CN207356910U - A kind of wet exhaust processing unit - Google Patents
A kind of wet exhaust processing unit Download PDFInfo
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- CN207356910U CN207356910U CN201721255751.3U CN201721255751U CN207356910U CN 207356910 U CN207356910 U CN 207356910U CN 201721255751 U CN201721255751 U CN 201721255751U CN 207356910 U CN207356910 U CN 207356910U
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- water
- settling tank
- babinet
- gas
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- Gas Separation By Absorption (AREA)
Abstract
It the utility model is related to a kind of wet exhaust processing unit, including babinet, babinet top is respectively arranged on the left side and the right side technology waste gas import, gas discharge outlet, in babinet spray port is disposed with below technology waste gas import, dust watershed partition, confluence point water plate, in babinet gas-liquid separation device is disposed with below gas discharge outlet, partition plate one, spray head two, PP filling balls, partition plate two, bottom is equipped with settling tank in babinet, settling tank is arranged on the lower section of confluence point water plate and partition plate two, spray port connects the water outlet of Sprayer Circulation pump by pipeline, the pump mouth of Sprayer Circulation pump is connected in settling tank by pipeline, liquid level gauge is installed in settling tank, settling tank side is provided with water compensating valve, it is electrically connected between liquid level gauge and water compensating valve；The utility model is suitable for water-soluble acidic and alkaline gas, the gas of discharge is reached environmental protection standard, solves the problems, such as the clogging deposits present in existing processing unit and processing rear end gas-liquid separation.
Description
[technical field]
Technology waste gas processing technology field is the utility model is related to, specifically a kind of wet exhaust processing unit.
[background technology]
In processing manufacture of semiconductor raw material with a variety of exhaust gas and harmfulness toxic gas can be produced in accessory substance, these danger
Evil thing has the danger of erosive burning room a bit, therefore these harmfulness toxic gases cannot be directly discharged in air, so just
It can be related to the device for handling these exhaust gas and harmfulness toxic gas.Moreover, IC/LED/Solar cell/TFT-LCD are respectively produced
Industry scale is all into Cluster Development, and the application of electron level special gas is also more and more extensive, so as to be produced during technological reaction
Raw exhaust gas, which is then one, to be needed to improve the link solved.Exhaust gas species are divided into again：Acid-base class, alkanes, organic etc..
At present, existing wet exhaust processing unit substantially exists some following problem：(1) spray head and pump housing and
The clogging deposits at the dead angle inside equipment：Due to the formation of a large amount of reaction products, the water in sedimentation basin is to do circulation to make again
With so that spray head and pump and equipment inner dead space are easy to block；(2) inside cavity structure：Chamber can not be ensured by being typically designed
The removing of the deposited material in internal portion；(3) gas-liquid separation of rear end is handled：With the lifting for the treatment of capacity, can not ensure generally to arrange
The tail gas at gas end does not contain corrosive liquids, can produce hydrops and corrosion to back segment pipeline.
[utility model content]
The purpose of this utility model seeks to solve above-mentioned deficiency and provide a kind of wet exhaust processing unit, Neng Goushi
For water-soluble acidic and alkaline gas, the gas of discharge is reached environmental protection standard, solve existing wet exhaust processing unit
The problem of existing clogging deposits and processing rear end gas-liquid separation.
A kind of wet exhaust processing unit, including babinet 16,16 top of babinet or so are designed to achieve the above object
Both sides are respectively equipped with technology waste gas import 1, gas discharge outlet 14, and the lower section of technology waste gas import 1 is disposed with the babinet
Spray port 2, dust watershed partition 3, confluence point water plate 4, the lower section of gas discharge outlet 14 is disposed with gas-liquid in the babinet 16
Separator 13, one 12a of partition plate, spray head 2 15, PP filling balls 11, two 12b of partition plate, bottom is equipped with precipitation in the babinet 16
Water tank 9, the settling tank 9 are arranged on the lower section of two 12b of confluence point water plate 4 and partition plate, and the spray port 2 is connected by pipeline
The water outlet of Sprayer Circulation pump 5 is connect, the pump mouth of the Sprayer Circulation pump 5 is connected in settling tank 9 by pipeline, described heavy
Liquid level gauge 8 is installed, 9 side of settling tank is provided with water compensating valve 10, the liquid level gauge 8 and water compensating valve 10 in shallow lake water tank 9
Between be electrically connected.
Further, bottom keeps to the side to be equipped with sediment isolation block 7, the sediment at position in the settling tank 9
Isolation block 7 top be equipped with one upwardly extend enclose bank, the pump mouth of the Sprayer Circulation pump 5 is higher than sediment isolation block 7
Bottom.
Further, sewage pump 6 is further included, the sewage pump 6 is connected to bottom end in settling tank 9, institute by pipeline
Sewage pump 6 is stated to be used to the fouling product for being deposited on 9 bottom of settling tank pumping to central scrubbing tower.
Further, the 3 V-shaped structure of dust watershed partition, the slope between the dust watershed partition 3 and horizontal plane
It is 5 degree to spend angle.
Further, the spray port 2 is provided with three sections, and three sections of spray ports 2 are evenly arranged from top to bottom.
Further, the confluence point water plate 4 is ramp-like in dipping down, the confluence point water plate 4 cross arrangement, described
Confluence point water plate 4 is provided with five to form five water curtain walls from top to bottom.
The utility model compared with the existing technology, has the following advantages that：
(1) after technology waste gas enters after being sprayed water by three sections of spray ports so that the soluble halogen dissolving in exhaust gas
With in water, dust watershed partition formed a V-type module, be designed to 5 degree of angles of gradient, then can make preliminarily solubilised and impurities in water
Collect along angle toward centre, ceaselessly washed away via spray port, prevent the accumulation of impurity；
(2) point water plate of converging forms 5 water curtain walls, can expand soluble gas and the contact area of water, allow not yet molten
The halogen of solution further reacts, and angle down can also be washed into reactant in bottom precipitation water tank；
(3) block is isolated by being provided with sediment, the intake of water circulating pump is slightly above bottom, and has and enclose bank, then adds
The current that the water curtain that upper 5th confluence point water plate is formed gets off are in other side, so as to effectively avoid sediment from entering water intaking
Mouthful, pump and spray head are protected, greatly reduces the probability of blocking；
(4) PP filling balls considerably increase gas by the water loading that one of spray head of top sprays in spherome surface
Body by when contact area, effectively increase the area that residual gas contacts, ensure that reaction is abundant；
(5) gas-liquid separation device can effectively prevent liquid from being taken away by exhausting system by gas discharge outlet to exhaust system
The inside is gone, the pipeline after corroding, and realizes the gas-liquid separation of processing rear end.
[brief description of the drawings]
Fig. 1 is the structure diagram of the utility model；
In figure：1st, technology waste gas import 2, spray port 3, dust watershed partition 4, confluence point water plate 5, Sprayer Circulation pump 6, dirt
Water pump 7, sediment isolation block 8, liquid level gauge 9, settling tank 10, water compensating valve 11, PP filling balls 12a, one 12b of partition plate, partition plate
2 13, gas-liquid separation device 14, gas discharge outlet 15, spray head 2 16, babinet.
