CN207163608U - Capacitance pressure transducer, and pressure measurement circuitry - Google Patents
Capacitance pressure transducer, and pressure measurement circuitry Download PDFInfo
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- CN207163608U CN207163608U CN201720666871.6U CN201720666871U CN207163608U CN 207163608 U CN207163608 U CN 207163608U CN 201720666871 U CN201720666871 U CN 201720666871U CN 207163608 U CN207163608 U CN 207163608U
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Abstract
The utility model is applied to sensor technical field, there is provided a kind of capacitance pressure transducer, and pressure measurement circuitry, capacitance pressure transducer, include：Substrate provided with a cavity, movable film and interdigital capacitor；Movable film is arranged on the top of the cavity of substrate, and movable film is fixedly connected with substrate；Interdigital capacitor includes fixed electrode and movable electrode, and fixed electrode is arranged on substrate, and movable electrode is set on movable film, and fixed electrode intersects and in the same plane with movable electrode.Because the movable electrode of interdigital capacitor is set directly on movable film, when movable film is deformed upon by ambient pressure, the larger deformation quantity of the generation of movable electrode can be caused, cause movable electrode that larger displacement occurs relative to fixed electrode, cause the capacitance of interdigital capacitor to vary widely, the measurement sensitivity of capacitance pressure transducer, can be effectively improved.
Description
Technical field
The utility model belongs to MEMS technology field, more particularly to a kind of MEMS capacitive pressure sensor and pressure measxurement
Circuit.
Background technology
At present, MEMS pressure sensor is widely used in various industrial circles.In traditional MEMS pressure sensor
Piezoresistive pressure sensor is most widely used.It is movable sensitive film above the cavity of piezoresistive pressure sensor, it is movable quick
Sense film is directly connected with anchor area, and pressure drag bar is located at the edge center of movable sensitive film.When movable sensitive film is received
When being acted on to pressure, it is bent downwardly so that pressure drag bar resistance changes, so as to measure the change of pressure.But due to pressure drag
The movable sensitive film of formula pressure sensor is fully connected with anchor area, and by the pulling force in anchor area, stress disperses movable sensitive film,
Cause that pressure drag bar resistance variations are limited, and the sensitivity of sensor is relatively low.
Utility model content
In view of this, the utility model embodiment provides a kind of capacitance pressure transducer, and pressure measurement circuitry, should
The higher movable sensitive film for solving piezoresistive pressure sensor in the prior art of transducer sensitivity directly connects completely with anchor area
Connect, by the pulling force in anchor area, stress disperses movable sensitive film, causes pressure drag bar resistance variations limited, the sensitivity of sensor
The problem of relatively low.
The first aspect of the utility model embodiment provides a kind of capacitance pressure transducer, including：Provided with a cavity
Substrate, movable film and interdigital capacitor；
The movable film is arranged on the top of the cavity of the substrate, and the movable film is fixed with the substrate to be connected
Connect；
The interdigital capacitor includes fixed electrode and movable electrode, and the fixed electrode is set over the substrate, described
Movable electrode is set on the movable film.
Further, the fixed electrode includes the first connection end and integrally formed some with first connection end
Fixation is interdigital, and first connection end is fixedly connected with the substrate.
Further, the movable electrode includes second connection end and integrally formed some with the second connection end
Movable interdigital, the second connection end is fixedly connected with the movable film.
Further, the cavity is shaped as cube or cylinder.
Further, the cross sectional shape of the cavity is more than bottom for trapezoidal and trapezoidal upper bottom edge length and grown.
Further, the first connection end of the fixed electrode is provided with insulating barrier with the substrate coupling part.
Further, the material of the substrate and the movable film is semi-conducting material.
The second aspect of the utility model embodiment provides a kind of pressure measurement circuitry, including above-mentioned capacitive pressure passes
Sensor, and power module and inductor；One end of the interdigital capacitor of the capacitance pressure transducer, and the inductor
One end electrically connects, and the power module electrically connects with the other end of the interdigital capacitor and the other end of the inductor respectively.
Existing beneficial effect is the utility model embodiment compared with prior art：What the utility model embodiment provided
Capacitance pressure transducer, and pressure measurement circuitry, including：Substrate provided with a cavity, movable film and interdigital capacitor；Movably
Film is arranged on the top of the cavity of substrate, and movable film is fixedly connected with substrate；Interdigital capacitor is including fixed electrode and movably
Electrode, fixed electrode are arranged on substrate, and movable electrode is set on movable film, and fixed electrode intersects and is located at movable electrode
On same plane.Because the movable electrode of interdigital capacitor is set directly on movable film, when movable film is by ambient pressure
When deforming upon, the larger deformation quantity of generation of movable electrode can be caused, cause movable electrode relative to fixed electrode occur compared with
Big displacement, cause the capacitance of interdigital capacitor to vary widely, the survey of capacitance pressure transducer, can be effectively improved
Measure sensitivity.
