CN207439919U - A kind of optical biosensor and its Equipment for Heating Processing - Google Patents
A kind of optical biosensor and its Equipment for Heating Processing Download PDFInfo
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- CN207439919U CN207439919U CN201721207519.2U CN201721207519U CN207439919U CN 207439919 U CN207439919 U CN 207439919U CN 201721207519 U CN201721207519 U CN 201721207519U CN 207439919 U CN207439919 U CN 207439919U
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
- G01N21/554—Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
- C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
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Abstract
The utility model provides a kind of optical biosensor and its Equipment for Heating Processing.The biosensor, including：The base board unit includes substrate, and the substrate has light transmission, and the light transmission is light transmittance more than 75%；The nano-particle unit includes metal nanoparticle, and the metal nanoparticle is formed at the substrate surface；The detection unit includes detection particle, and the detection particle is connected on the substrate, between the gap of the metal nanoparticle.On the other hand, a kind of Equipment for Heating Processing is provided, the Equipment for Heating Processing is meshbeltfurnace, including：Including heating zone, cooling zone, feeding area, discharging area and guipure.The utility model has used guipure furnace apparatus, can realize while can obtain the nano-particle of function admirable and continuously produce, simplify production technology, greatly improve production efficiency.
Description
Technical field
The utility model is related to biochemistry detection field, specifically, the utility model is related to a kind of optical biosensor and
Its Equipment for Heating Processing.
Background technology
Metal nanoparticle is mainly fixed on substrate by the detection operation principle of optical biosensor, is then modified
Biomolecule according to the LSPR effects of metal nanoparticle, detects optics signal intensity to judge the combination of biomolecule.
The synthesis of metal nanoparticle is usually using liquid phase chemical reaction method, according to the special electrodes of metal target electricity
Gesture selects corresponding metal salt or metallo-organic compound as presoma, in water or organic solvent, using reducing agent,
Electrochemistry, photochemistry either biochemical method reducing metal salt ion or by ultrasound, thermally decomposable metal compound be
Metal simple-substance, and choose respective surfaces activating agents, function key and polymer as needed as protective agent, control crystal into
Core, the speed of growth and direction prepare the metal nanoparticle of set size and pattern.CN201210005733.5、
CN201310407111.X etc. describes the liquid phase method synthesis path of gold nano grain.
For prepared by the liquid-phase chemical reaction method of current nano material, also there is particle agglomeration, grains to some extent
Footpath is uneven, purity is low, performance is unstable, synthesis path is compared with the problems such as long, influence factor is more, low yield.
The metal nanoparticle solution of chemical synthesis can be by trims such as bovine serum albumins to the affine of glass substrate
Power is fixed on glass, is fixed however, depending merely on affinity, there are stability it is poor the problem of, be unfavorable for preserving for a long time.
Metal nanoparticle is fixed on glass with physical method there are also research, such as on the glass substrate after plated film,
Then to glass substrate high-temperature calcination, beam bombardment, microwave plasma heat treatment etc., but due to high-temperature calcination heating and cooling
Journey is longer, and gold grain is easily reunited, and efficiency is also low；Beam bombardment, electron beam active area is limited, and efficiency is also undesirable；Microwave
For Plasma heat teratment when scale is handled, the uniformity controlling of microwave plasma heat treatment is difficult there are larger technology
Topic, control cost are high.Physical prepares metal nanoparticle, and also in the prevalence of taking, longer, inefficient, equipment is expensive, step
The deficiencies of rapid cumbersome.
Utility model content
The application is that the discovery of following facts and problem and understanding are made based on utility model people：
For biosensor, main function component is metal nanoparticle, and the quality of metal nanoparticle affects
The test effect of biosensor.Current some biosensors or be that metal nanoparticle and substrate combination power are inadequate,
Detection sensitivity or be that reference sample is needed in test process is influenced, detection is cumbersome.Meanwhile for biosensor
Preparation, it is committed step to prepare metal nanoparticle that is stable, uniform, being combined with substrates into intimate early period.At present
In the method for preparing biosensor, for the nano-particle stability for preparing the method for metal nanoparticle or being
Deficiency or it is the conjugation of nano-particle and substrate not enough or is more demanding to Preparation equipment or is production efficiency
It is too low or possess a variety of shortcomings.