[embodiment]
The utility model is made below in conjunction with the accompanying drawings further explained below：
As shown in Figure 1, the utility model includes：Babinet 16,16 top of babinet are respectively arranged on the left side and the right side technology waste gas
Import 1, gas discharge outlet 14, the lower section of technology waste gas import 1 is disposed with spray port 2, dust watershed partition 3, converges in babinet
Point water plate 4 is flowed, the lower section of gas discharge outlet 14 is disposed with gas-liquid separation device 13, one 12a of partition plate, spray head two in babinet 16
15th, PP filling balls 11, two 12b of partition plate, bottom is equipped with settling tank 9 in babinet 16, and settling tank 9 is arranged on confluence point water plate 4
And the lower section of two 12b of partition plate, spray port 2 connect the water outlet of Sprayer Circulation pump 5 by pipeline, Sprayer Circulation pump 5 draws water
Mouthful it is connected to by pipeline in settling tank 9, which takes the water in settling tank to do the dynamic of circulated sprinkling
Make, liquid level gauge 8 is installed in settling tank 9,9 side of settling tank is provided with water compensating valve 10, between liquid level gauge 8 and water compensating valve 10
It is electrically connected；Sewage pump 6 is further included, sewage pump 6 is connected to bottom end in settling tank 9 by pipeline, and sewage pump 6, which is used as, periodically will
The fouling product for being deposited on 9 bottom of settling tank pumps to central scrubbing tower and processes.
Wherein, bottom keeps to the side to be equipped with sediment isolation block 7,7 top of sediment isolation block at position in settling tank 9
Equipped with one upwardly extend enclose bank, the pump mouth of Sprayer Circulation pump 5 is higher than 7 bottom of sediment isolation block.Dust watershed partition 3
V-shaped structure, the angle of gradient between dust watershed partition 3 and horizontal plane are 5 degree.Spray port 2 is provided with three sections, three sections of spray ports
2 are evenly arranged from top to bottom.Confluence point water plate 4 is ramp-like in dipping down, confluence point water plate 4 cross arrangement, point water plate 4 of converging
Five are provided with from top to bottom to form five water curtain walls.
The operation principle of the utility model is：After technology waste gas entrance after being sprayed water by three sections of spray ports so that in exhaust gas
Soluble halogen dissolving with water in；Dust watershed partition forms a V-type module, is designed to 5 degree of angles of gradient, can make
Preliminarily solubilised and impurities in water collect along angle toward centre, are ceaselessly washed away via spray port, prevent the accumulation of impurity；Confluence point
Water plate forms 5 water curtain walls and expands soluble gas and the contact area of water；Water in Sprayer Circulation pumping water tank does one
The action of circulated sprinkling, sewage pump are processed as the fouling product for being deposited on water tank bottom is periodically pumped to central scrubbing tower；
Sediment isolates block, and the intake of water circulating pump is slightly above bottom, and has and enclose bank；Liquid level gauge in settling tank is and moisturizing
Valve does coordinated signals, when sediment is periodically pushed to central scrubbing tower by sewage pump, once liquid level drops to setting position
To put, water compensating valve automatically opens up, and carries out fluid infusion, if liquid level gauge, which detects liquid level, is higher than setting value, sewage pump can also start operation,
So that the water level in settling tank is maintained in a stable scope；PP filling balls are sprayed by one of spray head of top
Water loading in spherome surface, considerably increase gas by when contact area, effectively increase residual gas and contact
Area, ensure that reaction is abundant；Gas-liquid separation device effectively prevents liquid from being taken away by exhausting system by gas discharge outlet to row
Gone inside gas system, the pipeline after corroding.
The utility model is suitable for water-soluble acidic and alkaline gas, after exhaust gas enters cavity, is refined by several sections of sprayings
Absorb, dilution dissolving is flowed into bottom water tank, then be discharged into main system and carry out two level dilution and soda acid as in water along cavity partition
Neutralisation treatment, makes the gas of discharge reach environmental protection standard.
The basic principle of the utility model is：A. existed by the halogen preliminarily solubilised in spray head technology waste gas
In water, dust watershed partition collects product and flows backwards downwards；B. point water plate of converging forms 5 water curtain walls and is effectively increased reaction surface
Product；The region of c.PP filling balls, since the water loading that spray head sprays out is in spherome surface, gas by when can further with
Haptoreaction；D. gas-liquid separation device can effectively prevent liquid from being taken away by exhausting system by gas discharge outlet to exhaust system
System the inside is gone, and then the pipeline after corrosion.
