CN207251944U - Fast heater - Google Patents
Fast heater Download PDFInfo
- Publication number
- CN207251944U CN207251944U CN201721007320.5U CN201721007320U CN207251944U CN 207251944 U CN207251944 U CN 207251944U CN 201721007320 U CN201721007320 U CN 201721007320U CN 207251944 U CN207251944 U CN 207251944U
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- China
- Prior art keywords
- metallic plate
- temperature
- electrode
- negative electrode
- microprocessor
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Abstract
The utility model discloses a kind of fast heater.The fast heater, including furnace body, further include one or more layers metallic plate 10 and heating wire 8 being arranged on furnace body, the top of the metallic plate 10, which is equipped with, gathers light fiber coat 23, the top for gathering light fiber coat 23 is additionally provided with the ultra-high temp coating 24 of high reflectance, and the metallic plate 10, poly- light fiber coat 23 and ultra-high temp coating 24 are integrated；On the basis of 10 integral structure of metallic plate, also have additional multiple semiconductor refrigeration chips 25 and multiple temperature sensors 26, the temperature that the temperature sensor 26 detects metallic plate 10 in real time controls semiconductor refrigeration chip 25 to carry out heating and cooling to metallic plate 10 by microprocessor 27, further speeds up temperature rate.The utility model has the advantages that rate of temperature fall is high, with short production cycle, production cost is relatively low, the degree of automation is high, service life is long.
Description
Technical field
It the utility model is related to a kind of heater, and in particular to a kind of fast heater.
Background technology
It is traditionally used in the thin-film material production equipment of semiconductor applications, the heater heating and cooling heated to substrate
Speed is slower, and the uniformity of heating is difficult to ensure that, directly affects quality and the production cycle of film.Prepare and partly lead in the prior art
Film material has the temperature uniformity of heater, temperature rate and service life very high requirement.Existing Gao Gong
Not only warming and cooling rate is relatively slow, production cost is higher for rate heater, but also service life is shorter.
The content of the invention
In order to solve defect existing in the prior art, the utility model provides a kind of fast heater, lifting
Warm speed is high, with short production cycle, production cost is relatively low, the degree of automation is high, service life length.
In order to achieve the above object, the technical solution that the utility model is taken is as follows：
A kind of fast heater, including furnace body, further include one or more layers metallic plate 10 being arranged on furnace body
With heating wire 8, the top of the metallic plate 10, which is equipped with, gathers light fiber coat 23, and the top for gathering light fiber coat 23 is additionally provided with
The ultra-high temp coating 24 of high reflectance, the metallic plate 10, poly- light fiber coat 23 and ultra-high temp coating 24 are integrated；
Multiple semiconductor refrigeration chips 25 and multiple temperature sensors 26 are further included, the semiconductor refrigeration chip 25 is uniformly distributed
In the bottom of metallic plate 10, the temperature sensor 26 is distributed on the top of ultra-high temp coating 24 and the bottom of metallic plate 10, institute
The bottom interval that temperature sensor 26 and semiconductor refrigeration chip 25 are stated in metallic plate 10 is set.
Further, microprocessor 27 and temperature display unit 28, the temperature sensor 26, semiconductor refrigerating are further included
Chip 25 and temperature display unit 28 are electrically connected with microprocessor 27；The microprocessor 27 is located at the inside of furnace body.
Further, the temperature sensor 26 is used for the temperature for detecting metallic plate 10 and ultra-high temp coating 24, will detect
To temperature be transferred to microprocessor 27, by microprocessor 27 temperature display unit 28 carry out real-time display；
When the temperature that the temperature sensor 26 detects metallic plate 10 is higher than the preset value upper limit, controlled by microprocessor 27
Semiconductor refrigeration chip 25 cools down metallic plate 10；The temperature sensor 26 detects the temperature of metallic plate 10 less than default
When being worth lower limit, semiconductor refrigeration chip 25 is controlled to heat up metallic plate 10 by microprocessor 27.
Further, the temperature display unit 28 is touch display screen, positioned at the outer surface of furnace body.
