft is equipped with sealing gland gas
Road.The utility model is a kind of simple and practical in structure, easy to use and good airproof performance, safe and reliable reel device.It is dust-proof
The split of lid and bearing outside gland designs, and improves the reliability and security performance of whole device.The utility model is especially suitable
For the semiconductor manufacturing equipment being processed to chip.But disadvantage is that during to semiconductor manufacturing equipment coiling,
It is out of service in time when can not reverse reel, reel is easily made to damage semiconductor manufacturing equipment coiling, shadow
Ring coiling effect.
Utility model content
In view of the deficienciess of the prior art, the utility model aim is to provide a kind of semiconductor manufacturing equipment reel
Device, it is out of service in time when can not reverse reel during solving above equipment to semiconductor manufacturing equipment coiling,
The problem of easily reel is made to damage semiconductor manufacturing equipment coiling, influences coiling effect.
To achieve these goals, the utility model is to realize by the following technical solutions：A kind of semiconductor is special
Equipment reel device, structure include baffle, rot, nut, shaft, Anti-inversing device, conduit, installing plate, coiling
Wheel body, the baffle outer wall outer wall is strong and the cylindrical structure of hollow out, inner surface center and coiling wheel body both sides table
Face using interference fit type be flexibly connected and form drum, Weir Plate Thickness 50mm, the shaft for both side surface it is equal and
The cylindrical structure being mutually parallel, outer surface are located at baffle inner surface center and form convex, shaft diameter 3cm-
4.5cm, the baffle inner surface center are flexibly connected with coiling wheel body both side surface using interference fit type, and baffle is straight
Diameter is 12cm, and the installing plate is outer wall is strong and the concave of hollow out, and side inner side edge is along being located at baffle plate side face center device
It is mutually parallel, installing plate width is 4cm-5cm, and the coiling wheel body is the cylinder knot that both side surface is equal and is mutually parallel
Structure, shaft outer surface center are equipped with coiling wheel body inner surface and form cross, reel body width and installing plate
Width is all 4cm-5cm, and the shaft outer surface is flexibly connected with baffle inner surface center using interference fit type, is turned
Shaft length is 8cm, and the conduit is located at baffle side for both side surface protrusion and the dry font of central indent, side face extremities
Square face center and composition king's font, conducting wire length of tube are 6cm-6.5cm, and the baffle both side surface center is equipped with Anti-inversing device
Outer surface；The Anti-inversing device is made of shell, axle sleeve, steel ball, spring stack, fixture block, Anti-inversing device main body, and the shell is
Outer wall is strong and the cylindrical structure of inner hollow, and baffle both side surface center is equipped with outer side surface, and housing diameter is than turning
Shaft diameter increases 3cm, and the axle sleeve outer wall outer wall is strong and the cylindrical structure of inner hollow, outer surface and table on the inside of shell
Face is flexibly connected using interference fit type and forms convex, and axle sleeve overall diameter is 4.5cm-5cm, and the steel ball is to be arrived in space
The distance of fixed point be equal to fixed length all the points form sphere, outer surface be located at shell inner surface and axle sleeve top surface and
It is mutually perpendicular to, diameter of the steel ball 70mm, the spring stack is equal for both side surface and the cylindrical structure that is mutually parallel, anti-reverse
Device body top surface is equipped with and spring stack outer surface edge and is mutually parallel, and spring column length is 6cm-6.5cm, the fixture block
For the cylindrical structure that both side surface is equal and is mutually parallel, both side surface end was used with Anti-inversing device main body both side surface
The fit system that is full of be flexibly connected, a diameter of 1.5cm of fixture block, the Anti-inversing device main body both side surface be located at shell both side surface and
It is mutually perpendicular to, Anti-inversing device body width is 2cm-2.4cm.
Further, the nut is the cylindrical structure that both side surface is equal and is mutually parallel, and outer surface edge is set
In baffle both side surface, a diameter of 90mm-100mm of nut.
Further, the rot both side surface uses interference with baffle plate side surface and reel main body side surface
Fit system is flexibly connected, and rot thickness is 1.5cm.
Further, the installing plate is equipped with 4 mounting holes.
Further, the baffle both sides are equipped with 6 nuts.
Further, the installation plate thickness is 40mm-50mm.
Further, the baffle is made of metal.
Further, the rot is matched with shaft.
Advantageous effect
A kind of reel device for semiconductor dedicated equipment of the utility model, equipped with Anti-inversing device, shaft makes through rot
The set rotation of steel ball mating band moving axis, when axle sleeve drives steel ball to take a turn for the worse, Anti-inversing device main body makes spring stack pop-up drive card
Block blocks steel ball, and control axle sleeve stops operating, and avoids reversing the coiling of reel is impacted, and effectively improves winding efficiency.
Description of the drawings
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other spies of the utility model
Sign, objects and advantages will become more apparent upon：
Fig. 1 is a kind of structure diagram of reel device for semiconductor dedicated equipment of the utility model；
Fig. 2 is the Anti-inversing device appearance diagram of the utility model.
Fig. 3 is the Anti-inversing device internal structure schematic diagram of the utility model.
In figure：Baffle -1, rot -2, nut -3, shaft -4, Anti-inversing device -5, shell -501, axle sleeve -502, steel ball -
503rd, spring stack -504, fixture block -505, Anti-inversing device main body -506, conduit -6, installing plate -7, coiling wheel body -8.
Specific embodiment
To be easy to understand technical means, creative features, achievable purpose and effectiveness of the utility model, below
With reference to specific embodiment, the utility model is expanded on further.
- Fig. 3 is please referred to Fig.1, the utility model provides a kind of technical solution：A kind of semiconductor manufacturing equipment is filled with reel
It puts, structure includes baffle 1, rot 2, nut 3, shaft 4, Anti-inversing device 5, conduit 6, installing plate 7, coiling wheel body 8,
The 1 outer wall outer wall of baffle is strong and the cylindrical structure of hollow out, and inner surface center is used with 8 both side surface of coiling wheel body
Interference fit type is flexibly connected and forms drum, and 1 thickness of baffle is 50mm, and the shaft 4 is equal and mutual for both side surface
Parallel cylindrical structure, outer surface are located at 1 inner surface of baffle center and form convex, 4 a diameter of 3cm- of shaft
4.5cm, the 1 inner surface center of baffle are flexibly connected with 8 both side surface of coiling wheel body using interference fit type, baffle
1 a diameter of 12cm, the installing plate 7 is outer wall is strong and the concave of hollow out, and side inner side edge is along being located in 1 side surface of baffle
Centre device is mutually parallel, and 7 width of installing plate is 4cm-5cm, and the coiling wheel body 8 is the circle that both side surface is equal and is mutually parallel
Column structure, 4 outer surface center of shaft are equipped with 8 inner surface of coiling wheel body and form cross, 8 width of coiling wheel body
It is all 4cm-5cm with 7 width of installing plate, 4 outer surface of shaft uses interference fit type with 1 inner surface center of baffle
Flexible connection, 4 length of shaft are 8cm, and the conduit 6 is both side surface protrusion and the dry font of central indent, side surface
End be located at 1 side face center of baffle and form king's font, 6 length of conduit be 6cm-6.5cm, the 1 both sides table of baffle
Face center is equipped with 5 outer surface of Anti-inversing device；The Anti-inversing device 5 by shell 501, axle sleeve 502, steel ball 503, spring stack 504,
Fixture block 505, Anti-inversing device main body 506 form, and the shell 501 is outer wall is strong and the cylindrical structure of inner hollow, baffle 1
Both side surface center is equipped with 501 outer surface of shell, and 501 diameter of shell increases 3cm, 502 outer wall of axle sleeve than 4 diameter of shaft
Outer wall is strong and the cylindrical structure of inner hollow, and outer surface uses interference fit type activity with 501 inner surface of shell
Connection and composition convex, 502 overall diameter of axle sleeve are 4.5cm-5cm, and the steel ball 503 is equal to fixed in space to the distance of fixed point
The sphere of long all the points composition, outer surface are located at 501 inner surface of shell and 502 top surface of axle sleeve and are mutually perpendicular to,
503 a diameter of 70mm of steel ball, the spring stack 504 is equal for both side surface and the cylindrical structure that is mutually parallel, Anti-inversing device
506 top surface of main body is equipped with 504 outer surface edge of spring stack and is mutually parallel, and 504 length of spring stack is 6cm-6.5cm,
The fixture block 505 is the cylindrical structure that both side surface is equal and is mutually parallel, both side surface end and Anti-inversing device main body 506
Both side surface is flexibly connected using interference fit type, 505 a diameter of 1.5cm of fixture block, the 506 both sides table of Anti-inversing device main body
Face is located at 501 both side surface of shell and is mutually perpendicular to, and 506 width of Anti-inversing device main body is 2cm-2.4cm.The nut 3 is two
Side surface is equal and the cylindrical structure that is mutually parallel, outer surface edge are located at 1 both side surface of baffle, and nut 3 is a diameter of
90mm-100mm.2 both side surface of rot is matched with 1 side surface of baffle and 8 side surface of coiling wheel body using interference
Conjunction mode is flexibly connected, and 2 thickness of rot is 1.5cm.The installing plate 7 is equipped with 4 mounting holes.1 both sides of baffle are equipped with 6
A nut 3.7 thickness of installing plate is 40mm-50mm.
Shaft 4 described in this patent is that link zero main part of product must be used as its name suggests, for rotation work
In not only born moment of flexure but also born the axis of torque to be known as shaft.
It is carrying out in use, 5 outer surface of Anti-inversing device is mounted on 1 both side surface of baffle center, conduit 6 leads line
Enter onto coiling wheel body 8, the rotation of rot 2 is made to drive shaft 4 that coiling wheel body 8 is controlled to carry out coiling, shaft 4 is through rot
2 make 503 mating band moving axis of steel ball set, 502 rotation, when axle sleeve 502 drives steel ball 503 to take a turn for the worse, Anti-inversing device main body 506
Make the pop-up of spring stack 504 that fixture block 505 be driven to block steel ball, control axle sleeve 502 stops operating, avoids reversing the coiling to reel
It impacts, effectively improves winding efficiency.
The baffle 1 of the utility model, rot 2, nut 3, shaft 4, Anti-inversing device 5, conduit 6, installing plate 7, coiling
Wheel body 8, the component that component is universal standard part or those skilled in the art know, structure and principle are all this technology people
Member by technical manual can learn or know by routine experiment method the utility model solves the problems, such as it is above equipment pair
It is out of service in time when can not reverse reel during semiconductor manufacturing equipment coiling, easily make reel special to semiconductor
The problem of being damaged with equipment coiling, influencing coiling effect, the utility model are combined with each other by above-mentioned component, equipped with anti-
Reverser, shaft make the set rotation of steel ball mating band moving axis through rot, when axle sleeve drives steel ball to take a turn for the worse, Anti-inversing device master
Body makes spring stack pop-up that fixture block be driven to block steel ball, and control axle sleeve stops operating, avoids reversing and cause shadow to the coiling of reel
It rings, effectively improves winding efficiency.It is described in detail below:
For the shell 501 for outer wall is strong and the cylindrical structure of inner hollow, 1 both side surface center of baffle is equipped with shell
501 outer surfaces, 501 diameter of shell increase 3cm than 4 diameter of shaft, and the 502 outer wall outer wall of axle sleeve is strong and inner hollow
Cylindrical structure, outer surface are flexibly connected using interference fit type with 501 inner surface of shell and form convex, axle sleeve
502 overall diameters are 4.5cm-5cm, and the steel ball 503 is equal to the ball that all the points of fixed length form in space to the distance of fixed point
Body, outer surface are located at 501 inner surface of shell and 502 top surface of axle sleeve and are mutually perpendicular to, 503 a diameter of 70mm of steel ball,
The spring stack 504 is the cylindrical structure that both side surface is equal and is mutually parallel, and 506 top surface of Anti-inversing device main body is equipped with
It 504 outer surface edge of spring stack and is mutually parallel, 504 length of spring stack is 6cm-6.5cm, and the fixture block 505 is both sides table
Face is equal and the cylindrical structure that is mutually parallel, and both side surface end is matched with 506 both side surface of Anti-inversing device main body using interference
Conjunction mode is flexibly connected, and 505 a diameter of 1.5cm of fixture block, 506 both side surface of Anti-inversing device main body is located at 501 both sides of shell
It surface and is mutually perpendicular to, 506 width of Anti-inversing device main body is 2cm-2.4cm.
The basic principle of the utility model and main feature and the advantages of the utility model has been shown and described above, for
For those skilled in the art, it is clear that the utility model is not limited to the details of above-mentioned exemplary embodiment, and without departing substantially from this
In the case of the spirit or essential attributes of utility model, the utility model can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the utility model is by institute
Attached claim rather than above description limit, it is intended that will fall within the meaning and scope of the equivalent requirements of the claims
All changes are embraced therein.Any reference numeral in claim should not be considered as to the involved right of limitation
It is required that.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in each embodiment can also be properly combined, forms those skilled in the art
The other embodiment being appreciated that.
