CN207418847U - Mask plate support plate and mask plate transporting equipment - Google Patents

Mask plate support plate and mask plate transporting equipment Download PDF

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Publication number
CN207418847U
CN207418847U CN201721540032.6U CN201721540032U CN207418847U CN 207418847 U CN207418847 U CN 207418847U CN 201721540032 U CN201721540032 U CN 201721540032U CN 207418847 U CN207418847 U CN 207418847U
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CN
China
Prior art keywords
mask plate
screw
support plate
mask
screw hole
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CN201721540032.6U
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Chinese (zh)
Inventor
林治明
黄俊杰
王震
李冬伟
白音必力
尹志
郝志元
张健
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BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
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BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
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Priority to CN201721540032.6U priority Critical patent/CN207418847U/en
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Publication of CN207418847U publication Critical patent/CN207418847U/en
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Abstract

The utility model provides a kind of mask plate support plate and mask plate transporting equipment, belongs to display technology field.Wherein, mask plate support plate, including support plate frame, multiple screw holes are provided on the support plate frame, the mask plate support plate further includes the screw in the screw hole, the top of multiple screws forms to support the supporting surface of mask plate, and the screw is unthreaded portion close to the part on top, and the length of the unthreaded portion is not less than the length of the screw hole female thread portion.Pass through the technical solution of the utility model, screw can be made not relax from the screw hole on support plate frame, the mask plate of carrying can be stably placed on screw, so as to not interfere with sensing of the equipment inductor to the mask plate on mask plate support plate, it reduces equipment to delay probability, improves production efficiency.

