CN207019633U - Measurement apparatus and projective measuring instrument - Google Patents
Measurement apparatus and projective measuring instrument Download PDFInfo
- Publication number
- CN207019633U CN207019633U CN201721015661.7U CN201721015661U CN207019633U CN 207019633 U CN207019633 U CN 207019633U CN 201721015661 U CN201721015661 U CN 201721015661U CN 207019633 U CN207019633 U CN 207019633U
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- Prior art keywords
- measurement apparatus
- carrying platform
- block tool
- groove
- measuring instrument
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Abstract
The utility model discloses the projective measuring instrument of a kind of measurement apparatus and the application measurement apparatus, wherein, the measurement apparatus includes carrying platform and the block tool located at the carrying platform, and the carrying platform has light-permeable structure, and the block tool has one to keep out face;Block tool has light-permeable structure;And/or the face of keeping out is arranged with some printing opacity grooves.The measurement accuracy of the utility model measurement apparatus is higher, time of measuring is shorter, measurement efficiency is higher.
Description
Technical field
It the utility model is related to field of measuring technique, the projection of more particularly to a kind of measurement apparatus and the application measurement apparatus
Measuring instrument.
Background technology
Traditional projective measuring instrument includes glass platform, is installed on a block tool of the glass platform, is located at glass
Camera and overhead illumination device above platform and the soffit lighting device below glass platform.In measurement, by work
Part is positioned in glass platform, and makes the face of keeping out for being adjacent to side and being close to block tool of workpiece, then, overhead illumination device and bottom
Towards workpiece irradiation light, automatic measurement is carried out using camera for portion's lighting device.However, because block tool is light tight knot
Structure, and block tool keep out face and measured workpiece be adjacent to side close contact, block the upward irradiation of bottom light, cause
During camera automatic measurement, the side that is adjacent to of measured workpiece is shown as shade or smudgy.Therefore, all needed after measurement workpiece every time
Calibration of workpieces, namely need further workpiece correction be turned over turn 90 degrees or 180 degree measure its it is unmeasured be adjacent to side, workpiece
Correction upset have impact on measurement accuracy, also increase time of measuring, reduce measurement efficiency.
Utility model content
Main purpose of the present utility model is to provide a kind of measurement apparatus, it is intended to solves traditional measurement apparatus in measurement work
The problem of measurement accuracy is relatively low during part, time of measuring is longer, measurement efficiency is relatively low.
To achieve the above object, the utility model proposes measurement apparatus, applied to projective measuring instrument, it is characterised in that
The measurement apparatus includes carrying platform and the block tool located at the carrying platform, and the carrying platform has light-permeable knot
Structure, the block tool have one to keep out face;
The face of keeping out is arranged with some printing opacity grooves;
And/or block tool has light-permeable structure.
Alternatively, the carrying platform includes bearing base and fixed frame, and the periphery of the bearing base is equipped on institute
State fixed frame.
Alternatively, the block tool includes the fixed part for being fixed on the fixed frame, the end projection of the fixed part
There is an extension, the extension is oppositely arranged with the bearing base, one end shape of the extension away from the fixed part
Face is kept out into described.
Alternatively, the measurement apparatus also includes some connectors, and the fixed part offers some mounting holes, the company
The mounting hole is run through in one end of fitting, and is connected with the fixed frame, and the other end is connected to the periphery of mounting hole.
Alternatively, when the face of keeping out is arranged with some printing opacity grooves, the width range of the printing opacity groove is 5-10mm;
And/or the depth bounds of the printing opacity groove is 5-15mm.
Alternatively, when the face of keeping out is arranged with some printing opacity grooves, the printing opacity groove be "u"-shaped groove, " V " shape groove,
Semi-circular groove or dovetail groove.
Alternatively, the length range that the block tool forms the end for keeping out face is 150-200mm;And/or institute
The thickness range for stating block tool is 15-20mm.
Alternatively, the material of the bearing base is clear glass, transparent plastic or pebble.
The utility model also proposes a kind of projective measuring instrument, including measurement apparatus described above, and the projective measuring instrument is also
Including the overhead illumination device above the carrying platform and the soffit lighting device below the carrying platform.
Alternatively, the projective measuring instrument also includes the camera above the carrying platform, the camera with
The carrying platform is oppositely arranged.
