CN207396674U - A kind of polysilicon detection testboard - Google Patents
A kind of polysilicon detection testboard Download PDFInfo
- Publication number
- CN207396674U CN207396674U CN201721173983.4U CN201721173983U CN207396674U CN 207396674 U CN207396674 U CN 207396674U CN 201721173983 U CN201721173983 U CN 201721173983U CN 207396674 U CN207396674 U CN 207396674U
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- polysilicon
- fixedly connected
- cylinder
- flap
- shaft
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Abstract
The utility model is related to polysilicon equipment technical fields, and disclose a kind of polysilicon detection testboard, including pedestal, the top of pedestal is fixedly connected with the bottom of the first cylinder, the output terminal of first cylinder is fixedly connected with head rod, and one end at the top of head rod is connected with direction-changing device, and direction-changing device includes first rotating shaft, first rotating shaft and the top movable of head rod connect, and first rotating shaft is flexibly connected with one end of the first flap.The polysilicon detection testboard, pass through setting direction conversion equipment, rotated using first rotating shaft and the second shaft drive the first flap and the second flap can 180 degree rotate, more comprehensive rotation probe, more comprehensive detection polycrystalline silicon material can detect different size of polysilicon, by setting articulated section and hoop, achieve the effect that it is stronger fix probe, using the first cylinder operation achieve the effect that up and down adjustment pop one's head in height, achieve the purpose that more accurately detect polysilicon.
Description
Technical field
The utility model is related to polysilicon equipment technical fields, are specially a kind of polysilicon detection testboard.
Background technology
To adapt to the development of the fast development of large scale integrated circuit, particularly computer chip memory, more and more
Using the higher polycrystalline silicon material of major diameter, high-purity, the uniformity has been arrived, current polysilicon measuring instrument involves great expense, and
Testboard space is smaller, and probe rotational angle is smaller, can only test the polysilicon compared with small dimension or larger specification polysilicon
If desired sub-fraction measures large-sized polysilicon, can only the higher large scale equipment of replacement cost, to measurement work bring pole
Big inconvenience, reduces work efficiency, it is impossible to fast and accurately measure the quality of polysilicon, and polycrystal quality is more crisp, inspection
It is easily collided during surveying, increases production cost, affect product quality.
Utility model content
(1) the technical issues of solving
In view of the deficiencies of the prior art, the utility model provides a kind of polysilicon detection testboard, possesses more comprehensively
Measurement polysilicon the advantages that, solve the problems, such as that existing equipment measurement range is small.
(2) technical solution
To realize above-mentioned more fully measurement polysilicon purpose, the utility model provides following technical solution：A kind of polycrystalline
Silicon detection testboard, including pedestal, the top of the pedestal is fixedly connected with the bottom of the first cylinder, first cylinder
Output terminal is fixedly connected with head rod, and one end at the top of the head rod is connected with direction-changing device, institute
Stating direction-changing device includes first rotating shaft, and the top movable of the first rotating shaft and head rod connects, described first turn
Axis is flexibly connected with one end of the first flap, and one end of first flap is connected by first rotating shaft and head rod activity
It connects, the other end of first flap is movably installed with the second shaft, and one end of second flap passes through the second shaft and the
One flap is flexibly connected, and one end of the direction-changing device is fixedly connected with the second connecting rod, and the one of second connecting rod
End is fixedly connected with articulated section, and one end of the articulated section is fixedly connected with hoop, and the internal activity of the hoop is equipped with spy
Head, the one side of the pedestal are provided with workbench, and the inside of the bench-top offers sliding slot, and the inside of the sliding slot is lived
It is dynamic that sliding block is installed, telescopic sleeving rod is installed at the top of the sliding block, the bottom of the telescopic sleeving rod is fixedly connected with branch
Platform is supportted, the upper surface of the supporting table is fixedly connected with the bottom of motor, one end of the output shaft of the motor and the 3rd shaft
It is fixedly connected, the other end of the 3rd shaft is fixedly connected with clamping device.
Preferably, first flap is identical with the specification of the second flap.
Preferably, the hoop opening is equipped with flange, and the flange is equipped with the bolt hole passed through for bolt.
Preferably, the quantity of the sliding block is two, and the sliding block is evenly distributed in the both ends inside sliding slot.
