CN207387327U - A kind of gas-liquid-solid three-phase abrasive Flow polishing tool based on cavitation effect - Google Patents
A kind of gas-liquid-solid three-phase abrasive Flow polishing tool based on cavitation effect Download PDFInfo
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- CN207387327U CN207387327U CN201721354037.XU CN201721354037U CN207387327U CN 207387327 U CN207387327 U CN 207387327U CN 201721354037 U CN201721354037 U CN 201721354037U CN 207387327 U CN207387327 U CN 207387327U
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- 239000007787 solid Substances 0.000 title claims abstract description 88
- 238000005498 polishing Methods 0.000 title claims abstract description 77
- 230000000694 effects Effects 0.000 title claims abstract description 21
- 238000012545 processing Methods 0.000 claims abstract description 25
- 239000007788 liquid Substances 0.000 claims abstract description 14
- 239000002245 particle Substances 0.000 claims description 42
- 238000007789 sealing Methods 0.000 claims description 7
- 239000004744 fabric Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 21
- 238000013461 design Methods 0.000 abstract description 4
- 239000011148 porous material Substances 0.000 abstract description 2
- 239000012530 fluid Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000003754 machining Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
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Abstract
The utility model discloses a kind of gas-liquid-solid three-phase abrasive Flow polishing tools based on cavitation effect, and including gas-liquid-solid mixing arrangement, cavitation polishing tool and workpiece fixed platform, workpiece is mounted in workpiece fixed platform；Cavitation polishing tool is placed in above workpiece and the bottom surface of cavitation polishing tool and the upper surface of workpiece are parallel, and mixed gas-liquid-solid three-phase abrasive Flow is simultaneously passed through in cavitation polishing tool by gas-liquid-solid mixing arrangement connection cavitation polishing tool；Gas is mixed into liquid-solid two-phase abrasive Flow by the utility model using gas-liquid-solid mixing arrangement, is added the probability that workpiece surface bubble is crumbled and fall, is provided polishing efficiency；Gas access is mixed into air using micropore, that is, smaller pore, convenient for controlling the mixed volume of gases at high pressure, improves the stability of processing；The structure cavitation of liquid in itself is realized using the smaller runner design of entrance larger outlet, improves processing efficiency；The secondary cavitation of liquid is realized by the design of fillet on cavitation polishing tool, improves processing efficiency.
Description
Technical field
The utility model is related to Ultraprecise polished instrument, more specifically, more particularly to a kind of gas based on cavitation effect
Liquid consolidates three-phase abrasive Flow polishing tool.
Background technology
With the development of electronic information technology, accurate and ultraprecise optics and semiconductor components and devices are more and more made
With.Realize that efficient Ultra-smooth machining becomes more and more important in the surface of optical material and semi-conducting material.
Liquor finish is as emerging polishing mode, due to not generating no subsurface stratum damage and rough surface in process
The features such as low is spent, is gradually applied in optical material and semi-conducting material processing, however low born of liquor finish efficiency lacks
Fall into the actual use for significantly limiting liquor finish so that liquor finish technology is difficult to promote on a large scale in actual production.
In addition existing liquor finish technology needs that speed is fast, and flow is big mostly, and the high fluid of pressure is polished operation, this but also
Liquor finish generally has process equipment higher requirement, so as to cause fluid polishing high processing costs.