Claims (6)
1. a kind of reel device for semiconductor dedicated equipment, structure includes baffle (1), rot (2), nut (3), shaft
(4), Anti-inversing device (5), conduit (6), installing plate (7), coiling wheel body (8), baffle (1) the outer wall outer wall is strong and engraves
Empty cylindrical structure, inner surface center be flexibly connected with coiling wheel body (8) both side surface using interference fit type and
Drum is formed, baffle (1) thickness is 50mm, and the shaft (4) is the cylindrical structure that both side surface is equal and is mutually parallel, outside
Side surface is located at baffle (1) inner surface center and forms convex, shaft (4) a diameter of 3cm-4.5cm, it is characterised in that：
Baffle (1) the inner surface center is flexibly connected with coiling wheel body (8) both side surface using interference fit type, gear
Plate (1) a diameter of 12cm, the installing plate (7) is outer wall is strong and the concave of hollow out, and side inner side edge is along being located at baffle (1) side
Square face center device is mutually parallel, installing plate (7) width be 4cm-5cm, the coiling wheel body (8) for both side surface it is equal and
The cylindrical structure being mutually parallel, shaft (4) outer surface center are equipped with coiling wheel body (8) inner surface and form cross
Type, coiling wheel body (8) width and installing plate (7) width are all 4cm-5cm, and shaft (4) outer surface is interior with baffle (1)
Side surface center is flexibly connected using interference fit type, and shaft (4) length is 8cm, and the conduit (6) is convex for both side surface
It rises and the dry font of central indent, side face extremities is located at baffle (1) side face center and forms king's font, conduit
(6) length is 6cm-6.5cm, and baffle (1) the both side surface center is equipped with Anti-inversing device (5) outer surface；
The Anti-inversing device (5) is by shell (501), axle sleeve (502), steel ball (503), spring stack (504), fixture block (505), anti-reverse
Turn device main body (506) composition, the shell (501) is outer wall is strong and the cylindrical structure of inner hollow, baffle (1) both sides table
Face center is equipped with shell (501) outer surface, and shell (501) diameter increases 3cm than shaft (4) diameter, and the axle sleeve (502) is outside
Wall outer wall is strong and the cylindrical structure of inner hollow, and outer surface uses interference fit type with shell (501) inner surface
Flexible connection and form convex, axle sleeve (502) overall diameter be 4.5cm-5cm, the steel ball (503) be space in fixed point away from
Sphere from all the points composition equal to fixed length, outer surface are located at shell (501) inner surface and axle sleeve (502) top surface
And be mutually perpendicular to, steel ball (503) a diameter of 70mm, the spring stack (504) is the cylinder that both side surface is equal and is mutually parallel
Body structure, Anti-inversing device main body (506) top surface are equipped with spring stack (504) outer surface edge and are mutually parallel, spring stack
(504) length is 6cm-6.5cm, and the fixture block (505) is equal for both side surface and the cylindrical structure that is mutually parallel, both sides table
Face end is flexibly connected with Anti-inversing device main body (506) both side surface using interference fit type, and fixture block (505) is a diameter of
1.5cm, Anti-inversing device main body (506) both side surface are located at shell (501) both side surface and are mutually perpendicular to, Anti-inversing device master
Body (506) width is 2cm-2.4cm.
2. a kind of reel device for semiconductor dedicated equipment according to claim 1, it is characterised in that：The nut
(3) it is the cylindrical structure that both side surface is equal and is mutually parallel, outer surface edge is located at baffle (1) both side surface, nut
(3) a diameter of 90mm-100mm.
3. a kind of reel device for semiconductor dedicated equipment according to claim 1, it is characterised in that：The rot
(2) both side surface is flexibly connected with baffle (1) side surface and coiling wheel body (8) side surface using interference fit type,
Rot (2) thickness is 1.5cm.
4. a kind of reel device for semiconductor dedicated equipment according to claim 1, it is characterised in that：The installing plate
(7) equipped with 4 mounting holes.
5. a kind of reel device for semiconductor dedicated equipment according to claim 1, it is characterised in that：The baffle
(1) both sides are equipped with 6 nuts (3).
6. a kind of reel device for semiconductor dedicated equipment according to claim 1, it is characterised in that：The installing plate
(7) thickness is 40mm-50mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721199700.3U CN207465578U (en) | 2017-09-18 | 2017-09-18 | A kind of reel device for semiconductor dedicated equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721199700.3U CN207465578U (en) | 2017-09-18 | 2017-09-18 | A kind of reel device for semiconductor dedicated equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207465578U true CN207465578U (en) | 2018-06-08 |
Family
ID=62269093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721199700.3U Expired - Fee Related CN207465578U (en) | 2017-09-18 | 2017-09-18 | A kind of reel device for semiconductor dedicated equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207465578U (en) |
-
2017
- 2017-09-18 CN CN201721199700.3U patent/CN207465578U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180608 Termination date: 20180918 |