CN207126281U - Dicing saws cleans water injection system - Google Patents
Dicing saws cleans water injection system Download PDFInfo
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- CN207126281U CN207126281U CN201720738207.8U CN201720738207U CN207126281U CN 207126281 U CN207126281 U CN 207126281U CN 201720738207 U CN201720738207 U CN 201720738207U CN 207126281 U CN207126281 U CN 207126281U
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Abstract
The utility model provides a kind of dicing saws cleaning water injection system,The system includes sprayer unit,Sprayer unit includes first jet and second nozzle,First jet includes nozzle fixed block,The side wall of nozzle fixed block is provided with delivery port and the first gas outlet,Water spray sleeve is provided with nozzle fixed block,Nozzle fixed block connects nozzle fixed cover,Nozzle head is fixed with the first end of nozzle fixed cover,Adapter sleeve is fixed in second end of nozzle fixed cover,Adapter sleeve connection water spray sleeve,The second gas outlet is provided with the side wall of second nozzle,Side of the second nozzle away from the second gas outlet is provided with puff prot,Cleaning deskitte is provided with cutting machine,Nozzle,Puff prot is towards cleaning deskitte,Using above structure,The water smoke sprayed using sprayer unit is cleaned instead of traditional water column to cutting machine,Cleaning is more thorough,Sprayer unit is not fetched water by high-pressure pump,Therefore avoid can piston wear situation,Without changing in short term,Service life is longer.
Description
Technical field
Field of semiconductor manufacture is the utility model is related to, water injection system is cleaned more particularly, to a kind of dicing saws.
Background technology
Dicing saws is the high equipment of precision, its speed of mainshaft about 30000 between 60000rmb, due to
Spacing very little between crystal grain and crystal grain, and crystal grain is quite fragile, therefore the required precision of dicing saws is at a relatively high.Cut
Cutting mill, using blade trip cutting, but is cut in a manner of being ground in a manner of grinding, can produce many small dust, therefore
Pure water rinsing must be constantly used in cutting process, to avoid polluting crystal grain.Using pure water rinsing chip or rinse the knife cut
Tool, the effect for absorbing dust is not only acted as, cutter can also be cooled, the residual silica flour cleaned on chip.Utilized in cutting machine
The cutter that clean water is directly toward cutting machine as power by high-pressure pump are gone on a journey flushing in the form of water column, this kind of backwashing manner
Rinse not thorough, and the serious wear in the course of the work of the piston in high-pressure pump, piston life it is extremely short, it is necessary to it is regular more
Change, it is costly for a long time, and operating efficiency is influenceed to a certain extent.
The content of the invention
The dicing saws cleaning that main purpose of the present utility model is to provide a kind of cleaning thoroughly and cleaning efficiency is high
Water injection system.
To realize above-mentioned main purpose, dicing saws cleaning water injection system provided by the utility model includes spraying
Device, sprayer unit include first jet and second nozzle, and first jet includes nozzle fixed block, in the side wall of nozzle fixed block
Provided with delivery port and the first gas outlet, be provided with water spray sleeve in nozzle fixed block, water spray sleeve with delivery port, the first outlet
Mouth connection, nozzle fixed block connect nozzle fixed cover, nozzle head are fixed with the first end of nozzle fixed cover, nozzle fixed cover
Adapter sleeve, adapter sleeve connection water spray sleeve are fixed with second end, water spray sleeve, adapter sleeve and nozzle head are interconnected, and first
The first end of nozzle is provided with nozzle；First gas outlet connects the first escape pipe, delivery port connection outlet pipe, the side of second nozzle
The second gas outlet is provided with wall, side of the second nozzle away from the second gas outlet is provided with puff prot, puff prot and the second outlet
Mouthful connection, the second gas outlet connect the second escape pipe, the first escape pipe, the second escape pipe and outlet pipe with gas-liquid separation Guan Lian
Connect；
Cutting machine, cutting machine is interior to be provided with cleaning deskitte, and nozzle and puff prot are towards cleaning deskitte；
Liquid medicine pipe, liquid medicine pipe connection gas-liquid separation pipe；
Gas machine, gas machine connection gas-liquid separation pipe.
