CN207376115U - A kind of PECVD device with adjustable electrode - Google Patents
A kind of PECVD device with adjustable electrode Download PDFInfo
- Publication number
- CN207376115U CN207376115U CN201721349871.XU CN201721349871U CN207376115U CN 207376115 U CN207376115 U CN 207376115U CN 201721349871 U CN201721349871 U CN 201721349871U CN 207376115 U CN207376115 U CN 207376115U
- Authority
- CN
- China
- Prior art keywords
- electrode plate
- plated film
- insulation strip
- cathode electrode
- insulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
The utility model discloses a kind of PECVD devices with adjustable electrode,PECVD device has the plated film cavity of rectangle,Two upright side walls of left and right of plated film cavity are separately installed with left insulation strip array and right insulation strip array,Left insulation strip array and right insulation strip array include multiple strip insulation strips set at equal intervals up and down,Side of the strip insulation strip away from upright side walls is installed with the contact being connected with radio-frequency power supply,Further include the electrode module of multiple movable extractions,Each electrode module includes cathode electrode plate and the anode electrode plate being fixedly connected below cathode electrode plate,When electrode module is inserted into,The left and right side of cathode electrode plate contacts to form ground connection with two upright side walls of left and right of plated film cavity,The left and right side of anode electrode plate is connected by contact with radio-frequency power supply,Spacing between this electrode can carry out flexible modulation as needed,Meet the diversified process requirements of different size workpiece,It largely make use of plated film space,Nano material is greatly saved.
Description
Technical field
The utility model belongs to PECVD device field, more specifically, refers to a kind of PECVD with adjustable electrode
Equipment.
Background technology
PECVD (plasma enhanced chemical vapor deposition) generates active group film to be promoted to give birth to by plasma discharge
Into reaction, can significantly reduce CVD film preparation temperature, make some scripts need the CVD carried out at high temperature plate film reaction
It can carry out at a lower temperature.
Equipment used in PECVD includes electrode plate, and the electrode plate of PECVD device is generally fixed structure, electrode at present
Spacing between plate cannot be adjusted, when processing the product of different dimensions, it is impossible to plated film space is effectively utilized, for example (,) it is right
Some relatively thin products (such as circuit board) carry out nano water-proof processing, if the spacing between electrode is larger, a chamber can be swung in
Product it is less, the space wasted in vain, while waste liquid medicine (i.e. the raw material of nano thin-film)；To some larger rulers
When very little product (such as boots) carries out nano water-proof processing, the spacing between electrode seems too small again, and boots is difficult to place, therefore
For above deficiency, it is badly in need of being improved for the electrode of PECVD device.
Utility model content
The utility model is in order to overcome the deficiency of the prior art, it is proposed that a kind of PECVD device with adjustable electrode.
The utility model is to solve above-mentioned technical problem by following technical proposals.
A kind of PECVD device with adjustable electrode, the PECVD device have the plated film cavity of rectangle, and plated film is empty
The front opening and opening of chamber are hinged with an openable hermatic door, and two upright side walls of left and right of plated film cavity are fixed respectively to pacify
Equipped with left insulation strip array and right insulation strip array, the left insulation strip array and right insulation strip array include it is multiple it is it is inferior between
Every the strip insulation strip of setting, side of the strip insulation strip away from upright side walls is installed with what is be connected with radio-frequency power supply
Contact, multiple strip insulation strips of the left insulation strip array and multiple strip insulation strips of right insulation strip array are one by one just
To setting, the electrode module of multiple movable extractions is further included, each electrode module includes cathode electrode plate and is fixedly connected
It is left that width between anode electrode plate below cathode electrode plate, the cathode electrode plate or so side is more than anode electrode plate
Width between right edge, the cathode electrode plate are fixedly connected with anode electrode plate by insulator, when the electrode module
During insertion, the left and right side of cathode electrode plate contacts to form ground connection, anode electrode plate with two upright side walls of left and right of plated film cavity
Left and right side be connected by contact with radio-frequency power supply.
As a kind of improvement of the utility model, it is installed at the top of the plated film cavity of PECVD device and radio frequency electrical
The anode electrode plate of source connection, the bottom of plated film cavity is installed with cathode electrode plate.
As a kind of improvement of the utility model, the cathode electrode plate left and right sides of electrode module, which are equipped with, can bullet
The Metal Contact Rollers that property is stretched, the left and right sides of anode electrode plate are equipped with the Metal Contact Rollers for being capable of elastic telescopic.
The beneficial effects of the utility model are that the electrode module in the present apparatus arbitrarily can be extracted out and pushed away as needed
Enter into plated film cavity, since multiple strip insulation strips are set at equal intervals, when to slim workpiece (such as circuit board) product into
During row nano water-proof plated film, electrode module is inserted into the way of in Fig. 4, the spacing between electrode module is minimum, can maximize
Using plated film space, take full advantage of nano material (liquid medicine)；When carrying out nano-coating to larger product (such as shoes),
Electrode module can be inserted by Fig. 2 modes；Therefore the spacing between this electrode can carry out flexible modulation as needed, meet
The diversified process requirements of different size workpiece, largely make use of plated film space, nano material are greatly saved.
Description of the drawings
Fig. 1 is the dimensional structure diagram of the plated film cavity of PECVD filming equipments.
Fig. 2 is the front view of the plated film cavity of PECVD filming equipments.
Fig. 3 is one of structure diagram of insertion electrode module in plated film cavity.
Fig. 4 is the amplified structure diagram of part A in Fig. 3.
Fig. 5 is the second structural representation of insertion electrode module in plated film cavity.
Fig. 6 is the structure diagram of the electrode module of embodiment two.
Specific embodiment
The utility model preferred embodiment is provided below in conjunction with the accompanying drawings, the technical solution of the utility model is described in detail.
If Fig. 1 to Fig. 5 embodiments one is a kind of PECVD device with adjustable electrode, the PECVD device has square
The plated film cavity of shape, the front opening and opening of plated film cavity are hinged with an openable hermatic door (not shown),
The anode electrode plate 22 being connected with radio-frequency power supply (not shown) is installed at the top of the plated film cavity of PECVD device,
The bottom of plated film cavity is installed with cathode electrode plate 23, and two upright side walls 10 of left and right of plated film cavity are installed with respectively
Left insulation strip array and right insulation strip array, the left insulation strip array and right insulation strip array are set at equal intervals up and down including multiple
The strip insulation strip 21 put, side of the strip insulation strip 21 away from upright side walls are installed with radio-frequency power supply (in figure
Be not shown) connection contact 22, it is described it is left insulation strip array multiple strip insulation strips and it is right insulation strip array multiple length
Face is set bar shaped insulation strip one by one, further includes the electrode module 3 of multiple movable extractions, and each electrode module 3 includes cathode
Electrode plate 31 and the anode electrode plate 32 for being fixedly connected on 31 lower section of cathode electrode plate, 31 or so the side of cathode electrode plate
Width be more than the width of 32 or so side of anode electrode plate, the cathode electrode plate 31 and anode electrode plate 32 pass through insulator
33 are fixedly connected, when in the electrode module 3 insertion plated film sky film, left and right side and the plated film cavity of cathode electrode plate 31
Left and right two upright side walls 10 contact forms ground connection, and the left and right side of anode electrode plate 32 is connected by contact 22 with radio-frequency power supply.
Operation principle：The electrode module 3 arbitrarily can be extracted out and be pushed into plated film cavity as needed, due to more
A strip insulation strip 21 is set at equal intervals, when being inserted into electrode module 3 in the way of Fig. 4, between two neighboring electrode module 3
Spacing it is minimum, be relatively suitble to carry out nano-coating to slim workpiece (such as circuit board) product, when being inserted into electrode by Fig. 2 modes
During module 3, the spacing between two neighboring electrode module 3 is larger, relatively be suitble to have the product of certain altitude (such as shoes) into
Row nano-coating, therefore the spacing between electrode can carry out flexible modulation as needed, meet the more of processing various workpieces
Sample demand, while larger save nano material.
Such as Fig. 6, a kind of embodiment two with the PECVD device that electrode is adjusted, the cathode electrode plate 31 of electrode module 3
Left and right sides are equipped with the Metal Contact Rollers 34 for being capable of elastic telescopic, and the left and right sides of anode electrode plate 32 are equipped with being capable of bullet
Property the Metal Contact Rollers 34 that stretch, the spacing between 31 left and right sides Metal Contact Rollers 34 of cathode electrode plate is slightly larger than a left side for plated film cavity
Inside spacing between right two upright side walls 10, the spacing between 32 left and right sides Metal Contact Rollers 34 of anode electrode plate are slightly larger than two
Spacing between a opposite contact 22, so when electrode module is inserted into, the Metal Contact Rollers 34 of both sides can be squeezed, this to squeeze
Pressure condition makes the in electrical contact more reliable and more stable of electrode plate, while in extraction and push-on process, due to the rolling of Metal Contact Rollers
It is dynamic, reduce friction and resistance.
Although the foregoing describe specific embodiment of the present utility model, it will be appreciated by those of skill in the art that
These are merely examples, and the scope of protection of the utility model is defined by the appended claims.Those skilled in the art
Member can make these embodiments numerous variations or repair on the premise of the principle and essence without departing substantially from the utility model
Change, but these change and modification each fall within the scope of protection of the utility model.
