CN207133210U - X fluorescence spectrum analyzer with stacked collimater - Google Patents

Abstract

The utility model discloses a kind of X fluorescence spectrum analyzer with stacked collimater, including X-ray generator, vacuum measurement room and fixed element light splitter.Fixed element light splitter includes entrance slit tube assembly, light splitting case assembly and exit slit tube assembly.Entrance slit tube assembly includes incidence channel body, one-level collimater and entrance slit width adjustment structure；Exit slit tube assembly includes exit channel body, secondary collimator and exit slit width adjusting structure；At least one collimater in one-level collimater and secondary collimator includes collimator assembly, briquetting and light bar.Collimator assembly includes multiple spacer blocks and multiple sheet metals, and spacer block and sheet metal intersecting are set；Briquetting compresses the side of collimator assembly, so that collimator assembly is fixed at least one passage body of incidence channel body and exit channel body；Light bar is arranged on the tail end of at least one collimater.In this way, the loss of energy can be reduced, assembling is simple.

Description

X fluorescence spectrum analyzer with stacked collimater

Technical field

It the utility model is related to X fluorescence spectrum analyzer field, more particularly to a kind of X-fluorescence with stacked collimater Spectroanalysis instrument.

Background technology

In existing wavelength dispersion multielement simultaneous determination type X fluorescence spectrum analyzer (abbreviation co-shaping WDXRFS), one As for the surrounding of vacuum measurement room multiple fixed element roads (abbreviation element road), the characteristic X-ray in each element road are installed Detected after optical splitter is divided by detector, for caused pulse signal after amplifier amplifies, pulse height will be according to a peak shape Curve distribution, that is, it is referred to as the characteristic X-ray spectral peak (abbreviation element spectral peak) of the element.Spectral peak is must be carefully adjusted during instrument testing Peak position, and spectral peak resolution ratio is reached optimal, region of interest is then set, calculates the spectral peak area (pulsimeter digit rate) in area, The intensity of the elemental characteristic X ray is represented, it is directly proportional to the constituent content, constituent content can quantitatively be divided whereby Analysis.

Existing co-shaping WDXRFS, several fixed element light splitters are mounted with vacuum measurement room periphery.Element Light splitter connects by entrance slit tube assembly, the light splitting case assembly being connected with entrance slit tube assembly afterbody, with light splitting case assembly The exit slit tube assembly composition connect.Respective feature X is sent by the different elements in sample after the x-ray bombardment of X-ray tube to penetrate Line, its wavelength are different.These X ray are projected point by the slit and pipe internal channel of incident ray slit tube end with θ angles On analyzing crystal surface in light box component, wherein only wavelength X meets Bragg formula:N λ=2dSin θ (n is diffraction number, Generally 1, d is interplanar distance) elemental characteristic X ray could be split with same θ angles crystal reflection and focusing, and by going out The slit for penetrating slit tube assembly end is detected into detector.According to the intensity of this kind of detected elemental characteristic X ray The content of the element in sample can be calculated.The characteristic X-ray of other elements is split because its wavelength does not meet Bragg formula Crystal and exit slit tube wall absorb.

The collimater that existing X fluorescence spectrum analyzer includes is generally blade inserting collimater, and blade inserting collimater is adding It is complex in terms of work and assembling, and X ray energy loss when through blade inserting collimater is larger.

Utility model content

The utility model is intended at least solve one of technical problem present in correlation technique.Therefore, the utility model carries For a kind of X fluorescence spectrum analyzer with stacked collimater, the X fluorescence spectrum analyzer with stacked collimater includes X-ray generator, vacuum measurement room and multiple fixed element light splitters；The fixed element light splitter includes incident narrow Slit-tube component, the light splitting case assembly being connected with the tail end of entrance slit tube assembly, the exit slit being connected with light splitting case assembly Tube assembly；

The entrance slit tube assembly includes incidence channel body, one-level collimater and installed in the one-level collimater The entrance slit width adjustment structure in head end portion；The exit slit tube assembly include exit channel body, secondary collimator and Exit slit width adjusting structure installed in the head end portion of the secondary collimator；It is described light splitting case assembly include box body and Installed in the optical flat component of the tray interior, the optical flat component includes optical flat, crystal bracket and incidence angle governor motion；Institute The incident light axis for stating incidence channel body is equal to tested element by the center of the optical flat, the incidence angle of the incident light axis The angle of diffraction, the emergent light axis of the exit channel body is by the center of the optical flat, and the angle of emergence of emergent light axis is equal to incidence The incidence angle of optical axis；

At least one collimater in the one-level collimater and the secondary collimator includes：

Collimator assembly, the collimator assembly include multiple spacer blocks and multiple sheet metals, the spacer block and the metal Piece intersecting is set；

Briquetting, the briquetting compress the side of the collimator assembly, so that the collimator assembly is fixed on the incidence and led to On at least one passage body of road body and the exit channel body；And

Light bar, the light bar are arranged on the tail end of at least one collimater.

In the X fluorescence spectrum analyzer of above-mentioned embodiment, the spacer block and metal of one-level collimater and secondary collimator Piece intersecting is set, in this way, can so cause one-level collimater and secondary collimator to be easily worked and assemble, and can be with Ensure the uniform of sheet metal straight and interval, so that while one-level collimater and secondary collimator produce directional light The loss of energy can be reduced, production cost is low, efficiency high.

In some embodiments, the incident light axis in the incidence channel body and incidence channel body central axis it Between angle be 4 °~6 °；The incidence angle of incident light axis is respectively a, and the angle of diffraction of tested element is a, the exit slit pipe group The angle of emergence of emergent light axis on part is also a.

In some embodiments, the tail end of the exit slit tube assembly is provided with X-ray detector.

In some embodiments, the X-ray detector includes scintillation detector and gas detector.

In some embodiments, the center that the central axis of the entrance slit tube assembly passes through the box body.

In some embodiments, the optical flat includes Johannson types or Johann types or logarithmic spiral curved face type；Institute Center to the distance of the incidence channel body or the exit channel body for stating optical flat is 130~210mm.

Additional aspect and advantage of the present utility model will be set forth in part in the description, partly by from following description In become obvious, or by it is of the present utility model practice recognize.

Brief description of the drawings

In description of the of the present utility model above-mentioned and/or additional aspect and advantage from combination accompanying drawings below to embodiment It will be apparent and be readily appreciated that, wherein：

Fig. 1 is the structural representation of the X fluorescence spectrum analyzer of the utility model embodiment.

Fig. 2 is another structural representation of the X fluorescence spectrum analyzer of the utility model embodiment.

Fig. 3 is another structural representation of the X fluorescence spectrum analyzer of the utility model embodiment.

Fig. 4 is the enlarged diagram of Fig. 3 X fluorescence spectrum analyzer IV parts.

Main element symbol description:

X fluorescence spectrum analyzer 100, X-ray generator 101, vacuum measurement room 102, fixed element light splitter 104th, X-ray detector 105, entrance slit tube assembly 10, incidence channel body 12, one-level collimater 14, collimator assembly 142, Spacer block 1421, sheet metal 1423, briquetting 144, light bar 146, entrance slit width adjustment structure 16, light splitting case assembly 20, box Body 22, optical flat component 24, optical flat 242, crystal bracket 244, incidence angle governor motion 246, exit slit tube assembly 30, outgoing are logical Road body 32, secondary collimator 34, exit slit width adjusting structure 36.

Embodiment

Embodiment of the present utility model is described below in detail, the example of the embodiment is shown in the drawings, wherein Same or similar label represents same or similar element or the element with same or like function from beginning to end.Lead to below It is exemplary to cross the embodiment being described with reference to the drawings, and is only used for explaining the utility model, and it is not intended that to this practicality New limitation.

In description of the present utility model, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width Degree ", " thickness ", " on ", " under ", "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom ", " interior ", " outer ", The orientation or position relationship of the instructions such as " clockwise ", " counterclockwise " be based on orientation shown in the drawings or position relationship, be only for Be easy to describe the utility model and simplify to describe, rather than instruction or imply signified device or element must have it is specific Orientation, with specific azimuth configuration and operation, therefore it is not intended that to limitation of the present utility model.In addition, term " first ", " second " is only used for describing purpose, and it is not intended that indicating or implying relative importance or imply the technology indicated by indicating The quantity of feature.Thus, " first " is defined, the feature of " second " can be expressed or implicitly include one or more The feature.In description of the present utility model, " multiple " are meant that two or more, unless otherwise clearly specific Limit.

, it is necessary to which explanation, unless otherwise clearly defined and limited, term " are pacified in description of the present utility model Dress ", " connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or integratedly Connection；It can be mechanical connection or electrical connection or can mutually communicate；Can be joined directly together, can also be in Between medium be indirectly connected, can be connection or the interaction relationship of two elements of two element internals.For this area For those of ordinary skill, concrete meaning of the above-mentioned term in the utility model can be understood as the case may be.

In the utility model, unless otherwise clearly defined and limited, fisrt feature second feature it " on " or it " under " can directly be contacted including the first and second features, it is not directly to contact but lead to that can also include the first and second features The other characterisation contact crossed between them.Moreover, fisrt feature second feature " on ", " top " and " above " include the One feature is directly over second feature and oblique upper, or is merely representative of fisrt feature level height and is higher than second feature.First is special Sign second feature " under ", " lower section " and " below " including fisrt feature immediately below second feature and obliquely downward, or only Represent that fisrt feature level height is less than second feature.

Following disclosure provides many different embodiments or example is used for realizing different structure of the present utility model. In order to simplify disclosure of the present utility model, hereinafter the part and setting of specific examples are described.Certainly, they are only Example, and purpose does not lie in limitation the utility model.In addition, the utility model can in different examples repeat reference numerals And/or reference letter, this repetition are for purposes of simplicity and clarity, itself not indicate discussed various embodiments And/or the relation between setting.In addition, various specific techniques and the example of material that the utility model provides, but this Field those of ordinary skill can be appreciated that the application of other techniques and/or the use of other materials.

Fig. 1-2 is referred to, the utility model embodiment provides a kind of X fluorescence spectrum analysis with stacked collimater Instrument 100.X fluorescence spectrum analyzer 100 includes X-ray generator 101, vacuum measurement room 102 and multiple fixed element roads point Light device 104.Fixed element light splitter 104 includes entrance slit tube assembly 10, the tail end company with entrance slit tube assembly 10 The light splitting case assembly 20 connect, the exit slit tube assembly 30 being connected with light splitting case assembly 20.

Entrance slit tube assembly 10 includes incidence channel body 12, one-level collimater 14 and installed in one-level collimater 14 The entrance slit width adjustment structure 16 in head end portion.Exit slit tube assembly 30 includes exit channel body 32, secondary collimator 34 and the exit slit width adjusting structure 36 installed in the head end portion of secondary collimator 34.Light splitting case assembly 20 includes box body 22 And the optical flat component 24 inside box body 22.Optical flat component 24 includes optical flat 242, crystal bracket 244 and incidence angle and adjusted Save mechanism 246.The center that the incident light axis of incidence channel body 12 passes through optical flat 242.The incidence angle of incident light axis is equal to tested The angle of diffraction of element.The emergent light axis of exit channel body 32 by the center of optical flat 242, the angle of emergence of emergent light axis be equal into Penetrate the incidence angle of optical axis.

Refer to Fig. 3-4, at least one collimater in one-level collimater 14 and secondary collimator 34 includes collimator assembly 142nd, briquetting 144 and light bar 146.Collimator assembly 142 includes multiple spacer blocks 1421 and multiple sheet metals 1423.Spacer block 1421 Set with the intersecting of sheet metal 1423.Briquetting 144 compress collimator assembly 142 side so that collimator assembly 142 be fixed on into Penetrate at least one passage body of passage body 12 and exit channel body 32.Light bar 146 is arranged at least one collimater Tail end.

In the X fluorescence spectrum analyzer 100 of above-mentioned embodiment, the spacer block of one-level collimater 14 and secondary collimator 34 1421 and the intersecting of sheet metal 1423 set, in this way, can so make it that one-level collimater 14 and secondary collimator 34 are easy Processing and assembling, and can ensure the straight of sheet metal 1423 and interval it is uniform so that one-level collimater 14 and two Level collimater 34 can also reduce the loss of energy while producing directional light, production cost is low, efficiency high.

Specifically, testing sample sends the elemental characteristic X ray of different elements under the irradiation of X-ray generator 101, And different elemental characteristic X ray enters in one-level collimater 14 through vacuum measurement room 102, one-level collimater 14 is by X ray It is changed into parallel light emergence and enters secondary collimator 34 after light splitting case assembly 20 is divided to light splitting case assembly 20, X ray, two X ray is changed into parallel light emergence to X-ray detector 105 by level collimater 34.X-ray detector 105 is according to the X detected The intensity of ray can calculate the content of element in sample.

Specifically, one-level collimater 14 and secondary collimator 34 be during assembling, spacer block 1421 and metal first The intersecting of piece 1423, and spacer block 1421 is layered in the both sides of sheet metal 1423.By sheet metal 1423 and sheet metal After 1423 stacking assemblings, briquetting 144 is reassembled to compress spacer block 1421 and sheet metal 1423.Finally by briquetting 144 One-level collimater 14 is fixed on incidence channel body 12 and secondary collimator 34 is fixed on into exit channel by jackscrew (not shown) On body 32.

In the illustrated embodiment, one-level collimater 14 and secondary collimator 34 include collimator assembly 142, briquetting 144 and light bar 146.Certainly, in other embodiments, one-level collimater 14 or secondary collimator 34 include collimator assembly 142, Briquetting 144 and light bar 146.

In some embodiments, the incident light axis in incidence channel body 22 and the central axis of incidence channel body 12 it Between angle be 4 °~6 °；The incidence angle of incident light axis is respectively a, and the angle of diffraction of tested element is a, exit slit tube assembly 30 On the angle of emergence of emergent light axis be also a.

In this way, elemental characteristic X ray is reflected and focused on the same a angles case assembly 20 that is split, and pass through exit slit pipe Component 30, which enters in X-ray detector 105, to be detected.

In some embodiments, the tail end of exit slit tube assembly 30 is provided with X-ray detector 105.

In this way, the elemental characteristic X ray being emitted from the tail end of exit slit tube assembly 30 enters X-ray detector 105 In be detected.

Specifically, X-ray detector 105 is a kind of device for the electric signal for being converted to X-ray energy and being available for record.X Ray detector 105 receives x-ray bombardment, produces the electric signal directly proportional to radiation intensity.

In some embodiments, X-ray detector 105 includes scintillation detector and gas detector.

In this way, X-ray detector 105 can detect elemental characteristic X ray.

Specifically, the radiation detection that scintillation detector is mainly made up of scintillator, the collecting part of light and optical-electrical converter Device.When particle enters scintillator, the atom or molecule of scintillator are excited and produce fluorescence.Utilize the light such as light guide and reflector Collecting part makes fluorescence as often as possible be mapped on the photosensitive layer of electrooptical device and gets photoelectron.These photoelectrons can be direct Or after multiplication, collected by output stage and form electric pulse.

Gas detector collects the detector of gas ionization electric charge.Gas detector collect ionization caused by electronics and Ion, record the voltage signal as caused by their electric charge.

In some embodiments, the center that the central axis of entrance slit tube assembly 10 passes through box body 22.

In this way, it can so enable elemental characteristic X ray by the center of box body 22 to incide X-ray detector In 105.

In some embodiments, optical flat 242 includes Johannson types or Johann types or logarithmic spiral curved face type；It is flat Center to the distance of incidence channel body 12 or exit channel body 32 of crystalline substance 242 is 130~210mm.

In this way, optical flat 242 can cause the incidence angle of incident light axis, the angle of diffraction and exit slit tube assembly of tested element The angle of emergence all same of emergent light axis on 30.

In the description of this specification, reference term " embodiment ", " some embodiments ", " schematically implementation The description of mode ", " example ", " specific example " or " some examples " etc. means with reference to the embodiment or example description Specific features, structure, material or feature are contained at least one embodiment or example of the present utility model.In this explanation In book, identical embodiment or example are not necessarily referring to the schematic representation of above-mentioned term.Moreover, the specific spy of description Sign, structure, material or feature can combine in an appropriate manner in any one or more embodiments or example.

While there has been shown and described that embodiment of the present utility model, one of ordinary skill in the art can manage Solution：A variety of to the progress of these embodiments can change in the case where not departing from principle and objective of the present utility model, change, Replace and modification, the scope of the utility model are limited by claim and its equivalent.

Claims (10)

1. a kind of X fluorescence spectrum analyzer with stacked collimater, including X-ray generator, vacuum measurement room and more Individual fixed element light splitter, it is characterised in that：The fixed element light splitter includes entrance slit tube assembly, narrow with incidence The light splitting case assembly of the tail end connection of slit-tube component, the exit slit tube assembly being connected with light splitting case assembly；

The entrance slit tube assembly includes incidence channel body, one-level collimater and the head end installed in the one-level collimater The entrance slit width adjustment structure in portion；The exit slit tube assembly includes exit channel body, secondary collimator and installation Exit slit width adjusting structure in the head end portion of the secondary collimator；The light splitting case assembly includes box body and installation In the optical flat component of the tray interior, the optical flat component includes optical flat, crystal bracket and incidence angle governor motion；It is described enter The incident light axis of passage body is penetrated by the center of the optical flat, the incidence angle of the incident light axis is equal to the diffraction of tested element Angle, the emergent light axis of the exit channel body are equal to incident light axis by the center of the optical flat, the angle of emergence of emergent light axis Incidence angle；

At least one collimater in the one-level collimater and the secondary collimator includes：

Collimator assembly, the collimator assembly include multiple spacer blocks and multiple sheet metals, and the spacer block and the sheet metal are handed over Mistake is stacked；

Briquetting, the briquetting compresses the side of the collimator assembly, so that the collimator assembly is fixed on the incidence channel pipe On at least one passage body of body and the exit channel body；And

Light bar, the light bar are arranged on the tail end of at least one collimater.

2. X fluorescence spectrum analyzer as claimed in claim 1, it is characterised in that：Incident light in the incidence channel body Angle between axle and incidence channel body central axis is 4 °~6 °；The incidence angle of incident light axis is respectively a, is tested element The angle of diffraction is a, and the angle of emergence of the emergent light axis in the exit slit tube assembly is also a.

3. X fluorescence spectrum analyzer as claimed in claim 1, it is characterised in that：The tail end of the exit slit tube assembly It is provided with X-ray detector.

4. X fluorescence spectrum analyzer as claimed in claim 2, it is characterised in that：The tail end of the exit slit tube assembly It is provided with X-ray detector.

5. the X fluorescence spectrum analyzer according to claim 3 or 4, it is characterised in that：The X-ray detector includes dodging Bright detector and gas detector.

6. according to the X fluorescence spectrum analyzer described in claim 1 or 2 or 3 or 4, it is characterised in that：The entrance slit pipe group The center that the central axis of part passes through the box body.

7. X fluorescence spectrum analyzer according to claim 5, it is characterised in that：The center of the entrance slit tube assembly The center that axis passes through the box body.

8. according to the X fluorescence spectrum analyzer described in claim 1 or 2 or 3 or 4, it is characterised in that：The optical flat includes Johannson types or Johann types or logarithmic spiral curved face type；The center of the optical flat is to the incidence channel body or described The distance of exit channel body is 130~210mm.

9. X fluorescence spectrum analyzer according to claim 5, it is characterised in that：Described optical flat be Johannson types, Johann types or logarithmic spiral curved face type；The center of the optical flat is to the incidence channel body or the exit channel body Distance is 130~210mm.

10. X fluorescence spectrum analyzer according to claim 6, it is characterised in that：The optical flat be Johannson types, Johann types or logarithmic spiral curved face type；The center of the optical flat is to the incidence channel body or the exit channel body Distance is 130~210mm.