Gas is introduced in fluid processing, the microjet driving abrasive particle shock workpieces processing for generation of being crumbled and fall using bubble, from
And the efficiency for improving fluid processing is a kind of trend of fluid polishing.Such as the China of Application No. CN201510056821.1 is real
A kind of super-smooth surface precision fluid disk burnishing device based on three-phase abrasive Flow is proposed with new patent, is led in inlet
Enter microbubble, processing efficiency is improved using crumbling and fall for microbubble, however by way of this method only injects bubble outside, it generates
Cavitation be pseudo- cavitation, the microjet energy of generation, can not much smaller than the microjet energy that structure cavitation or ultrasonic cavitation generate
Substantive raising processing efficiency；This method is passed through abrasive Flow using three entrances simultaneously, can not circumferentially reach equably
Removal.The Chinese utility model patent of Application No. CN201610914661.4 proposes a kind of based on structure cavitation effect for another example
The high efficiency fluid polishing processing method and device answered generate structure cavitation to improve processing efficiency, so using venturi tube structure
And it sets the method for multiple Venturi tube cavitation units to still remain the non-uniform problem of circumferencial direction removal rate in circumference；Specially
Sharp CN201510056123.1 proposes a kind of ultrasonic polishing processing unit (plant) using gas-liquid-solid three-phase abrasive Flow, is produced using ultrasound
Raw cavitation raising processing efficiency, however the expensive high energy consumption of ultrasonic generator, also increase while increasing efficiency and are processed into
This.
Utility model content
The purpose of this utility model is that solve it is above-mentioned in the prior art the defects of, it is proposed that it is a kind of based on cavitation effect
Gas-liquid-solid three-phase abrasive Flow polishing tool on the basis of processing cost is not increased, changes polishing tool structure so as to improve existing
There is three-phase abrasive Flow Machining efficiency low and polish the non-uniform problem of removal amount.
The utility model is achieved through the following technical solutions above-mentioned purpose：A kind of gas-liquid-solid three-phase based on cavitation effect
Abrasive Flow polishing tool including gas-liquid-solid mixing arrangement, further includes cavitation polishing tool and workpiece fixed platform, it is necessary to processing
Workpiece is mounted in workpiece fixed platform；The cavitation polishing tool is placed in above workpiece and the bottom surface of cavitation polishing tool
It is parallel with the upper surface of workpiece, gas-liquid-solid mixing arrangement connection cavitation polishing tool and by mixed gas-liquid-solid three-phase abrasive Flow
It is passed through in cavitation polishing tool；The cavitation polishing tool includes outer obligatory point and interior obligatory point, is set on the outer obligatory point
There are flow channel entry point, inner flow passage, screwed hole of centre and an inner conical runner containment surfaces, flow channel entry point and gas-liquid-solid on outer obligatory point
Gas-liquid-solid three-phase abrasive particle outflux on mixing arrangement is connected, and center bolt, male-tapered stream are provided on the interior obligatory point
Road containment surfaces, the outer obligatory point and interior obligatory point pass through the center spiral shell on the screwed hole of centre on outer obligatory point and interior obligatory point
Bar is connected, and the inner conical runner containment surfaces of the outer obligatory point are collectively formed with the male-tapered runner containment surfaces of interior obligatory point
Toroidal confinement runner, the toroidal confinement runner are communicated by the inner flow passage on outer obligatory point with the flow channel entry point of outer obligatory point.
Further, liquid-solid two phase abrasive particle inflow entrance, gas access and gas-liquid are provided on the gas-liquid-solid mixing arrangement
Gu three-phase abrasive particle outflux, gas-liquid-solid mixing arrangement is connected through a screw thread with cavitation polishing tool and realizes gas-liquid-solid upon connection
Three-phase abrasive particle outflux is connected with the flow channel entry point of cavitation polishing tool.
Further, liquid-solid two phase abrasive particle inflow entrance, gas access and the gas-liquid-solid three-phase of the gas-liquid-solid mixing arrangement
Abrasive particle outflux interconnects, and the gentle liquid of liquid-solid two phase abrasive particle inflow entrance consolidates three-phase abrasive particle outflux in a straight line, gas
Entrance consolidates the flow direction arrangement of liquid in three-phase abrasive particle outflux perpendicular to the gentle liquid of liquid-solid two phase abrasive particle inflow entrance, and gas enters
Mouth and the gentle liquid of liquid-solid two phase abrasive particle inflow entrance pass through microporous connectivity between consolidating three-phase abrasive particle outflux.
Further, the toroidal confinement runner that the outer obligatory point of the cavitation polishing tool and interior obligatory point are formed is close to stream
The runner gap of road inlet is larger, smaller close to the runner gap in bottom surface exit.
Further, it is fillet between the external cylindrical surface of the outer obligatory point of the cavitation polishing tool and lower surface.
