CN207170382U - A kind of lustration type cleaning equipment for silicon chip production - Google Patents
A kind of lustration type cleaning equipment for silicon chip production Download PDFInfo
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- CN207170382U CN207170382U CN201720888824.6U CN201720888824U CN207170382U CN 207170382 U CN207170382 U CN 207170382U CN 201720888824 U CN201720888824 U CN 201720888824U CN 207170382 U CN207170382 U CN 207170382U
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Abstract
It the utility model is related to a kind of cleaning equipment, more particularly to a kind of lustration type cleaning equipment for silicon chip production.The technical problems to be solved in the utility model is to provide a kind of cleaning thoroughly, the high lustration type cleaning equipment for being used for silicon chip production of cleaning efficiency.In order to solve the above-mentioned technical problem, the utility model provides such a lustration type cleaning equipment for silicon chip production, includes bottom plate, pole, cleaning frame, web plate, drive mechanism, rotating mechanism, top plate etc.；Support bar is fixed in bottom plate one end；Rotating mechanism is fixed in end of the bottom plate away from support bar, and rotating mechanism is used to stir cleaning fluid；Top plate is fixed in support bar top；Drive mechanism is fixed in bottom plate, and between support bar and rotating mechanism.The utility model has reached cleaning thoroughly, improves the effect of cleaning efficiency.
Description
Technical field
It the utility model is related to a kind of cleaning equipment, more particularly to a kind of lustration type cleaning equipment for silicon chip production.
Background technology
According to the difference of material, solar cell can be divided into crystal-silicon solar cell（Monocrystalline, polycrystalline）, the non-crystalline silicon sun electricity
Pond, compound solar cell（GaAs, CIGS, CdTe etc.）, organic matter solar cell etc..Wherein, crystal-silicon solar cell is with it
The advantages that raw material storing is abundant, mature technical route, performance are stable, electricity conversion is higher occupies leading market
Status.
Crystal-silicon solar cell is using crystal silicon chip as substrate, by cleaning and texturing, thermal diffusion, back of the body etching, plating anti-reflection
The techniques such as film, silk-screen printing, sintering are made.And crystal silicon chip is divided into monocrystalline silicon silicon chip and polysilicon chip, monocrystalline silicon piece is by list
Crystalline silicon rod cutting is got, and polysilicon chip is to be cut to be formed by polycrystalline silicon ingot.Either monocrystalline silicon piece production or polysilicon chip life
Production is required for being cleaned after having cut, and existing Wafer Cleaning equipment is not thorough in the presence of cleaning, and cleaning efficiency is relatively low to be lacked
Point, therefore need a kind of cleaning of research and development badly comprehensively, the high lustration type cleaning equipment for being used for silicon chip production of cleaning efficiency.
Utility model content
（1）Technical problems to be solved
In order to overcome existing Wafer Cleaning equipment not thorough there is cleaning, cleaning efficiency is low to be lacked the utility model
Point, the technical problems to be solved in the utility model are to provide that a kind of cleaning is comprehensive, cleaning efficiency it is high be used for the clean of silicon chip production
Net type cleaning equipment.
（2）Technical scheme
In order to solve the above-mentioned technical problem, the utility model provides such a lustration type cleaning for silicon chip production
Equipment, include bottom plate, pole, cleaning frame, web plate, drive mechanism, rotating mechanism, top plate, swing mechanism, flat belt, steel wire
Rope, screen frame and support bar, support bar are fixed in bottom plate one end；Rotating mechanism is fixed in end of the bottom plate away from support bar, rotation
Rotation mechanism is used to stir cleaning fluid；Top plate is fixed in support bar top；Drive mechanism is fixed in bottom plate, and is located at support bar and rotation
Between rotation mechanism, rotating mechanism is connected with drive mechanism；Swing mechanism is fixed in top plate, and passes through flat belt and driving machine
Structure is connected, and swing mechanism is used to drive screen frame to swing；Two pole one ends are fixed in bottom plate, and are located at rotating mechanism two
Side, the other end are fixed in cleaning frame；Web plate is fixed in cleaning inframe portion, and screen frame is connected by steel wire rope with top plate, and screen frame
Above web plate.
