CN207334240U - A kind of safety and energy saving vaporizer - Google Patents
A kind of safety and energy saving vaporizer Download PDFInfo
- Publication number
- CN207334240U CN207334240U CN201721024692.9U CN201721024692U CN207334240U CN 207334240 U CN207334240 U CN 207334240U CN 201721024692 U CN201721024692 U CN 201721024692U CN 207334240 U CN207334240 U CN 207334240U
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- admission line
- bottle
- safety
- vaporization
- energy saving
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Abstract
The utility model provides a kind of safety and energy saving vaporizer, more particularly to semiconductor production gas supply system technical field, including vaporizing bottle, air inlet, inlet, gas outlet, porous cylinder and admission line, the vaporization top of bottle is equipped with the air inlet, the inlet and the gas outlet, the inlet and the gas outlet are located at the both sides of the air inlet, the admission line is equipped with the vaporization bottle, the admission line upper end is connected with the air inlet, the admission line lower end is inserted into the porous column body, the admission line is fixed in the vaporization bottle.The utility model has the advantages of security is good, and vaporization effect is good.
Description
Technical field
The utility model belongs to semiconductor production gas supply system technical field, and in particular to a kind of safety and energy saving
Vaporizer.
Background technology
It can be used in semiconductor production and arrive some special gases and N2Mixed gas, special gas has NH3、HF、C2H6
Deng vaporizer can be used in gas supply system, vaporizer is divided into two major classes on Vehicles Collected from Market, heated vaporizer and sweeps along formula
Vaporizer.Heated vaporizer due to there is heating unit, can fire hazard or explosion, have security risk；Formula vaporizer is swept along, by
It is unreasonable in structure design, cause gasification result bad, boil-off gas quality is unstable.Therefore a kind of vaporizer, Ji Nengke are needed
Heating gasifying device security risk is taken, solves the problems, such as to sweep along formula vaporizer gasification result bad again.
Therefore, it is badly in need of that a kind of security is good, the good safety and energy saving vaporizer of vaporization effect.
Utility model content
Dangerous in order to solve existing heating gasifying device, the problem of sweeping along formula vaporizer gasification result bad, this practicality is new
The purpose of type is to provide a kind of safety and energy saving vaporizer, has the advantages of security is good, and vaporization effect is good.
The utility model provides following technical solution：
A kind of safety and energy saving vaporizer, including vaporization bottle, air inlet, inlet, gas outlet, porous cylinder and air inlet
Pipeline, the vaporization top of bottle are equipped with the air inlet, the inlet and the gas outlet, the inlet and the outlet
Mouthful be located at the both sides of the air inlet, the admission line be equipped with the vaporization bottle, the admission line upper end and it is described into
Gas port connects, and the admission line lower end is inserted into the porous column body, and the admission line is fixed in the vaporization bottle.
The utility model is simple in structure, and cost is relatively low；The setting of the porous cylinder mainly plays cushioning effect, can make gasification
Carry gas and liquid comes into full contact with mixing, faster reach expected gasification result；The utility model need not heat, security
More preferably, security risk is not had.
Preferably, the axis of the admission line, the vaporization bottle and the porous cylinder overlaps.
Preferably, the porous cylinder is formed by some quartz particles sintering.The quartz particles are fired described porous
Cylinder buffering effect is more preferable.
Preferably, a diameter of 0.2-0.8mm of the quartz particles.
Preferably, the admission line circumferential direction is equipped with some equally distributed fixed links, and the admission line passes through institute
State fixed link to be fixed in the vaporization bottle, one end of the fixed link is fixedly connected with the admission line, the air inlet pipe
The other end in road is fixed on the vaporization bottle inner wall.The setting of the fixed link primarily to the fixed admission line,
It is placed on vertically in the vaporization bottle, do not influence the circulation of nitrogen.
Preferably, the quantity of the fixed link is at least 3.The quantity of the fixed link is more, to the admission line
Fixed effect it is better.
The beneficial effects of the utility model are：
1st, the setting of porous cylinder mainly plays cushioning effect, gasification carrying gas and liquid can be made to come into full contact with mixing, more
Reach expected gasification result soon.
2nd, the utility model need not heat, and security is more preferable, not have security risk.
3rd, simple in structure, cost is low.
Brief description of the drawings
Attached drawing is used to provide a further understanding of the present invention, and a part for constitution instruction, with this practicality
New embodiment is used to explain the utility model together, does not form the limitation to the utility model.In the accompanying drawings：
Fig. 1 is the utility model structure diagram；
In figure mark for：1st, bottle is vaporized；2nd, air inlet；3rd, inlet；4th, gas outlet；5th, porous cylinder；51st, quartz
Grain；6th, admission line；7th, fixed link.
Embodiment
Specific embodiment of the present utility model is described below in conjunction with the accompanying drawings.
As shown in Figure 1, a kind of safety and energy saving vaporizer, including vaporization bottle 1, air inlet 2, inlet 3, gas outlet 4,
Porous cylinder 5 and admission line 6,1 top of vaporization bottle are equipped with air inlet 2, inlet 3 and gas outlet 4, inlet 3 and gas outlet 4
Positioned at the both sides of air inlet 2, admission line 6 is equipped with vaporization bottle 1,6 upper end of admission line is connected with air inlet 2, admission line 6
Lower end is inserted into porous cylinder 5, and the setting of porous cylinder 5 mainly plays cushioning effect, and gasification carrying gas and liquid can be made abundant
Contact mixing, gasification result is more preferable, and admission line 6 is fixed in vaporization bottle 1.Admission line 6, vaporization bottle 1 and porous cylinder 5
Axis overlaps.Porous cylinder 5 burns 51 knots by some quartz particles and forms, 5 buffering effect of porous cylinder that quartz particles 51 are fired
More preferably, a diameter of 0.2-0.8mm of quartz particles 51.6 circumferential direction of admission line is equipped with 3 equally distributed fixed links 7, air inlet
Pipeline 6 is fixed in vaporization bottle 1 by fixed link 7, and one end of fixed link 1 is fixedly connected with admission line 6, admission line 6
The other end is fixed on vaporization 1 inner wall of bottle.The setting of fixed link 7 is primarily to fixed admission line 6, makes it to place vertically
In vaporization bottle 1, the circulation of nitrogen is not influenced.
Utility model works mode：The liquid for needing to gasify is entered in vaporization bottle 1 by inlet 3, feed liquor process essence
The high pure nitrogen of the really liquid level of control liquid, certain pressure and flow is entered in vaporization bottle 1 by air inlet 2, passes through air inlet pipe
Road 6 is entered in porous cylinder 5, and porous cylinder 5 plays cushioning effect, is fully connect with liquid in porous 5 inside nitrogen of cylinder
Mixing is touched, the gasifying gas handled by porous cylinder 5, the headroom being stored temporarily in vaporization bottle 1, and from gas outlet 4
Discharge, send to required station via pipeline.
The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the present invention, although ginseng
The utility model is described in detail according to previous embodiment, for those skilled in the art, it still can be with
Modify to the technical solution described in foregoing embodiments, or equivalent substitution is carried out to which part technical characteristic.It is all
Within the spirit and principles of the present invention, any modification, equivalent replacement, improvement and so on, should be included in this practicality
Within new protection domain.
Claims (6)
1. a kind of safety and energy saving vaporizer, it is characterised in that including vaporization bottle, air inlet, inlet, gas outlet, porous
Cylinder and admission line, the vaporization top of bottle are equipped with the air inlet, the inlet and the gas outlet, the inlet
It is located at the both sides of the air inlet with the gas outlet, described vaporize is equipped with the admission line in bottle, on the admission line
End is connected with the air inlet, and the admission line lower end is inserted into the porous column body, and the admission line is fixed on described
Vaporize in bottle.
2. a kind of safety and energy saving vaporizer according to claim 1, it is characterised in that the admission line, described
The axis for vaporizing bottle and the porous cylinder overlaps.
3. a kind of safety and energy saving vaporizer according to claim 1, it is characterised in that the porous cylinder is by some
Quartz particles sintering forms.
A kind of 4. safety and energy saving vaporizer according to claim 3, it is characterised in that the diameter of the quartz particles
For 0.2-0.8mm.
5. a kind of safety and energy saving vaporizer according to claim 1, it is characterised in that in the admission line circumferential direction
Equipped with some equally distributed fixed links, the admission line is fixed in the vaporization bottle by the fixed link, described solid
One end of fixed pole is fixedly connected with the admission line, and the other end of the admission line is fixed on the vaporization bottle inner wall.
6. a kind of safety and energy saving vaporizer according to claim 5, it is characterised in that the quantity of the fixed link is extremely
It is 3 less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721024692.9U CN207334240U (en) | 2017-08-16 | 2017-08-16 | A kind of safety and energy saving vaporizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721024692.9U CN207334240U (en) | 2017-08-16 | 2017-08-16 | A kind of safety and energy saving vaporizer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207334240U true CN207334240U (en) | 2018-05-08 |
Family
ID=62373470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721024692.9U Active CN207334240U (en) | 2017-08-16 | 2017-08-16 | A kind of safety and energy saving vaporizer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207334240U (en) |
-
2017
- 2017-08-16 CN CN201721024692.9U patent/CN207334240U/en active Active
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