Further, the workpiece fixed platform includes upper mounting plate, lower platform, sealing ring and screw, the upper mounting plate
Upper surface is provided with workpiece fixed groove, and the lower surface of upper mounting plate is provided with cavity, and workpiece fixed groove is with cavity by there is rule
The aperture connection of rule arrangement, the centrally disposed through hole of lower platform, upper mounting plate are connected by screw with lower platform, and upper mounting plate is under
The joint face of platform places sealing ring.
Further, the cavitation polishing tool bottom surface is plane or fixed curvature surface.
Further, the aperture of the micropore is between 0.1~0.2mm.
The beneficial effects of the utility model are：
1st, gas is mixed into liquid-solid two phase abrasive Flow by the utility model using gas-liquid-solid mixing arrangement, adds workpiece table
The probability that face bubble is crumbled and fall, provides polishing efficiency.
2nd, the gas access of the utility model is mixed into air using micropore, that is, smaller pore, convenient for control gases at high pressure
Mixed volume improves the stability of processing.
3rd, the utility model realizes the structure cavitation of liquid in itself using the smaller runner design of entrance larger outlet, carries
High processing efficiency.
4th, the utility model realizes the secondary cavitation of liquid by the design of fillet on cavitation polishing tool, improves processing effect
Rate.
5th, the utility model is mixed by multiple cavitation and extraneous air makes polishing tool can be under relatively low inlet flow rate
Work, so as to reduce the expense of corollary equipment, and processing efficiency is still protected.
6th, the utility model is equably contacted the abrasive Flow of single entrance using the structure of runner with workpieces processing, it is ensured that
The uniformity of rapidoprint removal improves the uniformity on workpieces processing surface.
7th, the utility model can be by changing the bottom surface shape of cavitation polishing tool, it can be achieved that plane or determining curvature
The processing of curved surface instrument.
Description of the drawings
Fig. 1 is that a kind of cross-section structure of the gas-liquid-solid three-phase abrasive Flow polishing tool based on cavitation effect of the utility model shows
It is intended to.
Fig. 2 is that a kind of three-dimensional structure of the gas-liquid-solid three-phase abrasive Flow polishing tool based on cavitation effect of the utility model is shown
It is intended to.
Fig. 3 is the top view of the utility model cavitation polishing tool.
Fig. 4 is the three dimensional structure diagram of the utility model workpiece fixed platform.
Fig. 5 is two cavitation polishing tool diagrammatic cross-section of the utility model embodiment.
In figure, 1- gas-liquid-solids mixing arrangement, 11- liquid-solid two phase abrasive particles inflow entrance, 12- gas accesses, 13- gas-liquid-solid three-phases
Abrasive particle outflux, 14- micropores, 2- cavitations polishing tool, 21- outer obligatory point, 211- flow channel entry points, 212- inner flow passages, 213-
Screwed hole of centre, 214- inner conical runners containment surfaces, obligatory point, 221- center bolts, the constraint of 222- male-tapereds runner in 22-
Face, 23- toroidal confinements runner, 3- workpiece fixed platform, 31- upper mounting plates, 32- lower platforms, 33- sealing rings, 34- screws, 4- works
Part.
Specific embodiment
The utility model is described in further detail below in conjunction with the accompanying drawings：
Embodiment one：
As shown in Figure 1, Figure 2, Figure 3 and Figure 4, a kind of gas-liquid-solid three-phase abrasive Flow polishing tool based on cavitation effect, bag
Gas-liquid-solid mixing arrangement 1 is included, further includes cavitation polishing tool 2 and workpiece fixed platform 3, it is necessary to which the workpiece 4 of processing is mounted on work
In part fixed platform 3；2 bottom surface of cavitation polishing tool is plane, and the cavitation polishing tool 2 is placed in 4 top of workpiece and sky
It is parallel with the upper surface of workpiece 4 to change the bottom surface of polishing tool 2, gas-liquid-solid mixing arrangement 1 connects cavitation polishing tool 2 and will be mixed
Gas-liquid-solid three-phase abrasive Flow after conjunction is passed through in cavitation polishing tool 2.
