CN207021243U - Silicon wafer cleaning basket - Google Patents
Silicon wafer cleaning basket Download PDFInfo
- Publication number
- CN207021243U CN207021243U CN201720890085.4U CN201720890085U CN207021243U CN 207021243 U CN207021243 U CN 207021243U CN 201720890085 U CN201720890085 U CN 201720890085U CN 207021243 U CN207021243 U CN 207021243U
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- CN
- China
- Prior art keywords
- slot
- support bar
- silicon chip
- wafer cleaning
- compensating part
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Cleaning Or Drying Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A kind of silicon wafer cleaning basket is the utility model is related to, including：The two side being oppositely arranged；First support bar；The space of silicon chip can be placed by being formed between second support bar, with the first support bar；First silicon chip slot part, is fixed in the first support bar, is provided with some slots, is respectively equipped with the slot compensating part being fixed in first support bar between the both ends of the first silicon chip slot part and side wall, formed with some slots on slot compensating part；Second silicon chip slot part, is fixed in the second support bar, is provided with some slots, the slot compensating part being fixed in the second support bar is also respectively equipped between the both ends and two side of the second silicon chip slot part.The position of spring is originally set to be changed to be substituted with slot compensating part, slot compensating part is also equipped with slot.Therefore, in the case of gaily decorated basket size constancy, the quantity of slot is added, so as to lift the load amount of the gaily decorated basket and do not increase the volume of equipment.
Description
Technical field
Wafer Cleaning field is the utility model is related to, more particularly to a kind of silicon wafer cleaning basket.
Background technology
The automatic inserted sheet cleaning all-in-one gaily decorated basket uses useful load to illustrate a kind of biography for 100, such as Fig. 1 to current line in the industry
The upper end of the gaily decorated basket of system, the wherein gaily decorated basket is provided with silicon chip slot element 110, and the both ends of the element of silicon chip slot element 110 use spring
120 hold out against.In the case that gaily decorated basket longitudinal size is 540mm, silicon chip slot element 110 offers 100 slots, can insert 100
Piece silicon chip.
Because the speed of inserted sheet cleaning machine is also almost on a par, in order to meet the needs of client, process time used in every family
It is essentially identical, but all due to, without too big room for promotion, being wanted to lift production capacity in the present case, increase dress by hardware impact
Carrying capacity is imperative, or perhaps the development trend for industry of cutting into slices.
Utility model content
Based on this, it is necessary to lift the problem of difficult for gaily decorated basket load amount, there is provided a kind of silicon wafer cleaning basket.
A kind of silicon wafer cleaning basket, including：
The two side being oppositely arranged；
First support bar, it is connected between the two side and with the two side；
Second support bar, it is connected between the two side and with the two side, between the first support bar
The space of silicon chip can be placed by being formed；
First silicon chip slot part, is fixed in the first support bar, is provided with some slots, the first silicon chip slot
The slot compensating part being fixed in first support bar is respectively equipped between the both ends of part and side wall, if on slot compensating part formed with
Dry slot；
Second silicon chip slot part, is fixed in the second support bar, is provided with some slots, the second silicon chip slot
Also the slot compensating part being fixed in the second support bar is respectively equipped between the both ends and two side of part.
Above-mentioned silicon wafer cleaning basket, the position of spring is originally set to be changed to be substituted with slot compensating part, slot compensating part
It is provided with slot.Therefore, in the case of gaily decorated basket size constancy, the quantity of slot is added, so as to lift the load of the gaily decorated basket
Amount does not increase the volume of equipment again.
In one of the embodiments, the first silicon chip slot part and its total length of the slot compensating part at both ends and
The size of one support bar is identical.
In one of the embodiments, the second silicon chip slot part and its total length of the slot compensating part at both ends and
The size of two support bars is identical.
In one of the embodiments, the slot compensating part in the first support bar is integrated into first support bar
Type.
In one of the embodiments, the slot compensating part in the second support bar is integrated into second support bar
Type.
In one of the embodiments, the distance between outer face of the two side is 540mm, and first silicon chip is inserted
100 slots are provided with slotware and the second silicon chip slot part, each slot compensating part is provided with 2 slots.
