CN207290582U - A kind of vacuum adsorption fixing device used during digital control processing - Google Patents
A kind of vacuum adsorption fixing device used during digital control processing Download PDFInfo
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- CN207290582U CN207290582U CN201721116210.2U CN201721116210U CN207290582U CN 207290582 U CN207290582 U CN 207290582U CN 201721116210 U CN201721116210 U CN 201721116210U CN 207290582 U CN207290582 U CN 207290582U
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- vacuum
- fixing device
- digital control
- control processing
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Abstract
The utility model discloses the vacuum adsorption fixing device used during a kind of digital control processing, including the vacuum extractor for adsorbing the suction tray of retaining element and being vacuumized to suction tray, suction tray includes chassis and side wall, and vacuum extractor includes vacuum generator and control valve.The utility model carries out retaining element use with CNC digital control processing lathes.Suction tray is vacuumized with vacuum generator, vacuum chamber is formed in central channel, vacuum can control, so part adsorption capacity is controllable, absorption stability is good.The absorption of part and release are completed by controlling control valve, operation is more convenient and stablizes, time saving and energy saving.Whole process suction tray working face and feature contacts so that part outside diameter can disposably be completed to process, and improve processing efficiency and avoid trueness error caused by part reprocessabilty outside diameter.
Description
Technical field
The utility model belongs to semiconductor processing equipment technical field, and in particular to the vacuum used during a kind of digital control processing
Absorption fixation device.
Background technology
Digital control processing, refers to a kind of process that part processing is carried out on numerically-controlled machine tool, numerically-controlled machine tool processing and biography
The technological procedure of system machine tooling says it is consistent on the whole, but also there occurs obvious change.With digital information control zero
The machining process of part and tool displacement.It is to solve the problems such as part kind is changeable, batch is small, complex-shaped, precision is high
With the effective way for realizing high efficiency and automation processing.
In sophisticated semiconductor industry, during to part physical form Precision Machining, the appearance of CNC numerical control devices solves well
The efficiency of part dimension batch machining.For CNC numerical control devices, precision is high, and speed is fast, and mass is that it is maximum
Advantage, but since in machine operation procedure, due to the influence of some uncontrollable factors, the product for making to process always occurs
Some problems, such as processing lines are uneven, damaged, chipping, cut, and flatness is bad etc., especially for fragile material
Speech, such as the semiconductor product such as silicon, material is crisp and hard, machining accuracy, lines, and the requirement such as flatness is all very high.
When being processed at this stage with CNC numerically-controlled machine tools to part, gripped by conventional mechanical fixture, and hand
Dynamic adjustment fixture is clamped part using multiple spot, after adjusting the mode for clamping part, then is adjusted to the pressure of parts locally contact point
Whole concentric position, reaches the effect of accurate processing part.Generally conventional property mechanical clamp is the circle of a similar bench vice structure
Chuck, by three to four metal claws by lead screw transmission, is clamped in part outside diameter smaller area, and carry out retaining element with this.
Above-mentioned stationary fixture has many defects, and it is uneven not only result in part stress, uncontrollable, and is easily destroyed table
Part is clamped by chuck because of outside diameter while the integrity degree of face, and long processing time, efficiency is low, and outside diameter processes uneven, concentricity
Grasp bad, it is easy to take part caused by processing is unqualified.Part outside diameter just needs to process at twice, thus the region easily by
Power is uneven, causes part flatness variation, scuffing, cut and chipping phenomenon.And when processing, worker's experience adjustments can only be leaned on to press from both sides
Having pressure, carry out clamping and simultaneously adjust part concentricity, when another side to be processed, adjusts pressure repeatedly again, and so on, if plus
The number of parts of work is more, then time-consuming and laborious.
In view of the above-mentioned problems, propose the utility model.
Utility model content
The utility model proposes the vacuum adsorption fixing device that a kind of digital control processing uses, and one of part wouldn't be added
Work face is placed on the suction tray of fixing device, and then sucker is fixed on lathe, then passes through supporting vacuum extractor pair
Suction tray is vacuumized, and part can be absorbed and fixed on suction tray, can be by the absorption of application by adjusting vacuum
Power is changed into free controllable state, by the use of the utility model, that is, can guarantee that part uniform force when fixing, reduces clamping
Hard contact, outside diameter, which is completely released, to be processed at one time, and improved clamping and adjusted the efficiency of part concentricity.By it is artificial because
Element influences to be minimized, and the cost that saves manpower and time.