The cavitation polishing tool 2 includes outer obligatory point 21 and interior obligatory point 22, and stream is provided on the outer obligatory point 21
Road entrance 211, inner flow passage 212, screwed hole of centre 213 and inner conical runner containment surfaces 214, inner conical runner containment surfaces 214
For outer 21 bottom surface of obligatory point, concave face, outer 21 upper end of obligatory point are provided with what is be connected with gas-liquid-solid mixing arrangement 1 upwards
Mounting groove, and internal thread is provided on the inside of mounting groove, inner flow passage 212 is arranged on the bottom of mounting groove, center screw thread
Hole 213 is arranged on the middle part of inner flow passage 212, and inner flow passage 212 is distributed around entire screwed hole of centre 213；Outer obligatory point 21
On flow channel entry point 211 be connected with the gas-liquid-solid three-phase abrasive particle outflux 13 on gas-liquid-solid mixing arrangement 1.
Center bolt 221, male-tapered runner containment surfaces 222 are provided on the interior obligatory point 22, interior obligatory point 22 is whole
In cone, and the height phase of the height of male-tapered runner containment surfaces 222 and inner conical runner containment surfaces 214 on outer obligatory point 21
Upper end Deng, interior obligatory point 22 is provided with center bolt 221, the size of center bolt 221 and center screw thread on outer obligatory point 21
The matching size in hole 213 closes, and outer obligatory point 21 and interior obligatory point 22 pass through the screwed hole of centre 213 and Nei Yue on outer obligatory point 21
Center bolt 221 on beam body 22 is connected, inner conical runner containment surfaces 214 and the interior obligatory point 22 of the outer obligatory point 21
Male-tapered runner containment surfaces 222 toroidal confinement runner 23 is collectively formed, which passes through on outer obligatory point 21
Inner flow passage 212 communicated with the flow channel entry point 211 of outer obligatory point 21.
Liquid-solid two phase abrasive particle inflow entrance 11, gas access 12 and gas-liquid-solid three are provided on the gas-liquid-solid mixing arrangement 1
Phase abrasive particle outflux 13, gas-liquid-solid mixing arrangement 1 are connected through a screw thread with cavitation polishing tool 2 and realize gas-liquid-solid upon connection
Three-phase abrasive particle outflux 13 is connected with the flow channel entry point 211 of cavitation polishing tool 2.The liquid of the gas-liquid-solid mixing arrangement 1 is consolidated
Two-phase abrasive particle inflow entrance 11, gas access 12 and gas-liquid-solid three-phase abrasive particle outflux 13 interconnect, and liquid-solid two phase abrasive particle flows into
Mouth 11 and gas-liquid-solid three-phase abrasive particle outflux 13 are in a straight line, and gas access 12 is perpendicular to liquid-solid two phase abrasive particle inflow entrance 11
With the flow direction arrangement of liquid in gas-liquid-solid three-phase abrasive particle outflux 13, gas access 12 and liquid-solid two phase abrasive particle inflow entrance 11
It is connected between gas-liquid-solid three-phase abrasive particle outflux 13 by micropore 14.The optimum aperture of the micropore 14 0.1~0.2mm it
Between, experiment proves that finding that better polishing effect can be obtained under the size.
The toroidal confinement runner 23 that the outer obligatory point 21 and interior obligatory point 22 of the cavitation polishing tool 2 are formed is close to runner
Runner gap at entrance 211 is larger, smaller close to the runner gap in bottom surface exit.
It is fillet between the external cylindrical surface of the outer obligatory point 21 of the cavitation polishing tool 2 and lower surface.Gas-liquid-solid three-phase
Pressure reduces suddenly when abrasive Flow passes through the fillet makes gas-liquid-solid three-phase abrasive Flow generate second of cavitation effect.