In one of the embodiments, the slot compensating part is rack, and the slot on the slot compensating part is rack
Gap between upper adjacent two tooth.
In one of the embodiments, the first support bar and second support bar are cylindrical stainless steel.
In one of the embodiments, the slot is V-shaped groove.
Brief description of the drawings
Fig. 1 illustrates the structural representation of traditional silicon wafer cleaning basket；
Fig. 2 is the structural representation of the silicon wafer cleaning basket of the application one embodiment.
Embodiment
For the ease of understanding the utility model, the utility model is more fully retouched below with reference to relevant drawings
State.Preferred embodiment of the present utility model is given in accompanying drawing.But the utility model can come in many different forms
Realize, however it is not limited to embodiment described herein.On the contrary, the purpose for providing these embodiments is made to of the present utility model
The understanding of disclosure more thorough and comprehensive.
It should be noted that when element is referred to as " being fixed on " another element, it can be directly on another element
Or there may also be element placed in the middle.When an element is considered as " connection " another element, it can be directly connected to
To another element or it may be simultaneously present centering elements.On the contrary, when element be referred to as " directly existing " another element " on " when,
Intermediary element is then not present.Term as used herein " vertically ", " horizontal ", "left", "right" and similar statement are only
It is for illustrative purposes.
Unless otherwise defined, all of technologies and scientific terms used here by the article is led with belonging to technology of the present utility model
The implication that the technical staff in domain is generally understood that is identical.It is simply in term used in the description of the present utility model herein
The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term as used herein " and/or " include
The arbitrary and all combination of one or more related Listed Items.
Below in conjunction with the accompanying drawings, the better embodiment of silicon wafer cleaning basket is described in detail.
With reference to figure 2, the silicon wafer cleaning basket 200 of one embodiment, including two side walls being oppositely arranged 210, first
Strut 220, second support bar 230.First support bar 220, second support bar 230 are respectively positioned between two side walls 210 and both sides
Wall 210 connects.First support bar 220, second support bar 230 are arranged at intervals in a manner of left and right, are formed place silicon chip therebetween
Space.
The first silicon chip slot part 240 is fixed with first support bar 220.First silicon chip slot part 240 is provided with some insert
Groove 242, to position silicon chip.The both ends of first silicon chip slot part 240 are respectively equipped with a slot compensating part 250 with side wall 210.
Two slot compensating parts 250 are fixed with first support bar 220, the first silicon chip between two slot compensating parts 250 is inserted
Slotware 240.
Similarly, the second silicon chip slot part 260 is fixed with second support bar 230.Second silicon chip slot part 260 and
The pairing of one silicon chip slot part 240 uses, and positions silicon chip jointly.Second silicon chip slot part 260 is provided with some slots 242, to
Position silicon chip.The both ends of second silicon chip slot part 260 are respectively equipped with a slot compensating part 250 with side wall 210.Second support bar
Two slot compensating parts 250, the second silicon chip slot part 260 between two slot compensating parts 250 are fixed with 230.
In above-described embodiment, the first silicon chip slot part 240 is fixed in first support bar 220, the first silicon chip slot part 240
Both sides need not rely on spring positioning, originally set the position of spring to be changed to be substituted with slot compensating part 250.Slot compensating part
250 are also equipped with slot 242.Therefore, in the case of gaily decorated basket size constancy, the quantity of slot 242 is added, so as to improve
The load amount of the gaily decorated basket does not increase the volume of equipment again.
In one embodiment, the total length of the slot compensating part 250 at the first silicon chip slot part 240 and its both ends and first
The size of strut 220 is identical.The total length of second silicon chip slot part 260 and its slot compensating part 250 at both ends also with second
The size of strut 230 is identical.So, originally the space of spring is set to be fully utilized.
In one embodiment, the distance between outer face of two side 210 is 540mm, i.e. silicon wafer cleaning basket 200 length
The size for spending direction is 540mm.100 slots are provided with first silicon chip slot part 240 and the second silicon chip slot part 260,
Each slot compensating part 250 is provided with 2 slots 242.Therefore, it is in the size of the length direction of silicon wafer cleaning basket 200
In the case of 540mm, the load quantity of silicon wafer cleaning basket 200 is promoted to 104 by 100.
In the case of gaily decorated basket size constancy, load is measured to be lifted, and other related equipment saves improvement expenses without transformation.
After transformation, 100 are often done, production capacity improves 4%；Daily 650,000, production capacity has more 2.6 ten thousand.1 year 365 × 2.6 ten thousand=9,490,000
Piece.
In one embodiment, the slot compensating part 250 in first support bar 220 is formed in one with first support bar 220.
In addition, the first silicon chip slot part 240 can also be formed in one with first support bar 220.
In one embodiment, the slot compensating part 250 in second support bar 230 is also integrated into second support bar 230
Type.In addition, the second silicon chip slot part 260 can also be formed in one with first support bar 220.
In one embodiment, slot compensating part 250 is rack.Slot 242 on slot compensating part 250 is adjacent on rack
Gap between two teeth.Rack is fixed in first support bar 220 or second support bar 230.For example, the side of cast can be passed through
Formula is integrally formed with first support bar 220 or second support bar 230.The rack for being adapted to size is directly selected as slot compensating part
250, it is not necessary to the non-standard of complexity is set, reduces production cost, raising efficiency.
In one embodiment, first support bar 220 and second support bar 230 are cylindrical stainless steel.
In one embodiment, slot 242 is V-shaped groove.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope that this specification is recorded all is considered to be.
Embodiment described above only expresses several embodiments of the present utility model, and its description is more specific and detailed,
But therefore it can not be interpreted as the limitation to utility model patent scope.It should be pointed out that the common skill for this area
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (9)
- A kind of 1. silicon wafer cleaning basket, it is characterised in that including：The two side being oppositely arranged；First support bar, it is connected between the two side and with the two side；Second support bar, it is connected between the two side and with the two side, is formed between the first support bar The space of silicon chip can be placed；First silicon chip slot part, is fixed in the first support bar, is provided with some slots, the first silicon chip slot part The slot compensating part being fixed in first support bar is respectively equipped between both ends and side wall, is inserted on slot compensating part formed with some Groove；Second silicon chip slot part, is fixed in the second support bar, is provided with some slots, the second silicon chip slot part Also the slot compensating part being fixed in the second support bar is respectively equipped between both ends and two side.
- 2. silicon wafer cleaning basket according to claim 1, it is characterised in that the first silicon chip slot part and its both ends The total length of slot compensating part is identical with the size of first support bar.
- 3. silicon wafer cleaning basket according to claim 1, it is characterised in that the second silicon chip slot part and its both ends The total length of slot compensating part is identical with the size of second support bar.
- 4. silicon wafer cleaning basket according to claim 1, it is characterised in that the slot compensating part in the first support bar It is formed in one with first support bar.
- 5. silicon wafer cleaning basket according to claim 1, it is characterised in that the slot compensating part in the second support bar It is formed in one with second support bar.
- 6. silicon wafer cleaning basket according to claim 1, it is characterised in that the distance between outer face of the two side For 540mm, 100 slots, each slot are provided with the first silicon chip slot part and the second silicon chip slot part Compensating part is provided with 2 slots.
- 7. silicon wafer cleaning basket according to claim 1, it is characterised in that the slot compensating part is rack, described to insert Gap of the slot between adjacent two tooth on rack on groove compensating part.
- 8. silicon wafer cleaning basket according to claim 1, it is characterised in that the first support bar and second support bar are equal For cylindrical stainless steel.
- 9. silicon wafer cleaning basket according to claim 1, it is characterised in that the slot is V-shaped groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720890085.4U CN207021243U (en) | 2017-07-20 | 2017-07-20 | Silicon wafer cleaning basket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720890085.4U CN207021243U (en) | 2017-07-20 | 2017-07-20 | Silicon wafer cleaning basket |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207021243U true CN207021243U (en) | 2018-02-16 |
Family
ID=61481952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720890085.4U Active CN207021243U (en) | 2017-07-20 | 2017-07-20 | Silicon wafer cleaning basket |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207021243U (en) |
-
2017
- 2017-07-20 CN CN201720890085.4U patent/CN207021243U/en active Active
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