For this purpose, the utility model the first aspect provides a kind of optical biosensor, optical biosensor tool
Have the advantages that stability is high, detection sensitivity is high, easy to operate.
To achieve the above object, embodiment according to the present utility model proposes a kind of optical biosensor, the optics
Biosensor includes：Base board unit, nano-particle unit, detection unit, it is characterised in that：Base board unit includes substrate, institute
Substrate is stated with light transmission, the light transmission is light transmittance more than 75%；The nano-particle unit includes metal nano
Particle, the metal nanoparticle are formed at the substrate surface；The detection unit includes detection particle, the detection particle
It connects on the substrate, between the gap of the metal nanoparticle.Wherein, the metal nanoparticle is by heat
It manages and is formed, specifically, being first to deposit at least one layer of metallic film in the substrate surface, then placed it in meshbeltfurnace,
It is heat-treated under gas shield, so that metallic film melting contracting receives and forms metal nano of the combination in the substrate surface
Particle.It can obtain as a result, and substrate surface is combined closely and equally distributed metal nanoparticle, ensure that biosensor
Stability.
Some embodiments according to the present utility model, the substrate are glass, quartz, crystalline ceramics, polymer or cloud
Master slice.
Some embodiments according to the present utility model, the metal nanoparticle is gold, silver, any or its group of chromium
It closes.
Some embodiments according to the present utility model, the metal nanoparticle are chromium and golden alloy, chromium and silver
The alloy of alloy, chromium and electrum.
Some embodiments according to the present utility model, the metal nanoparticle grain size are 2-40nm.
Some embodiments according to the present utility model, the detection unit include detection particle, and the detection particle is
Polypeptide, protein, oligosaccharide or lipid.
The utility model second aspect proposes a kind of Equipment for Heating Processing for preparing the optical biosensor, the heat
Processing equipment is meshbeltfurnace, including：Heating zone, cooling zone, feeding area, discharging area and guipure.
Some embodiments according to the present utility model, the meshbeltfurnace further include manipulator, can use manipulator will
The substrate is placed in meshbeltfurnace, after heat treatment, is reused manipulator and is removed the substrate from meshbeltfurnace.
Some embodiments according to the present utility model, the meshbeltfurnace further include gas outlet, air inlet.
Some embodiments according to the present utility model, the air inlet are arranged on cooling zone, heating zone, the gas outlet
It is arranged on heating zone.
Some embodiments according to the present utility model, the heat source of the heating zone is infrared heating.
Description of the drawings
Fig. 1 shows the biosensor structure schematic diagram according to the utility model embodiment.
Fig. 2 shows the preparation method flow chart of the biosensor according to the utility model embodiment.
Fig. 3 shows the structure diagram of the meshbeltfurnace according to the utility model embodiment.
Fig. 4 is shown according to spectrum change figure before and after the modification of the biosensor of the utility model embodiment.
Reference numeral：Base board unit 100, nano-particle unit 200, detection unit 300, determinand 400；Meshbeltfurnace 600,
Feeding area 610, discharging area 620, heating zone 630, cooling zone 640, guipure 650, gas outlet 601, air inlet 602, manipulator
700。
Specific embodiment
The embodiment of the utility model is described below in detail, the example of the embodiment is shown in the drawings.Below by
The embodiment being described with reference to the drawings is exemplary, it is intended to for explaining the utility model, and it is not intended that new to this practicality
The limitation of type.
In the one side of the utility model, optical biosensor is prepared the utility model proposes a kind of.According to this
The embodiment of utility model, the biosensor include base board unit 100, nano-particle unit 200 and detection unit 300.
Base board unit 100 includes substrate, is provided a supporting role to subsequently prepare nano-particle.This biosensor
Detection means is based on optic test, therefore it is required that substrate must have light transmission, in order to detect the variation of absorption spectrum.
Embodiment according to the present utility model, it is desirable that substrate light transmittance is more than 75%.
The substrate material is glass, quartz, crystalline ceramics, polymer or mica sheet.People can be as needed, selection
Different materials make substrate, as long as light transmittance, which meets, is more than 75%.For example, in some embodiments, substrate is glass, is taken
Material is convenient, cheap.In some embodiments, baseplate material is quartz glass, and light transmittance is high, and hardness is high.In some implementations
In example, baseplate material is mica sheet or crystalline ceramics, and property is stablized, is unlikely to deform.