The workpiece fixed platform 3 includes upper mounting plate 31, lower platform 32, sealing ring 33 and screw 34, the upper mounting plate 31
Upper surface be provided with workpiece fixed groove, the lower surface of upper mounting plate 31 is provided with cavity, and workpiece fixed groove passes through with cavity
The aperture connection of regular arrangement, the 32 centrally disposed through hole of lower platform, upper mounting plate 31 are connected with lower platform 32 by screw 34
It connects, upper mounting plate 31 and the joint face of lower platform 32 place sealing ring 33.
The utility model is mixed with the liquid-solid two phase abrasive Flow of abrasive particle from gas-liquid-solid mixing arrangement 1 when being polished work
Liquid-solid two phase abrasive particle inflow entrance 11 enter, gases at high pressure enter from the gas access of gas-liquid-solid mixing arrangement 1 12, gas and liquid
Gu gas-liquid-solid three-phase abrasive Flow is formed after the mixing of two-phase abrasive Flow passes sequentially through the flow channel entry point 211 of cavitation polishing tool 2, inside
The upper surface of bottom surface and workpiece 4 after runner 212 and toroidal confinement runner 23 from cavitation polishing tool 2 is flowed out, gas-liquid-solid three
Phase abrasive Flow is realizing first time cavitation after descending toroidal confinement runner 23, goes to the bottom from cavitation polishing tool 2
Second of cavitation is realized by fillet, crumbled and fall using the bubble of the gas being passed through and structure cavitation generation twice when surface current goes out
Hit the highly-efficient processing that abrasive particle realizes workpiece surface.
Embodiment two：
The present embodiment and the scheme of embodiment one are essentially identical, need the upper surface processed difference lies in workpiece 4 to fix
The curved surface of curvature, and the lower surface of interior obligatory point 22 is to fix curvature surface on cavitation polishing tool 2, on cavitation polishing tool 2
Lower surface any point of interior obligatory point 22 with the beeline of the upper surface of workpiece 4 be it is equal, i.e., the upper surface of workpiece 4 with
The lower surface of interior obligatory point 22 is parallel in cavitation polishing tool 2.
Above-described embodiment is the preferred embodiment of the utility model, is not the limit to technical solutions of the utility model
System, as long as without the technical solution that creative work can be realized on the basis of above-described embodiment, is regarded as falling into
In the rights protection scope of the utility model patent.
Claims (8)
1. a kind of gas-liquid-solid three-phase abrasive Flow polishing tool based on cavitation effect, including gas-liquid-solid mixing arrangement (1), feature
It is：Cavitation polishing tool (2) and workpiece fixed platform (3) are further included, it is necessary to which the workpiece (4) of processing is fixed mounted on workpiece and put down
On platform (3)；The cavitation polishing tool (2) is placed in above workpiece (4) and the bottom surface and workpiece of cavitation polishing tool (2)
(4) upper surface is parallel, and gas-liquid-solid mixing arrangement (1) connection cavitation polishing tool (2) simultaneously grinds mixed gas-liquid-solid three-phase
Grain circulates in cavitation polishing tool (2)；The cavitation polishing tool (2) includes outer obligatory point (21) and interior obligatory point (22),
Flow channel entry point (211), inner flow passage (212), screwed hole of centre (213) and inner conical stream are provided on the outer obligatory point (21)
Road containment surfaces (214), the flow channel entry point (211) on outer obligatory point (21) and the gas-liquid-solid three-phase on gas-liquid-solid mixing arrangement (1)
Abrasive particle outflux (13) is connected, and center bolt (221), male-tapered runner containment surfaces are provided on the interior obligatory point (22)
(222), the outer obligatory point (21) and interior obligatory point (22) by the screwed hole of centre (213) on outer obligatory point (21) and it is interior about
Center bolt (221) on beam body (22) is connected, the inner conical runner containment surfaces (214) of the outer obligatory point (21) with it is interior
Toroidal confinement runner (23) is collectively formed in the male-tapered runner containment surfaces (222) of obligatory point (22), the toroidal confinement runner (23)
It is communicated by the inner flow passage (212) on outer obligatory point (21) with the flow channel entry point (211) of outer obligatory point (21).