Further, the electrode 13 being arranged in furnace body, positive electrode 15, the first secure component 1, the second fastening part are further included
2 and the 3rd secure component 6 of part, multiple insulating parts and multiple supporting racks 9；
The negative electrode 13 is fixedly connected by the first secure component 1 and insulating part with 10 integral structure of metallic plate, and
Positioned at the lower section of metallic plate 10, the positive electrode 15 is fixedly connected simultaneously by the 3rd secure component 6 and insulating part with negative electrode 13
Insulation, and positioned at the lower section of negative electrode 13；The positive electrode 15 draws downwards the positive pin 20 of device electrode, and insulation is through negative upwards
Electrode 13 and 10 integral structure of metallic plate draw heating wire electrode anode 7；Insulation runs through positive electrode to the negative electrode 13 downwards
15 extraction device electrodes bear pin 16, conductive upwards to draw heating wire Electrode Negative 5 through 10 integral structure of negative metallic plate；
The heating wire 8 is supported in the top of 10 integral structure of metallic plate by supporting rack 9, and support frame as described above 9 insulate
It is fixed on through 10 integral structure of metallic plate and negative electrode 13 on positive electrode 15.
Further, the insulating part is to gather light fibre pipe.
Further, the electrode bears pin 16 and positive 20 upper end of pin of electrode is fixed by fastener.
Further, fixed plate 14 is further included, the fixed plate 14 passes through the second secure component 2,6 and of the 3rd secure component
Insulating part is fixed between negative electrode 13 and positive electrode 15, and conductive with negative electrode 13.
Beneficial effect：Compared with prior art, the utility model adds poly- light fiber coat on the basis of metallic plate 10
23 and high reflectance ultra-high temp coating 24 formed integral structure so that the integral structure as heater main body every
Heat and insulating materials, can not only improve uniformity, the temperature rate of temperature, and can reduce energy consumption and cost.In gold
On the basis of belonging to 10 integral structure of plate, multiple semiconductor refrigeration chips 25 and multiple temperature sensors 26 are also had additional, it is described
The temperature that temperature sensor 26 detects metallic plate 10 in real time controls semiconductor refrigeration chip 25 to metallic plate by microprocessor 27
10 carry out heating and cooling, further speed up temperature rate.Can be with real-time display metallic plate 10 and super by temperature display unit 28
The temperature of high temperature coating 24, the degree of automation are higher.Gather light fibre pipe using aluminium oxide has preferable insulation as insulating part
Property and heat-resistant stability.
Brief description of the drawings
, below will be to attached needed in embodiment in order to illustrate more clearly of the technical solution of the utility model
Figure is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the utility model, for
For those of ordinary skill in the art, without creative efforts, other can also be obtained according to these attached drawings
Attached drawing.
Fig. 1 is the structure diagram of fast heater described in the utility model；
Fig. 2 is the utility model temperature control principle block diagram.
In figure：The first secure components of 1-, the second secure components of 2-, the first insulating parts of 3-, the second insulating parts of 4-, 5- heating wires
Electrode Negative, the 3rd secure components of 6-, 7- heating wires electrode anode, 8- heating wires, 9- supporting racks, 10- metallic plates, 11- boss
Structure, the 3rd insulating parts of 12-, 13- negative electrodes, 14- fixed plates, 15- positive electrodes, 16- electrodes bear pin, the 4th insulating parts of 17-,
The 5th insulating parts of 18-, the 6th insulating parts of 19-, the positive pin of 20- electrodes, 21- nuts, the 7th insulating parts of 22-, 23- gather light fiber and apply
Layer, 24- ultra-high temp coatings, 25- semiconductor refrigeration chips, 26- temperature sensors, 27- microprocessors, 28- temperature display units.
Embodiment
In the description of the utility model, it is to be understood that term " " center ", " on ", " under ", "front", "rear",
The orientation or position relationship of the instruction such as "left", "right", " vertical ", " level ", " top ", " bottom ", " interior ", " outer " is based on attached drawing institutes
The orientation or position relationship shown, is for only for ease of description the utility model and simplifies description, rather than indicates or imply and is signified
Device or element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to this practicality
New limitation.
Term " first ", " second " be only used for description purpose, and it is not intended that instruction or imply relative importance or
The implicit quantity for indicating indicated technical characteristic.Thus, " first " is defined, the feature of " second " can be expressed or imply
Ground includes one or more this feature.In the description of the utility model, unless otherwise indicated, " multiple " are meant that two
A or two or more.
Embodiment
With reference to figure 1, a kind of fast heater, including furnace body, further includes one or more layers that be arranged on furnace body
Metallic plate 10 and heating wire 8, the top of the metallic plate 10, which is equipped with, gathers light fiber coat 23, the top for gathering light fiber coat 23
Portion is additionally provided with the ultra-high temp coating 24 of high reflectance, and the metallic plate 10, gather light fiber coat 23 and ultra-high temp coating 24 for one
Body structure；The present embodiment gathers light fiber coat 23 described in and gathers light fiber coat, the ultra-high temp coating 24 for aluminium oxide
For nano oxidized aluminized coating.
With reference to figure 1, multiple semiconductor refrigeration chips 25 and multiple temperature sensors 26, the semiconductor refrigerating core are further included
Piece 25 is distributed on the bottom of metallic plate 10, and the temperature sensor 26 is distributed on top and the metallic plate 10 of ultra-high temp coating 24
Bottom, the temperature sensor 26 and semiconductor refrigeration chip 25 are set in the bottom interval of metallic plate 10.
Further, microprocessor 27 and temperature display unit 28 are further included with reference to figure 1-2, the temperature sensor 26,
Semiconductor refrigeration chip 25 and temperature display unit 28 are electrically connected with microprocessor 27；The microprocessor 27 is located at furnace body
It is internal.The temperature sensor 26 is used for the temperature for detecting metallic plate 10 and ultra-high temp coating 24, and the temperature detected is transmitted
To microprocessor 27, real-time display is carried out in temperature display unit 28 by microprocessor 27；The temperature sensor 26 detects
When the temperature of metallic plate 10 is higher than the preset value upper limit, by microprocessor 27 control semiconductor refrigeration chip 25 to metallic plate 10 into
Row cooling；When the temperature that the temperature sensor 26 detects metallic plate 10 is less than preset value lower limit, controlled by microprocessor 27
Semiconductor refrigeration chip 25 heats up metallic plate 10.In the present embodiment, the temperature display unit 28 is touch display screen,
Positioned at the outer surface of furnace body；One kind of the embedded controllers such as the microprocessor 27 is microcontroller, DSP, ARM, FPGA.
Further, with reference to figure 1, the electrode 13 being arranged in furnace body, positive electrode 15, the first secure component 1, are further included
Two secure components 2 and the 3rd secure component 6, multiple insulating parts and multiple supporting racks 9；
With reference to figure 1, the negative electrode 13 is fixed by the first secure component 1 and insulating part with 10 integral structure of metallic plate
Connection, and pass through the 3rd secure component 6 and related perforative 4th insulating part positioned at the lower section of metallic plate 10, the positive electrode 15
17 and the 5th insulating part 18 be fixedly connected and insulate with negative electrode 13, and positioned at negative electrode 13 lower section；The positive electrode 15 to
The lower extraction positive pin 20 of device electrode, upwards insulation draw heating wire electrode through negative electrode 13 and 10 integral structure of metallic plate
Cathode 7；The negative electrode 13 draws device electrode through positive electrode 15 by the 7th insulation downwards of insulating part 22 and bears pin 16, to
It is upper conductive through negative metallic plate 10 integral structure extraction heating wire Electrode Negative 5；The metallic plate 10 passes through the first fastening part
Part 1, the second secure component 2, the first insulating part 3 and the second insulating part 4 are fixed on the top of negative electrode 13.
With reference to figure 1, the heating wire 8 is supported in the top of 10 integral structure of metallic plate, the support by supporting rack 9
Frame 9 is fixed on positive electrode 15 by the insulation of the 3rd insulating part 12 through 10 integral structure of metallic plate and negative electrode 13.It is described
Supporting rack 9 is equipped with boss structure 11, is interfixed by boss structure 11 and the top of the 3rd insulating part 12.The electrode is born
Pin 16 and positive 20 upper end of pin of electrode are fixed by fastener nut.
Further, with reference to figure 1, fixed plate 14 is further included, the fixed plate 14 is tight by the second secure component the 2, the 3rd
Gu component 6, the 6th insulating part 19 and related perforative 4th insulating part 17 and the 5th insulating part 18 are fixed on negative electrode 13 and just
Between electrode 15, and it is conductive with negative electrode 13.Secure component described in the present embodiment is screw rod, and the insulating part gathers for aluminium oxide
Light fibre pipe, has preferable insulating properties and heat-resistant stability.
Negative electrode 13, fixed plate 14,10 integral structure of metallic plate are identical polarity, and when energization connects with power cathode
Logical, positive electrode 15 connects when being powered with positive pole.Electric current enters through the positive pin 20 of connection electrode, is then imported through positive electrode 15
Heating wire electrode anode 7 is passed to heating wire 8, and electric current arrives negative electrode 13 through heating wire Electrode Negative 5, and last connection electrode bears pin
16 form a circuit.
Above is the preferred embodiment of the utility model, it is noted that for those skilled in the art
For, on the premise of the utility model principle is not departed from, some improvements and modifications can also be made, these improvements and modifications
It is considered as the scope of protection of the utility model.
Claims (8)
1. a kind of fast heater, including furnace body, it is characterised in that：Further include one or more layers that be arranged on furnace body
Metallic plate (10) and heating wire (8), the top of the metallic plate (10), which is equipped with, gathers light fiber coat (23), and the poly- light fiber applies
Be additionally provided with the ultra-high temp coating (24) of high reflectance at the top of layer (23), the metallic plate (10), gather light fiber coat (23) and
Ultra-high temp coating (24) is integrated；
Multiple semiconductor refrigeration chips (25) and multiple temperature sensors (26) are further included, the semiconductor refrigeration chip (25) is equal
For cloth in the bottom of metallic plate (10), the temperature sensor (26) is distributed on top and the metallic plate (10) of ultra-high temp coating (24)
Bottom, the temperature sensor (26) and semiconductor refrigeration chip (25) are set in the bottom interval of metallic plate (10).
A kind of 2. fast heater according to claim 1, it is characterised in that：Further include microprocessor (27) and
Temperature display unit (28), the temperature sensor (26), semiconductor refrigeration chip (25) and temperature display unit (28) with
Microprocessor (27) is electrically connected；The microprocessor (27) is located at the inside of furnace body.
3. according to a kind of fast heater described in claim 2, it is characterised in that：The temperature sensor (26) is used for
The temperature of metallic plate (10) and ultra-high temp coating (24) is detected, the temperature detected is transferred to microprocessor (27), by micro-
Processor (27) carries out real-time display in temperature display unit (28)；
When the temperature of temperature sensor (26) the detection metallic plate (10) is higher than the preset value upper limit, controlled by microprocessor (27)
Semiconductor refrigeration chip (25) processed cools down metallic plate (10)；The temperature of temperature sensor (26) the detection metallic plate (10)
When degree is less than preset value lower limit, semiconductor refrigeration chip (25) is controlled to rise metallic plate (10) by microprocessor (27)
Temperature.
4. according to a kind of fast heater described in claim 2, it is characterised in that：The temperature display unit (28) is
Touch display screen, positioned at the outer surface of furnace body.
A kind of 5. fast heater according to claim 2, it is characterised in that：Further include and be arranged in furnace body
Negative electrode (13), positive electrode (15), the first secure component (1), the second secure component (2) and the 3rd secure component (6), it is multiple absolutely
Edge part and multiple supporting racks (9)；
The negative electrode (13) is fixedly connected by the first secure component (1) and insulating part with metallic plate (10) integral structure,
And pass through the 3rd secure component (6) and insulating part and negative electrode (13) positioned at the lower section of metallic plate (10), the positive electrode (15)
It is fixedly connected and insulate, and positioned at the lower section of negative electrode (13)；The positive electrode (15) draws downwards the positive pin of device electrode
(20), insulation draws heating wire electrode anode (7) through negative electrode (13) and metallic plate (10) integral structure upwards；It is described negative
Electrode (13) insulation downwards draws device electrode through positive electrode (15) and bears pin (16), conductive through negative metallic plate (10) upwards
Integral structure draws heating wire Electrode Negative (5)；
The heating wire (8) is supported in the top of metallic plate (10) integral structure, support frame as described above (9) by supporting rack (9)
Insulation is fixed on positive electrode (15) through metallic plate (10) integral structure and negative electrode (13).
A kind of 6. fast heater according to claim 5, it is characterised in that：The insulating part is to gather light fiber
Pipe.
A kind of 7. fast heater according to claim 5, it is characterised in that：The electrode bear pin (16) and
The positive pin of electrode (20) upper end is fixed by fastener.
A kind of 8. fast heater according to claim 5, it is characterised in that：Further include fixed plate (14), institute
State fixed plate (14) and negative electrode (13) and positive electricity are fixed on by the second secure component (2), the 3rd secure component (6) and insulating part
Between pole (15), and it is conductive with negative electrode (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721007320.5U CN207251944U (en) | 2017-08-11 | 2017-08-11 | Fast heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721007320.5U CN207251944U (en) | 2017-08-11 | 2017-08-11 | Fast heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207251944U true CN207251944U (en) | 2018-04-17 |
Family
ID=61880678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721007320.5U Expired - Fee Related CN207251944U (en) | 2017-08-11 | 2017-08-11 | Fast heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207251944U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109429382A (en) * | 2017-08-24 | 2019-03-05 | 江苏威能电气有限公司 | Fast heater |
-
2017
- 2017-08-11 CN CN201721007320.5U patent/CN207251944U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109429382A (en) * | 2017-08-24 | 2019-03-05 | 江苏威能电气有限公司 | Fast heater |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180417 Termination date: 20180811 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |