CN207371253U - A kind of device for being used to filter air-borne dust microparticle - Google Patents

Abstract

The utility model discloses a kind of device for being used to filter air-borne dust microparticle, including babinet, several air admission holes are formed on the side wall of babinet, it is set in the babinet to the air filter into the in vivo air filtration of the case, the inner cavity of the air filter is defined as gas collection inner cavity, and the gas collection inner cavity is used to store clean gas;The top of the babinet sets out feed channel, and the outlet pipe upper end sets valve body, the import of the valve body with the outlet pipe is airtight docks;A gas-guide tube is set in the outlet pipe, the gas-guide tube movable can stretch into/stretch out the gas collection inner cavity and the clean gas of intracavitary in gas collection is sent into outlet pipe and the valve body;The one side of the valve body horizontal direction sets charge valve, opposite side then by pipeline with the air inlet pipe of the vacuum chamber of vacuum coating equipment is airtight docks, the charge valve can control the valve body to be Turned on/off, and make feeding and/or be placed in the in vivo clean gas of the valve to enter in vacuum chamber along the air inlet pipe of pipeline and vacuum chamber.

Description

A kind of device for being used to filter air-borne dust microparticle

Technical field

The utility model is related to technical field of air purification, more particularly to a kind of dress for being used to filter air-borne dust microparticle It puts.

Background technology

Industrially when vacuum coating equipment carries out vacuum coating, it is often necessary to ensure the clean of its vacuum chamber, avoid because true The pollution of empty room and cause vacuum coating product fail.And it is existing in, vacuum chamber is often to be connected with vacuum pump, passes through vacuum Pump compressed gas simultaneously and is passed into the plated film processing that vacuum coating equipment is matched in vacuum chamber.And it is existing in, to passing through vacuum pump Air is sent into the vacuum chamber processing mode of vacuum coating equipment generally:First, air is passed directly by vacuum by vacuum pump Room, and use and air is directly passed through vacuum chamber, the dust included in air, little particle then can directly form vacuum chamber dirty Dye, and then influence the quality of vacuum coating product;Second is that by integrated filter device to be passed through in vacuum chamber carry out it is preposition Filtering, but the input of production cost and the input of maintenance cost can be increased using integrated filter device, while using integrated For the filter device centering of change, small size vacuum plated film enterprise, introduce integrated filter device be it is unacceptable, therefore, For medium and small vacuum coating enterprise, how to ensure the cleaning of vacuum chamber is to restrict its vacuum coating product for a long time The deciding factor of quality.

Therefore, there is an urgent need for a kind of low manufacture costs, easy to use and can filter dust in air microparticle in the prior art Device, so as to avoid because influencing vacuum coating product quality during vacuum chamber contamination.

Utility model content

The technical problems to be solved in the utility model is for defect present in existing design technology, provides one kind and is used for The device of air-borne dust microparticle is filtered, the device cost of manufacture bottom is small, and can be to being sent into vacuum chamber using the device Gas carries out dust microparticle filtering, ensures vacuum coating product quality.

To solve above-mentioned technical problem, the technical solution that the utility model is taken is as follows:One kind is used to filter air-borne dust The device of microparticle including babinet, is formed with several air admission holes, is additionally provided in the babinet to entering on the side wall of the babinet State the air filter of the in vivo air filtration of case, the inner cavity of the air filter is defined as gas collection inner cavity, in the gas collection Chamber is used to store clean gas;The top of the babinet sets out feed channel, and a valve body, the valve are installed in the outlet pipe upper end The import of body with the outlet pipe is airtight docks;A gas-guide tube, the gas-guide tube energy are installed in also activity in the outlet pipe Activity is stretched into/is stretched out the gas collection inner cavity and the clean gas of intracavitary in gas collection is sent into outlet pipe and the valve body;It is described The one side of valve body horizontal direction sets charge valve, and air inlet pipe of the opposite side then by pipeline and the vacuum chamber of vacuum coating equipment is airtight right It connects, the charge valve can control the valve body to be Turned on/off, and make feeding and/or be placed in the in vivo clean gas of the valve along pipe The air inlet pipe of road and vacuum chamber enters in vacuum chamber.

It is expanded on further as to above-mentioned technical proposal：

In the above-mentioned technical solutions, the air filter is barrel-type efficient dust filter unit.

In the above-mentioned technical solutions, the valve body is dome valve.

In the above-mentioned technical solutions, the import of the outlet pipe and the valve body, the valve body and the charge valve and The valve body is docked with the admission line of vacuum chamber by flange fitted seal circle and airtight.

In the above-mentioned technical solutions, the charge valve is electromagnetic vacuum belt gas-charging valve.

