CN207333981U - A kind of bellows and organic electroluminescence process equipment - Google Patents
A kind of bellows and organic electroluminescence process equipment Download PDFInfo
- Publication number
- CN207333981U CN207333981U CN201721062994.5U CN201721062994U CN207333981U CN 207333981 U CN207333981 U CN 207333981U CN 201721062994 U CN201721062994 U CN 201721062994U CN 207333981 U CN207333981 U CN 207333981U
- Authority
- CN
- China
- Prior art keywords
- tube body
- bellows
- layer tube
- outer layer
- internal layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Diaphragms And Bellows (AREA)
- Rigid Pipes And Flexible Pipes (AREA)
Abstract
Display production equipment field is the utility model is related to, discloses a kind of bellows and organic electroluminescence process equipment, which includes：Internal layer tube body and diameter are more than the outer layer tube body of internal layer pipe diameter, wherein, outer layer tube body is set in the external side of inner tube, and the tube wall chamber of closing is formed between outer layer tube body and internal layer tube body, and tube wall intracavitary is filled with buffer medium.In above-mentioned bellows, by setting outer layer tube body and internal layer tube body, and fill buffer medium in tube wall chamber, realize successively decreasing step by step for vacuum pressure, filled media pressure and hydraulic pressure, it is achieved thereby that reduced in bellows by the step of outer layer tube body to internal layer tube body stress, reduce the probability of bellows damage, the phenomenon that vacuum declines caused by bellows damages leak is avoided to occur, it also avoid equipment delay machine phenomenon occur, the service life of bellows is improved, saves the use cost of equipment.
Description
Technical field
Display production equipment field is the utility model is related to, more particularly to a kind of bellows and organic electroluminescence add
Construction equipment.
Background technology
Fine metal mask pattern, is that ORGANIC ELECTROLUMINESCENCE DISPLAYS material is deposited according to preset program by evaporation mode
Onto low temperature polycrystalline silicon backboard, using the figure on high-precision metal mask plate, RGB device is formed.Evaporation is in vacuum chamber
Carried out in body, the positioning mechanism of evaporation source, glass loading and shade loading, is required for bellows, cold between moving component to ensure
The connection of condensate, but bellows bellows segment long-term motion is fragile, and bellows is damaged mainly due to cooling water system in bellows
There is certain hydraulic pressure, bellows is in by certain vacuum pressure in vacuum, and hydraulic pressure is identical with the pressure direction of vacuum pressure, i.e. ripple
The power that line pipe is subject to is hydraulic pressure and the numerical value summation of vacuum pressure so that bellows damages leak because bearing pressure is excessive, causes
Working environment vacuum declines, or even causes equipment to be delayed the generation of machine phenomenon.
Utility model content
The utility model provides a kind of bellows and organic electroluminescence process equipment, in the bellows, using double
Layer tube body, and buffer medium is filled in tube wall chamber, reduce the pressure value that ripple tube wall is born, solve bellows because bearing
Pressure is excessive and damages leak, cause working environment vacuum decline, or even cause equipment delay machine the problem of.
To reach above-mentioned purpose, the utility model provides following technical scheme：
A kind of bellows, including：Internal layer tube body and diameter are more than the outer layer tube body of the internal layer pipe diameter, wherein,
The outer layer tube body is set in the external side of the inner tube, and envelope is formed between the outer layer tube body and the internal layer tube body
The tube wall chamber closed, the tube wall intracavitary are filled with buffer medium.
In above-mentioned bellows, the tube wall chamber of closing is formed between outer layer tube body and internal layer tube body, filled with slow in tube wall chamber
Medium is rushed, when bellows, which is in vacuum environment, to work, buffer medium is less than the pressure value of internal layer tube body the size of hydraulic pressure,
The power that internal layer tube body is subject to makes a concerted effort the pressure of internal layer tube body for hydraulic pressure and buffer medium, the two direction is on the contrary, i.e. inner tube
Size of the value less than hydraulic pressure of making a concerted effort suffered by body, the pressure that outer layer tube body is subject to are buffer medium to the pressure of outer layer tube body and true
Pneumatics power is made a concerted effort, and buffer medium is identical with vacuum pressure direction to the pressure of outer layer tube body, then outer layer tube body pressure value
For buffer medium to the pressure value of outer layer tube body and vacuum pressure value and, since buffer medium is small to the pressure value of outer layer tube body
In the pressure value of hydraulic pressure, then internal layer tube body is respectively less than singel-ply bellows tube wall institute in the prior art with the pressure suffered by outer layer tube body
The pressure received, and outer layer tube body pressure is more than internal layer tube body pressure, i.e., by setting outer layer tube body and internal layer tube body,
And buffer medium is filled in tube wall chamber, successively decreasing step by step for vacuum pressure, filled media pressure and hydraulic pressure is realized, it is achieved thereby that
Reduced in bellows by the step of outer layer tube body to internal layer tube body stress, reduce the probability of bellows damage, avoid because of ripple
Line pipe damage leak caused by vacuum decline phenomenon occur, it also avoid equipment delay machine phenomenon occur, improve ripple
The service life of pipe, saves the use cost of equipment；
In addition, bellows includes internal layer tube body and outer layer tube body, when internal layer tube body is damaged, the cooling in bellows
Water is flowed into tube wall chamber, since tube wall chamber is closed, effectively can prevent cooling water from revealing.