Claims (3)
1. a kind of PECVD device with adjustable electrode, which is characterized in that the PECVD device has the plated film sky of rectangle
Chamber, the front end of plated film cavity is opening-like and opening is hinged with an openable hermatic door, and the left and right two of plated film cavity is vertical
Side wall is installed with left insulation strip array and right insulation strip array, the left insulation strip array and right insulation strip array bag respectively
Include multiple strip insulation strips set at equal intervals up and down, side of the strip insulation strip away from upright side walls be installed with
The contact of radio-frequency power supply connection, multiple strip insulation strips of the left insulation strip array and multiple strips of right insulation strip array
Face is set shape insulation strip one by one, further includes the electrode module of multiple movable extractions, and each electrode module includes cathode electrode
Width between plate and the anode electrode plate being fixedly connected below cathode electrode plate, the cathode electrode plate or so side is big
Width between anode electrode plate or so side, the cathode electrode plate are fixedly connected with anode electrode plate by insulator,
When the electrode module is inserted into, the left and right side of cathode electrode plate contacts to be formed and connect with two upright side walls of left and right of plated film cavity
Ground, the left and right side of anode electrode plate are connected by contact with radio-frequency power supply.
2. PECVD device according to claim 1, which is characterized in that peace is fixed at the top of the plated film cavity of PECVD device
Equipped with the anode electrode plate being connected with radio-frequency power supply, the bottom of plated film cavity is installed with cathode electrode plate.
3. PECVD device according to claim 2, which is characterized in that the cathode electrode plate left and right sides of electrode module
The Metal Contact Rollers for being capable of elastic telescopic are installed, the left and right sides of anode electrode plate are equipped with the metal rolling for being capable of elastic telescopic
Wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721349871.XU CN207376115U (en) | 2017-10-18 | 2017-10-18 | A kind of PECVD device with adjustable electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721349871.XU CN207376115U (en) | 2017-10-18 | 2017-10-18 | A kind of PECVD device with adjustable electrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207376115U true CN207376115U (en) | 2018-05-18 |
Family
ID=62339602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721349871.XU Active CN207376115U (en) | 2017-10-18 | 2017-10-18 | A kind of PECVD device with adjustable electrode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207376115U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110029328A (en) * | 2019-05-22 | 2019-07-19 | 上海稷以科技有限公司 | It is a kind of for improving the boxlike electrode of positive and negative planar depositions uniformity |
| CN110042348A (en) * | 2019-03-12 | 2019-07-23 | 深圳奥拦科技有限责任公司 | Plasma surface processing device and method |
| CN111218674A (en) * | 2020-03-09 | 2020-06-02 | 龙鳞(深圳)新材料科技有限公司 | PECVD radio frequency feed-in electrode system and PECVD device |
-
2017
- 2017-10-18 CN CN201721349871.XU patent/CN207376115U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110042348A (en) * | 2019-03-12 | 2019-07-23 | 深圳奥拦科技有限责任公司 | Plasma surface processing device and method |
| CN110029328A (en) * | 2019-05-22 | 2019-07-19 | 上海稷以科技有限公司 | It is a kind of for improving the boxlike electrode of positive and negative planar depositions uniformity |
| CN111218674A (en) * | 2020-03-09 | 2020-06-02 | 龙鳞(深圳)新材料科技有限公司 | PECVD radio frequency feed-in electrode system and PECVD device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207376115U (en) | A kind of PECVD device with adjustable electrode | |
| CN208378999U (en) | A kind of folding scaling electrode of PECVD device | |
| WO2014048561A3 (en) | Use of pedot/pss dispersions of high pedot content for the production of capacitors and solar cells | |
| MY156482A (en) | Grounding structures for header and receptacle assemblies | |
| CN105568257A (en) | Graphite boat with front and rear electrodes and chemical vapor deposition equipment | |
| CN106848134B (en) | Convenient and practical's power battery places case | |
| CN205900738U (en) | Battery dodges to change outfit to be put and battery thereof | |
| CN207615259U (en) | Adjustable washing copper strips drying equipment | |
| CN105555002A (en) | Dynamic parallel-plate plasma generator | |
| CN205491411U (en) | Developments parallel -plate plasma generator | |
| CN208767433U (en) | A kind of lithium ion battery disassembling apparatus | |
| CN207338493U (en) | A kind of lithium ion battery encapsulation device of leakproof | |
| KR20160001399A (en) | Tray for secondary battery electrode assembly | |
| CN207505197U (en) | A kind of cartridge-type plasma vacuum handles babinet | |
| CN206806351U (en) | A kind of device for solving crystalline silicon battery plate oxidation | |
| CN204905360U (en) | Utilize pressure -sensitive exoelectric lithium cell of liquid polymer | |
| CN204464401U (en) | A kind of electric contact pressure head be applied on Battery formation equipment | |
| CN109301341A (en) | A kind of forming and capacity dividing pin type device of lithium-ion-power cell | |
| CN203218406U (en) | Battery charger with high heat dissipation performance | |
| CN205428883U (en) | Thimble device and base plate vacuum processing equipment | |
| CN201895976U (en) | Water cooling-type conductive copper roller | |
| CN205872908U (en) | Aluminium electrolytic capacitor's packing discharge device | |
| CN204897802U (en) | A two -sided corona machine for insulating material | |
| CN207398784U (en) | A kind of bus protection set | |
| CN201063957Y (en) | Improved structure of air supply system in plasma processing apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |