CN207130331U - A kind of multidigit thermal resistance evaporation device - Google Patents
A kind of multidigit thermal resistance evaporation device Download PDFInfo
- Publication number
- CN207130331U CN207130331U CN201720285585.5U CN201720285585U CN207130331U CN 207130331 U CN207130331 U CN 207130331U CN 201720285585 U CN201720285585 U CN 201720285585U CN 207130331 U CN207130331 U CN 207130331U
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- crucible
- evaporation
- vacuum coating
- coating equipment
- power transmission
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Abstract
The utility model discloses a kind of multidigit thermal resistance evaporation device, including crucible, electrode and transmission system, transmission system includes stepper motor, driving gear set and power transmission shaft, crucible is arranged in vacuum coating equipment, and crucible is provided with multiple evaporation boats, electrode is arranged on the bottom of vacuum coating equipment, and transmission system is located at the bottom of vacuum coating equipment, stepper motor is connected with power transmission shaft by driving gear set, and the bottom of power transmission shaft through vacuum coating equipment is connected with crucible.The utility model needs the thickness of plated film by the control of several evaporation boats, after the material in an evaporation boat is finished, stepper motor rotates, control crucible rotation certain angle, go to next evaporation boat and continue plated film, it is simple in construction, working stability of the present utility model, applied widely for needing the product of various materials plated film to be also quite applicable.
Description
Technical field
Field of vacuum coating is the utility model is related to, more particularly to a kind of multidigit thermal resistance evaporation device.
Background technology
Vacuum coating is a kind of conventional coating process, and evaporation source is the most key part of vacuum coating equipment, according to
The difference of mode of heating, evaporation source can be divided into electron beam heating evaporation source and resistance heating evaporation source.Electric resistor heating type steams
Rise is that evaporation material after being powered using resistance wire in caused heat crucible makes its vaporization, resistance heating evaporation source
Have the advantages that simple in construction, evaporation efficiency is high, temperature stabilization and homogeneous heating, be largely used in industry and laboratory.
In vacuum coating equipment is a crucible mostly, and sometimes the product of plated film needs certain thickness requirement, but existing
Some crucibles can not meet.
The content of the invention
The purpose of this utility model is the multidigit thermal resistance evaporation device for providing a kind of adjustable coating film thickness.
The purpose of this utility model is achieved through the following technical solutions：
A kind of multidigit thermal resistance evaporation device, including crucible, electrode and transmission system, transmission system include stepper motor, passed
Moving gear group and power transmission shaft, crucible is arranged in vacuum coating equipment, and crucible is provided with multiple evaporation boats, and electrode is arranged on Vacuum Deposition
The bottom of film machine, transmission system are located at the bottom of vacuum coating equipment, and stepper motor is connected with power transmission shaft by driving gear set, pass
The bottom of moving axis through vacuum coating equipment is connected with crucible.
The crucible is provided with 12 evaporation boats, and each evaporation boat bottom is provided with two contacts.
Described two contacts of evaporation boat are in contact with the both positive and negative polarity of electrode respectively.
The utility model needs the thickness of plated film by the control of several evaporation boats, when the material in an evaporation boat is finished
Afterwards, stepper motor rotates, and controls crucible rotation certain angle, goes to next evaporation boat and continues plated film, for increasing product
Coating film thickness, the utility model have simple in construction, work surely for needing the product of various materials plated film to be also quite applicable
The features such as fixed, applied widely.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is front view of the present utility model.
Reference：1-vacuum coating equipment, 2-crucible, 21-evaporation boat, 22-contact, 3-electrode, 4 transmission systems,
41-stepper motor, 42-driving gear set, 43-power transmission shaft.
Embodiment
Embodiment
As shown in Figure 1 and Figure 2, the utility model includes crucible 2, electrode 3 and transmission system 4, and transmission system 4 includes stepping
Motor 41, driving gear set 42 and power transmission shaft 43, crucible 2 are arranged in vacuum coating equipment 1, and electrode 3 is arranged on vacuum coating equipment 1
Bottom, crucible 2 is provided with 12 evaporation boats 21, and each bottom of evaporation boat 21 is provided with two contacts 22, and two contacts 22 are distinguished
It is in contact with the both positive and negative polarity of electrode 3, transmission system 4 is located at the bottom of vacuum coating equipment 1, and stepper motor 41 and power transmission shaft 43 pass through
Driving gear set 42 is connected, and the bottom of power transmission shaft 43 through vacuum coating equipment 1 is connected with crucible 2.
Operation principle of the present utility model is：A certain amount of material is placed in each evaporation boat 21 first, then will be true
Empty coating machine 1 is worked, and electrode 3 is evaporated by the contact 22 of the bottom of evaporation boat 21 to the material in evaporation boat 21, makes material
It is attached on the product in vacuum coating equipment 1, after the material in an evaporation boat 21 is finished, stepper motor 41 passes through driving cog
Wheel group 42 drives power transmission shaft 43 to rotate 30 °, the contact 22 of next evaporation boat 21 is in contact with the both positive and negative polarity of electrode 3, then
Continue to evaporate material, when the thickness of product in vacuum coating equipment 1 reaches a timing, completion plated film work；When a collection of product needs
During various materials plated film, different materials is placed in different evaporation boats 21, then by electrode 3 successively to being placed with not jljl
The evaporation boat 21 of material is powered, and makes material evaporation and is attached to product surface, finally completes plated film.
Described above is only the utility model preferred embodiment, but the scope of protection of the utility model is not limited to
This, any transformation carried out based on technical scheme provided by the utility model and inventive concept and replacement should all be covered in this reality
With in new protection domain.
Claims (3)
- A kind of 1. multidigit thermal resistance evaporation device, it is characterised in that：Including crucible, electrode and transmission system, transmission system includes step Stepper motor, driving gear set and power transmission shaft, crucible are arranged in vacuum coating equipment, and crucible is provided with multiple evaporation boats, electrode peace Mounted in the bottom of vacuum coating equipment, transmission system is located at the bottom of vacuum coating equipment, and stepper motor and power transmission shaft pass through driving cog Wheel group is connected, and the bottom of power transmission shaft through vacuum coating equipment is connected with crucible.
- 2. multidigit thermal resistance evaporation device according to claim 1, it is characterised in that：The crucible is provided with 12 evaporation boats, And each evaporation boat bottom is provided with two contacts.
- 3. multidigit thermal resistance evaporation device according to claim 2, it is characterised in that：Described two contacts of evaporation boat respectively with The both positive and negative polarity of electrode is in contact.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720285585.5U CN207130331U (en) | 2017-03-22 | 2017-03-22 | A kind of multidigit thermal resistance evaporation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720285585.5U CN207130331U (en) | 2017-03-22 | 2017-03-22 | A kind of multidigit thermal resistance evaporation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207130331U true CN207130331U (en) | 2018-03-23 |
Family
ID=61630561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720285585.5U Active CN207130331U (en) | 2017-03-22 | 2017-03-22 | A kind of multidigit thermal resistance evaporation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207130331U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114990495A (en) * | 2022-08-04 | 2022-09-02 | 怡通科技有限公司 | Electron beam high-precision coating equipment |
-
2017
- 2017-03-22 CN CN201720285585.5U patent/CN207130331U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114990495A (en) * | 2022-08-04 | 2022-09-02 | 怡通科技有限公司 | Electron beam high-precision coating equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210224 Address after: 628017 no.059 Fushun street, Weizi Town, Zhaohua District, Guangyuan City, Sichuan Province Patentee after: Wang Wei Address before: 618 Kelin West Road, Chengdu cross strait science and Technology Industrial Development Park, Wenjiang District, Chengdu, Sichuan 610000 Patentee before: CHENGDU GUOTAI VACUUM EQUIPMENT Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210630 Address after: 618 Kelin West Road, Chengdu cross strait science and Technology Industrial Development Park, Wenjiang District, Chengdu, Sichuan 610000 Patentee after: CHENGDU GUOTAI VACUUM EQUIPMENT Co.,Ltd. Address before: 628017 no.059 Fushun street, Weizi Town, Zhaohua District, Guangyuan City, Sichuan Province Patentee before: Wang Wei |
|
| TR01 | Transfer of patent right |