The beneficial effects of the utility model are:The device of the utility model be by setting dust filter unit in babinet, make into The air for entering babinet is filtered off chalk dust removing microparticle and forms clean gas, is coordinating charge valve control by gas-guide tube and valve body The on/off of valve body processed and deliver purge gas to vacuum chamber, so as to ensure the cleaning of vacuum chamber and ensure vacuum coating production The quality of product;Meanwhile the device cost of manufacture bottom of the utility model, small, easy to use and maintenance cost is low, is existed using the device Production equipment cost input can be saved again while the quality for improving vacuum coating product.

Description of the drawings

Fig. 1 is the structure diagram of the utility model；

Fig. 2 is that schematic diagram is moved towards in the air-flow flowing of the utility model.

In figure, 001. gas channel, 1. babinets, 2. air filters, 3. outlet pipes, 4. valve bodies, 5. flanges, 6. air guides Pipe, 7. charge valves, 8. pipelines, 9. air inlet pipe, 101. air admission holes.

Specific embodiment

The utility model is described in further detail below in conjunction with the accompanying drawings.

The embodiment described by reference to attached drawing is exemplary, it is intended to for explaining the application, and it is not intended that right The limitation of the application.In the description of the present application, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", " on ", " under ", "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outer ", The orientation or position relationship of the instructions such as " clockwise ", " counterclockwise " be based on orientation shown in the drawings or position relationship, be only for It is described convenient for description the application and simplifying, rather than instruction or implies that signified device or element must have specific side Position, with specific azimuth configuration and operation, therefore it is not intended that limitation to the application.In addition, term " first ", " second " Description purpose is only used for, and it is not intended that indicating or implying relative importance or imply the technical characteristic indicated by indicating Quantity.Thus, " first " is defined, the feature of " second " can be expressed or implicitly includes one or more spy Sign.In the description of the present application, " several ", " multiple " are meant that two or more, unless otherwise clearly specific It limits.Unless otherwise clearly defined and limited, in this application, the arts such as term " installation ", " connected ", " connection ", " fixation " Language should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected or be integrally connected;Can be machinery Connection can also be electrical connection;It can be directly connected, can also be indirectly connected by intermediary, can be two elements Internal connection.For the ordinary skill in the art, above-mentioned term can be understood in the application as the case may be In concrete meaning.Unless otherwise clearly defined and limited, in this application, fisrt feature second feature it " on " or it " under " can be contacted directly including the first and second features, it is not to contact directly but lead to that can also include the first and second features Cross the other characterisation contact between them.And fisrt feature second feature " on ", " top " and " above " include the One feature is directly over second feature and oblique upper, or is merely representative of fisrt feature level height higher than second feature.First is special Sign second feature " under ", " lower section " and " below " including fisrt feature directly over second feature and oblique upper, or only Represent that fisrt feature level height is less than second feature.

A kind of 1 example of attached drawing specific embodiment of the utility model.The present embodiment, which is that desired design is a kind of, to be used to filter The device of air-borne dust microparticle, in the air inlet pipe by the vacuum chamber that the device is mounted on to vacuum coating equipment, by will be by Vacuum pump is sent into the air filtration microparticle out of dust of vacuum chamber in advance, so as to ensure vacuum chamber cleaning so as to ensure vacuum coating produce Quality.Refer to the attached drawing 1, a kind of for filtering the device of air-borne dust microparticle, it includes babinet 1, the side wall of the babinet 1 On be formed with several air admission holes 101, the air admission hole 101 connects external environment or is connected by tracheae (attached drawing is not shown) and vacuum pump It connects, the babinet 1 is square box, opens air admission hole 101 processed in at least one side wall of the babinet 1, the air admission hole 101 is outer Portion's gas enters the passage of babinet 1, is additionally provided in the babinet 1 and the air entered along air admission hole in the babinet 1 was carried out The air filter 2 of filter, in the present embodiment, the air filter 2 are barrel-type efficient dust filter unit, in practice, described Air filter 2 can also be is covered with 1 madial wall of babinet by what polylith board-like high efficiency dust filter was sequentially connected composition Knockdown filter assemblies, the inner cavity of the air filter 2 are defined as gas collection inner cavity (attached drawing is not shown), the gas collection inner cavity For storing clean gas, that is, gumming is filtered off after flowing through air filter into air along babinet 1 along air admission hole 101 Then become clean gas when dirt microparticle and entrance gas collection inner cavity;The top of the babinet 1 sets out feed channel 3, the outlet pipe 3 Inner cavity of pipe is formed with, and is connected with 1 inner cavity of babinet, a valve body 4 is installed in 3 upper end of outlet pipe, and the import of the valve body 4 is led to Cross 5 fitted seal circle of flange（Attached drawing is not shown, often selects O-ring seal）With the outlet pipe 3 is airtight docks;The outlet Also a gas-guide tube 6 is installed in activity in the inner cavity of pipe of pipeline 3, and 6 one end of gas-guide tube energy activity is stretched into/stretched out in the gas collection Chamber, the other end connects the inner cavity of pipe of the outlet pipe 3, and then can the clean gas of intracavitary in gas collection be sent into outlet pipe 3 and the valve body 4;The valve body 4 is dome valve, and dome valve has three ports, wherein the first port corresponds to the valve body 4 Import, another two port is located on same level direction, namely on the horizontal direction of vertical first port, and two port is wherein One of be tightly connected by 5 fitted seal circle of flange with a charge valve 7, another port is also by pipeline 8, flange 5 and sealing ring With the air inlet pipe 9 of the vacuum chamber of vacuum coating equipment is airtight docks, the charge valve 7 is electromagnetic vacuum belt gas-charging valve, and described is filled Air valve 7 can control the valve body 4 to be Turned on/off, and make feeding and/or the clean gas being placed in the valve body 4 along pipeline 8 and true The air inlet pipe 9 of empty room enters in vacuum chamber;Refer to the attached drawing 2, by being Turned on/off for the application valve body 4 of charge valve 7, so as to control System turns on by the gas channel 001 that the air inlet pipe 9 of babinet 1, integrated inner cavity, gas-guide tube 6, valve body 4, pipeline 8 and vacuum chamber is formed/ Cut-off, so as to which the clean gas along 002 runner of gas channel be controlled to enter vacuum chamber by injection/blocking.

The device of the present embodiment is by setting dust filter unit in babinet, the air into babinet being made to be filtered off gumming Dirt microparticle and form clean gas, coordinated by gas-guide tube 6 and valve body 4 on/off of 7 application valve body 4 of charge valve and Vacuum chamber is delivered purge gas to, so as to ensure the cleaning of vacuum chamber and ensure the quality of vacuum coating product, and the present embodiment Device cost of manufacture bottom, small, easy to use and maintenance cost is low, using the device improve vacuum coating product matter Production equipment cost input can be saved while amount again.

The above is only the utility model preferred embodiment, and not the utility model is made in any form Limitation, although the utility model is disclosed above with preferred embodiment, is not limited to the utility model, any to be familiar with sheet Technical professional is not being departed from the range of technical solutions of the utility model, is made when using the technology contents of the disclosure above A little change or the equivalent embodiment for being modified to equivalent variations, as long as being without departing from the content of the technical scheme of the utility model, foundation The utility model technology refers to any simple modification, equivalent change and modification made to above example, belongs to this practicality In the range of new technique scheme.

Claims (5)

1. a kind of device for being used to filter air-borne dust microparticle, it is characterised in that, including babinet, made on the side wall of the babinet There are several air admission holes, be additionally provided in the babinet to the air filter into the in vivo air filtration of the case, the air The inner cavity of filter is defined as gas collection inner cavity, and the gas collection inner cavity is used to store clean gas;The top of the babinet sets out gas A valve body is installed in pipeline, the outlet pipe upper end, the import of the valve body with the outlet pipe is airtight docks;The outlet A gas-guide tube is installed in also activity in pipeline, and the gas-guide tube energy activity is stretched into/stretched out the gas collection inner cavity and by intracavitary in gas collection Clean gas be sent into outlet pipe and the valve body;The one side of the valve body horizontal direction sets charge valve, and opposite side then passes through Pipeline with the air inlet pipe of the vacuum chamber of vacuum coating equipment is airtight docks, the charge valve can control the valve body to be Turned on/off, and make The in vivo clean gas of the valve is sent into and/or is placed in along the air inlet pipe of pipeline and vacuum chamber to enter in vacuum chamber.

2. a kind of device for being used to filter air-borne dust microparticle according to claim 1, it is characterised in that:The air Filter is barrel-type efficient dust filter unit.

3. a kind of device for being used to filter air-borne dust microparticle according to claim 1, it is characterised in that:The valve body For dome valve.

4. a kind of device for being used to filter air-borne dust microparticle according to claim 1, it is characterised in that:The outlet Import, the valve body and the charge valve and the admission line of the valve body and vacuum chamber of pipeline and the valve body pass through method Blue fitted seal circle and airtight docking.

5. a kind of for filtering the device of air-borne dust microparticle according to claim 1-4 any one, feature exists In:The charge valve is electromagnetic vacuum belt gas-charging valve.