Description

Mask plate support plate and mask plate transporting equipment
Technical field
The utility model is related to display technology fields, particularly relate to a kind of mask plate support plate and mask plate transporting equipment.
Background technology
Fine metal mask pattern is according to preset program vapor deposition to backboard by vapor deposition mode by OLED luminescent materials On, using the figure on FMM (fine metal mask plate), RGB luminous organic material is deposited to assigned position.It sets at present Standby is to transport FMM by mask plate support plate when FMM is cleaned, and is first assembled FMM and mask plate support plate, then FMM is transported by transporting mask plate support plate, so can directly clamp FMM in itself to avoid clip, makes FMM deformation effects smart Degree.
Multiple screw holes are provided on support plate frame, mask plate support plate further includes the screw in screw hole, multiple screws Top composition is to support the supporting surface of mask plate, it is necessary to use ultrasonic wave during FMM is cleaned, in vibration processes, Screw can relax from the screw hole on support plate frame, so during FMM and mask plate support plate are separated, loose screw meeting The flat condition that FMM is placed on screw is influenced, FMM is caused to place uneven, and then it is onboard to mask to influence equipment inductor The sensing of FMM is whether there is on plate, the machine so that equipment is delayed influences equipment mobility, and production efficiency reduces.
Utility model content
The technical problem to be solved by the present invention is to provide a kind of mask plate support plate and mask plate transporting equipments, can make Screw will not relax from the screw hole on support plate frame, and the mask plate of carrying can be stably placed on screw, thus will not Sensing of the equipment inductor to the mask plate on mask plate support plate is influenced, equipment is reduced and delays probability, improve production efficiency.
In order to solve the above technical problems, the embodiment offer technical solution of the utility model is as follows:
On the one hand, a kind of mask plate support plate is provided, including support plate frame, multiple screw holes are provided on the support plate frame, The mask plate support plate further includes the screw in the screw hole, and the top of multiple screws forms to support the branch of mask plate Support face, the screw are unthreaded portion close to the part on top, and the length of the unthreaded portion is not less than in the screw hole The length of threaded portion.
Further, the length of the unthreaded portion is more than the length of the screw hole female thread portion.
Further, the length of the unthreaded portion is bigger 1-2mm than the length of the screw hole female thread portion.
Further, the diameter of the unthreaded portion is less than the internal diameter of the screw hole female thread portion.
Further, the 70%~95% of the internal diameter of a diameter of screw hole female thread portion of the unthreaded portion.
Further, the 90% of the internal diameter of a diameter of screw hole female thread portion of the unthreaded portion.
Further, section of the unthreaded portion on the plane parallel to the support plate frame is polygon.
Further, section of the unthreaded portion on the plane parallel to the support plate frame is regular polygon.
Further, the mask plate is fine metal mask plate.
The utility model embodiment additionally provides a kind of mask plate transporting equipment, including mask plate support plate as described above.
The embodiment of the utility model has the advantages that:
In said program, screw is unthreaded portion close to the part on top, and the length of unthreaded portion is not less than screw hole The length of female thread portion, so after screw is fully screwed into screw hole, the threaded portion of screw just passes completely through screw hole Threaded portion so that the threaded portion of screw is broken with the matching status that is engaged of the threaded portion of screw hole, super even at having In the environment of sound wave, mask plate support plate vibrates, and the screw thread of screw will not be matched with the screw thread of screw hole, the spiral shell of screw Line will not depart from according to the screw thread rotation of screw hole, so screw will not relax from the screw hole on support plate frame, by mask plate When being separated from mask plate support plate, the mask plate of carrying can be stably placed on screw, so as to not interfere with equipment sensing Sensing of the device to the mask plate on mask plate support plate reduces equipment and delays probability, improve production efficiency.
Description of the drawings
Fig. 1 is the schematic diagram of mask plate carrier for bearing mask plate;
Mask plate is carried on the schematic diagram on mask plate support plate by Fig. 2 to keep flat mask plate support plate;
Fig. 3 is that mask plate support plate is upright, transports the schematic diagram of mask plate support plate;
Mask plate support plate is is kept flat by Fig. 4, by mask plate carrying separated schematic diagram from mask plate support plate;
Fig. 5 is the schematic diagram of screw relaxation from the screw hole on support plate frame;
Fig. 6 relaxations from the screw hole on support plate frame for screw, influence the flat condition that mask plate is placed on screw Schematic diagram;
Fig. 7 is the length of the utility model embodiment screw unthreaded portion not less than the length of screw hole female thread portion Schematic diagram;
Fig. 8 is that the diameter of the utility model embodiment screw unthreaded portion is less than showing for the internal diameter of screw hole female thread portion It is intended to;
Fig. 9 and Figure 10 is after the utility model embodiment mask plate support plate is upright, and what screw moved down under the effect of gravity shows It is intended to.
Reference numeral
1 support plate frame
2 screws
3 mask plates
Specific embodiment
To make the embodiment technical problems to be solved, technical solution and advantage of the utility model clearer, below will It is described in detail in conjunction with the drawings and the specific embodiments.
Equipment is to transport mask plate 3 by mask plate support plate when mask plate 3 are cleaned at present, first by mask plate 3 are assembled with mask plate support plate, then transport mask plate 3 by transporting mask plate support plate, so can be straight to avoid clip Clamping mask plate 3 itself is connect, makes 3 deformation effect precision of mask plate.Fig. 1 is the schematic diagram of mask plate carrier for bearing mask plate 3, such as Shown in Fig. 2, when mask plate 3 is carried on mask plate support plate, it is to keep flat mask plate support plate, afterwards carries mask plate 3 On mask plate support plate;It is that mask plate support plate is upright as shown in figure 3, when transporting mask plate support plate;As shown in figure 4, it is inciting somebody to action Mask plate 3 carries when being separated from mask plate support plate, is to keep flat mask plate support plate.During mask plate 3 is cleaned, it is necessary to Ultrasonic wave is used, in vibration processes, as shown in figure 5, screw 2 can the relaxation from the screw hole on support plate frame 1.In cleaning process Middle mask plate 3 and mask plate support plate are uprightly synchronized with the movement, but during mask plate 3 and mask plate support plate are separated, Mask plate 3 and mask plate support plate need to become laid-flat status (being rotated by 90 °) from erectility, if the screw 2 of contact mask plate 3 The relaxation from the screw hole on support plate frame 1, as shown in fig. 6, the flat condition that mask plate 3 is placed on screw 2 can be influenced, mask Plate 3 places unevenness, and then influences equipment inductor to whetheing there is the sensing of mask plate 3 on mask plate support plate, so that equipment is delayed Machine, influences equipment mobility, and production efficiency reduces.
To solve the above-mentioned problems, the embodiment of the utility model provides a kind of mask plate support plate and mask plate transport is set It is standby, screw 2 can be made not relax from the screw hole on support plate frame 1, the mask plate 3 of carrying can be stably placed at screw On 2, so as to not interfere with sensing of the equipment inductor to the mask plate 3 on mask plate support plate, reduce equipment and delay probability, improve life Produce efficiency.