To realize above-mentioned purpose of utility model, the technical solution of the utility model is：What is used during a kind of digital control processing is true
Empty absorption fixation device, including the vacuum extractor for adsorbing the suction tray of retaining element and being vacuumized to suction tray；
Suction tray includes circular base plate, and along chassis periphery integrally formed with side wall, side wall top is smooth plane, side wall
Top be equipped with the annular center groove coaxial with chassis, be equipped with coaxial annular boss in central channel, the height at the top of boss is less than
Central channel is separated into the first groove and the second groove by the height on side wall top, boss, further include one be used for vacuumize it is true
Empty passage, the entrance of vacuum passage are arranged on boss, and vacuum passage is extended in chassis from the opening's edge interior that enters on boss
The heart, the outlet of vacuum passage further include several mounting holes on chassis on the center of tray bottom, chassis.
Vacuum extractor includes vacuum generator, and the air entry of vacuum generator connects control valve, control by the first pipeline
Valve processed is detachably connected the outlet of tray bottom by second pipe.
Further, corresponding gasket seal is respectively equipped with the first groove and the second groove, gasket seal is elastic material
Material is made.
Further, the height at the top of gasket seal is higher than the height on side wall top.
Further, the first pipeline is equipped with vacuum buffer tank.
Further, second pipe is equipped with tank.
Further, control valve to the second pipe between tank is equipped with pressure gauge.
Further, second pipe is equipped with swivel coupling close to one end of suction tray.
Further, control valve is foot control valve.
Further, suction tray is installed on the main shaft of lathe or on workbench by the mounting hole on chassis.
Further, when suction tray is installed on the main shaft of lathe by the mounting hole on chassis, swivel coupling to suction tray
Between second pipe be placed in hollow spindle tube.
The beneficial effects of the utility model are：
The absorption fixation device of the utility model, including suction tray and the vacuum extractor that is vacuumized to suction tray,
Mainly it is used for that part use is fixed on CNC digital control processing lathes.Suction tray is vacuumized with vacuum generator, in
Vacuum chamber is formed in heart groove, vacuum can control, so part adsorption capacity is controllable, absorption stability is good, and due to absorption
Disk side wall top is smooth plane, avoids damaging part caused by unbalance stress.And completed by controlling control valve
The absorption and release of part, operation is more convenient and stablizes, time saving and energy saving.Whole process suction tray working face connects with part
Touch so that part outside diameter can disposably be completed to process, and improve processing efficiency and avoid smart caused by part reprocessabilty outside diameter
Spend error.
Brief description of the drawings
When considered in conjunction with the accompanying drawings, by referring to following detailed description, it can more completely more fully understand that this practicality is new
Type and easily learn many of which with the advantages of, but attached drawing described herein is used for providing to the utility model into one
Step understands, forms the part of the utility model, and the schematic description and description of the utility model is used to explain this practicality
It is new, the improper restriction to the utility model is not formed, wherein：
Fig. 1 is that the side section structure of the vacuum adsorption fixing device used during a kind of digital control processing of the utility model is shown
It is intended to；
Fig. 2 is the top structure signal of the vacuum adsorption fixing device used during a kind of digital control processing of the utility model
Figure；
Fig. 3 is the polycrystalline substance signal of the vacuum adsorption fixing device used during a kind of digital control processing of the utility model
Figure；
Fig. 4 is that the vacuum adsorption fixing device that is used during a kind of digital control processing of the utility model is installed on vehicle window main shaft
When structure diagram；
Fig. 5 is when being installed on workbench of vacuum adsorption fixing device used during a kind of digital control processing of the utility model
Structure diagram；
In figure：1- chassis, 2- side walls, 3- vacuum passages, 31- outlets, 32- entrances, 4- parts, the first grooves of 5-, 6- the
Two grooves, 7- mounting holes, 8- boss, the first pipelines of 9-, 10- vacuum generators, 11- control valves, 12- second pipes, 13- water storages
Container, 14- pressure gauges, 16- workbench, 17- vacuum buffer tanks, 18- swivel couplings.
Embodiment
Below in conjunction with attached drawing to the utility model, the technical scheme in the embodiment of the utility model is carried out clear, complete
Site preparation describes.
Such as Fig. 1-5, vacuum adsorption fixing device that when a kind of digital control processing uses, including for adsorbing retaining element 4
Suction tray and the vacuum extractor vacuumized to suction tray；
Suction tray includes circular base plate 1, and along 1 periphery of chassis integrally formed with side wall 2,2 top of side wall is smooth plane,
The top of side wall 2 is equipped with the annular center groove coaxial with chassis 1, and coaxial annular boss 8 is equipped with central channel, the top of boss 8
Highly it is less than the height on 2 top of side wall, central channel is separated into the first groove 5 and the second groove 6, further includes a use by boss 8
In the vacuum passage 3 vacuumized, the entrance 32 of vacuum passage 3 is arranged on boss 8, and vacuum passage 3 is from 32 edge of entrance on boss 8
For 2 internal stretch of side wall to 1 center of chassis, the outlet 31 of vacuum passage 3 is arranged on the center of 1 bottom of chassis, is also wrapped on chassis 1
Include and several run through the One On The Chassis mounting hole 7.
Vacuum extractor includes vacuum generator 10, and the air entry of vacuum generator 10 is connected by the first pipeline 9 to be controlled
Valve 11, control valve 11 are detachably connected the outlet 31 of tray bottom by second pipe 12.
Operation principle：The one side that part 4 is not processed temporarily is positioned over the upper of suction tray, then starts vacuum generator and opens
Beginning vacuumizes, and the vacuum vacuumized to suction tray is controlled using control valve, since the side wall top plan of suction tray is flat
Whole smooth structure, so the vacuum space of negative pressure is pumped into the space between central channel and part, part can be fixed on suction
On attached disk, a surface of part and whole outside diameter can be both processed.Machine rear closing control valve and stop vacuum
Generator discharges part, more convenient and stable with traditional mechanical clamp operation.
Corresponding gasket seal, gasket seal are respectively equipped with more preferably technical solution, the first groove 5 and the second groove 6
It is made of elastic material.Here elastic material can select rubber or silica gel pad etc., and sealing effect is good, and and part
Scuffing is not produced during contact.
More preferably technical solution, the height at the top of gasket seal are higher than the height on 2 top of side wall.Gasket seal and boss
Between form vacuum space, sealing effect is more preferable, and part can more stable fixation.
More preferably technical solution, the first pipeline 9 are equipped with vacuum buffer tank 17, i.e. the first pipeline is broken by vacuum buffer tank
Open, one end connects the entrance of vacuum buffer tank, and the other end connects the outlet of vacuum buffer tank.There is provided to whole vacuum suction system
More stable vacuum action.
More preferably technical solution, second pipe 12 are equipped with tank 13.The connection side of second pipe and tank
Formula is identical with the connection mode of the first pipeline with above-mentioned vacuum buffer tank.The main function of tank is exactly to play air and water
Separated effect.The vapor under vacuum environment in air is avoided to be condensed into water so as to blocking pipeline or application valve body, processing
When cutting fluid be inhaled into vacuum suction system.
More preferably technical solution, control valve 11 to the second pipe 12 between tank 13 are equipped with pressure gauge 14.With
It whether there is gas leak phenomenon in detection part and vacuum suction system, if there are gap between parts to be processed and suction tray,
Then vacuum table index reduces, this shows that part installation is not firm, easily throws away operating position by centrifugal force, causes danger and damage
It is bad.
More preferably technical solution, second pipe are equipped with swivel coupling 18 close to one end of suction tray.It is mainly used for the system
Situation on lathe, because the operation principle of lathe causes main shaft to rotate at a high speed, it is therefore necessary to using swivel coupling, if
The system is installed on machining center need not then use the component when in equipment, be directly mounted on workbench.
More preferably technical solution, control valve 11 are foot control valve, and the vacuum vacuumized is controlled with foot-operated mode, solution
Put both hands.
More preferably technical solution, suction tray is installed on by the One On The Chassis mounting hole 7 on the main shaft of lathe or workbench
On 16.
More preferably technical solution, when suction tray is installed on the main shaft of lathe by the One On The Chassis mounting hole 7, swivel coupling
18 are placed in hollow spindle tube to the second pipe 12 between suction tray.
Work step：
1. answering held by both hands parts to be processed during operation, slowly abut on suction tray.
2. trampling vacuum switch with foot, part is set to be completely fixed on suction tray.
3. checking vacuum table, pressure value is read after pointer complete stability, determines whether gas leak phenomenon and confirmation zero
Part firmly installs errorless.
4. the concentricity of dozen table detection part, appropriate closing vacuum suction are gently adjusted to standard value.
5. it can be processed after checking concentricity and adsorption capacity qualification.