As can be seen here, the water smoke sprayed by sprayer unit cleans instead of traditional water column to cutting machine, water smoke
Accessible area is bigger, cleaning it is more thorough, sprayer unit is not fetched water by high-pressure pump, thus avoid can piston wear feelings
Condition.Sprayer unit is changed, service life is longer during long-term use without short-term.
Further scheme is provided with second nozzle provided with spacing hole, and outlet pipe and the first escape pipe are through limit
Position hole.
It can be seen that it is spacing to outlet pipe and the progress of the second escape pipe, avoid pipeline from arbitrarily being put in cutting machine, influence to cut
Cleaning process.
Further scheme is that gas-liquid separation pipe is provided with water inlet, water inlet connection water outlet towards one end of first jet
Manage, the first air inlet and the second air inlet are additionally provided with gas-liquid separation pipe, the first air inlet connects the first escape pipe, and second enters
Gas port connects the second escape pipe, and water inlet pipe, the first air inlet pipe and the second air inlet pipe are connected with gas-liquid separation pipe, and water inlet pipe connects
The mouth of a river is tapped into, the first air inlet pipe connects the first air inlet, and the second air inlet pipe connects the second air inlet, and water inlet pipe connects liquid medicine pipe,
First air inlet pipe and the second air inlet pipe are all connected with gas machine.
It can be seen that gas-liquid separation pipe is as position-limiting tube, the pipeline of connection first jet, second nozzle concentrate it is spacing,
Avoid pipeline from arbitrarily being put in cutting machine, influence to cut cleaning process.
Further scheme is that first jet, second nozzle and gas-liquid separation pipe are each attached in fixed plate, described solid
Fixed board bending is set.
It can be seen that fixed first jet, second nozzle IKEA gas-liquid separation pipe are easy to during cleaning simultaneously in fixed plate
Overall movement, the bending of fixed plate, which is set, conveniently adapts to the installation site in cutting machine.
Further scheme is second nozzle connection air jet pipe, and the mouth of pipe of the free end of air jet pipe is towards cleaning deskitte.
Brief description of the drawings
Fig. 1 is the structured flowchart of the utility model dicing saws cleaning water injection system embodiment.
Fig. 2 is the structure chart of the sprayer unit in the utility model dicing saws cleaning water injection system embodiment.
Fig. 3 is the structure chart of the first jet in the utility model dicing saws cleaning water injection system embodiment.
Fig. 4 is the profile along the line A-A cutting in Fig. 3.
Fig. 5 is the structure chart of the utility model dicing saws cleaning water injection system embodiment Chinese medicine water mixing device.
Fig. 6 be the utility model dicing saws cleaning water injection system embodiment in anti static device inlet end with
The structure chart of Rose Box.
Fig. 7 be the utility model dicing saws cleaning water injection system embodiment in anti static device water side with
The structure chart of Rose Box.
A step explanation is made to the utility model below in conjunction with drawings and Examples.
Embodiment
Dicing saws cleaning water injection system of the present utility model applies the cleaning process after cutting machine cutting crystal wafer
In, the accessible area of water smoke is bigger, and the water smoke sprayed using sprayer unit is cleaned instead of traditional water column to cutting machine,
Cleaning it is more thorough, sprayer unit is not fetched water by high-pressure pump, thus avoid can piston wear situation.Sprayer unit is in length
During phase use, changed without short-term, service life is longer.