The utility model is simultaneously not limited to the embodiments described above, and other any spirit without departing from the utility model are real
Matter with made under principle change, modification, replacement, combine, simplification, should be equivalent substitute mode, be included in this practicality
Within new protection domain.
Claims (6)
1. a kind of wet exhaust processing unit, including babinet (16), it is characterised in that：Divide at left and right sides of babinet (16) top
Not She You technology waste gas import (1), gas discharge outlet (14), be disposed with below technology waste gas import (1) in the babinet
Spray port (2), dust watershed partition (3), confluence point water plate (4), the interior gas discharge outlet of the babinet (16) (14) lower section is successively
Gas-liquid separation device (13), partition plate one (12a), spray head two (15), PP filling balls (11), partition plate two (12b) are provided with, it is described
Babinet (16) interior bottom is equipped with settling tank (9), and the settling tank (9) is arranged on confluence point water plate (4) and partition plate two
The lower section of (12b), the spray port (2) connect the water outlet of Sprayer Circulation pump (5) by pipeline, and the Sprayer Circulation pumps (5)
Pump mouth be connected to by pipeline in settling tank (9), liquid level gauge (8), the precipitation are installed in the settling tank (9)
Water tank (9) side is provided with water compensating valve (10), is electrically connected between the liquid level gauge (8) and water compensating valve (10).
2. wet exhaust processing unit as claimed in claim 1, it is characterised in that：Keep to the side the interior bottom of the settling tank (9)
Sediment isolation block (7) is equipped with position, be equipped with the top of sediment isolation block (7) one upwardly extend enclose bank, institute
The pump mouth of Sprayer Circulation pump (5) is stated higher than sediment isolation block (7) bottom.
3. wet exhaust processing unit as claimed in claim 1 or 2, it is characterised in that：Further include sewage pump (6), the dirt
Water pump (6) is connected to settling tank (9) interior bottom end by pipeline, and the sewage pump (6) is used to that settling tank (9) will to be deposited on
The fouling product of bottom pumps to central scrubbing tower.
4. wet exhaust processing unit as claimed in claim 3, it is characterised in that：The V-shaped knot of the dust watershed partition (3)
Structure, the angle of gradient of the dust watershed partition (3) between horizontal plane are 5 degree.
5. wet exhaust processing unit as claimed in claim 4, it is characterised in that：The spray port (2) is provided with three sections, and three
Section spray port (2) is evenly arranged from top to bottom.
6. wet exhaust processing unit as claimed in claim 5, it is characterised in that：The confluence point water plate (4) is in dip down
Ramp-like, confluence point water plate (4) cross arrangement, the confluence point water plate (4) is provided with five to be formed from top to bottom
Five water curtain walls.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721255751.3U CN207356910U (en) | 2017-09-28 | 2017-09-28 | A kind of wet exhaust processing unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721255751.3U CN207356910U (en) | 2017-09-28 | 2017-09-28 | A kind of wet exhaust processing unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207356910U true CN207356910U (en) | 2018-05-15 |
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ID=62350278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721255751.3U Active CN207356910U (en) | 2017-09-28 | 2017-09-28 | A kind of wet exhaust processing unit |
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| CN (1) | CN207356910U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110314516A (en) * | 2019-05-17 | 2019-10-11 | 安徽京仪自动化装备技术有限公司 | One kind being suitable for manufacture of semiconductor exhaust treatment system |
| CN113576112A (en) * | 2020-04-30 | 2021-11-02 | 广东森浩除尘设备有限公司 | Dust removal explosion-proof equipment |
-
2017
- 2017-09-28 CN CN201721255751.3U patent/CN207356910U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110314516A (en) * | 2019-05-17 | 2019-10-11 | 安徽京仪自动化装备技术有限公司 | One kind being suitable for manufacture of semiconductor exhaust treatment system |
| CN113576112A (en) * | 2020-04-30 | 2021-11-02 | 广东森浩除尘设备有限公司 | Dust removal explosion-proof equipment |
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