6. after machining, held by both hands part, after stepping on foot controller release vacuum adsorption force, takes out part, completes
Processing.
In conclusion the absorption fixation device of the utility model, including suction tray and the pumping that is vacuumized to suction tray
Vacuum plant, is mainly used for that part use is fixed on CNC digital control processing lathes.Suction tray is carried out with vacuum generator
Vacuumizing, vacuum chamber is formed in central channel, vacuum can control, so part adsorption capacity is controllable, absorption stability is good, and
Since suction tray side wall top is smooth plane, avoid damaging part caused by unbalance stress.And by controlling
Valve completes the absorption of part and release, and operation is more convenient and stablizes, time saving and energy saving.Whole process suction tray working face
With feature contacts so that part outside diameter can disposably be completed to process, when improving processing efficiency and avoiding part reprocessabilty outside diameter
The trueness error of generation.
Claims (10)
1. the vacuum adsorption fixing device used during a kind of digital control processing, it is characterised in that including for adsorbing retaining element (4)
Suction tray and the vacuum extractor that is vacuumized to suction tray；
Suction tray includes circular base plate (1), and along chassis (1) periphery integrally formed with side wall (2), side wall (2) top is smooth
Plane, the top of side wall (2) are equipped with the annular center groove coaxial with chassis (1), coaxial annular boss (8) are equipped with central channel,
Height at the top of boss (8) is less than the height on side wall (2) top, and central channel is separated into the first groove (5) and second by boss (8)
Groove (6), further includes a vacuum passage (3) for being used to vacuumize, and the entrance (32) of vacuum passage (3) is arranged on boss (8),
Vacuum passage (3) from the entrance (32) on boss (8) along side wall (2) internal stretch to chassis (1) center, vacuum passage (3)
The center that (31) are arranged on chassis (1) bottom is exported, several mounting holes on chassis (1) are further included on chassis (1)
(7)；
Vacuum extractor includes vacuum generator (10), and the air entry of vacuum generator (10) is connected by the first pipeline (9) to be controlled
Valve (11) processed, control valve (11) are detachably connected the outlet (31) of tray bottom by second pipe (12).
2. the vacuum adsorption fixing device used during a kind of digital control processing according to claim 1, first groove (5)
With the second groove (6) in be respectively equipped with corresponding gasket seal, gasket seal is made of elastic material.
3. the vacuum adsorption fixing device used during a kind of digital control processing according to claim 2, it is characterised in that sealing
The height at the top of gasket is higher than the height on side wall (2) top.
4. the vacuum adsorption fixing device used during a kind of digital control processing according to claim 3, it is characterised in that first
Pipeline (9) is equipped with vacuum buffer tank (17).
5. the vacuum adsorption fixing device used during a kind of digital control processing according to claim 3, it is characterised in that second
Pipeline (12) is equipped with tank (13).
6. the vacuum adsorption fixing device used during a kind of digital control processing according to claim 5, it is characterised in that control
Valve (11) to the second pipe (12) between tank (13) is equipped with pressure gauge (14).
7. the vacuum adsorption fixing device used during a kind of digital control processing according to claim 3, it is characterised in that second
Pipeline is equipped with swivel coupling (18) close to one end of suction tray.
8. the vacuum adsorption fixing device used during digital control processing a kind of according to claim 1-7 any one of them, its feature
It is, control valve (11) is foot control valve.
9. the vacuum adsorption fixing device used during a kind of digital control processing according to claim 7, it is characterised in that absorption
Disk by the mounting hole (7) on chassis (1) be installed on the main shaft of lathe or workbench (16) on.
10. the vacuum adsorption fixing device used during a kind of digital control processing according to claim 9, it is characterised in that inhale
When attached disk is installed on the main shaft of lathe by the mounting hole (7) on chassis (1), swivel coupling (18) to second between suction tray
Pipeline (12) is placed in hollow spindle tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721116210.2U CN207290582U (en) | 2017-09-01 | 2017-09-01 | A kind of vacuum adsorption fixing device used during digital control processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721116210.2U CN207290582U (en) | 2017-09-01 | 2017-09-01 | A kind of vacuum adsorption fixing device used during digital control processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207290582U true CN207290582U (en) | 2018-05-01 |
Family
ID=62438529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721116210.2U Active CN207290582U (en) | 2017-09-01 | 2017-09-01 | A kind of vacuum adsorption fixing device used during digital control processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207290582U (en) |
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2017
- 2017-09-01 CN CN201721116210.2U patent/CN207290582U/en active Active
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