CN207300820U - It is a kind of to be used to measure under rated differential head film to the system of specific gas leak rate - Google Patents
It is a kind of to be used to measure under rated differential head film to the system of specific gas leak rate Download PDFInfo
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- CN207300820U CN207300820U CN201721306678.8U CN201721306678U CN207300820U CN 207300820 U CN207300820 U CN 207300820U CN 201721306678 U CN201721306678 U CN 201721306678U CN 207300820 U CN207300820 U CN 207300820U
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Abstract
It is used to measure the system of film under rated differential head to specific gas leak rate the utility model discloses a kind of, including：First cavity, second cavity and film mounting flange, described first cavity one end is connected with multiple pressure valve, the first cavity top is connected with the first film rule, the first cavity lower part is connected with third gear plate valve and fourth gear plate valve, fourth gear plate valve is connected with flowmeter, the third gear plate valve is connected by pipeline with the second cavity, the first cavity top is connected with first gear plate valve, the first gear plate valve connects through pipeline with film mounting flange, the film mounting flange connects through pipeline with the second cavity, the second cavity top is connected with the second film rule, the second cavity lower part is connected to mechanical pump through second gear plate valve.The utility model can directly testing film under rated differential head to specific gas leak rate, compensate for the deficiency that conventional Helium Leak Test is needed to convert or even can not implemented.
Description
Technical field
It the utility model is related to technical field of vacuum, and in particular to one kind is used to measure under rated differential head film to specific gas
The system of body drain rate.
Background technology
Leak detection is to evaluate one of important indicator that can vacuum system and parts effectively run, so just needing essence
True measures leak rate.
One leak rate of accurate definition, it is necessary to when the pressure difference of clear and definite leakage hole both sides, the medium of leakage and measurement leak rate
Environment temperature and humidity.
Conventional leakage detection method, there is leak detection by bubbles, pressure change leak detection, halogen leak detection, helium mass spectrum leak detection etc., wherein
Pressure change leak detection, halogen leak detection, helium mass spectrum leak detection can accurately obtain leak rate value, and halogen leak detector is using less, application at present
It is exactly most widely helium mass spectrometer leak detecting technology in technical field of vacuum.
Helium mass spectrometer leak detecting technology can be widely used in the leakage rate measurement and sealing performance of vacuum or pressure-containing member
Evaluation, but need workpiece being described with the leak rate to helium, it is conventional to be expressed as " pressure of the component in an atmospheric pressure
Under poor (or helium of certain pressure intensity), 1.0E-9pam is not more than to the leak rate of helium3This methods of/s ", can for evaluation
It is can occurring because the pressure of vacuum component caused by air leaks into rises, be very reliable, but accurately to calculate
Come the display that converts be inaccurate by helium leak rate when one working media is the special gas of specified pressure, moreover, when leak rate value compared with
When big, the ion gun of helium mass spectrum leak detection equipment, which can not even start, to be caused to work, so having to seek more effective standard
True leakage rate measurement method.
Utility model content
The technical problem to be solved by the utility model is to provide one kind to be used to measure under rated differential head film to specific
The system of gas leak rate, for measuring leak rate of the Special Film to specific gas under rated differential head.
Technical problem to be solved in the utility model is realized using following technical scheme：
It is a kind of to be used to measure the system of film under rated differential head to specific gas leak rate, including：First cavity, the second cavity
With film mounting flange, described first cavity one end is connected with multiple pressure valve, and the first cavity top is connected with the first film rule,
The first cavity lower part is connected with third gear plate valve and fourth gear plate valve, and fourth gear plate valve is connected with flowmeter, and the described 3rd
Flapper valve is connected by pipeline with the second cavity, and the first cavity top is connected with first gear plate valve, the first gear plate valve
Connect through pipeline with film mounting flange, the film mounting flange connects through pipeline with the second cavity, on second cavity
Portion is connected with the second film rule, and the second cavity lower part is connected to mechanical pump through second gear plate valve.
The first film rule and the second film rule use Capacitance Diaphragm Gauge, the milli of response time 30 of the Capacitance Diaphragm Gauge
Second.
The film mounting flange includes female flange, outer O-ring, plane face flange, square flange, steel wire and inner seal ring,
The plane face flange connects through square flange with female flange, and the outer O-ring and inner seal ring are connected to the groove on the inside of female flange
In mouthful, and the outer O-ring is located on the outside of inner seal ring, and the steel wire is between inner seal ring and square flange.
The inner seal ring is between female flange and steel wire.
The utility model devises the erecting device of a film, realizes the installation and sealing of film, devises two chambers
Body, film erecting device is connected with two cavitys, by the way that special gas are vacuumized and be filled with to cavity, makes film both sides
A specified pressure difference is produced, employs two response times, 30 milliseconds of Capacitance Diaphragm Gauge to detect pressure values in real time, according to
The mode that static pressure rises and pressure drop is combined, calculates film under the pressure to the leak rate of such a special gas.
Measuring method is as follows：
Film to be measured is installed between steel wire and inner seal ring, then film mounting flange is connected with two cavitys；
Whole test system installs, and all valves are closed, to carrying out helium mass spectrum inspection at all sealings of system
Leakage, leak rate are below 1.0E-9pam3/ s, test target are leakage of 0.5 μm of polyethylene film under 5000pa argon gas pressure differences
Rate.
First, second gear plate valve and third gear plate valve are opened, starts mechanical pump, two cavitys are vacuumized, work as pressure
Tend towards stability, close two second gear plate valves and third gear plate valve, the second cavity is filled with by fourth gear plate valve and flowmeter
5000pa argon gas, after the completion of close fourth gear plate valve.
The numerical value for having recorded the first film rule 1 and the second film rule is P1, P2 (unit pa), opens first gear plate valve,
Recording t, (value of the first cavity and the second film rule is P1 ' and P2 ' after the unit s) times, then the film is under 5000pa pressure differences
Leak rate to argon gas is：
Q=(P1-P1 ') V2/t or Q=(P2 '-P2) V1/t
The first film rule, the numerical value of the second film rule, pa when wherein P1, P2- monitoring start
The first film rule, the numerical value of the second film rule, pa at the end of P1 ', P2- are monitored
The volume of the first cavity of V1, V2- and the second cavity, wherein L, V1=190L V2=210L
T- monitors duration, s
Measured data, P1=5012pa, P1 '=4097pa, P1=7pa, P1 '=21pa, t=1800s
Q=(P1-P1 ') V2/t=1.58pal/s or Q=(P2 '-P2) V1/t=1.63pal/s
Conclusion：0.5 μm of polyethylene film is about that 1.6pal/s can be seen that to the leak rate of argon gas under 5000pa pressure differences
The resultant error very little of method calculating is risen by 1 static drop method of cavity and the second cavity static pressure, fully meets design requirement.
The beneficial effects of the utility model are：The utility model can directly testing film under rated differential head to specific gas
Body drain rate, thin-film material, gaseous species can select as needed, and applicable pressure differential range is very wide, compensate for conventional helium mass spectrum
The deficiency that leak hunting method is needed to convert or even can not implemented, is follow-up Vacuum System Design, the configuration provides of extract system standard
True foundation.
Brief description of the drawings
Fig. 1 is Tthe utility model system structure chart；
Fig. 2 is the structure chart of the utility model film mounting flange；
Fig. 3 is partial enlarged view in Fig. 2.
Embodiment
In order to make the technical means, creative features, achievable purpose and effectiveness that the utility model is realized easy to understand, under
Face combines and is specifically illustrating, and the utility model is expanded on further.
As shown in Figs. 1-3, it is a kind of to be used to measure the system of film under rated differential head to specific gas leak rate, including：First
Cavity 2, the second cavity 7 and film mounting flange 5,2 one end of the first cavity are connected with multiple pressure valve 1, and 2 top of the first cavity is connected with
The first film rule 3,2 lower part of the first cavity is connected with third gear plate valve 10 and fourth gear plate valve 11, and fourth gear plate valve 11 is connected with
Flowmeter 12, third gear plate valve 10 are connected by pipeline with the second cavity 7, and 2 top of the first cavity is connected with first gear plate valve 4,
First gear plate valve 4 connects through pipeline with film mounting flange 5, and film mounting flange 5 connects through pipeline with the second cavity 7, and second
7 top of cavity is connected with the second film rule 6, and 7 lower part of the second cavity is connected to mechanical pump 9 through second gear plate valve 8.The first film is advised
3 and second film rule 6 use Capacitance Diaphragm Gauge, 30 milliseconds of the response time of the Capacitance Diaphragm Gauge.Film mounting flange 5 includes
Female flange 501, outer O-ring 502, plane face flange 503, square flange 504, steel wire 505 and inner seal ring 506, plane face flange 503 pass through
Square flange 504 connects with female flange 501, and outer O-ring 502 and inner seal ring 506 are connected to the notch of the inner side of female flange 501
It is interior, and outer O-ring 502 is located at the outside of inner seal ring 506, steel wire 505 is interior between inner seal ring 506 and square flange 504
Sealing ring 506 is between female flange 501 and steel wire 505.
Measuring method is as follows：
Film 507 to be measured is installed between steel wire 505 and inner seal ring 506, then by film mounting flange 5 and two
Cavity connects；
Whole test system installs, and all valves are closed, to carrying out helium mass spectrum inspection at all sealings of system
Leakage, leak rate are below 1.0E-9pam3/ s, test target are leakage of 0.5 μm of polyethylene film under 5000pa argon gas pressure differences
Rate.
First, 8 (flapper valves 2) and 10 (flapper valves 3) are opened, starts mechanical pump, two cavitys are vacuumized, work as pressure
Tend towards stability, close two valves, 5000pa argon gas is filled with to 2 (cavitys 1) by 11 (flapper valves 4) and 12 (flowmeters), it is complete
11 are closed into rear.
Record 2 (film rule 1) and the numerical value of 6 (film rule 2) are P1, P2 (unit pa), open 4 (flapper valves 1), note
Recording t, (2 and 6 value is P1 ' and P2 ' after the unit s) times, then the film is to the leak rate of argon gas under 5000pa pressure differences：
Q=(P1-P1 ') V2/t or Q=(P2 '-P2) V1/t
The numerical value of Capacitance Diaphragm Gauge 1,2, pa when wherein P1, P2- monitoring start
The numerical value of Capacitance Diaphragm Gauge 1,2, pa at the end of P1 ', P2- are monitored
The volume of V1, V2- cavity 1 and 2, wherein L, V1=190L V2=210L
T- monitors duration, s
Measured data, P1=5012pa, P1 '=4097pa, P1=7pa, P1 '=21pa, t=1800s
Q=(P1-P1 ') V2/t=1.58pal/s or Q=(P2 '-P2) V1/t=1.63pal/s
Conclusion：0.5 μm of polyethylene film is about that 1.6pal/s can be seen that to the leak rate of argon gas under 5000pa pressure differences
The resultant error very little of method calculating is risen by 1 static drop method of cavity and 2 static pressure of cavity, fully meets design requirement.
The advantages of basic principle and main feature and the utility model of the utility model has been shown and described above.One's own profession
The technical staff of industry is it should be appreciated that the present utility model is not limited to the above embodiments, described in above embodiments and description
Simply illustrate the utility model principle, on the premise of not departing from the spirit and scope of the utility model, the utility model is also
Various changes and modifications are had, these various changes and improvements fall within the scope of the claimed invention.The utility model
Claimed scope is defined by the appending claims and its equivalent thereof.
Claims (5)
1. a kind of be used to measure under rated differential head film to the system of specific gas leak rate, it is characterised in that including：First cavity,
Second cavity and film mounting flange, described first cavity one end are connected with multiple pressure valve, and the first cavity top is connected with
One film is advised, and the first cavity lower part is connected with third gear plate valve and fourth gear plate valve, and fourth gear plate valve is connected with flowmeter,
The third gear plate valve is connected by pipeline with the second cavity, and the first cavity top is connected with first gear plate valve, and described
One flapper valve connects through pipeline with film mounting flange, and the film mounting flange connects through pipeline with the second cavity, and described
Two cavity tops are connected with the second film rule, and the second cavity lower part is connected to mechanical pump through second gear plate valve.
2. it is according to claim 1 it is a kind of be used to measure the system of film under rated differential head to specific gas leak rate, it is special
Sign is：The first film rule and the second film rule use Capacitance Diaphragm Gauge.
3. it is according to claim 1 it is a kind of be used to measure the system of film under rated differential head to specific gas leak rate, it is special
Sign is：The film mounting flange includes female flange, outer O-ring, plane face flange, square flange, steel wire and inner seal ring, institute
State plane face flange through square flange with female flange to connect, the outer O-ring and inner seal ring are connected to the notch on the inside of female flange
It is interior, and the outer O-ring is located on the outside of inner seal ring, the steel wire is between inner seal ring and square flange.
4. it is according to claim 3 it is a kind of be used to measure the system of film under rated differential head to specific gas leak rate, it is special
Sign is：The inner seal ring is between female flange and steel wire.
5. it is according to claim 2 it is a kind of be used to measure the system of film under rated differential head to specific gas leak rate, it is special
Sign is：30 milliseconds of the response time of the Capacitance Diaphragm Gauge.
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| CN201721306678.8U CN207300820U (en) | 2017-10-11 | 2017-10-11 | It is a kind of to be used to measure under rated differential head film to the system of specific gas leak rate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107703043A (en) * | 2017-10-11 | 2018-02-16 | 合肥科烨电物理设备制造有限公司 | It is a kind of to be used to measure under rated differential head film to the system of specific gas leak rate |
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- 2017-10-11 CN CN201721306678.8U patent/CN207300820U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107703043A (en) * | 2017-10-11 | 2018-02-16 | 合肥科烨电物理设备制造有限公司 | It is a kind of to be used to measure under rated differential head film to the system of specific gas leak rate |
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