Therefore, bellows uses internal layer tube body and outer layer tube body, and the step for realizing bellows stress reduces, and reduces ripple
Line pipe damage probability, it is therefore prevented that the leakage of cooling water, avoid because bellows damage leak caused by vacuum decline show
As occurring, it also avoid the delay phenomenon of machine of equipment and occur, improve the service life of bellows, save the use of equipment into
This.
Preferably, the buffer medium is inert gas.
Preferably, the inert gas is nitrogen.
Preferably, the buffer medium is vacuum grease.
Preferably, the outer layer tube body includes the first tube body and the second tube body prepared by hard material, first pipe
The diameter of body is less than the diameter of second tube body, and the first end of first tube body extends from the first end of second tube body
To in second tube body, and the first end of first tube body passes through the connection pipe body and described second that is prepared by soft material
The first end connection of tube body.
Preferably, the connection pipe body is bellows.
Preferably, the connection pipe body is metal bellows.
Preferably, first tube body, second tube body and the connection pipe body have integral structure.
The utility model additionally provides a kind of organic electroluminescence process equipment, including described in above-mentioned technical proposal
Any one bellows.
Brief description of the drawings
Fig. 1 is the structure diagram of bellows provided by the utility model；
Fig. 2 is the structure diagram of ripple fragment position set-up mode one in bellows provided by the utility model；
Fig. 3 is the structure diagram of ripple fragment position set-up mode two in bellows provided by the utility model.
Icon：1- internal layer tube bodies；2- outer layer tube bodies；The first tube bodies of 21-；The second tube bodies of 22-；23- connection pipe body；3- tube walls
Chamber.
Embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work
All other embodiments obtained, shall fall within the protection scope of the present invention.
Please refer to Fig.1, the bellows that the utility model embodiment provides, including：Internal layer tube body 1 and diameter are more than inner tube
The outer layer tube body 2 of 1 diameter of body, wherein,
Outer layer tube body 2 is set in the outside of internal layer tube body 1, and the tube wall chamber 3 of closing is formed between outer layer tube body 2 and internal layer tube body 1,
Buffer medium is filled with tube wall chamber 3.
In above-mentioned bellows, the tube wall chamber 3 of closing is formed between outer layer tube body 2 and internal layer tube body 1, is filled in tube wall chamber 3
There is buffer medium, when bellows, which is in vacuum environment, to work, buffer medium is less than hydraulic pressure to the pressure value of internal layer tube body 1
Size, the power that internal layer tube body 1 is subject to make a concerted effort the pressure of internal layer tube body 1 for hydraulic pressure and buffer medium, the two direction is on the contrary, i.e.
Size of the value less than hydraulic pressure of making a concerted effort suffered by internal layer tube body 1, the pressure that outer layer tube body 2 is subject to is buffer medium to outer layer tube body 2
Pressure and vacuum pressure make a concerted effort, buffer medium is identical with vacuum pressure direction to the pressure of outer layer tube body 2, then outer layer tube body
2 pressure values for buffer medium to the pressure value of outer layer tube body 2 and vacuum pressure value and, since buffer medium is to outer tube
The pressure value of body 2 is less than the pressure value of hydraulic pressure, then internal layer tube body 1 is respectively less than in the prior art with the pressure suffered by outer layer tube body 2
Pressure suffered by singel-ply bellows tube wall, and 2 pressure of outer layer tube body is more than 1 pressure of internal layer tube body, that is, passes through setting
Outer layer tube body 2 and internal layer tube body 1, and buffer medium is filled in tube wall chamber 3, realize vacuum pressure, filled media pressure and water
Pressure is successively decreased step by step, it is achieved thereby that being reduced in bellows by the step of outer layer tube body 2 to 1 stress of internal layer tube body, reduces ripple
The probability of line pipe damage, avoids the phenomenon that vacuum declines caused by bellows damages leak and occurs, it also avoid equipment
The phenomenon of machine of delaying occurs, and improves the service life of bellows, saves the use cost of equipment；
In addition, bellows includes internal layer tube body 1 and outer layer tube body 2, when internal layer tube body 1 is damaged, in bellows
Cooling water is flowed into tube wall chamber 3, since tube wall chamber 3 is closed, effectively can prevent cooling water from revealing.
Therefore, bellows uses internal layer tube body 1 and outer layer tube body 2, and the step for realizing bellows stress reduces, and reduces
The probability of bellows damage, it is therefore prevented that the leakage of cooling water, avoids what the vacuum caused by bellows damages leak declined
Phenomenon occurs, and it also avoid the delay phenomenon of machine of equipment and occurs, improves the service life of bellows, save the use of equipment into
This.
Specifically, buffer medium is inert gas or vacuum grease.
Inert gas can be filled in above-mentioned tube wall chamber 3, when the buffer medium filled in tube wall chamber 3 is inert gas, i.e.,
The tube wall of bellows is damaged, leakage is produced, due to the chemical property torpescence of inert gas, it is extremely difficult to produced with other materials
Biochemical reaction, can effectively avoid after bellows damage is revealed and produces damage to miscellaneous part.
Specifically, inert gas is nitrogen.
Above-mentioned inert gas uses nitrogen, nontoxic since nitrogen is one of part of air, when bellows quilt
During damage, smooth base will not produce pollution to environment.
As a kind of embodiment of above-mentioned outer layer tube body 2, outer layer tube body 2 includes the first tube body prepared by hard material
21 and second tube body 22, the diameter of the first tube body 21 is less than the diameter of the second tube body 22, and the first end of the first tube body 21 is from second
The first end of tube body 22 is extended in the second tube body 22, and the first end of the first tube body 21 passes through the connection that is prepared by soft material
Tube body 23 is connected with the first end of the second tube body 22.
Above-mentioned outer layer tube body 2 is included for the first tube body 21, the second tube body 22 and the first tube body 21 of connection and the second tube body 22
Connection pipe body 23, the first end of the first tube body 21 extended in the second tube body 22, and the second tube body 22 effectively prevents foreign matter to
The damage of one tube body 21 and connection pipe body 23, improves the service life of bellows.
Easily damaged according to the bellows segment on outer layer tube body 2 by foreign matter, the position of bellows segment there are following two set-up modes：
Mode one：
With reference to figure 2, the part that the first tube body 21 is extended in the second tube body 22 is bellows.
In aforesaid way one, the bellows segment of outer layer tube body 2 is arranged on the first tube body 21 and extends to pipe in the second tube body 22
On wall, the second tube body 22 can effectively prevent foreign matter from touching the bellows segment part of the first tube body 21, prevent bellows segment from damaging.
Mode two：
With reference to figure 3, connection pipe body 23 is bellows.
Specifically, connection pipe body 23 is metal bellows.
In aforesaid way two, the bellows segment of outer layer tube body 2 is arranged in connection pipe body 23, i.e., connection pipe body 23 is ripple
Pipe, the second tube body 22 can effectively prevent foreign matter from touching connection pipe body 23, prevent bellows segment from damaging.
As a kind of embodiment of above-mentioned outer layer tube body 2, the first tube body 21, the second tube body 22 and connection pipe body 23 have
There is integral structure.
In above-mentioned outer layer tube body 2, the first tube body 21, the second tube body 22 and connection pipe body 23 use integral structure so that
The structure of outer layer tube body 2 is relatively stable, is not susceptible to damage leakage.
The utility model embodiment additionally provides a kind of organic electroluminescence process equipment, including in above-described embodiment
Any one bellows.
Obviously, those skilled in the art the utility model embodiment can be carried out various modification and variations without departing from
The spirit and scope of the utility model.In this way, if these modifications and variations of the utility model belong to the utility model right
It is required that and its within the scope of equivalent technologies, then the utility model be also intended to include these modification and variations including.
Claims (9)
- A kind of 1. bellows, it is characterised in that including：Internal layer tube body and diameter are more than the outer tube of the internal layer pipe diameter Body, wherein,The outer layer tube body is set in the external side of the inner tube, and closing is formed between the outer layer tube body and the internal layer tube body Tube wall chamber, the tube wall intracavitary are filled with buffer medium.
