CN207181327U - A kind of grenz ray imaging device of vacuum flight pipeline - Google Patents
A kind of grenz ray imaging device of vacuum flight pipeline Download PDFInfo
- Publication number
- CN207181327U CN207181327U CN201721189153.0U CN201721189153U CN207181327U CN 207181327 U CN207181327 U CN 207181327U CN 201721189153 U CN201721189153 U CN 201721189153U CN 207181327 U CN207181327 U CN 207181327U
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- ray
- vacuum
- flight pipeline
- sample
- vacuum flight
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Abstract
The utility model discloses a kind of grenz ray imaging device of vacuum flight pipeline, belong to x-ray imaging technology field, it includes：X-ray tube, sample stage, vacuum flight pipeline and X-ray camera；Two opposing end surfaces of the vacuum flight pipeline are machined with coaxial through-hole, are closed by installing incident beryllium window and outgoing beryllium window respectively on two through holes, are vacuum state inside vacuum flight pipeline；Vacuum flight pipeline is between X-ray tube and X-ray camera, and for fixing the sample stage of sample between X-ray tube and vacuum flight pipeline, and the incident beryllium window of vacuum flight pipeline is close to sample stage, and outgoing beryllium window is close to the recording surface of X-ray camera；The X-ray emission source point of X-ray tube, the center of sample, incident beryllium window and the center of outgoing beryllium window and the recording surface of X-ray camera are centrally located on same straight line；The device can carry out grenz ray imaging to the sample under atmospheric environment.
Description
Technical field
The utility model belongs to x-ray imaging technology field, and in particular to a kind of grenz ray imaging of vacuum flight pipeline
Device.
Background technology
X-ray imaging is scientific research and a kind of widely used technology of field of industrial production.X ray has very strong saturating
Ability is penetrated, sample can be penetrated, the transmission image of object is formed on recording equipment, the condition of sample topography can not destroyed
Under to sample carry out perspective imaging.X-ray imaging is typically that X-ray absorption is differently formed using sample interior different parts
Visible image.For lighter weight, the sample of very thin thickness, due to absorbing difference caused by hard x-ray imaging less, it is necessary to utilize
Grenz ray is imaged to improve the contrast and resolution capability of imaging.But propagate in an atmosphere can be strong by air for grenz ray
Strong absorption so that grenz ray image intensity signal dies down, and image quality declines.When being therefore imaged using grenz ray, generally
Sample is placed under vacuum test environment, grenz ray signal impacted with avoiding air from absorbing.Due to the whole series being imaged
Device, which is placed in vacuum test environment, substantially to increase the cost of sample detection, and reduces the efficiency of test, which has limited
Grenz ray is imaged on popularization and application in manufacturing industry Product checking.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of grenz ray imaging device of vacuum flight pipeline, can
Grenz ray imaging is carried out to the sample under atmospheric environment.
The utility model is achieved through the following technical solutions：
A kind of grenz ray imaging device of vacuum flight pipeline, including：X-ray tube, sample stage, vacuum flight pipeline and X
Ray camera；
The X-ray tube is used to outwards launch grenz ray by internal X-ray emission source point；
Two opposing end surfaces of the vacuum flight pipeline are machined with the coaxial through-hole that can pass through grenz ray, by
Incident beryllium window is installed respectively on two through holes and outgoing beryllium window is closed, is vacuum state inside vacuum flight pipeline；
Integrated connection relation is as follows：Vacuum flight pipeline is between X-ray tube and X-ray camera, for fixing sample
Sample stage between X-ray tube and vacuum flight pipeline, and the incident beryllium window of vacuum flight pipeline is close to sample stage, goes out
Beryllium window is penetrated with the recording surface of X-ray camera to be close to；The X-ray emission source point of X-ray tube, the center of sample, incident beryllium window and go out
Penetrate the center of beryllium window and the recording surface of X-ray camera is centrally located on same straight line.
Further, the X-ray emission source point is to the distance between the recording surface of X-ray camera and X-ray emission source
The ratio of point to the distance between sample is identical with the imaging enlargement ratio that sample is set.
Further, the length of the vacuum flight pipeline determines according to the imaging enlargement ratio of setting.
Further, the vacuum flight pipeline uses metal material.
Further, the sample stage uses plastics, polyethylene or sheet of nylon material.
Beneficial effect：(1) the utility model can carry out grenz ray imaging to the sample under atmospheric environment, pass through vacuum
Dirft tube makes grenz ray be propagated after transmission sample in vacuum flight pipeline, and it is aerial that grenz ray is greatly reduced
Propagation distance, effectively reduce air to the strong absorption of grenz ray, improve the quality of image, improve grenz ray into
The signal intensity and signal to noise ratio of picture, grenz ray imaging technique application cost in manufacturing industry Product checking is reduced, improves inspection
Survey efficiency.
(2) grenz ray of the present utility model passes through vacuum flight pipeline by incident beryllium window and outgoing beryllium window, reduces soft
X ray enters vacuum flight pipeline from air and caused when being emitted to X-ray camera from vacuum flight pipeline by window material
Decay.
(3) the distance between X-ray emission source point and sample of the present utility model are less than between sample and X-ray camera
Distance, the transmission image of the amplification of sample can be obtained.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
Wherein, 1-X ray tubes, 2- sample stages, 3- vacuum flight pipelines, 4-X ray cameras, 5-X ray emission source points, 6-
X ray tube light-emitting windows, 7- incidence beryllium windows, 8- outgoing beryllium windows, 9- samples.
Embodiment
With reference to the accompanying drawings and examples, the utility model is described in detail.
The utility model provides a kind of grenz ray imaging device of vacuum flight pipeline, referring to accompanying drawing 1, including：X is penetrated
Spool 1, sample stage 2, vacuum flight pipeline 3 and X-ray camera 4；
The X-ray tube 1 is used to launch grenz ray, is internally provided with X-ray emission source point 5, end face is machined with X ray
Pipe light-emitting window 6；
The vacuum flight pipeline 3 is cylindrical shell closed at both ends, and its both ends of the surface is machined with axially extending bore respectively, described
Incident beryllium window 7 is separately installed with axially extending bore and outgoing beryllium window 8 is closed, the inside of vacuum flight pipeline 3 is vacuum state；
The length of vacuum flight pipeline 3 determines that its profile is square or circular, its axially extending bore according to the imaging enlargement ratio of setting
Be sized to ensure cone soft X ray beam by the way that its material uses metal；
The sample stage 2 uses plastics, polyethylene or the sheet of nylon less to X-ray absorption；
Integrated connection relation is as follows：Vacuum flight pipeline 3 is between X-ray tube 1 and X-ray camera 4, for fixing sample
The sample stage 2 of product 9 is between X-ray tube 1 and vacuum flight pipeline 3, and the incident beryllium window and sample stage of vacuum flight pipeline 3
2 are close to, and outgoing beryllium window 8 is close to the recording surface of X-ray camera 4；The X-ray emission source point 5 of X-ray tube 1, the center of sample 9,
The axis of vacuum flight pipeline 3 and the recording surface of X-ray camera 4 are centrally located on same straight line；The X-ray emission source point
5 arrive the ratio and sample 9 of the distance between recording surface of X-ray camera 4 and the distance between X-ray emission source point 5 to sample 9
The imaging enlargement ratio of setting is identical.
Operation principle：Sample 9 is arranged on the sample stage 2 under atmospheric environment, from the X-ray emission source point of X-ray tube 1
After 5 grenz rays emitted pass through X-ray tube light-emitting window 6, enter successively after transmission sample 9, sample stage 2 and incident beryllium window 7
Vacuum flight pipeline 3, and incide the recording surface of X-ray camera 4 from outgoing beryllium window 8 and be amplified imaging, and record sample 9
X-ray transmission image.
In summary, preferred embodiment of the present utility model is these are only, is not intended to limit of the present utility model
Protection domain.All any modification, equivalent substitution and improvements within the spirit and principles of the utility model, made etc., all should be wrapped
It is contained within the scope of protection of the utility model.
Claims (5)
- A kind of 1. grenz ray imaging device of vacuum flight pipeline, it is characterised in that including：X-ray tube (1), sample stage (2), Vacuum flight pipeline (3) and X-ray camera (4)；The X-ray tube (1) is used to outwards launch grenz ray by internal X-ray emission source point (5)；Two opposing end surfaces of the vacuum flight pipeline (3) are machined with the coaxial through-hole that can pass through grenz ray, by two Incident beryllium window (7) is installed respectively on the individual through hole and outgoing beryllium window (8) is closed, it is true that vacuum flight pipeline (3) is internal Dummy status；Integrated connection relation is as follows：Vacuum flight pipeline (3) is located between X-ray tube (1) and X-ray camera (4), for fixing The sample stage (2) of sample (9) is located between X-ray tube (1) and vacuum flight pipeline (3), and the incidence of vacuum flight pipeline (3) Beryllium window is close to sample stage (2), and outgoing beryllium window (8) is close to the recording surface of X-ray camera (4)；The X ray hair of X-ray tube (1) Penetrate source point (5), the center of sample (9), incident beryllium window (7) and the center of outgoing beryllium window (8) and the recording surface of X-ray camera (4) It is centrally located on same straight line.
- A kind of 2. grenz ray imaging device of vacuum flight pipeline as claimed in claim 1, it is characterised in that the X ray Emission source point (5) arrives the distance between recording surface of X-ray camera (4) and arrived X-ray emission source point (5) between sample (9) The ratio of distance is identical with the imaging enlargement ratio that sample (9) is set.
- A kind of 3. grenz ray imaging device of vacuum flight pipeline as claimed in claim 1, it is characterised in that the vacuum The length of dirft tube (3) determines according to the imaging enlargement ratio of setting.
- A kind of 4. grenz ray imaging device of vacuum flight pipeline as claimed in claim 1, it is characterised in that the vacuum Dirft tube (3) uses metal material.
- A kind of 5. grenz ray imaging device of vacuum flight pipeline as claimed in claim 1, it is characterised in that the sample Platform (2) uses plastics, polyethylene or sheet of nylon material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721189153.0U CN207181327U (en) | 2017-09-15 | 2017-09-15 | A kind of grenz ray imaging device of vacuum flight pipeline |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721189153.0U CN207181327U (en) | 2017-09-15 | 2017-09-15 | A kind of grenz ray imaging device of vacuum flight pipeline |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207181327U true CN207181327U (en) | 2018-04-03 |
Family
ID=61746639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721189153.0U Expired - Fee Related CN207181327U (en) | 2017-09-15 | 2017-09-15 | A kind of grenz ray imaging device of vacuum flight pipeline |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207181327U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107561101A (en) * | 2017-09-15 | 2018-01-09 | 中国工程物理研究院激光聚变研究中心 | A kind of grenz ray imaging device of vacuum flight pipeline |
-
2017
- 2017-09-15 CN CN201721189153.0U patent/CN207181327U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107561101A (en) * | 2017-09-15 | 2018-01-09 | 中国工程物理研究院激光聚变研究中心 | A kind of grenz ray imaging device of vacuum flight pipeline |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180403 Termination date: 20200915 |
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| CF01 | Termination of patent right due to non-payment of annual fee |