Preferably, the clamping device includes the second cylinder, and the bottom and the top of the second cylinder of the 3rd shaft are consolidated
Fixed connection, the output terminal of second cylinder are fixedly connected with cylinder piston rod, and the both sides of second cylinder are fixedly mounted
There is support plate, one end of the support plate is connected with gripper, the bottom of the cylinder piston rod and one end of drive rod
Flexible connection, the other end of the drive rod are flexibly connected with the middle part of gripper.
Preferably, the cylinder piston rod stretches in the second cylinder, and cylinder piston rod be located in the second cylinder one
End is equipped with end.
Preferably, the quantity of the gripper is two, and rubber pad is provided at the inner wall of the gripper bottom.
(3) advantageous effect
Compared with prior art, the utility model provides a kind of polysilicon detection testboard, possesses following beneficial to effect
Fruit：
1st, the polysilicon detection testboard by setting direction conversion equipment, is turned using first rotating shaft and the second shaft
It is dynamic drive the first flap and the second flap can 180 degree rotate, more comprehensive rotation probe, more comprehensive detection polysilicon material
Material, can detect different size of polysilicon, by setting articulated section and hoop, reach the stronger effect for fixing probe
Fruit achievees the effect that up and down adjustment probe height using the first cylinder operation, achievees the purpose that more accurately to detect polysilicon.
2nd, the polysilicon detection testboard, by setting clamping device and motor, motor work drives clamping device to turn
It is dynamic, achieve the effect that rotate polysilicon, more thorough careful detection polysilicon drives the movement of drive rod by the second cylinder,
So that gripper achievees the purpose that pine and grabs, achieve the effect that convenient and efficient crawl and relieving polysilicon, clamp and protect polycrystalline
Silicon is not broken, and suitable for the polysilicon of different size, polysilicon is made to be clamped in aerial rotatable movement, by setting sliding slot
And sliding block, achieve the effect that left and right adjusting clamping device, facilitate clamping device movement polysilicon and probe detection polysilicon.
Description of the drawings
Fig. 1 is the utility model structure diagram；
Fig. 2 is the utility model clamping device structure diagram.
In figure：1 pedestal, 2 first cylinders, 3 head rods, 4 direction-changing devices, 401 first rotating shafts, 402 first turns
Plate, 403 second shafts, 404 second flaps, 5 second connecting rods, 6 articulated sections, 7 hoops, 8 probes, 9 workbench, 10 sliding slots, 11
Sliding block, 12 telescopic sleeving rods, 13 supporting tables, 14 motors, 15 the 3rd shafts, 16 clamping devices, 1,601 second cylinders, 1602 cylinders are lived
Stopper rod, 1603 support plates, 1604 grippers, 1605 drive rods, 1606 rubber pads, 17 flange.
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
It clearly and completely describes, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work
All other embodiments obtained shall fall within the protection scope of the present invention.
Please refer to Fig.1-2, a kind of polysilicon detection testboard, including pedestal 1, the top of pedestal 1 and the first cylinder 2
Bottom is fixedly connected, and the output terminal of the first cylinder 2 is fixedly connected with head rod 3, one end activity at 3 top of head rod
Direction-changing device 4 is connected with, direction-changing device 4 includes first rotating shaft 401, first rotating shaft 401 and the top of head rod 3
Portion is flexibly connected, and first rotating shaft 401 is flexibly connected with one end of the first flap 402, and one end of the first flap 402 passes through first turn
Axis 401 is flexibly connected with head rod 3, and the other end of the first flap 402 is movably installed with the second shaft 403, the second flap
404 one end is flexibly connected by the second shaft 403 with the first flap 402, the specification of the first flap 402 and the second flap 404
Identical, which, by setting direction conversion equipment 4, utilizes 401 and second shaft 403 of first rotating shaft
Rotate drive the first flap 402 and the second flap 404 can 180 degree rotate, more comprehensive rotation probe 8, more comprehensive inspection
Polycrystalline silicon material is surveyed, one end of direction-changing device 4 is fixedly connected with the second connecting rod 5, and one end of the second connecting rod 5, which is fixed, to be connected
Articulated section 6 is connected to, one end of articulated section 6 is fixedly connected with hoop 7, and the internal activity of hoop 7 is equipped with probe 8, passes through setting
Articulated section 6 and hoop 7, achieve the effect that it is stronger fix probe 8, using the first cylinder 2 work reach up and down adjustment visit