Preferably, drive mechanism includes slide rail, sliding block, the first rack, installing plate, motor, first rotating shaft, the first belt
Wheel, the first rotating disk, sliding axle, oscillating rod, sector gear and the second rack, slide rail are fixed in bottom plate；First rack passes through sliding block
It is slidably connected with slide rail, and it is affixed with the second rack one end；Installing plate is vertically fixed in bottom plate, and motor is fixed in peace
Loading board；First rotating shaft one end is connected with motor output end, and the first belt pulley and the first rotating disk are fixed in first rotating shaft, and
The distance between first rotating disk and motor are more than the distance between the first belt pulley and motor；Sliding axle is fixed in the first rotating disk one
Sidepiece；Oscillating rod is hinged with the sidepiece of installing plate one and offers the word hole run through for sliding axle on oscillating rod；Sector gear is consolidated
Oscillating rod bottom is connected to, and sector gear engages with the first rack.
Preferably, rotating mechanism includes the second rack, first bearing seat, the second rotating shaft, roller gear, sealing ring and leaf
Piece, first bearing seat are fixed in bottom plate；Second rotating shaft is articulated in first bearing seat；Roller gear is fixed in first rotating shaft bottom,
And engaged with the second rack；Sealing ring is fixed in cleaning frame bottom, and first rotating shaft one end is affixed through sealing ring and blade.
Preferably, swing mechanism includes second bearing seat, the 3rd rotating shaft, the second belt pulley, the second rotating disk, connecting rod, cunning
Set and slide bar, sliding sleeve are fixed in top plate；Slide bar runs through sliding sleeve, and slide bar is slidably connected with sliding sleeve；The one end of slide bar away from connecting rod
Portion offers the pilot hole run through for steel wire rope；Second bearing seat is fixed in top plate；3rd rotating shaft one end and second bearing seat
Pivot joint, the second belt pulley and the second rotating disk are fixed in the 3rd rotating shaft, and the distance between the second rotating disk and second bearing seat are more than
The distance between second belt pulley and second bearing seat；Connecting rod one end is hinged with the second rotating disk, and the other end is hinged with slide bar.
Preferably, the lustration type cleaning equipment for being used for silicon chip production also includes drain pipe and valve；Drain pipe is affixed
In the cleaning sidepiece of frame one, and with cleaning inframe UNICOM；Valve is installed on drain pipe.
Operation principle：When needing cleaning silicon chip, worker is put into silicon chip in screen frame first, then pours into cleaning fluid clearly
Inframe is washed, then controls drive mechanism operating, drive mechanism drives rotating mechanism and swing mechanism operating, and then stirs cleaning fluid
And drive screen frame to swing, when cleaning finishes, worker controls drive mechanism to shut down again, after worker takes out cleaning from screen frame
Silicon chip.The double action of swing mechanism and rotating mechanism so that silicon chip can clean comprehensively, improve cleaning efficiency.
Because drive mechanism include slide rail, sliding block, the first rack, installing plate, motor, first rotating shaft, the first belt pulley,
First rotating disk, sliding axle, oscillating rod, sector gear and the second rack, slide rail are fixed in bottom plate；First rack passes through sliding block and cunning
Rail is slidably connected, and affixed with the second rack one end；Installing plate is vertically fixed in bottom plate, and motor is fixed in installation
Plate；First rotating shaft one end and motor output end are connected, and the first belt pulley and the first rotating disk are fixed in first rotating shaft, and the
The distance between one rotating disk and motor are more than the distance between the first belt pulley and motor；Sliding axle is fixed in the first rotating disk side
Portion；Oscillating rod is hinged with the sidepiece of installing plate one and offers the word hole run through for sliding axle on oscillating rod；Sector gear is affixed
In oscillating rod bottom, and sector gear engages with the first rack, and when silicon chip needs cleaning, worker's controlled motor rotates, and drives
First rotating shaft rotates, and then drives the first belt pulley and the first rotating disk to rotate, and the first belt pulley drives oscillating machine by flat belt
Structure is operated, and the first rotating disk is swung by sliding axle and the mating band movable pendulum lever in a word hole, and then drives sector gear left
Move right, and then drive the first rack and the second rack to move left and right, and then drive rotating mechanism operating.So saving is reached
The effect of the energy and high-efficiency washing silicon chip.
