CN207099420U - A kind of multiple ion-beam accelerator installation of coaxial transmission - Google Patents
A kind of multiple ion-beam accelerator installation of coaxial transmission Download PDFInfo
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- CN207099420U CN207099420U CN201720709157.0U CN201720709157U CN207099420U CN 207099420 U CN207099420 U CN 207099420U CN 201720709157 U CN201720709157 U CN 201720709157U CN 207099420 U CN207099420 U CN 207099420U
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- ion
- coaxial transmission
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- accelerator installation
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Abstract
The utility model discloses a kind of multiple ion-beam accelerator installation of coaxial transmission, device includes gas handling system, ion gun, beam transfer element, vacuum system and target；Beam transfer element includes beam focusing element, beam steering element and rear accelerating sections, and vacuum system includes vavuum pump and vacuum chamber；Gas handling system, ion gun, beam transfer element and target are set by direction of beam transport order respectively, wherein, ion gun, beam focusing element, beam steering element and target are all in vacuum chamber.The utility model provides a kind of different kinds of ions accelerate (beamacceleration) device device that can produce simultaneously coaxial transmission injection simultaneously.
Description
Technical field
The utility model belongs to particle accelerator technical field, and more particularly to one kind can simultaneously be produced, accelerated, and can be same
Axle transmits and the multiple ion-beam accelerator installation of injection.
Background technology
Ion accelerator is generation, accelerates various ions and by a kind of device in the beam transmission after acceleration to target.
Accelerator is typically made up of elements such as ion gun, accelerating sections, beam transfer section, line analyses.Ion gun is by atom or molecule
Ionization forms charged ion, and charged ion is brought out forming ion beam by the effect of ion gun draw-out area electric field.Prior art
A typically accelerator produces and transmits a kind of beam of charged ions.However, it is necessary to simultaneously on target under some specific conditions
Inject two kinds or more of different ion beams.In order to meet these specific demands, the method for generally use is added using more
Fast device injects while supplying the mode of beam to realize different kinds of ions beam on target simultaneously, and every accelerator only produces and transmits a kind of ion
Beam.But in this way, due to the space layout of accelerator, there is certain angle between each ion beam, it is impossible to realize same
Axle injects, and injection track difference is larger, can influence injection effect to a certain extent.Meanwhile need to develop in this way
More accelerators, cause development cost higher.
Therefore, it is those skilled in the art to research and develop one and two kinds of accelerators that even different kinds of ions beam coaxially injects can be achieved
Thirst for the technical barrier solved, this accelerates field to have milestone significance polyion.
The content of the invention
(1) goal of the invention
The utility model overcomes prior art when handling two kinds or more of ions, and every accelerator can only provide one
Kind of ion beam, the deficiency that development cost is higher, each ion beam mutation direction is incomplete same, there is provided one kind can produce and coaxial
The accelerator installation of transmission injection different kinds of ions beam.
(2) technical scheme
In order to solve the problems of prior art, the technical scheme that the utility model is provided is as follows：
A kind of multiple ion-beam accelerator installation of coaxial transmission, the device include gas handling system, ion gun, beam transfer member
Part, vacuum system and target；Beam transfer element includes beam focusing element, beam steering element and rear accelerating sections, vacuum system
Including vavuum pump and vacuum chamber；Gas handling system, ion gun, beam transfer element and target are set by direction of beam transport order respectively
Put, wherein, ion gun, beam focusing element, beam steering element and target are all in vacuum chamber.
Further, the gas handling system is connected with gaseous mass flowmeter and formed by gas cylinder, tracheae.
Further, the ion gun is cold cathode penning source.
Further, the beam focusing element is electrostatic focusing lens.
Further, the beam steering element is static deflecter.
Further, all electrostatic elements of beam transfer element.
Further, the electrostatic focusing lens is electrostatic film lens.
Further, the electrostatic focusing lens is electrostatic quadrupole lens.
Further, the electrostatic focusing lens is three cylinder electrostatic einzel lens.
(3) beneficial effect
The utility model is simple in construction, can not only produce a variety of different ion beams simultaneously, can also pass through gas matter
Amount flowmeter realizes freely adjusting for different kinds of ions beam ratio example so that various ion ratios are controllable and control accuracy is high and is easy to grasp
Make；Electrostatic element is used in beam line entirely, it is possible to achieve different kinds of ions beam accelerates simultaneously, coaxial transmission, using cold cathode penning
Ion gun may be such that the hydrogen of extraction and helium ion beam range are close, and exposed material damage effect is more preferable.Both saved time cost and
Development cost cost, solves the problem that different kinds of ions simultaneously, is coaxially injected from an ion implanting mouth again.
Brief description of the drawings
The coaxial multiple ion-beam accelerator structure schematic diagrames of Fig. 1
1st, gas handling system 2, gas cylinder 3, tracheae 4, gas mass flow gauge 5, ion gun
6th, extraction electrode 7, ion beam 8, beam focusing element 9, molecular pump 10, vacuum chamber
11st, beam steering element 12, rear accelerating sections 13, target
Embodiment
The utility model is further elaborated below in conjunction with specification drawings and specific embodiments.
A kind of multiple ion-beam accelerator installation of coaxial transmission as shown in Figure 1, the device include gas handling system 1, ion
Source 5, extraction electrode 6, beam transfer element, vacuum system and target 13.Vacuum system includes vavuum pump 9 and vacuum chamber 10.Air inlet
System is made up of gas cylinder 2, tracheae 3 and gaseous mass flowmeter 4, and gas handling system can be made up of two groups or multigroup intake channel,
Often set intake channel includes a gas cylinder 2, a gas mass flow gauge 4 and accordingly tracheae 3, can be with each gas cylinder 2
Fill different gas.Multiple intake channels converge at ion gun 5 while supplied to ion gun 5, to realize two kinds or multigroup
The feed-in of high-purity gas；Ion gun 5 by the multiple gases being passed through while can ionize, and draw the mixing for forming different kinds of ions combination
Ion beam 7, the air inflow of gas with various is controlled by adjusting gas mass flow gauge 4, so as to change various different ions beams
Ratio, produced while realizing multiple ion-beam 7, various ion ratios are adjustable.After ion beam 7 is drawn by extraction electrode 6, it is necessary to
The envelope of line and direction are controlled using beam transfer element, beam transfer element includes beam focusing element 8, line
Director element 11 and rear accelerating sections 12, beam focusing element 8 are electrostatic focusing lens, and beam steering element 11 is electrostatic deflection
Device, electrostatic focusing lens are generally electrostatic film lens, electrostatic quadrupole lens or three cylinder electrostatic einzel lens, can set in beam line
Multigroup beam focusing element 8 and beam steering element 11 are put, so as to ensure the coaxial transmission of various ion beams 7.In order to meet reality
Test the requirement to the energy of ion beam 7, it is also necessary to ion beam 7 is accelerated using rear accelerating sections 12, the beam transfer element
All electrostatic elements are to meet the coaxial transmission of the ion beam 7 of different quality.Gas handling system 1, ion gun 5, extraction electrode 6,
Beam transfer element and target 13 are set by the transmission direction of ion beam 7 order respectively, wherein, ion gun 5, beam focusing element 8, beam
Director element 11 and target 13 are flowed all in vacuum chamber, and rear accelerating sections 12 carries vacuum environment, and rear accelerating sections is connected with vacuum chamber.Very
Empty pump 9 can discharge the air in vacuum chamber 10, and vacuum typically requires to be better than 10-3Pa, vacuum chamber 10 can make ion beam 7 high
The transmission backward of effect.Can be by adjusting the parameter change ion beam 7 of beam transfer element size and position on target 13.
Embodiment：
The present embodiment intermediate ion source 5 uses the cylinder simple lens of electrostatic three using cold cathode penning source, beam focusing element 8,
Accelerating sections 12 uses collar plate shape accelerator afterwards.Gas handling system 1 is passed through hydrogen simultaneously to cold cathode penning source and two kinds of helium is high-purity
Gas, cold cathode penning source ionize and draw H caused by both gases simultaneously2 +Ion beam and He+The double ion of ion beam mixes
Beam is closed, it is 20keV that ion gun rear end extraction electrode 6, which draws ion beam energy,.Regulation gas mass flow gauge 4 can change hydrogen
The aeration ratio of gas and helium, so as to change the ion ratio and beam intensity of two kinds of ion beams.The double ion combined beam is in beam
Coaxial transmission backward is realized under the control of streaming element, in the presence of rear accelerating sections 12, ion beam is accelerated to simultaneously
Target arrive in 200keV, the bombardment of ion beam 7 after accelerated device, while so as to realize hydrogen, helium double-ion beam, coaxially injects.
The embodiment device has been used for the irradiation damage research of pile materials.But use ion irradiation mock-up reactor
Neutron irradiation, ion beam irradiation requires that hydrogen, helium and HIB inject simultaneously, and requires that range is close, for simulating
(n, p) and (n, α) transmutation product during neutron irradiation.The nuclear transmutation product hydrogen and helium of neutron irradiation and heavy dose of atom
Cooperative effect caused by displacement has very important effect to irradiation damage, and newest research shows that hydrogen, helium and heavy ion are simultaneously
Damage caused by the cooperative effect of injection adds up irradiation successively with single beam, two-beam irradiation or multi beam differs larger.In order to true
Neutron irradiation effect is simulated, ion irradiation device requires that three kinds of hydrogen, helium and heavy ion ion beams inject simultaneously.If using matter
Son injection, will meet that hydrogen is consistent with the injection depth of helium, and two kinds of ion beam energy difference are larger, can not realize that two kinds of ion beams close
And to a beam line, while produce, coaxially accelerate.Therefore, the utility model uses produces H using cold cathode penning source2 +Point
Daughter ion, using H2 +Molecular ion replaces H1 +Ion implanting, meet that hydrogen is consistent with the injection depth of helium.Asked to solve this
Topic, the utility model have developed one can produce simultaneously, the multiple ion-beam accelerator of two kinds of coaxial transmission hydrogen, helium ion beams dress
Put.By the way which solves the technical problem underlying of this development a new generation reactor of problem of materials bottleneck.
Claims (9)
1. the multiple ion-beam accelerator installation of a kind of coaxial transmission, it is characterised in that the device includes gas handling system (1), ion
Source (5), beam transfer element, vacuum system and target (13)；Beam transfer element includes beam focusing element (8), beam steering
Element (11) and rear accelerating sections (12), vacuum system include vavuum pump (9) and vacuum chamber (10)；Gas handling system (1), ion gun
(5), beam transfer element and target (13) are set by ion beam (7) transmission direction order respectively, wherein, ion gun (5), line gather
Burnt element (8), beam steering element (11) and target (13) are all in vacuum chamber (10).
A kind of 2. multiple ion-beam accelerator installation of coaxial transmission according to claim 1, it is characterised in that the air inlet
System is made up of the connection of gas cylinder (2), tracheae (3) and gaseous mass flowmeter (4).
A kind of 3. multiple ion-beam accelerator installation of coaxial transmission according to claim 1, it is characterised in that the ion
Source (5) is cold cathode penning source.
A kind of 4. multiple ion-beam accelerator installation of coaxial transmission according to claim 1, it is characterised in that the line
Concentrating element (8) is electrostatic focusing lens.
A kind of 5. multiple ion-beam accelerator installation of coaxial transmission according to claim 1, it is characterised in that the line
Director element (11) is static deflecter.
A kind of 6. multiple ion-beam accelerator installation of coaxial transmission according to claim 1, it is characterised in that the line
The all electrostatic elements of transfer element.
A kind of 7. multiple ion-beam accelerator installation of coaxial transmission according to claim 4, it is characterised in that the electrostatic
Condenser lens is electrostatic film lens.
A kind of 8. multiple ion-beam accelerator installation of coaxial transmission according to claim 4, it is characterised in that the electrostatic
Condenser lens is electrostatic quadrupole lens.
A kind of 9. multiple ion-beam accelerator installation of coaxial transmission according to claim 4, it is characterised in that the electrostatic
Condenser lens is three cylinder electrostatic einzel lens.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720709157.0U CN207099420U (en) | 2017-06-19 | 2017-06-19 | A kind of multiple ion-beam accelerator installation of coaxial transmission |
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| CN201720709157.0U CN207099420U (en) | 2017-06-19 | 2017-06-19 | A kind of multiple ion-beam accelerator installation of coaxial transmission |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107333381A (en) * | 2017-06-19 | 2017-11-07 | 中国原子能科学研究院 | A kind of multiple ion-beam accelerator installation of coaxial transmission |
| CN110208311A (en) * | 2019-05-21 | 2019-09-06 | 四川大学 | Resistance tritium coating multi- scenarios method performance test methods and its test device based on accelerator ion irradiation |
| CN110225643A (en) * | 2019-04-23 | 2019-09-10 | 中国科学院近代物理研究所 | A kind of cocktail line preparation facilities and method |
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2017
- 2017-06-19 CN CN201720709157.0U patent/CN207099420U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107333381A (en) * | 2017-06-19 | 2017-11-07 | 中国原子能科学研究院 | A kind of multiple ion-beam accelerator installation of coaxial transmission |
| CN110225643A (en) * | 2019-04-23 | 2019-09-10 | 中国科学院近代物理研究所 | A kind of cocktail line preparation facilities and method |
| CN110225643B (en) * | 2019-04-23 | 2021-06-04 | 中国科学院近代物理研究所 | Cocktail beam preparation device and method |
| CN110208311A (en) * | 2019-05-21 | 2019-09-06 | 四川大学 | Resistance tritium coating multi- scenarios method performance test methods and its test device based on accelerator ion irradiation |
| CN110208311B (en) * | 2019-05-21 | 2021-06-08 | 四川大学 | Tritium-resistant coating multi-field coupling performance test method and test device based on accelerator ion irradiation |
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