- 2. bellows according to claim 1, it is characterised in that the buffer medium is inert gas.
- 3. bellows according to claim 2, it is characterised in that the inert gas is nitrogen.
- 4. bellows according to claim 1, it is characterised in that the buffer medium is vacuum grease.
- 5. bellows according to claim 1, it is characterised in that the outer layer tube body includes the prepared by hard material One tube body and the second tube body, the diameter of first tube body are less than the diameter of second tube body, and the first of first tube body Hold from the first end of second tube body and extend in second tube body, and the first end of first tube body passes through by soft Connection pipe body prepared by material is connected with the first end of second tube body.
- 6. bellows according to claim 5, it is characterised in that the connection pipe body is bellows.
- 7. bellows according to claim 5, it is characterised in that the connection pipe body is metal bellows.
- 8. bellows according to claim 5, it is characterised in that first tube body, second tube body and described Connection pipe body has integral structure.
- 9. a kind of organic electroluminescence process equipment, it is characterised in that including the ripple described in claim 1-8 any one Pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721062994.5U CN207333981U (en) | 2017-08-23 | 2017-08-23 | A kind of bellows and organic electroluminescence process equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721062994.5U CN207333981U (en) | 2017-08-23 | 2017-08-23 | A kind of bellows and organic electroluminescence process equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207333981U true CN207333981U (en) | 2018-05-08 |
Family
ID=62374323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721062994.5U Active CN207333981U (en) | 2017-08-23 | 2017-08-23 | A kind of bellows and organic electroluminescence process equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207333981U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114111398A (en) * | 2021-12-08 | 2022-03-01 | 江阴市亚龙换热设备有限公司 | Pressure-resistant brazing type plate heat exchanger |
| CN117711873A (en) * | 2024-02-05 | 2024-03-15 | 武汉飞特电气有限公司 | Corrugated pipe for vacuum switch tube |
-
2017
- 2017-08-23 CN CN201721062994.5U patent/CN207333981U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114111398A (en) * | 2021-12-08 | 2022-03-01 | 江阴市亚龙换热设备有限公司 | Pressure-resistant brazing type plate heat exchanger |
| CN117711873A (en) * | 2024-02-05 | 2024-03-15 | 武汉飞特电气有限公司 | Corrugated pipe for vacuum switch tube |
| CN117711873B (en) * | 2024-02-05 | 2024-04-26 | 武汉飞特电气有限公司 | Corrugated pipe for vacuum switch tube |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207333981U (en) | A kind of bellows and organic electroluminescence process equipment | |
| CN101881335B (en) | Multilayer rubber sealing ring sealing device | |
| CN104895849A (en) | Refrigeration equipment and compressor thereof | |
| TW200641917A (en) | The manufacturing method of superconductive wiring, multi-core superconductive wiring and superconductive machine | |
| CN202545264U (en) | Three-segment type air-inlet connecting pipe for compressor | |
| CN203717095U (en) | Sectional type exhaust pipe connector seal structure | |
| US20140182132A1 (en) | Method of manufacturing a vapor chamber structure | |
| CN212361549U (en) | Oil feeder | |
| CN101237115B (en) | A laser pipe with spiral pipe structure | |
| CN103486004B (en) | A kind of compressor air-discharging muffler | |
| CN102155597B (en) | Connecting structure of low-temperature pipeline and valve | |
| CN203868341U (en) | Oil-proof and waterproof structure applied to magnetic fluid sealing device | |
| CN209856370U (en) | Sealing structure | |
| CN202940208U (en) | Exhaust structure suitable for vacuum electronic device | |
| CN202047129U (en) | Novel magnetic baffle plate viewing window | |
| CN216354244U (en) | Boat integer of solar cell piece automation equipment | |
| CN211665137U (en) | Heat preservation cylinder for high vacuum heat treatment furnace | |
| CN204558872U (en) | A kind of breakage-proof syndeton of laser air-return pipe | |
| CN204493785U (en) | A kind of ball valve core | |
| CN216715874U (en) | Dry vacuum pump sweeps gas flow auto-change over device | |
| CN210716334U (en) | High vacuum glass joint with corrugated pipe structure | |
| CN101012887A (en) | Vacuum furnace pneumatic rubber seal casting valve | |
| CN210196996U (en) | Sealing device for electric light source gas storage tank | |
| CN204921986U (en) | Sealing device and pass wind channel axle mounting structure | |
| CN215060173U (en) | Double-layer pipeline leakage-proof structure for special gas under clean working condition |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |