CN207198082U - A kind of micro-nano biological detection chip of variable capacitance - Google Patents
A kind of micro-nano biological detection chip of variable capacitance Download PDFInfo
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- CN207198082U CN207198082U CN201720898682.1U CN201720898682U CN207198082U CN 207198082 U CN207198082 U CN 207198082U CN 201720898682 U CN201720898682 U CN 201720898682U CN 207198082 U CN207198082 U CN 207198082U
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Abstract
The utility model discloses a kind of micro-nano biological detection chip of variable capacitance, it is characterized in that, including a pole plate one, the pole plate one is provided with several detection holes, the detection hole bottom is covered with one layer of conductor or semiconductor coated film in the detection hole of back cover by one layer of elastic insulated film back cover from bottom；The material that can be specifically bound is solidified with positioned at the conductor of the detection hole bottom or semiconductor coated film upper surface；One pole plate two, the upper surface of the pole plate two are covered with one layer of conductor or semiconductor coated film to match with the detection hole area of pole plate one.The utility model is based on the specific binding of detected material, the change for driving micro- electric capacity with elastic film mechanical deformation turns to principle, by the change for determining detector capacitors, measured object in quantitative or qualitative determination sample, theoretical measurement range is from 0.0001pF -9.9999F, measurement accuracy is 0.1%, has very high the test range of linearity and measurement accuracy.
Description
Technical field
The utility model belongs to technical field of medical instruments, and in particular to a kind of micro-nano biological detection core of variable capacitance
Piece and its processing method chip are available for clinical biochemical sample quick detection and diagnosis.
Background technology
The detection in clinical diagnosis to antigen, antibody, small-molecule substance is mainly with latex enhancing immune turbidimetry, change at present
Based on the methods of learning luminescence method, immunofluorescence technique, colloidal gold method, based on optical principle, the analysis of optical instrument is accurate
Spend for≤5%, detection range has that precision is general from 0.001-3.500Abs, the narrower situation of test range.And bacterium is examined
Clinic is surveyed based on cultivating, the problems such as troublesome in poeration, detection cycle is long, loss is high be present.Virus examination is usually to be expanded with PCR
The mode of increasing is detected, and detection process trouble is, it is necessary to special PCR Lab, round of visits length.DNA or fragment are current
Detection mode is mainly gene sequencing, and cost is high, costly.
Utility model content
The purpose of this utility model is to provide a kind of micro-nano biological detection chip of variable capacitance and its processing method, should
Chip can be used for protein, bacterium, virus, DNA or fragment, other small molecules to have the quick detection for specifically binding material.
The utility model solves technical problem and adopted the following technical scheme that：
A kind of micro-nano biological detection chip of variable capacitance, its feature be, including
One pole plate one, the pole plate one are provided with several detection holes, and the detection hole bottom is elastic insulated by one layer
Film back cover, one layer of conductor or semiconductor coated film are covered with from bottom in the detection hole of back cover；Positioned at the detection hole bottom
Conductor or semiconductor coated film upper surface are solidified with the material that can be specifically bound；
One pole plate two, the upper surface of the pole plate two are covered with one layer of conductor or half to match with the detection hole area of pole plate one
Conductor plated film.
Further, the upper surface on the upper surface and pole plate two of the pole plate one is equipped with and corresponding conductor or semiconductor plating
The metering contact of film connection.
Further, described detection hole bottom resilient insulation film thickness is 10nm-100 μm.
Further, the conductor of described detection hole bottom or semiconductor coated film thickness are 10nm-5000nm.
Further, the number of the detection hole is 1 or 2 or more than 2；A diameter of 50 μm of the detection hole-
2cm。
Further, the detection hole bottom and inwall are covered with conductor or semiconductor coated film, and the detection hole bottom is led
Body or semiconductor coated film and elastic insulated film are combined as a whole formula flexible deformable film.
A kind of micro-nano biological detection chip detector of variable capacitance, its feature is, including pole plate as described above
One and pole plate two, the detector also includes the support or fixed seat for being used to be detachably fixed pole plate one and pole plate two, and
The detector that one connection pole plate one and the measurement of pole plate two are got an electric shock, the electric capacity that the detector is used between Detection electrode one and pole plate two
Value.
Further, the dielectric media between the pole plate one and pole plate two is gas, the conductor of the pole plate one and pole plate two
Or semiconductor coated film spacing is 10nm-5mm.
A kind of qualitative or quantitative detection method of biological specimen, its feature is, the material that can be specifically bound is led to
Cross chemically or physically means to be solidificated on pole plate one as described above, when detected sample passes through detection hole, if tested test sample
When in product containing the composition specifically bound with the material solidified on pole plate one, then two kinds of materials are specifically bound,
Convergent force is produced, the film shrunk of pole plate one, judges whether also have in testing sample by the capacitance between pole plate one, pole plate two
How much is the content of special component and special component.
A kind of processing method of the micro-nano biological detection chip of variable capacitance, its feature is, comprises the following steps：
First, pole plate one is processed
A1：Using insulation or semiconductor substrate as pole plate one, by chemical vapour deposition technique, base material upper and lower surface simultaneously
Grow elastic insulated film；
A2：Some detection holes are etched on elastic insulated film first, it is naked to spill base material, detection hole is then etched away again
Under base material to base material lower surface elastic insulated film；
A3：Corresponding conductor or semi-conducting material are plated in detection hole；And ensure that the metering contact of pole plate one can be from this
Continuously extended out in conductor or semiconductor coated film；
A4：Bioactive process processing is carried out in the conductor positioned at detection hole bottom or semiconductor coated film upper surface, solidification can
The material specifically bound with subsequent detection material；Pole plate one machines；
2nd, pole plate two is processed
B1：Using insulating substrate as pole plate two, in the upper surface of the base material of pole plate two, plating last layer detects hole area with pole plate one
The conductor to match or semiconductor coated film region；Pole plate two machines.
Compared with the prior art, the utility model has the beneficial effect that：
The utility model is based on the specific binding of detected material, and the change for driving micro- electric capacity with mechanical deformation turns to
Principle, by determining the change of detector capacitors, the measured object in quantitative or qualitative determination sample, theoretical measurement range from
0.0001pF -9.9999F, measurement accuracy 0.1%, there is very high the test range of linearity and measurement accuracy.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model chip pole plate one.
Fig. 2 is the structural representation of the utility model chip pole plate two.
Fig. 3 is the decomposing schematic representation of pole plate one.
Fig. 4 is the machining sketch chart of pole plate two.
Fig. 5 is the flow process chart of the utility model pole plate one.
Fig. 6 is the result of the test of the utility model embodiment 5.
Reference in figure：
11st, pole plate one；
12nd, conductor or semiconductor coated film；
13rd, detection hole；
14th, the metering contact of pole plate one；
15th, elastic film；
16th, material is specifically bound
21st, pole plate two；
22nd, conductor or semiconductor coated film；
23rd, the metering contact of pole plate two；
3rd, mould.
Embodiment
With reference to embodiment, the utility model is further described.
In following examples, conductor or semiconductor coated film include but is not limited to Au, Pt, Cu, Al and other conductors or partly led
Body material；The base material of pole plate one includes but is not limited to wafer, lucite, and the base material of pole plate two is any insulating materials.
Embodiment 1
A kind of micro-nano biological detection chip of variable capacitance, including pole plate one and pole plate two.
As shown in Figure 1,3, pole plate 1 includes insulating substrate body, and material main body is provided with one or more detection holes
13, detection hole bottom is covered with one layer of conductor in the detection hole 13 of back cover by one layer of elastic insulated back cover of film 15 from bottom
Or semiconductor coated film 12；Specific knot can be occurred by being solidified with positioned at the conductor of the detection hole bottom or semiconductor coated film upper surface
The material 16 of conjunction；
When it is implemented, detection hole bottom and inwall are covered with conductor or semiconductor coated film, the conductor of detection hole bottom or
Semiconductor coated film and elastic insulated film are combined as a whole formula flexible deformable film.
As shown in Fig. 2 pole plate 2 21 includes insulating substrate body, the upper surface of pole plate two is covered with one layer and detected with pole plate one
The conductor or semiconductor coated film 22 that hole area matches.
When application is embodied, for the ease of being detected the capacitance one/pole plate of pole plate two, in pole plate one and pole plate
The metering contact 14 of pole plate one and the metering contact of pole plate two being connected with respective conductors or semiconductor coated film are equipped with two
23。
Wherein, conductor or semiconductor coated film thickness are 10-5000nm in concrete application；Elastic insulated film thickness is
10nm-100μm；A diameter of 50 μm of -2cm of detection hole.
Embodiment 2
The embodiment is a kind of micro-nano biological detection chip detector of variable capacitance, including the pole plate in embodiment 1
One and pole plate two, the detector also includes a support for being used to being detachably fixed pole plate one and pole plate two or fixed seat is (such as existing
Fixture in structure type grips or card slot type fixed seat is fixed) and one connection pole plate one and pole plate two measurement touch
The detector of point, the capacitance that detector is used between Detection electrode one and pole plate two.In the detector between pole plate one and pole plate two
Dielectric media be advisable for gas, the conductor or semiconductor coated film of wherein pole plate one and pole plate two are spaced about 50 μm.
Embodiment 3
A kind of qualitative or quantitative detection method of biological specimen, specifically passes through chemistry by the material that can be specifically bound
Or physical means are solidificated on the pole plate one of embodiment 1, when detected sample passes through detection hole, contain if being detected in sample
During the composition that the material with solidifying on pole plate one is specifically bound, then two kinds of materials are specifically bound, and produce contraction
Power, the film shrunk of pole plate one, judge whether also have special component in testing sample by the capacitance between pole plate one, pole plate two
And the content of special component how much.
For example, antigen is solidificated on the conductor or semiconductor coated film in the detection hole of pole plate one by chemically or physically means
Surface, when detected sample by or when resting in detection hole, if being detected the antibody contained in sample corresponding to antigen,
Antibody is combined with the antigentic specificity of polar board surface, produces convergent force, and capacitance just, between pole plate two changes, so as to
To carry out qualitative detection to sample；Simultaneously can also by the variable quantity of the capacitance just, between pole plate two come detect in sample with
The relative antibody content of antigen.
Embodiment 4
A kind of processing method of the chip of embodiment 1 is provided further below.
First, pole plate one makes
It is as follows referring to Fig. 5, preparation method：
Step (1)：Using low-pressure chemical vapor deposition (LPCVD) method, in the two-sided throwing of 450 μ m-thicks, diameter 100mm
Grow thick silicon nitride (SiN) films of 500nm on the Silicon Wafer two sides of light simultaneously, silicon nitride film and lower silicon nitride in formation
Film；
Step (2)：Use standard ultraviolet photolithographic technology (UV Photolithography) and reaction equation ion etching technology
(Reactive Ion Etching, RIE), several a diameter of 6mm detection hole is etched on upper silicon nitride film 12, is made
Silicon Wafer is exposed；
Step (3)：Will be sudden and violent using deep reaction equation ion etching technology (Deep Reactive Ion Etching, DRIE)
The Silicon Wafer material exposed etches completely, does not penetrate lower silicon nitride film, forms the detection hole of pole plate one；
Step (4)：By metal coating technology (such as：Electron beam evaporation deposition), in the detection hole bottom of pole plate one and inwall
Upper deposit thickness is 50nm golden film, while forms metering contact in the upper surface of pole plate one, plated film due to golden film cooling meat, from
And conductor or semiconductor coated film is set to form a radian film with the flexible deformable film that elastic insulated film is combined as a whole.
Step (5)：Solidify DNA in detection hole bottom, the single stranded DNA of sulfhydrylation is directly total to by the sulphur atom of itself sulfydryl
Valency is attached to the surface of golden film；Complete the processing of pole plate one.
2nd, pole plate two is processed
Step (1)：It is the base material of pole plate two to select acrylic board, as shown in figure 4, the mould 3 of designated shape is made, by mould
3 are fitted on pole plate two, and by electron evaporation coating technique, last layer 100nm is plated on the surface that pole plate two is not covered by mould 3
Thick golden film region, the region is suitable or slightly larger with the detection hole area of pole plate one, and draws the measurement of pole plate two from the region and touch
Point, pole plate two are completed.
Embodiment 5
One/pole plate of pole plate two that embodiment 4 is processed to gained is fixed by face above and below stationary fixture progress, in fixture
In, one/pole plate of pole plate, two golden films are spaced about 50 μm, then connect the detection contact of pole plate one, pole plate two by signal
Mouth connection component (Agilent Keysight 16048A) is connected to capacitance detecting instrument (Agilent Keysight E4980AL).Inspection
During survey, following testing liquid is separately added into order into detection hole：1. buffer solution (1M PBS), 2. incomplementarities do not match that
DNA single-stranded (1 μM of DNA is single-stranded in PBS), DNA that 3. complementations match is single-stranded, and (1 μM of DNA is single-stranded in PBS
In buffer solution), the drop volume added every time is 300 μ L, and acquired results are as shown in Figure 6.
Embodiment of the present utility model is the foregoing is only, not thereby limits the scope of the claims of the utility model type, it is all
It is the equivalent structure or equivalent flow conversion made using utility model specification and accompanying drawing content, or is directly or indirectly used in
Other related technical areas, similarly it is included in scope of patent protection of the present utility model.
Claims (8)
- A kind of 1. micro-nano biological detection chip of variable capacitance, it is characterised in that includingOne pole plate one, the pole plate one are provided with several detection holes, and the detection hole bottom passes through one layer of elastic insulated film Back cover, one layer of conductor or semiconductor coated film are covered with from bottom in the detection hole of back cover；Conductor positioned at the detection hole bottom Or semiconductor coated film upper surface is solidified with the material that can be specifically bound；One pole plate two, the upper surface of the pole plate two are covered with one layer of conductor or semiconductor to match with the detection hole area of pole plate one Plated film.
- A kind of 2. micro-nano biological detection chip of variable capacitance according to claim 1, it is characterised in that the pole plate One and pole plate two on be equipped with corresponding conductor or semiconductor coated film connection metering contact.
- A kind of 3. micro-nano biological detection chip of variable capacitance according to claim 1, it is characterised in that the detection The elastic insulated film thickness in bottom hole portion is 10nm-100 μm.
- A kind of 4. micro-nano biological detection chip of variable capacitance according to claim 1, it is characterised in that the detection The conductor or semiconductor coated film thickness in bottom hole portion are 10nm-5000nm.
- A kind of 5. micro-nano biological detection chip of variable capacitance according to claim 1, it is characterised in that the detection The number in hole is 1 or 2 or more than 2；A diameter of 50 μm of -2cm of the detection hole.
- A kind of 6. micro-nano biological detection chip of variable capacitance according to claim 1, it is characterised in that the detection Bottom hole portion and inwall are covered with conductor or semiconductor coated film, the conductor or semiconductor coated film of the detection hole bottom with it is elastic insulated Film is combined as a whole formula flexible deformable film.
- 7. a kind of micro-nano biological detection chip detector of variable capacitance, it is characterised in that including any in claim 1-6 Pole plate one and pole plate two described in one, the detector also include a support for being used to be detachably fixed pole plate one and pole plate two Or fixed seat, and the detector that a connection pole plate one and the measurement of pole plate two are got an electric shock, the detector is used for the He of Detection electrode one Capacitance between pole plate two.
- A kind of 8. micro-nano biological detection chip detector of variable capacitance according to claim 7, it is characterised in that institute It is gas to state the dielectric media between pole plate one and pole plate two, and the conductor or semiconductor coated film spacing of the pole plate one and pole plate two are 10nm-5cm。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720898682.1U CN207198082U (en) | 2017-07-24 | 2017-07-24 | A kind of micro-nano biological detection chip of variable capacitance |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720898682.1U CN207198082U (en) | 2017-07-24 | 2017-07-24 | A kind of micro-nano biological detection chip of variable capacitance |
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| CN207198082U true CN207198082U (en) | 2018-04-06 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107192747A (en) * | 2017-07-24 | 2017-09-22 | 徐林 | A kind of micro-nano biological detection chip of variable capacitance and its processing method |
| CN109321668A (en) * | 2018-10-24 | 2019-02-12 | 安徽大千生物工程有限公司 | Detect the preparation application method of the condenser type biochip of bacillus tuberculosis |
-
2017
- 2017-07-24 CN CN201720898682.1U patent/CN207198082U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107192747A (en) * | 2017-07-24 | 2017-09-22 | 徐林 | A kind of micro-nano biological detection chip of variable capacitance and its processing method |
| CN107192747B (en) * | 2017-07-24 | 2023-12-15 | 梁鑫 | Variable capacitance type micro-nano biological detection chip and processing method thereof |
| CN109321668A (en) * | 2018-10-24 | 2019-02-12 | 安徽大千生物工程有限公司 | Detect the preparation application method of the condenser type biochip of bacillus tuberculosis |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211026 Address after: 230088 room 604, block a, office building of Anhui scientific and technological achievements transformation demonstration base, No. 425, Chuangxin Avenue, high tech Zone, Hefei, Anhui Patentee after: Liang Xin Address before: 231555 Education Office of gap community, Longqiao Town, Lujiang County, Chaohu City, Hefei City, Anhui Province Patentee before: Xu Lin |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220825 Address after: Room 5-506, No. 260, Dongping Road, Suzhou Industrial Park, Suzhou Area, China (Jiangsu) Pilot Free Trade Zone, Suzhou City, Jiangsu Province, 215000 Patentee after: Suzhou Xinyuan Medical Technology Co.,Ltd. Address before: 230088 room 604, block a, office building of Anhui scientific and technological achievements transformation demonstration base, No. 425, Chuangxin Avenue, high tech Zone, Hefei, Anhui Patentee before: Liang Xin |
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| TR01 | Transfer of patent right |