Because rotating mechanism includes the second rack, first bearing seat, the second rotating shaft, roller gear, sealing ring and blade,
First bearing seat is fixed in bottom plate；Second rotating shaft is articulated in first bearing seat；Roller gear is fixed in first rotating shaft bottom, and with
Second rack engages；Sealing ring is fixed in cleaning frame bottom, and first rotating shaft one end is affixed with blade through sealing ring, works as motor
During operating, the second rack is driven to move left and right, because roller gear engages with the second rack, the second rack moves left and right band
Dynamic roller gear rotates, and then drives the second axis of rotation, and the second axis of rotation band movable vane piece rotates, and blade rotates quick agitation
Cleaning fluid so that it can efficient cleaning silicon chip.
Because swing mechanism include second bearing seat, the 3rd rotating shaft, the second belt pulley, the second rotating disk, connecting rod, sliding sleeve and
Slide bar, sliding sleeve are fixed in top plate；Slide bar runs through sliding sleeve, and slide bar is slidably connected with sliding sleeve；One end of the slide bar away from connecting rod is opened
Provided with the pilot hole run through for steel wire rope；Second bearing seat is fixed in top plate；3rd rotating shaft one end is pivotally connected with second bearing seat,
Second belt pulley and the second rotating disk are fixed in the 3rd rotating shaft, and the distance between the second rotating disk and second bearing seat are more than the second skin
The distance between belt wheel and second bearing seat；Connecting rod one end is hinged with the second rotating disk, and the other end is hinged with slide bar, works as motor
During rotation, the first pulley rotation is driven, the first belt pulley drives the second pulley rotation, the second belt rotation by flat belt
Move and drive the second rotating disk to rotate, and then drivening rod rotates, link rotatable band moving slide-bar moves left and right, and is led because steel wire rope runs through
Xiang Kong, drive steel wire rope to swing so slide bar moves left and right, and then drive screen frame to swing so that the silicon in it
Piece stirs, and reaches the effect uniformly cleaned.
Because the lustration type cleaning equipment for being used for silicon chip production also includes drain pipe and valve；Drain pipe is fixed in clearly
The sidepiece of frame one is washed, and with cleaning inframe UNICOM；Valve is installed on drain pipe, it is necessary to which cleaning fluid is arranged after the completion of Wafer Cleaning
Go out and clean frame, now worker opens valve, and cleaning fluid is discharged by drain pipe, has reached conveniently effect.
（3）Beneficial effect
The utility model is comprehensively cleaned to the silicon chip in screen frame by the cooperation of swing mechanism and rotating mechanism,
The effect for improving cleaning efficiency is reached.
Brief description of the drawings
Fig. 1 is the first main structure diagram of the present utility model.
Fig. 2 is the main structure diagram of the utility model drive mechanism.
Fig. 3 is the main structure diagram of the utility model rotating mechanism.
Fig. 4 is the main structure diagram of the utility model swing mechanism.
Fig. 5 is second of main structure diagram of the present utility model.
Mark in accompanying drawing for：1- bottom plates, 2- poles, 3- cleaning frames, 4- web plates, 5- drive mechanisms, 51- slide rails, 52- are slided
Block, the racks of 53- first, 54- installing plates, 55- motors, 56- first rotating shafts, the belt pulleys of 57- first, the rotating disks of 58- first, 59- are slided
Moving axis, 510- oscillating rods, the word holes of 511- mono-, 512- sector gears, the racks of 513- second, 6- rotating mechanisms, 61- clutch shaft bearings
Seat, the rotating shafts of 62- second, 63- roller gears, 64- sealing rings, 65- blades, 7- top plates, 8- swing mechanisms, 81- second bearing seats,
The rotating shafts of 82- the 3rd, the belt pulleys of 83- second, the rotating disks of 84- second, 85- connecting rods, 86- sliding sleeves, 87- slide bars, 88- pilot holes, 9- are put down
Belt, 10- steel wire ropes, 11- screen frames, 12- support bars, 13- drain pipes, 14- valves.
Embodiment
The utility model is further described with reference to the accompanying drawings and examples.
Embodiment 1
A kind of lustration type cleaning equipment for silicon chip production, as Figure 1-5, include bottom plate 1, pole 2, cleaning frame
3rd, web plate 4, drive mechanism 5, rotating mechanism 6, top plate 7, swing mechanism 8, flat belt 9, steel wire rope 10, screen frame 11 and support bar
12, support bar 12 is fixed in the one end of bottom plate 1；Rotating mechanism 6 is fixed in end of the bottom plate 1 away from support bar 12, rotating mechanism 6
For stirring cleaning fluid；Top plate 7 is fixed in the top of support bar 12；Drive mechanism 5 is fixed in bottom plate 1, and is located at the He of support bar 12
Between rotating mechanism 6, rotating mechanism 6 is connected with drive mechanism 5；Swing mechanism 8 is fixed in top plate 7, and passes through flat belt 9
It is connected with drive mechanism 5, swing mechanism 8 is used to drive screen frame 11 to swing；The one end of two pole 2 is fixed in bottom plate 1, and position
In the both sides of rotating mechanism 6, the other end is fixed in cleaning frame 3；Web plate 4 is fixed in inside cleaning frame 3, and screen frame 11 passes through steel wire rope
10 are connected with top plate 7, and screen frame 11 is located at the top of web plate 4.
Drive mechanism 5 includes slide rail 51, sliding block 52, the first rack 53, installing plate 54, motor 55, first rotating shaft 56,
One belt pulley 57, the first rotating disk 58, sliding axle 59, oscillating rod 510, the rack 513 of sector gear 512 and second, slide rail 51 are affixed
In bottom plate 1；First rack 53 is slidably connected by sliding block 52 and slide rail 51, and affixed with the one end of the second rack 513；Installing plate
54 are vertically fixed in bottom plate 1, and motor 55 is fixed in installing plate 54；The one end of first rotating shaft 56 passes with the output end of motor 55
Dynamic connection, the first belt pulley 57 and the first rotating disk 58 are fixed in first rotating shaft 56, and between the first rotating disk 58 and motor 55 away from
From more than the distance between the first belt pulley 57 and motor 55；Sliding axle 59 is fixed in the sidepiece of the first rotating disk 58 1；Oscillating rod 510
With the sidepiece of installing plate 54 1 the word hole 511 run through for sliding axle 59 is offered on be hinged and oscillating rod 510；Sector gear 512
The bottom of oscillating rod 510 is fixed in, and sector gear 512 engages with the first rack 53.
Rotating mechanism 6 includes the second rack 513, first bearing seat 61, the second rotating shaft 62, roller gear 63, sealing ring
64 and blade 65, first bearing seat 61 be fixed in bottom plate 1；Second rotating shaft 62 is articulated in first bearing seat 61；Roller gear 63 is solid
The bottom of first rotating shaft 56 is connected to, and is engaged with the second rack 513；Sealing ring 64 is fixed in cleaning frame 3 bottom, first rotating shaft 56 1
End is affixed through sealing ring 64 and blade 65.
Swing mechanism 8 includes second bearing seat 81, the 3rd rotating shaft 82, the second belt pulley 83, the second rotating disk 84, connecting rod
85th, sliding sleeve 86 and slide bar 87, sliding sleeve 86 are fixed in top plate 7；Slide bar 87 runs through sliding sleeve 86, and slide bar 87 is slided with sliding sleeve 86 and connected
Connect；One end of the slide bar 87 away from connecting rod 85 offers the pilot hole 88 run through for steel wire rope 10；Second bearing seat 81 is fixed in
Top plate 7；The one end of 3rd rotating shaft 82 is pivotally connected with second bearing seat 81, and the second belt pulley 83 and the second rotating disk 84 are fixed in the 3rd turn
Axle 82, and the distance between the second rotating disk 84 and second bearing seat 81 are more than between the second belt pulley 83 and second bearing seat 81
Distance；The one end of connecting rod 85 and the second rotating disk 84 are be hinged, and the other end is be hinged with slide bar 87.
The lustration type cleaning equipment for being used for silicon chip production also includes drain pipe 13 and valve 14；Drain pipe 13 is fixed in
The sidepiece of frame 3 one is cleaned, and with cleaning UNICOM in frame 3；Valve 14 is installed on drain pipe 13.
Operation principle：When needing cleaning silicon chip, worker is put into silicon chip in screen frame 11 first, then pours into cleaning fluid
Clean in frame 3, then control drive mechanism 5 to operate, drive mechanism 5 drives rotating mechanism 6 and swing mechanism 8 to operate, and then stirs
Dynamic cleaning fluid and screen frame 11 is driven to swing, when cleaning finishes, worker controls drive mechanism 5 to shut down again, and worker is from screen frame
The silicon chip after cleaning is taken out in 11.The double action of swing mechanism 8 and rotating mechanism 6 so that silicon chip can clean comprehensively, improve clear
Wash efficiency.
Because drive mechanism 5 includes slide rail 51, sliding block 52, the first rack 53, installing plate 54, motor 55, first rotating shaft
56th, the first belt pulley 57, the first rotating disk 58, sliding axle 59, oscillating rod 510, the rack 513 of sector gear 512 and second, slide rail 51
It is fixed in bottom plate 1；First rack 53 is slidably connected by sliding block 52 and slide rail 51, and affixed with the one end of the second rack 513；Peace
Loading board 54 is vertically fixed in bottom plate 1, and motor 55 is fixed in installing plate 54；The one end of first rotating shaft 56 exports with motor 55
End drive connection, the first belt pulley 57 and the first rotating disk 58 are fixed in first rotating shaft 56, and between the first rotating disk 58 and motor 55
Distance be more than the distance between the first belt pulley 57 and motor 55；Sliding axle 59 is fixed in the sidepiece of the first rotating disk 58 1；Swing
Bar 510 is hinged with the sidepiece of installing plate 54 1 and offers the word hole 511 run through for sliding axle 59 on oscillating rod 510；Sector
Wheel 512 is fixed in the bottom of oscillating rod 510, and sector gear 512 engages with the first rack 53, when silicon chip needs cleaning, worker
Controlled motor 55 rotates, and drives first rotating shaft 56 to rotate, and then drives the first belt pulley 57 and the first rotating disk 58 to rotate, the first skin
Belt wheel 57 drives swing mechanism 8 to operate by flat belt 9, the mating band that the first rotating disk 58 passes through the word hole 511 of sliding axle 59 and one
Movable pendulum lever 510 swings, and then drives sector gear 512 to move left and right, and then drives the first rack 53 and the second rack
513 move left and right, and then drive rotating mechanism 6 to operate.The effect for saving the energy and high-efficiency washing silicon chip is so reached.
Because rotating mechanism 6 includes the second rack 513, first bearing seat 61, the second rotating shaft 62, roller gear 63, close
Seal 64 and blade 65, first bearing seat 61 are fixed in bottom plate 1；Second rotating shaft 62 is articulated in first bearing seat 61；Roller gear
63 are fixed in the bottom of first rotating shaft 56, and are engaged with the second rack 513；Sealing ring 64 is fixed in cleaning frame 3 bottom, first rotating shaft
56 one ends are affixed through sealing ring 64 and blade 65, when motor 55 operates, drive the second rack 513 to move left and right, because
Roller gear 63 engages with the second rack 513, drives roller gear 63 to rotate so the second rack 513 moves left and right, and then band
Dynamic second rotating shaft 62 rotates, and the rotational band movable vane piece 65 of the second rotating shaft 62 rotates, and blade 65 rotates quick agitation cleaning fluid so that its
Can efficient cleaning silicon chip.
Because swing mechanism 8 includes second bearing seat 81, the 3rd rotating shaft 82, the second belt pulley 83, the second rotating disk 84, company
Bar 85, sliding sleeve 86 and slide bar 87, sliding sleeve 86 are fixed in top plate 7；Slide bar 87 runs through sliding sleeve 86, and slide bar 87 is slided with sliding sleeve 86 and connected
Connect；One end of the slide bar 87 away from connecting rod 85 offers the pilot hole 88 run through for steel wire rope 10；Second bearing seat 81 is fixed in
Top plate 7；The one end of 3rd rotating shaft 82 is pivotally connected with second bearing seat 81, and the second belt pulley 83 and the second rotating disk 84 are fixed in the 3rd turn
Axle 82, and the distance between the second rotating disk 84 and second bearing seat 81 are more than between the second belt pulley 83 and second bearing seat 81
Distance；The one end of connecting rod 85 and the second rotating disk 84 are be hinged, and the other end is be hinged with slide bar 87, when motor 55 rotates, drive the
One belt pulley 57 rotates, and the first belt pulley 57 drives the second belt pulley 83 to rotate by flat belt 9, the rotational band of the second belt pulley 83
Dynamic second rotating disk 84 rotates, and then drivening rod 85 rotates, and the rotational band moving slide-bar 87 of connecting rod 85 moves left and right, due to steel wire rope 10
Through pilot hole 88, drive steel wire rope 10 to swing so slide bar 87 moves left and right, and then drive screen frame 11 being capable of left and right pendulum
It is dynamic so that the silicon chip in it stirs, and reaches the effect uniformly cleaned.
Because the lustration type cleaning equipment for being used for silicon chip production also includes drain pipe 13 and valve 14；Drain pipe 13 is solid
The cleaning sidepiece of frame 3 one is connected to, and with cleaning UNICOM in frame 3；Valve 14 is installed on drain pipe 13, after the completion of Wafer Cleaning, needs
Cleaning fluid is discharged into cleaning frame 3, now worker opens valve 14, and cleaning fluid is discharged by drain pipe 13, and it is fast to have reached convenience
Prompt effect.
Embodiment described above only expresses preferred embodiment of the present utility model, and its description is more specific and detailed,
But therefore it can not be interpreted as the limitation to the utility model patent scope.It should be pointed out that for the common of this area
For technical staff, without departing from the inventive concept of the premise, some deformations can also be made, improves and substitutes, these are all
Belong to the scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (5)
1. a kind of lustration type cleaning equipment for silicon chip production, it is characterised in that include bottom plate（1）, pole（2）, cleaning
Frame（3）, web plate（4）, drive mechanism（5）, rotating mechanism（6）, top plate（7）, swing mechanism（8）, flat belt（9）, steel wire rope
（10）, screen frame（11）And support bar（12）, support bar（12）It is fixed in bottom plate（1）One end；Rotating mechanism（6）It is fixed in bottom plate
（1）Away from support bar（12）End, rotating mechanism（6）For stirring cleaning fluid；Top plate（7）It is fixed in support bar（12）Top
Portion；Drive mechanism（5）It is fixed in bottom plate（1）, and it is located at support bar（12）And rotating mechanism（6）Between, rotating mechanism（6）With drive
Motivation structure（5）Drive connection；Swing mechanism（8）It is fixed in top plate（7）, and pass through flat belt（9）With drive mechanism（5）Transmission connects
Connect, swing mechanism（8）For driving screen frame（11）Swing；Two poles（2）One end is fixed in bottom plate（1）, and it is located at whirler
Structure（6）Both sides, the other end are fixed in cleaning frame（3）；Web plate（4）It is fixed in cleaning frame（3）Inside, screen frame（11）Pass through steel wire
Rope（10）With top plate（7）Connection, and screen frame（11）Positioned at web plate（4）Top.
A kind of 2. lustration type cleaning equipment for silicon chip production according to claim 1, it is characterised in that drive mechanism
（5）Include slide rail（51）, sliding block（52）, the first rack（53）, installing plate（54）, motor（55）, first rotating shaft（56）, first
Belt pulley（57）, the first rotating disk（58）, sliding axle（59）, oscillating rod（510）, sector gear（512）With the second rack（513）,
Slide rail（51）It is fixed in bottom plate（1）；First rack（53）Pass through sliding block（52）With slide rail（51）Be slidably connected, and with the second rack
（513）One end is affixed；Installing plate（54）Vertically it is fixed in bottom plate（1）, motor（55）It is fixed in installing plate（54）；The
One rotating shaft（56）One end and motor（55）Output end is connected, the first belt pulley（57）With the first rotating disk（58）It is fixed in
One rotating shaft（56）, and the first rotating disk（58）With motor（55）The distance between be more than the first belt pulley（57）With motor（55）Between
Distance；Sliding axle（59）It is fixed in the first rotating disk（58）One sidepiece；Oscillating rod（510）With installing plate（54）One sidepiece it is be hinged and
Oscillating rod（510）On offer for sliding axle（59）The word hole run through（511）；Sector gear（512）It is fixed in oscillating rod
（510）Bottom, and sector gear（512）With the first rack（53）Engagement.
A kind of 3. lustration type cleaning equipment for silicon chip production according to claim 1, it is characterised in that rotating mechanism
（6）Include the second rack（513）, first bearing seat（61）, the second rotating shaft（62）, roller gear（63）, sealing ring（64）With
Blade（65）, first bearing seat（61）It is fixed in bottom plate（1）；Second rotating shaft（62）It is articulated in first bearing seat（61）；Cylinder Gear
Wheel（63）It is fixed in first rotating shaft（56）Bottom, and with the second rack（513）Engagement；Sealing ring（64）It is fixed in cleaning frame（3）
Bottom, first rotating shaft（56）One end runs through sealing ring（64）With blade（65）It is affixed.
A kind of 4. lustration type cleaning equipment for silicon chip production according to claim 1, it is characterised in that swing mechanism
（8）Include second bearing seat（81）, the 3rd rotating shaft（82）, the second belt pulley（83）, the second rotating disk（84）, connecting rod（85）, it is sliding
Set（86）And slide bar（87）, sliding sleeve（86）It is fixed in top plate（7）；Slide bar（87）Through sliding sleeve（86）, and slide bar（87）With sliding sleeve
（86）It is slidably connected；Slide bar（87）Away from connecting rod（85）One end offer for steel wire rope（10）The pilot hole run through（88）；
Second bearing seat（81）It is fixed in top plate（7）；3rd rotating shaft（82）One end and second bearing seat（81）Pivot joint, the second belt pulley
（83）With the second rotating disk（84）It is fixed in the 3rd rotating shaft（82）, and the second rotating disk（84）With second bearing seat（81）The distance between
More than the second belt pulley（83）With second bearing seat（81）The distance between；Connecting rod（85）One end and the second rotating disk（84）Hinge
Connect, the other end and slide bar（87）It is be hinged.
5. a kind of lustration type cleaning equipment for silicon chip production according to claim 1, it is characterised in that this is used for silicon
The lustration type cleaning equipment of piece production also includes drain pipe（13）And valve（14）；Drain pipe（13）It is fixed in cleaning frame（3）
One sidepiece, and with cleaning frame（3）Interior UNICOM；Valve（14）It is installed on drain pipe（13）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720888824.6U CN207170382U (en) | 2017-07-21 | 2017-07-21 | A kind of lustration type cleaning equipment for silicon chip production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720888824.6U CN207170382U (en) | 2017-07-21 | 2017-07-21 | A kind of lustration type cleaning equipment for silicon chip production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207170382U true CN207170382U (en) | 2018-04-03 |
Family
ID=61737209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720888824.6U Expired - Fee Related CN207170382U (en) | 2017-07-21 | 2017-07-21 | A kind of lustration type cleaning equipment for silicon chip production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207170382U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108767352A (en) * | 2018-04-30 | 2018-11-06 | 闫大勇 | A kind of battery recycling copper cap retracting device |
| CN109317315A (en) * | 2018-10-14 | 2019-02-12 | 郭增起 | A kind of separation of solid and liquid uses supercentrifuge |
| CN110810932A (en) * | 2019-11-05 | 2020-02-21 | 湖南创一电子科技股份有限公司 | Production process of electronic cigarette magnetic core |
| CN115615147A (en) * | 2022-08-20 | 2023-01-17 | 浙江艾科半导体设备有限公司 | Drying device for silicon wafer cleaning machine |
| CN116809509A (en) * | 2023-08-25 | 2023-09-29 | 临沭县东升磨料有限公司 | Silicon carbide micro powder cleaning device and cleaning method thereof |
-
2017
- 2017-07-21 CN CN201720888824.6U patent/CN207170382U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108767352A (en) * | 2018-04-30 | 2018-11-06 | 闫大勇 | A kind of battery recycling copper cap retracting device |
| CN109317315A (en) * | 2018-10-14 | 2019-02-12 | 郭增起 | A kind of separation of solid and liquid uses supercentrifuge |
| CN109317315B (en) * | 2018-10-14 | 2020-06-12 | 河北华晨药业有限公司 | High-speed centrifuge for solid-liquid separation |
| CN110810932A (en) * | 2019-11-05 | 2020-02-21 | 湖南创一电子科技股份有限公司 | Production process of electronic cigarette magnetic core |
| CN115615147A (en) * | 2022-08-20 | 2023-01-17 | 浙江艾科半导体设备有限公司 | Drying device for silicon wafer cleaning machine |
| CN115615147B (en) * | 2022-08-20 | 2024-02-23 | 浙江艾科半导体设备有限公司 | Drying device for silicon wafer cleaning machine |
| CN116809509A (en) * | 2023-08-25 | 2023-09-29 | 临沭县东升磨料有限公司 | Silicon carbide micro powder cleaning device and cleaning method thereof |
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