Nano-particle unit 200 is formed at the substrate surface, wherein, it is first to deposit at least one layer in the substrate surface
Metallic film, then place it in meshbeltfurnace 600, is heat-treated under gas shield so that metallic film melting contracting receive and
Form metal nanoparticle of the combination in the substrate surface.
After forming nano-particle on substrate, due to LSPR (resonance of local surfaces particle) effect of nano-particle, when having
When light penetrates substrate, the variation of delustring intensity is had in specific position, and this variation can also be subject to the material, greatly of nano-particle
The factors such as the dielectric constant of small, shape, interparticle distance and ambient enviroment influence.Therefore, nano-particle is combined with substrate
The reappearance of stability, the uniformity of nano-particle and preparation method, by influence biosensor detection stability and
Detection sensitivity.The obtained metal nanoparticle of the utility model has good stability and uniformity, because of heat treatment
Under high temperature, substrate surface, metallic film can be heated and become molten condition, and metallic, which can be spread, at this time penetrates into substrate table
Face, meanwhile, metallic film also can form spherical nano-particle because melting contracting is received during the effect with surface tension, be formed as a result,
It combines closely with substrate surface and equally distributed metal nanoparticle.
Some embodiments according to the present utility model, the metallic film are gold, silver, chromium or its combination.To obtain more
Stable metal nanoparticle.
Some embodiments according to the present utility model, the metallic film is at least one layer, the bottom contacted with substrate
For chromium, layer deposition gold, silver or its combination.After Overheating Treatment, substrate surface metallic film into variation for separately
Spherical metal nanoparticle.Bottom is chromium metallic film, can make to have more between the metal nanoparticle and substrate to be formed
Good combination power.It is since chromium more easily reachs molten condition, part chromium ion is made to infiltrate through in substrate, forms stronger knot
It closes.Based on this, the metal nanoparticle formed by the metallic film is chromium and the alloy of gold, the alloy of chromium and silver, chromium
With the alloy of electrum.
Some embodiments according to the present utility model, the thickness of metal film are 1-20nm.The thickness of film determines
The grain size of the nano-particle subsequently obtained, utility model people learns by largely testing, film thickness and metallic nanoparticle
Son grain size it is proportional, but when film thickness it is excessively thin or it is blocked up all it is unfavorable be used in heat treatment when contracting receive obtain nano-particle.
Some embodiments according to the present utility model, the metal nanoparticle grain size are 2-40nm.Metallic nanoparticle
It is mutually suitable with the particle size of determinand 400 that the grain size of son has, to obtain more accurately testing result.
Detection unit 300 is modified in the substrate surface, and between the interval of the metal nanoparticle.The inspection
Surveying unit 300 includes most detection particles, when detecting capturing determinand 400.The detection grain of the detection unit 300
Son forms specificity with target determinand 400 and is combined.In other words, i.e., specifically detection particle can be to be measured with specific target
Object 400 is combined, and the different of target determinand 400 can be selected suitable detection particle as needed, be enable detection unit 300
Achieve the effect that qualitative detection.
Specifically, detection unit 300 on being modified on the substrate for embedded nano-particle, you can be referred to as bio-sensing
Device.Due to LSPR (resonance of local surfaces particle) effect of nano-particle, examined in the compartment modification of nano-particle unit 200
After surveying unit 300, the variation of delustring intensity is similarly had in specific position, after further capture determinand 400, biology
The extinction wavelength and delustring intensity of sensor can change, and people can sentence according to the variation of extinction wavelength and delustring intensity
It is disconnected whether to contain determinand 400.
The utility model second aspect proposes a kind of preparation method of optical biosensor, comprises the following steps：
S100：A substrate is provided, on the substrate deposited metal film layer；
Some embodiments according to the present utility model, in this step, the method in deposition are magnetron sputtering, heat
Evaporation, electron beam evaporation or its combination.In some embodiments, metal layer is obtained by magnetically controlled sputter method, so as to
More preferably being formed on substrate evenly, and predetermined metal layer thickness can be controlled.
Some embodiments according to the present utility model, in this step, the deposited metal film layer are first to deposit one
Layer chromium, redeposited one layer of gold, silver or electrum.After Overheating Treatment, substrate surface metallic film into variation to be alternate
Every spherical metal nanoparticle.Bottom is chromium metallic film, can make to have between the metal nanoparticle and substrate to be formed
Have and preferably combine power.It is since chromium more easily reachs molten condition, part chromium ion is made to infiltrate through in substrate, is formed more secured
Combination.
S200：The substrate is placed in meshbeltfurnace 600, protective gas, at a temperature of be heat-treated, make metallic film
It melts as metal nanoparticle, becomes nano-particle unit 200；
The heat treatment refers to the heat that meshbeltfurnace 600 provides, metal layer is made to melt at high temperature, and forms spacer
From metal nanoparticle equal and with predetermined particle diameter, and then expose substrate portion surface.The metal nanoparticle
Grain size can increase with the increase of the thickness of metal layer, you can to adjust metal by controlling the thickness of the metal layer prepared
The grain size of nano-particle obtains the metal nanoparticle of predetermined particle diameter, to obtain higher detection sensitivity.At overheat
Reason, it is metal nanoparticle that can not only make metal layer variation, and nanoparticle fraction can also be made to be embedded in substrate, fixes nano-particle,
Improve the stability of metal nanoparticle application.It in addition, also will be according to the length of the different adjustment heat treatment time of metal layer thickness
Degree, when metal layer is thicker or area is bigger, it is necessary to which increase heat treatment time makes metal layer reach melting to provide enough heats
State.
Some embodiments according to the present utility model, in this step, the meshbeltfurnace 600 include heating zone 630, cold
But area 640, feeding area 610, discharging area 620 and guipure 650.The heating zone 630 has heat source to provide heat treatment institute calorific requirement,
In some embodiments, heat source can be infrared heating mode, to provide more stable heat.
The meshbeltfurnace 600 further includes gas outlet 601, air inlet 602, and protective gas enters from air inlet 602, by adding
Hot-zone 630, cooling zone 640 are flowed out from gas outlet 601.Heating zone 630 leads to protective gas to prevent metal layer or substrate in Re Chu
It is aoxidized during reason, cooling zone 640 passes to gas to prevent quenching is completed in heat treatment from causing substrate and nano metal particles
Stability.650 circulating rolling of guipure connects 4 areas, and heat treatment process is that the composite component is placed on feeding area
On 610 guipure 650, with the guipure 650 of rolling, by heating zone 630 and cooling zone 640, discharging area 620 is reached, is removed.
The metal film variation on the composite component surface through Overheating Treatment at this time is the metal nanoparticle of predetermined particle diameter.It can be as needed
The rate of guipure 650 is adjusted, makes composite component enough in 630 residence time of heating zone, to ensure to reach thermal effectiveness.Make
It is heat-treated with meshbeltfurnace 600, can realize the mass continuous production of substrate, and it is easy to operate, production cost is low, favorably
In realization industrialized production.
Compared with the preparation method of existing biosensor, the utility model has used 600 equipment of meshbeltfurnace, can obtain
To function admirable nano-particle while can realize and continuously produce, simplify production technology, greatly improve
Production efficiency.It is such as heat-treated, is generally required by temperature program, heat preservation program, cooling journey using conventional heating equipment
Sequence completes entire heat treatment process.And the utility model has used 600 equipment of meshbeltfurnace, the guipure 650 of rolling can continue
Substrate is constantly transported to heating zone 630, reduces temperature program and cooling process, production efficiency improves at least 1/2.
Some embodiments according to the present utility model, it is in this step, further comprising the steps of：Use manipulator 700
The substrate is placed in meshbeltfurnace 600, after heat treatment, reuses manipulator 700 by the substrate from meshbeltfurnace 600
In remove.Using 700 setting-out of manipulator and sampling, flow can realize automation, and production efficiency is high.
Some embodiments according to the present utility model, in this step, the protective gas is nitrogen, argon gas, dioxy
Change at least one of carbon.In some embodiments, gas used in protective gas is nitrogen, to reach better heat
Treatment effect.
Some embodiments according to the present utility model, in this step, the temperature are 200 DEG C~900 DEG C.To reach
Better thermal effectiveness.
S300：Modifying detection particle in the substrate surface becomes detection unit 300.
Some embodiments according to the present utility model, in this step, the detection particle refers to can be with determinand 400
The probe molecule of specific binding, such as polypeptide, protein, oligosaccharide, lipid are more specifically adalimumab (TNF-a),
Rabbit-anti HCP antibody, antibody of the goat-anti rabbit with HRP, human IgG, alpha-fetoprotein, biotin, Streptavidin etc..
Some embodiments according to the present utility model, in this step, the modification are to modify to detect in substrate surface
Particle becomes optical bio sensor finished product to form detection unit 300, and then prepare.Specifically, it is pre- by the substrate
It is soaked at a temperature of if in the solution containing the detection particle, after preset time, the detection particle is made to be incorporated into institute
State substrate surface.
Some embodiments according to the present utility model, in this step, the modification of the detection particle, is according to target
The type of determinand 400, selection can form the detection particle that specificity is combined with target determinand 400.In order to make detection particle
It can preferably modify in the substrate surface, first can also modify coupling agent in substrate surface.For example, when target determinand 400
For avidin when, using the specificity that avidin is combined with biotin, using biotin as detection particle, due to biotin
Can not stable bond directly be formed with substrate, therefore, can be combined first with being easier to be combined with substrate and can be formed with biotin
The amine propyl trimethoxy silane (APTMS) of key forms APTMS molecular films in the substrate surface, biotin is added, with regard to energy
Biotin is made to be modified at the state of substrate surface indirectly through APTMS, the combination of APTMS and biotin is made to become detection grain
Son is combined by biotin with the specificity of avidin to test whether existed by avidin, therefore, using the optical bio
Sensor base screens avidin.
In conclusion the utility model provides a kind of biosensor and preparation method thereof, biosensor includes base
Plate unit 100, nano-particle unit 200 and detection unit 300, nano-particle unit 200 are to surface using meshbeltfurnace 600
The substrate for having metal layer is heat-treated and is formed, detection unit 300 be by be soaked in containing detection particle solution in and
It obtains.On the whole, the utility model offer biosensor matrix and preparation method thereof possesses advantages below：
1st, simple, the quick qualitative detection determinand of this biosensor matrix energy, before and after matrix absorption determinand
The variation of absorption peak strength can determine whether that containing determinand and detection sensitivity is high, testing result is reliably effective.
2nd, this biosensor matrix has a wide range of application, detection unit can be selected according to the difference of determinand it is different can
The detection particle combined with determinand formation specificity.
3rd, the preparation method equipment of the utility model is simple, easy to operate, and manufacture efficiency is high, beneficial to industrialized production.
4th, the biosensor structure obtained by the preparation method of the utility model is stablized, and nano-particle is combined jail with substrate
It is Gu not easily to fall off.
In order to which those skilled in the art is made to more fully understand the technical solution of the utility model, one is disclosed further below
The utility model is described in further detail for a little non-limiting embodiments.
Reagent used in the utility model can be bought or can be by described by the utility model from the market
Method be prepared.
In the utility model, mmol expressions mM, h represents hour, g expressions gram, and ml represents milliliter.
In the utility model, filming equipment is coating machine Q150T ES, Quorum Q150RS, and guipure furnace apparatus is
The infrared fast burning meshbeltfurnace of HSH2503-0510Z types, metallic particles detection device are Dimension Icon AFM, and photometric detection is set
Standby is 5000 ultraviolet-visibles of Cary-near infrared spectrometer.
Embodiment 1
Glass substrate is put into magnetron sputtering apparatus, using film thickness monitoring or time control pattern, first plates one layer of 0.5nm
Chromium film, then plate the golden film of last layer 1nm again.The glass substrate for having plated film is placed on meshbeltfurnace front end with manipulator,
It is sent to using guipure in infrared fast burning meshbeltfurnace furnace chamber.Lead to nitrogen protective gas in furnace chamber, heated with infrared quartz fluorescent tube, used
Thermocouple temperature control, cavity temperature control are 200 DEG C.The transmission speed of guipure is 100mm/min, and the sample on guipure reaches guipure
Sample with manipulator is taken out, it is packaged to be put into sample box by stove rear end.Guipure fore-stream sample color is pale blue, by infrared fast
The rapid thermal treatment of meshbeltfurnace is burnt, the color sample of guipure rear end becomes rose pink, and the result is shown in experimental result forms.
Embodiment 2
Glass substrate is put into magnetron sputtering apparatus, using film thickness monitoring or time control pattern, first plates one layer of 0.5nm
Chromium film, then plate the golden film of last layer 2nm again.The glass substrate for having plated film is placed on meshbeltfurnace front end with manipulator,
It is sent to using guipure in infrared fast burning meshbeltfurnace furnace chamber.Lead to nitrogen protective gas in furnace chamber, heated with infrared quartz fluorescent tube, used
Thermocouple temperature control, cavity temperature control are 400 DEG C.The transmission speed of guipure is 200mm/min, and the sample on guipure reaches guipure
Sample with manipulator is taken out, it is packaged to be put into sample box by stove rear end.Guipure fore-stream sample color is pale blue, by infrared fast
The rapid thermal treatment of meshbeltfurnace is burnt, the color sample of guipure rear end becomes rose pink, and the result is shown in experimental result forms.
Embodiment 3
Glass substrate is put into electron beam evaporation equipment, using film thickness monitoring or time control pattern, first plates one layer
Then the chromium film of 0.5nm plates the golden film of last layer 4nm again.Before the glass substrate for having plated film is placed on meshbeltfurnace with manipulator
On end, it is sent to using guipure in infrared fast burning meshbeltfurnace furnace chamber.Lead to nitrogen protective gas in furnace chamber, added with infrared quartz fluorescent tube
Heat, with thermocouple temperature control, cavity temperature control is 400 DEG C.The transmission speed of guipure is 300mm/min, and the sample on guipure arrives
Up to meshbeltfurnace rear end, sample is taken out with manipulator, it is packaged to be put into sample box.Guipure fore-stream sample color is pale blue, is passed through
The infrared fast rapid thermal treatment for burning meshbeltfurnace, the color sample of guipure rear end become rose pink, and the result is shown in experimental result forms.
Embodiment 4
Transparent ceramic base is put into magnetron sputtering apparatus, using film thickness monitoring or time control pattern, first plates one layer
Then the chromium film of 0.5nm plates the golden film of last layer 6nm again.The transparent ceramic base for having plated film is placed on guipure with manipulator
On the end of stokehold, it is sent to using guipure in infrared fast burning meshbeltfurnace furnace chamber.Lead to nitrogen protective gas in furnace chamber, with infrared quartz lamp
Pipe heats, and with thermocouple temperature control, cavity temperature control is 400 DEG C.The transmission speed of guipure is 400mm/min, the sample on guipure
Product reach meshbeltfurnace rear end, take out sample with manipulator, it is packaged to be put into sample box.Guipure fore-stream sample color is pale blue,
By the infrared fast rapid thermal treatment for burning meshbeltfurnace, the color sample of guipure rear end becomes rose pink, and the result is shown in experimental results
Form.
Embodiment 5
Glass substrate is put into thermal evaporation apparatus, using film thickness monitoring or time control pattern, first plates one layer of 0.5nm's
Then chromium film plates the golden film of last layer 8nm again.The glass substrate for having plated film is placed on meshbeltfurnace front end with manipulator, profit
It is sent to guipure in infrared fast burning meshbeltfurnace furnace chamber.Lead to nitrogen protective gas in furnace chamber, heated with infrared quartz fluorescent tube, with heat
Galvanic couple temperature control, cavity temperature control are 500 DEG C.The transmission speed of guipure is 400mm/min, and the sample on guipure reaches meshbeltfurnace
Sample with manipulator is taken out, it is packaged to be put into sample box by rear end.Guipure fore-stream sample color is pale blue, by infrared fast burning
The rapid thermal treatment of meshbeltfurnace, the color sample of guipure rear end become rose pink, and the result is shown in experimental result forms.
Embodiment 6
Glass substrate is put into magnetron sputtering apparatus, using film thickness monitoring or time control pattern, first plates one layer of 1nm's
Then chromium film plates the golden film of last layer 8nm again.The glass substrate for having plated film is placed on meshbeltfurnace front end with manipulator, profit
It is sent to guipure in infrared fast burning meshbeltfurnace furnace chamber.Lead to nitrogen protective gas in furnace chamber, heated with infrared quartz fluorescent tube, with heat
Galvanic couple temperature control, cavity temperature control are 600 DEG C.The transmission speed of guipure is 600mm/min, and the sample on guipure reaches meshbeltfurnace
Sample with manipulator is taken out, it is packaged to be put into sample box by rear end.Guipure fore-stream sample color is pale blue, by infrared fast burning
The rapid thermal treatment of meshbeltfurnace, the color sample of guipure rear end become rose pink, and the result is shown in experimental result forms.
Embodiment 7
Mica plate base is put into magnetron sputtering apparatus, using film thickness monitoring or time control pattern, first plates one layer of 1nm
Chromium film, then plate the golden film of last layer 5nm again.The mica plate base for having plated film is placed on meshbeltfurnace front end with manipulator
On, it is sent to using guipure in infrared fast burning meshbeltfurnace furnace chamber.Lead to nitrogen protective gas in furnace chamber, added with infrared quartz fluorescent tube
Heat, with thermocouple temperature control, cavity temperature control is 600 DEG C.The transmission speed of guipure is 800mm/min, and the sample on guipure arrives
Up to meshbeltfurnace rear end, sample is taken out with manipulator, it is packaged to be put into sample box.Guipure fore-stream sample color is pale blue, is passed through
The infrared fast rapid thermal treatment for burning meshbeltfurnace, the color sample of guipure rear end become rose pink, and the result is shown in experimental result forms.
Embodiment 8
Glass substrate is put into magnetron sputtering apparatus, using film thickness monitoring or time control pattern, first plates one layer of 2nm's
Then chromium film plates the electrum film of last layer 10nm again (silver is containing 10%).The glass substrate for having plated film is placed with manipulator
On meshbeltfurnace front end, it is sent to using guipure in infrared fast burning meshbeltfurnace furnace chamber.Lead to nitrogen protective gas in furnace chamber, use is infrared
Quartz burner heats, and with thermocouple temperature control, cavity temperature control is 800 DEG C.The transmission speed of guipure be 1000mm/min, guipure
On sample reach meshbeltfurnace rear end, sample is taken out with manipulator, it is packaged to be put into sample box.Guipure fore-stream sample color is
Pale blue, by the infrared fast rapid thermal treatment for burning meshbeltfurnace, the color sample of guipure rear end becomes rose pink, and the result is shown in experiments
As a result form.
Embodiment 9
Sapphire substrate is put into magnetron sputtering apparatus, using film thickness monitoring or time control pattern, first plates one layer of 2nm
Chromium film, then plate the golden film of last layer 15nm again.The sapphire substrate for having plated film is placed on meshbeltfurnace front end with manipulator
On, it is sent to using guipure in infrared fast burning meshbeltfurnace furnace chamber.Lead to argon gas protective gas in furnace chamber, added with infrared quartz fluorescent tube
Heat, with thermocouple temperature control, cavity temperature control is 800 DEG C.The transmission speed of guipure is 2000mm/min, and the sample on guipure arrives
Up to meshbeltfurnace rear end, sample is taken out with manipulator, it is packaged to be put into sample box.Guipure fore-stream sample color is pale blue, is passed through
The infrared fast rapid thermal treatment for burning meshbeltfurnace, the color sample of guipure rear end become rose pink, and the result is shown in experimental result forms.
Embodiment 10
Glass substrate is put into magnetron sputtering apparatus, using film thickness monitoring or time control pattern, first plates one layer of 2nm's
Then chromium film plates the golden film of last layer 15nm again.The glass substrate for having plated film is placed on meshbeltfurnace front end with manipulator, profit
It is sent to guipure in infrared fast burning meshbeltfurnace furnace chamber.Lead to argon gas protective gas in furnace chamber, heated with infrared quartz fluorescent tube, with heat
Galvanic couple temperature control, cavity temperature control are 900 DEG C.The transmission speed of guipure is 5000mm/min, and the sample on guipure reaches guipure
Sample with manipulator is taken out, it is packaged to be put into sample box by stove rear end.Guipure fore-stream sample color is pale blue, by infrared fast
The rapid thermal treatment of meshbeltfurnace is burnt, the color sample of guipure rear end becomes rose pink, and the result is shown in experimental result forms.
The experimental result of embodiment 1-10
Embodiment 11
5 gained substrate of embodiment is immersed in the APTMS solution of 10mM, is heated to 70 DEG C, 2h is maintained, then uses PBS
Solution, deionized water are cleaned 3 times, nitrogen drying.It is immersed in again in 15w/w%GA solution, maintains 1h, Ran Houyong at room temperature
PBS solution, deionized water are cleaned 3 times, nitrogen drying.The substrate handled well is placed in clean plastic box, adds in 1ml
Adalimumab solution, covers lid, is placed on 1h in 4 DEG C of refrigerators, each with PBS solution and ultrapure water glass substrate after taking-up
3 times, nitrogen drying.Spectrum change is as shown in Figure 4 before and after thus obtained biosensor modification.
The method of the utility model is described by preferred embodiment, and related personnel substantially can be new in this practicality
Method described herein and application are modified or suitably changed with combining in type content, spirit and scope, to realize and answer
With the utility model technology.Those skilled in the art can use for reference present disclosure, be suitably modified technological parameter realization.Especially need
, it is noted that all similar substitutions and modifications are apparent to those skilled in the art, they are considered as wrapping
It includes in the utility model.
Claims (9)
1. a kind of optical biosensor, including：Base board unit (100), nano-particle unit (200), detection unit (300),
It is characterized in that：The base board unit (100) includes substrate, and the substrate has light transmission, and the light transmission is light transmission
Rate more than 75%；The nano-particle unit (200) includes metal nanoparticle, and the metal nanoparticle is formed at the base
Plate surface；The detection unit (300) includes detection particle, and the detection particle is connected on the substrate, positioned at the gold
Between the gap for belonging to nano-particle.
2. optical biosensor according to claim 1, which is characterized in that the metal nanoparticle is chromium and gold
Alloy, chromium and the alloy of silver or the alloy of chromium and electrum；The grain size of the metal nanoparticle is 2nm-40nm.
3. optical biosensor according to claim 1, which is characterized in that the substrate is glass, quartz, transparent pottery
Porcelain, polymer or mica sheet.
4. optical biosensor according to claim 1, which is characterized in that it is described detection particle for polypeptide, protein,
Oligosaccharide or lipid.
5. a kind of Equipment for Heating Processing for preparing the optical biosensor as described in claim any one of 1-4, the heat treatment is set
Standby is meshbeltfurnace, which is characterized in that the meshbeltfurnace includes heating zone (630), cooling zone (640), feeding area (610), blanking
Area (620) and guipure (650)；Guipure (650) circulating rolling, be sequentially connected the feeding area (610), heating zone (630),
Cooling zone (640), discharging area (620).
6. the Equipment for Heating Processing according to claim 5 for preparing optical biosensor, which is characterized in that the meshbeltfurnace
Further include manipulator (700).
7. the Equipment for Heating Processing according to claim 5 for preparing optical biosensor, which is characterized in that the meshbeltfurnace
Further include gas outlet (601), air inlet (602).
8. the Equipment for Heating Processing according to claim 7 for preparing optical biosensor, which is characterized in that the air inlet
(602) cooling zone (640), heating zone (630) are arranged on, the gas outlet (601) is arranged on the heating zone (630).
9. the Equipment for Heating Processing according to claim 5 for preparing optical biosensor, which is characterized in that the heating zone
(630) heat source is infrared heating.
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| CN201610854342 | 2016-09-26 | ||
| CN2016108543429 | 2016-09-26 | ||
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| CN201710848706.7A Withdrawn CN107870163A (en) | 2016-09-26 | 2017-09-20 | A kind of optical biosensor preparation method |
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| TWI337254B (en) * | 2005-11-11 | 2011-02-11 | Nat Univ Chung Cheng | Localized surface plasmon resonance sensing system and method thereof |
| JP5397577B2 (en) * | 2007-03-05 | 2014-01-22 | オムロン株式会社 | Surface plasmon resonance sensor and chip for the sensor |
| CN101205120B (en) * | 2007-11-30 | 2011-08-24 | 中国科学院广州能源研究所 | Spectrum local decorated thermocolour glass and method for making same |
| CN101429644B (en) * | 2008-03-21 | 2012-01-25 | 中国科学院上海硅酸盐研究所 | Production method of metal or metal oxide nano particle |
| CN103472237B (en) * | 2013-09-18 | 2015-02-25 | 四川大学华西第二医院 | Bio-sensitive chip as well as preparation method and use thereof |
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