Referring to Fig. 1 to Fig. 4, dicing saws cleaning water injection system of the present utility model includes sprayer unit 2, spraying dress
Putting 2 includes first jet 20 and second nozzle 21, and first jet 20 includes nozzle fixed block 203, the side of nozzle fixed block 203
Wall is provided with the gas outlet 202 of delivery port 201 and first, and water spray sleeve 204 is provided with nozzle fixed block 203, sleeve of spraying water
204 connect with delivery port 201, the first gas outlet 202, and nozzle fixed block 203 connects nozzle fixed cover 206, nozzle fixed cover
Nozzle head 207 is fixed with 206 first end, adapter sleeve 205, adapter sleeve 205 are fixed with the second end of nozzle fixed cover 206
Connection water spray sleeve 204, water spray sleeve 204, adapter sleeve 205 and nozzle head 207 are interconnected, and the first end of first jet 20 is set
There is nozzle 208.First gas outlet 202 connects the first escape pipe, and delivery port 201 connects outlet pipe.
Be provided with the second gas outlet 211 in the side wall of second nozzle 21, second nozzle 21 away from the second gas outlet 211 one
Side is provided with puff prot 212, and puff prot 212 connects with the second gas outlet 211, and the second gas outlet 211 connects the second escape pipe, the
One escape pipe, the second escape pipe are connected with outlet pipe with gas-liquid separation pipe 23.Second nozzle 21 can wash into wafer supernatant
Residual water spray drying afterwards.
It is provided with second nozzle 21 and runs through spacing hole 213 provided with spacing hole 213, outlet pipe and the first escape pipe, is limited
Position hole 213 is spacing to outlet pipe and the progress of the second escape pipe, avoids pipeline from arbitrarily being put in cutting machine, influences cutting and cleaned
Journey.Second nozzle 21 connects air jet pipe 212, and the mouth of pipe of the free end of air jet pipe 212 is towards cleaning deskitte.
Gas-liquid separation pipe 23 is provided with water inlet 231 towards one end of first jet 20, and water inlet 231 connects outlet pipe, gas
The first air inlet and the second air inlet are additionally provided with liquid separating pipe 23, the first air inlet connects the first escape pipe, the second air inlet
Mouth the second escape pipe of connection.Water inlet pipe, the first air inlet pipe and the second air inlet pipe are connected with gas-liquid separation pipe 23, water inlet pipe connects
The mouth of a river 231 is tapped into, the first air inlet pipe connects the first air inlet, and the second air inlet pipe connects the second air inlet, and gas-liquid separation pipe 23 is made
For position-limiting tube, the pipeline of connection first jet 20, second nozzle 21 concentrate it is spacing, avoid pipeline in cutting machine arbitrarily
Put, influence to cut cleaning process.
First jet 20, second nozzle 21 and gas-liquid separation pipe 23 are each attached in fixed plate 24, and fixed plate 24 is bent
Set, fixed first jet 20, second nozzle 21 and gas-liquid separation pipe 23 are easy to during cleaning simultaneously in fixed plate 24
Overall movement, the bending of fixed plate 24, which is set, conveniently adapts to the installation site in cutting machine.
Dicing saws cleaning water injection system includes cutting machine 1, and cleaning deskitte, the spray of sprayer unit 2 are provided with cutting machine 1
Mist mouth 208 and puff prot are towards cleaning deskitte.
Dicing saws cleaning water injection system may include liquid medicine pipe 3, and liquid medicine pipe 3 connects the water inlet in gas-liquid separation pipe 23
Pipe, the clean water in liquid medicine pipe 3 is sprayed by sprayer unit 2 with water smoke shape.Liquid medicine pipe 3 also connects liquid medicine by non-return valve
Mixing arrangement 4, by the clean water containing a certain proportion of cleaning agent in liquid medicine mixing arrangement 4 by sprayer unit 2 with water smoke shape
Shape sprays so that the cleaning of wafer is more thorough, effectively prevents silica flour from remaining.Referring to Fig. 5, liquid medicine mixing arrangement 4 includes liquid medicine
Tank 40, liquid medicine tank 40 are provided with centrifugal pump of horizontal axis 42, and centrifugal pump of horizontal axis 42 connects controller 41.The connection of centrifugal pump of horizontal axis 42 first
Drainpipe 45, the first drainpipe 45 are stretched into liquid medicine tank 40, are easy to discharge the clean water in liquid medicine tank 40.Centrifugal pump of horizontal axis 42
Including discharge outlet 43, exhaust outlet 44, wherein after the liquid medicine in liquid medicine tank 40 has been extracted, but centrifugal pump of horizontal axis 42 is still in work
When making, now what centrifugal pump of horizontal axis 42 extracted is the air in liquid medicine tank 40, and centrifugal pump of horizontal axis 42 switches according to the difference of medium
Outlet side, the air being drawn into are discharged from exhaust outlet 44, avoid air from carrying out in liquid medicine pipe 3.Discharge outlet 43 connects the second draining
Pipe 46, the second drainpipe 46 connect one end of non-return valve, and the other end of non-return valve is connected with liquid medicine pipe 3.
Dicing saws cleaning water injection system also includes gas machine 6, and gas machine 6 connects first in gas-liquid separation pipe 23
Air inlet pipe and the second air inlet pipe.
During cutting machine cutting crystal wafer, broken because the electrostatic of naturally occurring can produce to the circuit of crystal column surface
It is bad, therefore during wafer is cut, to remove the electrostatic in cutting water, cutting machine 1 need to connect anti static device 5, resist quiet
Electric installation 5 in cutting water by, with carbon dioxide is passed through, producing bicarbonate ion and hydrogen ion, being reduced to electrostatic resistance suitable
Work as value, ensure the quality for the wafer that cutting is completed.
Referring to Fig. 6, Fig. 7, anti static device 5 includes inlet end 51, water side 53 and Rose Box 52, Rose Box 52 with
Inlet end 51, water side 53 connect, and inlet end 51 is provided with air inlet pipe 511, and air inlet pipe 511 connects carbon dioxide steel cylinder.Along
In the flow direction of air inlet pipe 511, air inlet pipe 511 is sequentially connected pressure regulator valve 512, air gauge 513, is respectively used to adjust carbon dioxide
The whole air pressure with test carbon dioxide, conveniently adapt to produce.
The side wall of Rose Box 52 is provided with first the 520, second opening 521 of opening, is open in Rose Box 52 close to first
520 are provided with film, and the film only allows by carbon dioxide, can not pass through hydrone gas.The connection of first opening 520
First drainpipe 530, the connection oral siphon 531 of the second opening 521, the setting of film, the first opening 520 and the second opening 521
Position reduces successively, and water side includes oral siphon 531, the first drainpipe 530, and the first opening 520 connects the first drainpipe 530,
Second opening 521 connection oral siphons 531, due to first opening 520 connection the first drainpipes 530, second opening 521 connect into
Water pipe 531, the first drainpipe 530 connection sprayer unit 2, sprayer unit 2 is towards wafer, and oral siphon 531 is toward in Rose Box 52
From bottom or lower water filling so that the carbon dioxide of the firm used film of water contact in Rose Box 52 is just opened by first
Mouth 520, flows to sprayer unit 2 from the first drainpipe 530, the water of carbon dioxide is blended with the form of water smoke by sprayer unit 2
Spray.
Conductivity probe 532 is additionally provided with the first drainpipe 530, is easy to control cutting into the first drainpipe 530
Cut the resistance value of water.
The bottom of Rose Box 52 is arranged on the 3rd opening, and the set location of the 3rd opening is less than the setting position of the second opening
Put, the 3rd opening the second drainpipe 522 of connection, be easy to the ponding cleared up after cutting machine 1 is stopped in Rose Box 52.It is anti-quiet
Controller is additionally provided with electric installation, the battery pack 54 being connected with controller, battery pack 54 is the display function of anti static device 5
Power supply is provided.
First drainpipe 530 of anti static device 5 can be connected with the water inlet pipe of sprayer unit 2, by anti static device
The clean water containing carbon dioxide of two drainpipes 522 discharge is sprayed with vaporific shape.
The wafer that the water smoke sprayed by sprayer unit 2 replaces traditional water column to cut cutting machine 1 cleans, water smoke
Accessible area it is bigger, cleaning is more thorough, and sprayer unit 2 need not be fetched water by high-pressure pump, therefore avoid can piston
The situation of abrasion.Sprayer unit 2 is changed, service life is longer during long-term use without short-term.
Finally it is emphasized that the utility model is not limited to above-mentioned embodiment, such as the system of first jet, second nozzle
The changes such as the change of the change of producing material material, fixed plate structure and shape should also be included in the protection of the utility model claims
In the range of.
Claims (5)
1. dicing saws cleans water injection system, it is characterised in that including：
Sprayer unit, the sprayer unit include first jet and second nozzle, and the first jet includes nozzle fixed block, institute
The side wall for stating nozzle fixed block is provided with delivery port and the first gas outlet, and water spray sleeve, institute are provided with the nozzle fixed block
State water spray sleeve to connect with the delivery port, the first gas outlet, the nozzle fixed block connects nozzle fixed cover, the nozzle
Nozzle head is fixed with the first end of fixed cover, adapter sleeve, the adapter sleeve are fixed with the second end of the nozzle fixed cover
Connecting the water spray sleeve, the water spray sleeve, the adapter sleeve are interconnected with the nozzle head, and the of the first jet
One end is provided with nozzle；First gas outlet connects the first escape pipe, and the delivery port connects outlet pipe, the second nozzle
Side wall on be provided with the second gas outlet, side of the second nozzle away from second gas outlet is provided with puff prot, described
Puff prot connects with second gas outlet, and second gas outlet connects the second escape pipe, first escape pipe, described the
Two escape pipes are connected with the outlet pipe with gas-liquid separation pipe；
Cutting machine, the cutting machine is interior to be provided with cleaning deskitte, and the nozzle and the puff prot are towards the cleaning deskitte；
Liquid medicine pipe, the liquid medicine pipe connect the gas-liquid separation pipe；
Gas machine, the gas machine connect the gas-liquid separation pipe.
2. dicing saws according to claim 1 cleans water injection system, it is characterised in that：
It is provided with the second nozzle provided with spacing hole, the outlet pipe is with first escape pipe through described spacing
Hole.
3. dicing saws according to claim 2 cleans water injection system, it is characterised in that：
The gas-liquid separation pipe is provided with water inlet towards one end of the first jet, and the water inlet connects the outlet pipe,
The first air inlet and the second air inlet are additionally provided with the gas-liquid separation pipe, first air inlet connects first outlet
Pipe, second air inlet connect second escape pipe, be connected with the gas-liquid separation pipe water inlet pipe, the first air inlet pipe with
And second air inlet pipe, the water inlet pipe connect the water inlet, first air inlet pipe connects first air inlet, described the
Two air inlet pipe connect the second air inlet, and the water inlet pipe connects the liquid medicine pipe, first air inlet pipe and second air inlet
Pipe is all connected with the gas machine.
4. dicing saws according to claim 3 cleans water injection system, it is characterised in that：
The first jet, second nozzle and gas-liquid separation pipe are each attached in fixed plate, and the fixed plate benging is set.
5. dicing saws according to claim 4 cleans water injection system, it is characterised in that：
The second nozzle connects air jet pipe, and the mouth of pipe of the free end of the air jet pipe is towards the cleaning deskitte.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720738207.8U CN207126281U (en) | 2017-06-22 | 2017-06-22 | Dicing saws cleans water injection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720738207.8U CN207126281U (en) | 2017-06-22 | 2017-06-22 | Dicing saws cleans water injection system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207126281U true CN207126281U (en) | 2018-03-23 |
Family
ID=61632019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720738207.8U Active CN207126281U (en) | 2017-06-22 | 2017-06-22 | Dicing saws cleans water injection system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207126281U (en) |
-
2017
- 2017-06-22 CN CN201720738207.8U patent/CN207126281U/en active Active
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