The utility model embodiment provides a kind of mask plate support plate, as shown in fig. 7, mask plate support plate includes support plate frame 1, Multiple screw holes are provided on the support plate frame 1, the mask plate support plate further includes the screw 2 in the screw hole, multiple The top of screw 2 forms to support the supporting surface of mask plate 3, and the screw 2 is unthreaded portion close to the part on top, institute The length for stating unthreaded portion is not less than the length of the screw hole female thread portion.
In the present embodiment, screw 2 is unthreaded portion close to the part on top, and the length of unthreaded portion is not less than screw hole The length of female thread portion, so after screw 2 is fully screwed into screw hole, the threaded portion of screw 2 just passes completely through screw hole Threaded portion so that the threaded portion of screw 2 is broken with the matching status that is engaged of the threaded portion of screw hole, even at having In the environment of ultrasonic wave, mask plate support plate vibrates, and the screw thread of screw 2 will not be matched with the screw thread of screw hole, screw 2 Screw thread will not depart from according to the screw thread rotation of screw hole, so screw 2 will not relax from the screw hole on support plate frame 1, will When mask plate 3 is separated from mask plate support plate, the mask plate 3 of carrying can be stably placed on screw 2, so as to not interfere with Sensing of the equipment inductor to the mask plate 3 on mask plate support plate reduces equipment and delays probability, improve production efficiency.
Specifically, the length of the unthreaded portion of screw 2 can be more than the length of the screw hole female thread portion, such as spiral shell The length of the unthreaded portion of nail 2 is slightly larger than the length of screw hole female thread portion, and the length of screw hole female thread portion can be spiral shell The 90%-95% of the length of the unthreaded portion of nail 2.
In one specific embodiment, the length of the unthreaded portion can be bigger 1- than the length of the screw hole female thread portion 2mm。
It is so complete in screw 2 since the length of the unthreaded portion of screw 2 is more than the length of the screw hole female thread portion Wheel is into after screw hole, and the threaded portion of screw 2 passes completely through the threaded portion of screw hole so that the threaded portion and spiral shell of screw 2 The occlusion matching status of the threaded portion in hole is broken, and in the environment of having ultrasonic wave, mask plate support plate vibrates, The screw thread of screw 2 will not be matched with the screw thread of screw hole, and the screw thread of screw 2 will not depart from according to the screw thread rotation of screw hole, So screw 2 will not relax from the screw hole on support plate frame 1, the mask plate 3 of carrying can be stably placed on screw 2, So as to not interfering with sensing of the equipment inductor to the mask plate 3 on mask plate support plate, reduce equipment and delay probability, improve production effect Rate.
Further, as shown in figure 8, screw 2 unthreaded portion length be not less than screw hole female thread portion length On the basis of degree, the diameter of the unthreaded portion of screw 2 is also less than the internal diameter of the screw hole female thread portion.So covering When diaphragm plate support plate is in erectility (mask plate support plate is all erectility when cleaning and transport), such as Fig. 9 and figure Shown in 10, by the booster action of the gravity of screw 2, the screw thread on screw 2 and screw hole on support plate frame can be preferably prevented Screw thread matched, realize matched zero probability, the screw thread of screw 2 will not depart from according to the screw thread rotation of screw hole, so Screw 2 will not relax from the screw hole on support plate frame 1, when mask plate 3 is separated from mask plate support plate, the mask of carrying Plate 3 can be stably placed on screw 2, so as to not interfere with sense of the equipment inductor to the mask plate 3 on mask plate support plate Should, it reduces equipment and delays probability, improve production efficiency.
Specifically, the 70%~95% of the internal diameter of a diameter of screw hole female thread portion of the unthreaded portion.It is excellent Selection of land, the 90% of the internal diameter of a diameter of screw hole female thread portion of the unthreaded portion.
Further, screw 2 unthreaded portion diameter be less than the screw hole female thread portion internal diameter basis On, the shape of the unthreaded portion of screw 2 can also be changed, further prevent the screw thread on screw 2 and screw hole on support plate frame Screw thread matched.It specifically, can be by the unthreaded portion of screw 2 on the plane parallel to the support plate frame 1 Section is designed as polygon, and the screw thread that the screw thread on screw 2 and screw hole on support plate frame can so be better achieved is matched Zero probability, the screw thread of screw 2 will not depart from according to the screw thread rotation of screw hole, so screw 2 will not be from the screw hole on support plate frame 1 Middle relaxation, when mask plate 3 is separated from mask plate support plate, the mask plate 3 of carrying can be stably placed on screw 2, So as to not interfering with sensing of the equipment inductor to the mask plate 3 on mask plate support plate, reduce equipment and delay probability, improve production effect Rate.
Specifically, section of the unthreaded portion of screw 2 on the plane parallel to the support plate frame 1 can be just more Side shape, such as equilateral triangle, square, regular pentagon, regular hexagon etc..Certainly, the unthreaded portion of screw 2 parallel to Section in the plane of the support plate frame 1 can also be other shapes, for example can be irregular shape, as long as can reduce The matched probability of screw thread of screw thread and screw hole on support plate frame on screw 2.
Specifically, above-mentioned mask plate 3 can be fine metal mask plate.
The utility model embodiment additionally provides a kind of mask plate transporting equipment, including mask plate support plate as described above. In the present embodiment, the screw 2 of mask plate support plate is unthreaded portion close to the part on top, and the length of unthreaded portion is not less than The length of screw hole female thread portion, so after screw 2 is fully screwed into screw hole, the threaded portion of screw 2 just passes completely through The threaded portion of screw hole so that the threaded portion of screw 2 is broken with the matching status that is engaged of the threaded portion of screw hole, even if place In the environment of having ultrasonic wave, mask plate support plate vibrates, and the screw thread of screw 2 will not be matched with the screw thread of screw hole, The screw thread of screw 2 will not depart from according to the screw thread rotation of screw hole, so screw 2 will not relax from the screw hole on support plate frame 1, The mask plate 3 of carrying can be stably placed on screw 2, so as to not interfere with equipment inductor to covering on mask plate support plate The sensing of diaphragm plate 3 reduces equipment and delays probability, improves production efficiency.
Unless otherwise defined, the technical term or scientific terminology that the disclosure uses should be the utility model fields The ordinary meaning that the interior personage with general technical ability is understood." first ", " second " and the similar word used in the disclosure Language is not offered as any order, quantity or importance, and is used only to distinguish different components." comprising " or " bag Containing " etc. similar word mean to occur element before the word either object cover appear in the word presented hereinafter element or Object and its equivalent, and it is not excluded for other elements or object.The similar word such as " connection " or " connected " is not limited to Physics or mechanical connection, but electrical connection can be included, it is either directly or indirect." on ", " under ", "left", "right" etc. is only used for representing relative position relation, and after the absolute position for being described object changes, then the relative position is closed System may also correspondingly change.
It is appreciated that ought such as layer, film, region or substrate etc element be referred to as be located at another element "above" or "below" When, which " direct " can be located at "above" or "below" another element or there may be intermediary element.
The above is the preferred embodiment of the utility model, it is noted that for the ordinary skill of the art For personnel, on the premise of principle described in the utility model is not departed from, several improvements and modifications can also be made, these improvement The scope of protection of the utility model is also should be regarded as with retouching.

Claims (10)

1. a kind of mask plate support plate including support plate frame, is provided with multiple screw holes, the mask plate support plate on the support plate frame The screw in the screw hole is further included, the top of multiple screws forms to support the supporting surface of mask plate, and feature exists In the screw is unthreaded portion close to the part on top, and the length of the unthreaded portion is not less than spiral shell in the screw hole The length of line part.
2. mask plate support plate according to claim 1, which is characterized in that the length of the unthreaded portion is more than the spiral shell The length of hole female thread portion.
3. mask plate support plate according to claim 2, which is characterized in that the length of the unthreaded portion is than the screw hole The big 1-2mm of length of female thread portion.
4. mask plate support plate according to claim 1, which is characterized in that the diameter of the unthreaded portion is less than the spiral shell The internal diameter of hole female thread portion.
5. mask plate support plate according to claim 4, which is characterized in that a diameter of screw hole of the unthreaded portion The 70%~95% of the internal diameter of female thread portion.
6. mask plate support plate according to claim 5, which is characterized in that a diameter of screw hole of the unthreaded portion The 90% of the internal diameter of female thread portion.
7. mask plate support plate according to claim 4, which is characterized in that the unthreaded portion is parallel to the support plate Section in the plane of frame is polygon.
8. mask plate support plate according to claim 7, which is characterized in that the unthreaded portion is parallel to the support plate Section in the plane of frame is regular polygon.
9. the mask plate support plate according to any one of claim 1-8, which is characterized in that the mask plate is fine metal Mask plate.
10. a kind of mask plate transporting equipment, which is characterized in that onboard including mask as claimed in any one of claims 1-9 wherein Plate.
CN201721540032.6U 2017-11-17 2017-11-17 Mask plate support plate and mask plate transporting equipment Active CN207418847U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721540032.6U CN207418847U (en) 2017-11-17 2017-11-17 Mask plate support plate and mask plate transporting equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721540032.6U CN207418847U (en) 2017-11-17 2017-11-17 Mask plate support plate and mask plate transporting equipment

Publications (1)

Publication Number Publication Date
CN207418847U true CN207418847U (en) 2018-05-29

Family

ID=62306546

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721540032.6U Active CN207418847U (en) 2017-11-17 2017-11-17 Mask plate support plate and mask plate transporting equipment

Country Status (1)

Country Link
CN (1) CN207418847U (en)

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