The effect of first 8 height achievees the purpose that more accurately detection polysilicon, the one side of pedestal 1 are provided with workbench 9, and workbench 9 pushes up
The inside in portion offers sliding slot 10, and the internal activity of sliding slot 10 is equipped with sliding block 11, and the quantity of sliding block 11 is two, and sliding block 11 is equal
The even both ends being distributed in inside sliding slot 10 by setting sliding slot 10 and sliding block 11, reach the effect of left and right adjusting clamping device 16
Fruit facilitates clamping device 16 to move 8 detection polysilicon of polysilicon and probe, and the top of sliding block 11 is installed with telescopic sleeving rod
12, the bottom of telescopic sleeving rod 12 is fixedly connected with supporting table 13, and the upper surface of supporting table 13 is fixedly connected with the bottom of motor 14,
The output shaft of motor 14 is fixedly connected with one end of the 3rd shaft 15, and the other end of the 3rd shaft 15 is fixedly connected with clamping device
16, clamping device 16 includes the second cylinder 1601, and the bottom of the 3rd shaft 15 is fixedly connected with the top of the second cylinder 1601, the
The output terminal of two cylinders 1601 is fixedly connected with cylinder piston rod 1602, and cylinder piston rod 1602 stretches in the second cylinder 1601
It is interior, and one end that cylinder piston rod 1602 is located in the second cylinder 1601 is equipped with end, the both sides of the second cylinder 1601 are fixed
Support plate 1603 is installed, one end of support plate 1603 is connected with gripper 1604, the bottom of cylinder piston rod 1602 with
One end flexible connection of drive rod 1605, the other end of drive rod 1605 are flexibly connected with the middle part of gripper 1604, gripper
1604 quantity is two, and rubber pad 1606 is provided at the inner wall of 1604 bottom of gripper, and 7 opening of hoop is equipped with flange
17, flange 17 is equipped with the bolt hole passed through for bolt, the polysilicon detection testboard, by setting clamping device 16 and electricity
Machine 14, the work of motor 14 drive clamping device 16 to rotate, and achieve the effect that rotate polysilicon, more thorough careful detection polycrystalline
Silicon is driven the up and down motion of cylinder piston rod 1602 by the second cylinder 1601, and then drives the movement of drive rod 1605 so that
Gripper 1604 achievees the purpose that pine and grabs, and achievees the effect that convenient and efficient crawl and relieving polysilicon, is clamped polysilicon
Rotatable movement in the air.
The electric elements occurred in this article are electrically connected with extraneous main controller and 220V alternating currents, and main controller can be meter
Calculation machine etc. plays the conventionally known equipment of control.
In conclusion the polysilicon detection testboard, by setting direction conversion equipment 4, utilizes 401 He of first rotating shaft
Second shaft 403 rotate drive the first flap 402 and the second flap 404 can 180 degree rotate, more comprehensive rotation probe 8, more
Comprehensive detection polycrystalline silicon material, by setting articulated section 6 and hoop 7, achieve the effect that it is stronger fix probe 8,
Achieve the effect that up and down adjustment 8 height of probe using the work of the first cylinder 2, achieve the purpose that more accurately to detect polysilicon.It should
Polysilicon detection testboard, by setting clamping device 16 and motor 14, the work of motor 14 drives clamping device 16 to rotate, reaches
To the effect of rotation polysilicon, more thorough careful detection polysilicon passes through the fortune that the second cylinder 1601 drives drive rod 1605
It is dynamic so that gripper 1604 achievees the purpose that pine and grabs, and achievees the effect that convenient and efficient crawl and relieving polysilicon, clamps and protect
Shield polysilicon is not broken, and suitable for polysilicon of different size and specifications, polysilicon is made to be clamped in aerial rotatable movement, is led to
Cross setting sliding slot 10 and sliding block 11, achieve the effect that left and right adjusting clamping device 16, facilitate clamping device 16 move polysilicon and
8 detection polysilicon of probe.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any this actual relation or order.Moreover, term " comprising ", "comprising" or its any other variant are intended to
Non-exclusive inclusion, so that process, method, article or equipment including a series of elements not only will including those
Element, but also including other elements that are not explicitly listed or further include as this process, method, article or equipment
Intrinsic element.
While there has been shown and described that the embodiment of the utility model, for the ordinary skill in the art,
It is appreciated that in the case where not departing from the principle of the utility model and spirit can these embodiments be carried out with a variety of variations, repaiied
Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.
Claims (7)
1. a kind of polysilicon detection testboard, including pedestal (1), it is characterised in that：The top of the pedestal (1) and the first gas
The bottom of cylinder (2) is fixedly connected, and the output terminal of first cylinder (2) is fixedly connected with head rod (3), and described first connects
One end at the top of extension bar (3) is connected with direction-changing device (4), and the direction-changing device (4) includes first rotating shaft
(401), the first rotating shaft (401) is connected with the top movable of head rod (3), the first rotating shaft (401) and first
One end flexible connection of flap (402), one end of first flap (402) passes through first rotating shaft (401) and head rod
(3) it is flexibly connected, the other end of first flap (402) is movably installed with the second shaft (403), second flap
(404) one end is flexibly connected by the second shaft (403) with the first flap (402), one end of the direction-changing device (4)
The second connecting rod (5) is fixedly connected with, one end of second connecting rod (5) is fixedly connected with articulated section (6), the articulated section
(6) one end is fixedly connected with hoop (7), and the internal activity of the hoop (7) is equipped with probe (8), and the one of the pedestal (1)
Side is provided with workbench (9), and the inside at the top of the workbench (9) offers sliding slot (10), and the inside of the sliding slot (10) is lived
It is dynamic that sliding block (11) is installed, telescopic sleeving rod (12) is installed at the top of the sliding block (11), the telescopic sleeving rod (12)
Bottom is fixedly connected with supporting table (13), and the upper surface of the supporting table (13) is fixedly connected with the bottom of motor (14), described
The output shaft of motor (14) is fixedly connected with one end of the 3rd shaft (15), and the other end of the 3rd shaft (15) is fixedly connected
There is clamping device (16).
2. a kind of polysilicon detection testboard according to claim 1, it is characterised in that：First flap (402)
It is identical with the specification of the second flap (404).
3. a kind of polysilicon detection testboard according to claim 1, it is characterised in that：Hoop (7) opening
Equipped with flange (17), the flange (17) is equipped with the bolt hole passed through for bolt.
4. a kind of polysilicon detection testboard according to claim 1, it is characterised in that：The quantity of the sliding block (11)
For two, the sliding block (11) is evenly distributed in the internal both ends of sliding slot (10).
5. a kind of polysilicon detection testboard according to claim 1, it is characterised in that：Clamping device (16) bag
The second cylinder (1601) is included, the bottom of the 3rd shaft (15) at the top of the second cylinder (1601) with being fixedly connected, and described
The output terminal of two cylinders (1601) is fixedly connected with cylinder piston rod (1602), and the both sides of second cylinder (1601) are fixed
Support plate (1603) is installed, one end of the support plate (1603) is connected with gripper (1604), the cylinder piston
The bottom of bar (1602) is flexibly connected with one end of drive rod (1605), the other end and gripper of the drive rod (1605)
(1604) middle part flexible connection.
6. a kind of polysilicon detection testboard according to claim 5, it is characterised in that：The cylinder piston rod
(1602) stretch in the second cylinder (1601), and one end that cylinder piston rod (1602) is located in the second cylinder (1601) is equipped with
End.
7. a kind of polysilicon detection testboard according to claim 5, it is characterised in that：The gripper (1604)
Quantity is two, and rubber pad (1606) is provided at the inner wall of gripper (1604) bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721173983.4U CN207396674U (en) | 2017-09-14 | 2017-09-14 | A kind of polysilicon detection testboard |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721173983.4U CN207396674U (en) | 2017-09-14 | 2017-09-14 | A kind of polysilicon detection testboard |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207396674U true CN207396674U (en) | 2018-05-22 |
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ID=62416299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721173983.4U Expired - Fee Related CN207396674U (en) | 2017-09-14 | 2017-09-14 | A kind of polysilicon detection testboard |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207396674U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109632273A (en) * | 2018-12-10 | 2019-04-16 | 宁波安创电子科技有限公司 | A kind of urea for vehicle nozzle clamps detection device automatically |
| CN111679137A (en) * | 2020-05-26 | 2020-09-18 | 江西源盛泰电子科技有限公司 | Backlight screen detection tool |
-
2017
- 2017-09-14 CN CN201721173983.4U patent/CN207396674U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109632273A (en) * | 2018-12-10 | 2019-04-16 | 宁波安创电子科技有限公司 | A kind of urea for vehicle nozzle clamps detection device automatically |
| CN111679137A (en) * | 2020-05-26 | 2020-09-18 | 江西源盛泰电子科技有限公司 | Backlight screen detection tool |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180522 Termination date: 20210914 |