2. a kind of gas-liquid-solid three-phase abrasive Flow polishing tool based on cavitation effect according to claim 1, feature exist
In：Liquid-solid two phase abrasive particle inflow entrance (11), gas access (12) and gas-liquid-solid three are provided on the gas-liquid-solid mixing arrangement (1)
Phase abrasive particle outflux (13), gas-liquid-solid mixing arrangement (1) are connected through a screw thread with cavitation polishing tool (2) and realize upon connection
Gas-liquid-solid three-phase abrasive particle outflux (13) is connected with flow channel entry point (211) of cavitation polishing tool (2).
3. a kind of gas-liquid-solid three-phase abrasive Flow polishing tool based on cavitation effect according to claim 2, feature exist
In：Liquid-solid two phase abrasive particle inflow entrance (11), gas access (12) and the gas-liquid-solid three-phase abrasive particle of the gas-liquid-solid mixing arrangement (1)
Outflux (13) interconnects, and liquid-solid two phase abrasive particle inflow entrance (11) and gas-liquid-solid three-phase abrasive particle outflux (13) are in a straight line cloth
It puts, gas access (12) are perpendicular to liquid-solid two phase abrasive particle inflow entrance (11) and gas-liquid-solid three-phase abrasive particle outflux (13) interior liquid
Flow direction arranges, gas access (12) and liquid-solid two phase abrasive particle inflow entrance (11) and gas-liquid-solid three-phase abrasive particle outflux (13) it
Between pass through micropore (14) connect.
4. a kind of gas-liquid-solid three-phase abrasive Flow polishing tool based on cavitation effect according to claim 3, feature exist
In：The toroidal confinement runner (23) that the outer obligatory point (21) and interior obligatory point (22) of the cavitation polishing tool (2) are formed is close
Runner gap at flow channel entry point (211) is larger, smaller close to the runner gap in bottom surface exit.
5. a kind of gas-liquid-solid three-phase abrasive Flow polishing tool based on cavitation effect according to claim 4, feature exist
In：It is fillet between the external cylindrical surface of the outer obligatory point (21) of the cavitation polishing tool (2) and lower surface.
6. a kind of gas-liquid-solid three-phase abrasive Flow polishing tool based on cavitation effect according to claim 5, feature exist
In：The workpiece fixed platform (3) includes upper mounting plate (31), lower platform (32), sealing ring (33) and screw (34), described flat
The upper surface of platform (31) is provided with workpiece fixed groove, and the lower surface of upper mounting plate (31) is provided with cavity, workpiece fixed groove with
Cavity is connected by the aperture of regular arrangement, the centrally disposed through hole of the lower platform (32), upper mounting plate (31) and lower platform
(32) connected by screw (34), upper mounting plate (31) and the joint face of lower platform (32) place sealing ring (33).
7. a kind of gas-liquid-solid three-phase abrasive Flow polishing tool based on cavitation effect according to claim 6, feature exist
In：Cavitation polishing tool (2) bottom surface is plane or fixed curvature surface.
8. a kind of gas-liquid-solid three-phase abrasive Flow polishing tool based on cavitation effect according to claim 7, feature exist
In：The aperture of the micropore (14) is between 0.1~0.2mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721354037.XU CN207387327U (en) | 2017-10-19 | 2017-10-19 | A kind of gas-liquid-solid three-phase abrasive Flow polishing tool based on cavitation effect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721354037.XU CN207387327U (en) | 2017-10-19 | 2017-10-19 | A kind of gas-liquid-solid three-phase abrasive Flow polishing tool based on cavitation effect |
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| CN207387327U true CN207387327U (en) | 2018-05-22 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110605653A (en) * | 2019-10-16 | 2019-12-24 | 浙江工业大学 | Through hole polishing device and method for polishing through hole by using negative pressure |
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2017
- 2017-10-19 CN CN201721354037.XU patent/CN207387327U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110605653A (en) * | 2019-10-16 | 2019-12-24 | 浙江工业大学 | Through hole polishing device and method for polishing through hole by using negative pressure |
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Granted publication date: 20180522 Termination date: 20201019 |