CN207303647U - A kind of optical path adjustment device of solid state laser - Google Patents
A kind of optical path adjustment device of solid state laser Download PDFInfo
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- CN207303647U CN207303647U CN201721329649.3U CN201721329649U CN207303647U CN 207303647 U CN207303647 U CN 207303647U CN 201721329649 U CN201721329649 U CN 201721329649U CN 207303647 U CN207303647 U CN 207303647U
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- solid state
- state laser
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- position adjustment
- direction position
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Abstract
The utility model discloses a kind of optical path adjustment device of solid state laser, including horizontal X direction position adjustment component, horizontal Y-direction position adjustment component, vertical Z direction position adjustment component and vertical angle adjusting part；Position adjustment component in horizontal X direction is used for the displacement for adjusting solid state laser horizontal X direction, horizontal Y-direction position adjustment component is used for the displacement for adjusting the horizontal Y-direction of solid state laser, position adjustment component in vertical Z direction is used for the displacement for adjusting solid state laser vertical Z direction, and vertical angle adjusting part is used to adjust the luminous point angle that solid state laser is launched；As a result of tri- direction position adjustment components of XYZ and a vertical angle adjusting part, meet luminous point omnirange, the adjustment adaptation of different spaces angle that solid state laser is launched, with the optical system of litho machine is comprehensive is adapted, realize quick, the accurate light spot position launched of adjustment solid state laser, angle is accurately matched with the optical system of lithographic equipment.
Description
Technical field
The utility model relates to the ancillary equipment field of solid state laser, more particularly to a kind of light path of solid state laser
Adjusting apparatus.
Background technology
In optical mask plate-making industry, the solid state laser being usually required in adjustment replacement or maintenance process is launched
The optical system of the light spot position, angle and the lithographic equipment that go out matches.So-called mask plate refers to one kind by surface metal
Film records the glass support plate of the information such as figure, word.And solid state laser herein refers to making the photoetching of mask plate
The laser generator of device-specific.
Traditional method of adjustment either using bikini adjusting method or uses manual alignment method.But these are passed
The method of adjustment adjustment time length of system, and the angle of deviation of luminous point cannot also realize accurate adjustment.
Therefore, the prior art still has much room for improvement and develops.
Utility model content
In order to solve the above technical problems, the utility model provides a kind of optical path adjustment device of solid state laser, can be quick
Adjust and accurately realize that the optical system of light spot position, angle and lithographic equipment that solid state laser is launched matches.
The technical solution of the utility model is as follows：A kind of optical path adjustment device of solid state laser, including：Horizontal X direction
Position adjustment component, horizontal Y-direction position adjustment component, vertical Z direction position adjustment component and vertical angle adjusting part；Institute
State the displacement that position adjustment component in horizontal X direction is used to adjust solid state laser horizontal X direction, the horizontal Y-direction position tune
Whole group part is used for the displacement for adjusting the horizontal Y-direction of solid state laser, and the vertical Z direction position adjustment component is used to adjust solid
The displacement in laser vertical Z direction, the vertical angle adjusting part are used to adjust the luminous point angle that solid state laser is launched
Degree.
The optical path adjustment device of the solid state laser, wherein：The horizontal X direction position adjustment component, horizontal Y side
It is arranged to position adjustment component, vertical Z direction position adjustment component and vertical angle adjusting part on a platform base,
And it is respectively positioned on the lower section of the solid state laser.
The optical path adjustment device of the solid state laser, wherein：The platform base uses marble slab or stainless
Steel plate makes.
The optical path adjustment device of the solid state laser, wherein：The bottom of the solid state laser is provided with a damping
Pad, the beam are located at horizontal X direction position adjustment component, horizontal Y-direction position adjustment component, the position adjustment of vertical Z direction
The top of component and vertical angle adjusting part.
The optical path adjustment device of the solid state laser, wherein：The beam is made of rubber slab.
The optical path adjustment device of the solid state laser, wherein：The fixing end of the vertical angle adjusting part is set
On a bracket stable component, which is located at the lower section of the solid state laser front end.
The optical path adjustment device of a kind of solid state laser provided by the utility model, as a result of tri- directions of XYZ
Position adjustment component and a vertical angle adjusting part, meet luminous point omnirange, difference that solid state laser is launched
Space angle adjustment adaptation, with the optical system of litho machine it is comprehensive be adapted, realize it is quick, accurately adjust Solid State Laser
Light spot position that device is launched, angle are accurately matched with the optical system of lithographic equipment.
Brief description of the drawings
Fig. 1 is the structure diagram of the optical path adjustment device embodiment of the utility model solid state laser.
Embodiment
Below with reference to attached drawing, specific embodiment of the present utility model and embodiment are described in detail, it is described
Specific embodiment only to explain the utility model, be not intended to limit specific embodiment of the present utility model.
As shown in Figure 1, Fig. 1 is the structure diagram of the optical path adjustment device embodiment of the utility model solid state laser,
The optical path adjustment device includes (the signified knob position for the adjustment component of figure label of horizontal X direction position adjustment component 130
Put), horizontal Y-direction position adjustment component 140 knob position of the adjustment component (figure label is signified be), vertical Z direction position
Put adjustment component 150 (the signified knob position for the adjustment component of figure label) and vertical angle adjusting part 160；Wherein,
The horizontal X direction position adjustment component 130 is used for the displacement for adjusting 180 horizontal X direction of solid state laser, the horizontal Y side
It is used for the displacement for adjusting 180 horizontal Y-direction of solid state laser, the vertical Z direction position adjustment group to position adjustment component 140
Part 150 is used for the displacement for adjusting 180 vertical Z direction of solid state laser, and the vertical angle adjusting part 160 is used to adjust solid
The luminous point angle that laser 180 is launched.
The optical path adjustment device of the utility model solid state laser as a result of tri- direction position adjustment components of XYZ and
One vertical angle adjusting part, meets the adjustment of luminous point omnirange, different spaces angle that solid state laser is launched
Adaptation, it is comprehensive adaptable with the optical system of litho machine, realize the light that quick, accurate adjustment solid state laser is launched
Point position, angle are accurately matched with the optical system of lithographic equipment.
In the embodiment of the optical path adjustment device of the utility model solid state laser, the horizontal X direction position
Adjustment component 130, horizontal Y-direction position adjustment component 140, vertical Z direction position adjustment component 150 and vertical angle is put to adjust
Component 160 is arranged on a platform base 110, and is respectively positioned on the lower section of the solid state laser 180.
Specifically, the platform bottom 110 can use the larger sheet fabrication shaping of density, it is preferred that the platform bottom
Seat 110 is made of marble slab or stainless steel plate, to filter or absorb the energy of external shock, ensures whole light path adjustment
The stability of device.
In the embodiment of the optical path adjustment device of the utility model solid state laser, the solid state laser
180 bottom is additionally provided with a beam 170, which is located at horizontal X direction position adjustment component 130, horizontal Y side
To the top of position adjustment component 140, vertical Z direction position adjustment component 150 and vertical angle adjusting part 160.
Specifically, the beam 170 is made of rubber slab, with the energy for further filtering or absorbing external shock,
Ensure the stability of whole optical path adjustment device.
It is preferred that the fixing end of the vertical angle adjusting part 160 is arranged on a bracket stable component 120, should
Bracket stable component 120 is located at the lower section of 180 front end of solid state laser, further to stablize and accurately adjust Solid State Laser
The luminous point angle that device 180 is launched.
It should be appreciated that the above is only the preferred embodiment of the utility model only, it e insufficient to limit this reality
With new technical solution, for those of ordinary skills, within the spirit and principles of the present invention, Ke Yigen
Increased and decreased according to described above, replaced, converted or improved, and all these increases and decreases, replacement, conversion or improved technical side
Case, should all belong to the protection domain of the appended claims for the utility model.
Claims (6)
- A kind of 1. optical path adjustment device of solid state laser, it is characterised in that including：Horizontal X direction position adjustment component, level Y-direction position adjustment component, vertical Z direction position adjustment component and vertical angle adjusting part；Horizontal X direction position tune Whole group part is used for the displacement for adjusting solid state laser horizontal X direction, and the horizontal Y-direction position adjustment component is used to adjust solid The displacement of laser level Y-direction, the vertical Z direction position adjustment component are used to adjust solid state laser vertical Z direction Displacement, the vertical angle adjusting part are used to adjust the luminous point angle that solid state laser is launched.
- 2. the optical path adjustment device of solid state laser according to claim 1, it is characterised in that：The horizontal X direction position Put adjustment component, horizontal Y-direction position adjustment component, vertical Z direction position adjustment component and vertical angle adjusting part are all provided with Put on a platform base, and be respectively positioned on the lower section of the solid state laser.
- 3. the optical path adjustment device of solid state laser according to claim 2, it is characterised in that：The platform base uses Marble slab or stainless steel plate make.
- 4. the optical path adjustment device of solid state laser according to claim 1, it is characterised in that：The solid state laser Bottom is provided with a beam, which is located at horizontal X direction position adjustment component, horizontal Y-direction position adjustment component, hangs down The top of straight Z-direction position adjustment component and vertical angle adjusting part.
- 5. the optical path adjustment device of solid state laser according to claim 4, it is characterised in that：The beam uses rubber Offset plate makes.
- 6. the optical path adjustment device of solid state laser according to claim 1, it is characterised in that：The vertical angle is adjusted The fixing end of component is arranged on a bracket stable component, which is located under the solid state laser front end Side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721329649.3U CN207303647U (en) | 2017-10-14 | 2017-10-14 | A kind of optical path adjustment device of solid state laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721329649.3U CN207303647U (en) | 2017-10-14 | 2017-10-14 | A kind of optical path adjustment device of solid state laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207303647U true CN207303647U (en) | 2018-05-01 |
Family
ID=62414386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721329649.3U Active CN207303647U (en) | 2017-10-14 | 2017-10-14 | A kind of optical path adjustment device of solid state laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207303647U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109143529A (en) * | 2018-08-30 | 2019-01-04 | 大连理工大学 | A kind of precision adjustment unit of highly integrated adjustment light path angle and position |
| CN112751252A (en) * | 2020-12-11 | 2021-05-04 | 湖州师范学院求真学院 | Line laser generator |
-
2017
- 2017-10-14 CN CN201721329649.3U patent/CN207303647U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109143529A (en) * | 2018-08-30 | 2019-01-04 | 大连理工大学 | A kind of precision adjustment unit of highly integrated adjustment light path angle and position |
| CN112751252A (en) * | 2020-12-11 | 2021-05-04 | 湖州师范学院求真学院 | Line laser generator |
| CN112751252B (en) * | 2020-12-11 | 2022-05-31 | 湖州师范学院求真学院 | Line laser generator |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 518000 The first floor of plant 4 #, Shengzuozhi Science and Technology Industrial Park, north of Xinyu Road, Shajing Street, Bao'an District, Shenzhen, Guangdong Patentee after: Shenzhen Longtu Optical Mask Co.,Ltd. Address before: 518000 The first floor of plant 4 #, Shengzuozhi Science and Technology Industrial Park, north of Xinyu Road, Shajing Street, Bao'an District, Shenzhen, Guangdong Patentee before: SHENZHEN LONGTU PHOTOMASK CO.,LTD. |