CN207148351U - A kind of gluing levelling device made for diffraction optical element - Google Patents
A kind of gluing levelling device made for diffraction optical element Download PDFInfo
- Publication number
- CN207148351U CN207148351U CN201721213007.7U CN201721213007U CN207148351U CN 207148351 U CN207148351 U CN 207148351U CN 201721213007 U CN201721213007 U CN 201721213007U CN 207148351 U CN207148351 U CN 207148351U
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- CN
- China
- Prior art keywords
- gluing
- gluing frame
- optical element
- diffraction optical
- levelling device
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model provides a kind of gluing levelling device made for diffraction optical element, including gluing frame mechanism and multiple governor motions for being arranged at gluing frame mechanism；Multiple Top fastening screws that gluing frame mechanism includes gluing frame, is arranged at multiple accepting holes of gluing frame bottom and is arranged at gluing frame periphery；Each governor motion includes the regulating block being arranged in accepting hole, the support block being connected by connecting rod with regulating block, the adjusting screw rod being connected through gluing frame with regulating block and the compression spring being sheathed on adjusting screw rod respectively.Treat that the substrate of gluing is placed in the accepting groove of the rubber-coated mechanism, supported by multiple support blocks, the height of regulating block can be adjusted by adjusting screw rod, so as to realize the regulation to the height of support block, realize the regulation of substrate height, after the completion of regulation, substrate can be locked by the multiple Top fastening screw；It is simple and compact for structure compact, the height of substrate can be adjusted, while conveniently substrate is carried out clear.
Description
Technical field
It the utility model is related to diffractive optics technology field, more particularly to a kind of gluing made for diffraction optical element
Levelling device.
Background technology
Diffraction optical element is applied to numerous areas, such as beam shaping, pulse compression, light beam sampling, sharp combiner.With
The development of laser technology, the popularization of high power laser application, requirement to associated diffraction optical element also more and more higher is special
It is not in extremely strong extremely short pulse laser system, diffraction optical element needs to bear great power, thus needs by raising
Element area improves the upper limit of born power.The manufacture of large area diffraction optical element is broadly divided into photoresist and is coated with, is complete
Several steps such as exposure, development, ion beam etching are ceased, wherein photoresist coating is a vital process.Coating technique
It is required that one layer of photoresist film of thickness uniform, controllable can be obtained over a large area, its difficulty increases with the increase of area.At present,
The preferable glued membrane of uniformity mainly obtained using spin coating mode, it using colloid surface tension and spin coating when
The balancing of centrifugal force realizes the thick control of glue, to specific Other substrate materials, has determination between rotating speed and glue thickness
Relation, therefore accurate thickness control can be realized.
Gluing success depends on many factors, is on the one hand the cleaning of coating substrate, if remained on substrate
Oil stain, dust or other compositions, then be likely to occur on follow-up diffraction element finished product glue-line attachment loosely, fall glue, graininess spot
Deng flaw；On the other hand it is rotary coating, if substrate is not parallel to rotation basal plane, it is uneven etc. rubberization thickness easily occurs
Problem.Therefore coating technique needs a kind of can facilitate to carry out substrate cleaning, the device of substrate leveling.
In the prior art, No. 201510133314.3 patents disclose heavy caliber diffraction grating exposure device and heavy caliber spreads out
The preparation method of grating is penetrated, is directed to each step such as gluing, exposure, development, glue spreading apparatus is not explained.
No. 200610105092.5 patents disclose the levelling device of article carrying platform, disclose a kind of by screw mandrel, the regulation knot of handwheel
Structure.But compact, compact substrate plane regulation can not be also realized, simultaneously without the dedicated regulating mechanism of photoresist coating
Existing adjusting method is difficult to the cleaning requirement for taking into account substrate.
Utility model content
The technical problem that the utility model solves is to provide a kind of regulation substrate height simple and compact for structure, convenient
The gluing levelling device made for diffraction optical element.
The utility model provide it is a kind of for diffraction optical element make gluing levelling device, including gluing frame mechanism and
The multiple governor motions being arranged at the gluing frame mechanism；The gluing frame mechanism includes gluing frame, is arranged at the gluing
Multiple accepting holes of frame bottom and the multiple Top fastening screws for being arranged at the gluing frame periphery, the middle part of the gluing frame are set
There is accepting groove；Regulating block that each governor motion includes being arranged in the accepting hole respectively, by connecting rod and the tune
The connected support block of locking nub, the adjusting screw rod being connected through the gluing frame with the regulating block and it is sheathed on the regulation spiral shell
Compression spring on bar, the both ends of the compression spring abut with the gluing frame and the regulating block respectively, the support block
In the accepting groove.
Further, the regulating block coordinates with the accepting hole.
Further, the cross section of the accepting hole is that triangle is either square or pentagon or hexagon.
Further, the multiple Top fastening screw is located at the both sides of the gluing frame, the multiple governor motion respectively
It is located at the other both sides of the gluing frame respectively.
Further, the adjusting screw rod is the adjusting screw rod of interior hexagonal.
Further, the Top fastening screw includes four, and the governor motion includes four, four Top fastening screws
It is located at the both sides of the gluing frame respectively, four governor motions are located at the other both sides of the gluing frame respectively.
The gluing levelling device of the present utility model made for diffraction optical element, treat gluing substrate be placed on it is described
In the accepting groove of rubber-coated mechanism, supported by multiple support blocks, when adjusting screw rod described in turn, due to the regulating block quilt
The accepting hole limitation can not produce rotation, can only slide up and down, therefore the tune can be adjusted by the adjusting screw rod
The height of locking nub, it is achieved thereby that the regulation of the height to the support block, that is, realize the regulation of substrate height, regulation is completed
Afterwards, substrate can be locked by the multiple Top fastening screw；The gluing levelling device made for diffraction optical element
It is simple and compact for structure compact, the height of substrate can be adjusted, while conveniently substrate is cleaned.
Brief description of the drawings
Fig. 1 is the schematic diagram of the gluing levelling device of the present utility model made for diffraction optical element；
Fig. 2 is the signal of the governor motion of the gluing levelling device of the present utility model made for diffraction optical element
Figure；
In figure mark for：Gluing frame mechanism 1, gluing frame 11, accepting hole 12, Top fastening screw 13, accepting groove 14, governor motion
2, regulating block 21, connecting rod 22, support block 23, adjusting screw rod 24, compression spring 25.
Embodiment
Embodiment of the present utility model is described below in detail, the example of the embodiment is shown in the drawings, wherein
Same or similar label represents same or similar element or the element with same or like function from beginning to end.Lead to below
It is exemplary to cross the embodiment being described with reference to the drawings, it is intended to for explaining the utility model, and it is not intended that to this practicality
New limitation.
As shown in Figures 1 and 2, the utility model provides a kind of gluing levelling device made for diffraction optical element,
Including gluing frame mechanism 1 and the multiple governor motions 2 being arranged at the gluing frame mechanism 1；The gluing frame mechanism 1 includes applying
Glue frame 11, the multiple accepting holes 12 for being arranged at the bottom of gluing frame 11 and the multiple tops for being arranged at the periphery of gluing frame 11
Tight screw 13, the middle part of the gluing frame 11 is provided with accepting groove 14；Each governor motion 2 is described including being arranged at respectively
Regulating block 21 in accepting hole 12, the support block 23 being connected by connecting rod 22 with the regulating block 21, through the gluing frame 11
The adjusting screw rod 24 being connected with the regulating block 21 and the compression spring 25 being sheathed on the adjusting screw rod 24, the compression
The both ends of spring 25 abut with the gluing frame 11 and the regulating block 21 respectively, and the support block 23 is located at the accepting groove 14
In.Treat that the substrate of gluing is placed in the accepting groove 14 of the rubber-coated mechanism 1, supported by multiple support blocks 23, work as turn
During the adjusting screw rod 24, rotation can not be produced because the regulating block 21 is limited by the accepting hole 12, can only be slided up and down,
Therefore the height of the regulating block 21 can be adjusted by the adjusting screw rod 24, it is achieved thereby that to the support block 23
The regulation of height, that is, the regulation of substrate height is realized, can be by substrate by the multiple Top fastening screw 13 after the completion of regulation
Locking；The gluing levelling device for diffraction optical element making is simple and compact for structure compact, can adjust the height of substrate
Degree, while conveniently substrate is cleaned.Specifically, the gluing frame 11 and the part of the regulating block 21 are processed using metallic aluminium
Form, and do Nickel Plating Treatment, its resistance to corrosion is strong.The Top fastening screw 13 and the adjusting screw rod 24 are etch-proof stainless
Steel screw, the compression spring 25 are stainless steel spring, and the line footpath of the compression spring 25 typically exists in 2mm or so, external diameter
15mm or so, the original length of compression spring 25 subtract the difference of the height of the regulating block 21 than the depth of accepting hole 12
Big 5 to 10mm；The support block 24 is that the plastic components such as nylon make, can be to protect substrate not to be scratched.
The regulating block 21 coordinates with the accepting hole 12；The cross section of the accepting hole 12 be triangle or it is square or
Person's pentagon or hexagon.
Specifically, the multiple Top fastening screw 13 is located at the both sides of the gluing frame 11, the multiple governor motion 2 respectively
It is located at the other both sides of the gluing frame 11 respectively.
The adjusting screw rod 24 is the adjusting screw rod of interior hexagonal.It can be adjusted by inner hexagon spanner, it is easy to adjust.
The Top fastening screw 13 includes four, and the governor motion 2 includes four, and four Top fastening screws 13 distinguish position
In the both sides of the gluing frame 11, four governor motions 2 are located at the other both sides of the gluing frame 11 respectively.It can pass through
One governor motion 2 realizes the surface horizontal attitude regulation of substrate, can also be by adjusting four regulation machines simultaneously
Structure 2 realizes the lifting of substrate, easy to adjust.
The gluing levelling device of the present utility model made for diffraction optical element, can be directly placed into spin coater
The interior rotary coating for carrying out substrate, regulation height is can be used for, substrate surface is higher by the gluing frame 11, as substrate
Rack for cleaning a, it is possible to achieve frame is dual-purpose, simplifies frock；In addition, the regulation process continuous-stable of the governor motion 2, to base
Piece has preferable protective effect, by adjusting the height of the regulating block 21, and change the length of the Top fastening screw 13 with
And the length of the connecting rod 22, the gluing levelling device made for diffraction optical element can be made to be applied to different thickness
Degree, different size of substrate, it is versatile.
It is described above, only it is most preferred embodiment of the present utility model, not the utility model is made any formal
Limitation, any those skilled in the art, in the case where not departing from technical solutions of the utility model ambit, utilization is above-mentioned
The method content of announcement makes many possible changes and modifications to technical solutions of the utility model, belongs to claim protection
Scope.
Claims (6)
- A kind of 1. gluing levelling device made for diffraction optical element, it is characterised in that：Including gluing frame mechanism and setting Multiple governor motions at the gluing frame mechanism；The gluing frame mechanism includes gluing frame, is arranged at the gluing frame bottom Multiple accepting holes in portion and the multiple Top fastening screws for being arranged at gluing frame periphery, receipts are provided with the middle part of the gluing frame Tank；Regulating block that each governor motion includes being arranged in the accepting hole respectively, by connecting rod and the regulating block Connected support block, the adjusting screw rod being connected through the gluing frame with the regulating block and it is sheathed on the adjusting screw rod Compression spring, the both ends of the compression spring abut with the gluing frame and the regulating block respectively, and the support block is located at In the accepting groove.
- 2. the gluing levelling device made as claimed in claim 1 for diffraction optical element, it is characterised in that：The regulation Block coordinates with the accepting hole.
- 3. the gluing levelling device made as claimed in claim 1 for diffraction optical element, it is characterised in that：The collecting The cross section in hole is that triangle is either square or pentagon or hexagon.
- 4. the gluing levelling device made as claimed in claim 1 for diffraction optical element, it is characterised in that：It is the multiple Top fastening screw is located at the both sides of the gluing frame respectively, and the multiple governor motion is located at other the two of the gluing frame respectively Side.
- 5. the gluing levelling device made as claimed in claim 1 for diffraction optical element, it is characterised in that：The regulation Screw rod is the adjusting screw rod of interior hexagonal.
- 6. the gluing levelling device made as claimed in claim 1 for diffraction optical element, it is characterised in that：It is described to hold out against Screw includes four, and the governor motion includes four, and four Top fastening screws are located at the both sides of the gluing frame, institute respectively State the other both sides that four governor motions are located at the gluing frame respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721213007.7U CN207148351U (en) | 2017-09-21 | 2017-09-21 | A kind of gluing levelling device made for diffraction optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721213007.7U CN207148351U (en) | 2017-09-21 | 2017-09-21 | A kind of gluing levelling device made for diffraction optical element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207148351U true CN207148351U (en) | 2018-03-27 |
Family
ID=61668292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721213007.7U Expired - Fee Related CN207148351U (en) | 2017-09-21 | 2017-09-21 | A kind of gluing levelling device made for diffraction optical element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207148351U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108919454A (en) * | 2018-07-18 | 2018-11-30 | 中山新诺科技股份有限公司 | Regulating mechanism, lenslet array system and exposure machine |
-
2017
- 2017-09-21 CN CN201721213007.7U patent/CN207148351U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108919454A (en) * | 2018-07-18 | 2018-11-30 | 中山新诺科技股份有限公司 | Regulating mechanism, lenslet array system and exposure machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180327 Termination date: 20190921 |