Brief description of the drawings
, below will be to embodiment or prior art in order to illustrate more clearly of the technical scheme in the embodiment of the utility model
The required accompanying drawing used is briefly described in description, it should be apparent that, drawings in the following description are only that this practicality is new
Some embodiments of type, for those of ordinary skill in the art, without having to pay creative labor, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 provides a kind of top view of the structural representation of capacitance pressure transducer, for the utility model embodiment；
Fig. 2 is diagrammatic cross-sections of the Fig. 1 of the utility model one embodiment offer along hatching A-A；
Fig. 3 is diagrammatic cross-sections of the Fig. 1 of the utility model one embodiment offer along hatching B-B；
Fig. 4 is a kind of structural representation for pressure measurement circuitry that the utility model embodiment provides.
Embodiment
In describing below, in order to illustrate rather than in order to limit, it is proposed that such as tool of particular system structure, technology etc
Body details, thoroughly to understand the utility model embodiment.However, it will be clear to one skilled in the art that there is no these
The utility model can also be realized in the other embodiments of detail.In other situations, omit to well-known system,
The detailed description of device, circuit and method, in case unnecessary details hinders description of the present utility model.
Technical term " first ", " second " in the specification and claims of the utility model embodiment etc. are to be used for
Similar object is distinguished, without for describing specific order precedence.It should be appreciated that the data so used are appropriate
In the case of can exchange, so that embodiment of the present utility model described herein can be with that except illustrating or describing herein
Order beyond a little is implemented.
In order to illustrate technical scheme described in the utility model, illustrated below by specific embodiment.
With reference to figure 1-3, Fig. 1 provides a kind of structural representation of capacitance pressure transducer, for the utility model embodiment
Top view, Fig. 2 are diagrammatic cross-sections of the Fig. 1 along hatching A-A, and Fig. 3 is diagrammatic cross-sections of the Fig. 1 along hatching B-B, this practicality
The capacitance pressure transducer, that new embodiment provides includes：
Substrate 101, movable film 102 and interdigital capacitor 103 provided with a cavity 104.Wherein, substrate 101 and movable thin
The material of film 102 is semi-conducting material, is included but is not limited to, silicon, germanium, GaAs etc..
Movable film 102 is arranged on the top of the cavity 104 of substrate 101, and movable film 102 is fixedly connected with substrate 101.
Wherein, the edge of movable film 102 is fixed on the top of substrate 101, and movable film 102 is centrally located at the cavity of substrate 101
104 top.
Interdigital capacitor 103 includes fixed electrode 1031 and movable electrode 1032, and fixed electrode 1031 is arranged on substrate 101
On, movable electrode 1032 is set on movable film 102.Wherein, fixed electrode 1031 intersects with movable electrode 1032 and positioned at same
In one plane, fixed electrode 1031 can interact arrangement successively with the interdigital of movable electrode 1032.
The operation principle of capacitance pressure transducer, is：When there is ambient pressure to be applied on movable film, movable film
Be under pressure the deformation that bends, and the movable electrode in turn resulting in the interdigital capacitor being fixedly connected with movable film is subjected to displacement,
Relative displacement occurs for the fixed electrode of movable electrode and interdigital capacitor so that leucismus occurs for the capacitance of interdigital capacitor, then
According to the pressure value and the corresponding relation of interdigital capacitor to prestore, it may be determined that the size of ambient pressure.
It was found from above-described embodiment, the capacitance pressure transducer, of the utility model embodiment offer, including provided with
The substrate of chamber, movable film and interdigital capacitor；Movable film is arranged on the top of the cavity of substrate, and movable film is fixed with substrate
Connection；Interdigital capacitor includes fixed electrode and movable electrode, and fixed electrode is arranged on substrate, and movable electrode sets movable film
On, fixed electrode intersects and in the same plane with movable electrode.Due to the movable electrode of interdigital capacitor is set directly at can
On dynamic film, when movable film is deformed upon by ambient pressure, the larger deformation quantity of the generation of movable electrode can be caused, made
Larger displacement occurs relative to fixed electrode into movable electrode, causes the capacitance of interdigital capacitor to vary widely, can
Effectively improve the measurement sensitivity of capacitance pressure transducer,.
Further, with reference to figure 2 and 3, fixed electrode 1031 include the first connection end 10311 and with the first connection end
10311 integrally formed some fixations interdigital 10312, the first connection end 10311 is fixedly connected with substrate 101.
Movable electrode 1032 include second connection end 10321 and with second connection end 10321 it is integrally formed it is some can
Moving fork refers to 10322, and second connection end 10321 is fixedly connected with movable film 102.
By set it is multiple interdigital with the integrally formed some fixations in the first connection end and with second connection end one into
Some movable fixed forks of type refer to, and can increase to interdigital capacitor the variable quantity of capacitance after deforming, improve capacitive pressure sensing
The sensitivity of device.
Further, cavity 104 is shaped as cube or cylinder.
Further, the cross sectional shape of cavity 104 is more than bottom for trapezoidal and trapezoidal upper bottom edge length and grown.
Further, the first connection end 10311 of fixed electrode 1031 is provided with insulation with the coupling part of substrate 101
Layer.
With reference to figure 4, a kind of structural representation for pressure measurement circuitry that Fig. 4 provides for the utility model embodiment, the pressure
Power measuring circuit includes the capacitance pressure transducer, 401 of above-described embodiment, in addition to：Power module 402 and inductor 403,
Wherein, one end of the interdigital capacitor 103 of the capacitance pressure transducer, 401 electrically connects with one end of the inductor 403, institute
Power module 402 is stated to electrically connect with the other end of the interdigital capacitor 103 and the other end of the inductor 403 respectively.
Power module can be exchange electricity output.What it is when power module output is AC signal, and the frequency of AC signal
For f, the inductance value of inductor is L, then the capacitance of interdigital capacitor isIt can be obtained by pressure measurement circuitry
The capacitance of the interdigital capacitor deformed upon under different ambient pressures.
Therefore, reference table 1, be able to can be obtained not according to the pressure value and the corresponding relation of interdigital capacitor pre-saved
With the size of ambient pressure corresponding to the capacitance of interdigital capacitor.
The pressure value and the corresponding relation of the capacitance of interdigital capacitor that table 1 pre-saves
| The capacitance C of interdigital capacitor | Ambient pressure P |
| C1 | P1 |
| C2 | P2 |
| … | … |
Embodiment described above is only to illustrate the technical solution of the utility model, rather than its limitations；Although with reference to before
Embodiment is stated the utility model is described in detail, it will be understood by those within the art that：It still can be with
Technical scheme described in foregoing embodiments is modified, or equivalent substitution is carried out to which part technical characteristic；And
These modifications are replaced, and the essence of appropriate technical solution is departed from the spirit of various embodiments of the utility model technical scheme
And scope, it should be included within the scope of protection of the utility model.
Claims (8)
- A kind of 1. capacitance pressure transducer, it is characterised in that including：Substrate provided with a cavity, movable film and interdigital electricity Hold；The movable film is arranged on the top of the cavity of the substrate, and the movable film is fixedly connected with the substrate；The interdigital capacitor includes fixed electrode and movable electrode, and the fixed electrode is set over the substrate, described movable Electrode is set on the movable film.
- 2. capacitance pressure transducer, according to claim 1, it is characterised in that the fixed electrode includes the first connection End and, first connection end and substrate fixation company interdigital with the integrally formed some fixations in first connection end Connect.
- 3. capacitance pressure transducer, according to claim 1, it is characterised in that the movable electrode includes the second connection Hold and integrally formed some movable interdigital with the second connection end, the second connection end is fixed with the movable film Connection.
- 4. capacitance pressure transducer, according to claim 1, it is characterised in that the cavity be shaped as cube or Cylinder.
- 5. capacitance pressure transducer, according to claim 4, it is characterised in that the cross sectional shape of the cavity is ladder Shape, and trapezoidal upper bottom edge length is more than bottom and grown.
- 6. capacitance pressure transducer, according to claim 2, it is characterised in that the first connection end of the fixed electrode Insulating barrier is provided with the substrate coupling part.
- 7. according to the capacitance pressure transducer, described in claim any one of 1-6, it is characterised in that the substrate and it is described can The material of dynamic film is semi-conducting material.
- 8. a kind of pressure measurement circuitry, it is characterised in that including the capacitive pressure sensing as described in claim any one of 1-7 Device, and power module and inductor；The capacitance pressure transducer, electrically connects with one end of the inductor, the power module respectively with the condenser type The other end of the other end of pressure sensor and the inductor electrically connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720666871.6U CN207163608U (en) | 2017-06-08 | 2017-06-08 | Capacitance pressure transducer, and pressure measurement circuitry |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720666871.6U CN207163608U (en) | 2017-06-08 | 2017-06-08 | Capacitance pressure transducer, and pressure measurement circuitry |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207163608U true CN207163608U (en) | 2018-03-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720666871.6U Active CN207163608U (en) | 2017-06-08 | 2017-06-08 | Capacitance pressure transducer, and pressure measurement circuitry |
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| CN (1) | CN207163608U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108362407A (en) * | 2017-06-08 | 2018-08-03 | 深圳信息职业技术学院 | Capacitance pressure transducer, and pressure measurement circuitry |
-
2017
- 2017-06-08 CN CN201720666871.6U patent/CN207163608U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108362407A (en) * | 2017-06-08 | 2018-08-03 | 深圳信息职业技术学院 | Capacitance pressure transducer, and pressure measurement circuitry |
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