Measurement apparatus is applied to projective measuring instrument in technical solutions of the utility model, and measurement apparatus includes carrying platform and set
In the block tool of carrying platform, carrying platform is light-permeable structure, and the block tool has one to keep out face.It is described to keep out face
It is arranged with some printing opacity grooves;When measurement apparatus measures workpiece, workpiece is positioned on carrying platform, and make workpiece is adjacent to side
It is close to the face of keeping out of block tool, then, workpiece is irradiated by the light from carrying platform over and under, under carrying platform
After the light of side passes through carrying platform, further irradiated upwards through block tool by printing opacity groove, so that workpiece is adjacent to
Side light, and cause workpiece is adjacent to that side is high-visible, so as to clearly measure the size for being adjacent to side, workpiece is put
It can once complete to measure, without further calibration of workpieces, therefore improve measurement accuracy, reduce time of measuring, improve
Measurement efficiency.
And/or carrying platform is light-permeable structure;When measurement apparatus measures workpiece, workpiece is positioned on carrying platform,
And make the face of keeping out for being adjacent to side and being close to block tool of workpiece, then, workpiece is by the light from carrying platform over and under
Line irradiates, and because block tool has a light-permeable structure, after the light below carrying platform passes through carrying platform, further passs through
Block tool irradiates upwards so that workpiece is adjacent to side light, and cause workpiece to be adjacent to side high-visible, so as to more
Clearly measurement is adjacent to the size on side, and workpiece, which is put, can once complete to measure, and without further calibration of workpieces, therefore improves
Measurement accuracy, reduces time of measuring, improves measurement efficiency.
Brief description of the drawings
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, drawings in the following description are only
It is some embodiments of the utility model, for those of ordinary skill in the art, is not paying the premise of creative work
Under, other accompanying drawings can also be obtained according to the structure shown in these accompanying drawings.
Fig. 1 is the structural representation at the visual angle of the utility model projective measuring instrument embodiment one;
Fig. 2 is the structural representation at another visual angle of the utility model projective measuring instrument embodiment;
Fig. 3 is the structural representation at the visual angle of block tool one in the utility model projective measuring instrument embodiment;
Fig. 4 is the structural representation at another visual angle of block tool in the utility model projective measuring instrument embodiment;
Fig. 5 is the structural representation at the another visual angle of block tool in the utility model projective measuring instrument embodiment.
Drawing reference numeral explanation:
Realization, functional characteristics and the advantage of the utility model purpose will be described further referring to the drawings in conjunction with the embodiments.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only part of the embodiment of the present utility model, rather than all
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making creative work premise
Lower obtained every other embodiment, belong to the scope of the utility model protection.
It is to be appreciated that the directional instruction (such as up, down, left, right, before and after ...) of institute in the utility model embodiment
It is only used for explaining relative position relation under a certain particular pose (as shown in drawings) between each part, motion conditions etc., such as
When the fruit particular pose changes, then directionality instruction also correspondingly changes therewith.
In addition, the description for being related to " first ", " second " etc. in the utility model is only used for describing purpose, without being understood that
To indicate or implying its relative importance or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ",
At least one this feature can be expressed or be implicitly included to the feature of " second ".In addition, the technical side between each embodiment
Case can be combined with each other, but must can be implemented as basis with those of ordinary skill in the art, when the combination of technical scheme
Occur conflicting or will be understood that the combination of this technical scheme is not present when can not realize, also not in the requires of the utility model
Protection domain within.
In the utility model, unless otherwise clearly defined and limited, term " connection ", " fixation " etc. should do broad sense reason
Solution, for example, " fixation " can be fixedly connected or be detachably connected, or integrally;Can mechanically connect, also may be used
Be electrical connection;Can be joined directly together, can also be indirectly connected by intermediary, can be the connection of two element internals
Or the interaction relationship of two elements, limited unless otherwise clear and definite.For the ordinary skill in the art, can be with
Concrete meaning of the above-mentioned term in the utility model is understood as the case may be.
Referring to Fig. 1 to Fig. 5, the measurement apparatus of a preferred embodiment in the utility model embodiment, surveyed applied to projection
Instrument 100 is measured, measurement apparatus includes carrying platform 10 and the block tool 20 located at carrying platform 10, and carrying platform 10 has can be saturating
Photo structure, block tool 20 have one to keep out face 211;Keep out face 211 and be arranged with some printing opacity grooves 2111.
Measurement apparatus is applied to projective measuring instrument 100 in technical solutions of the utility model, and measurement apparatus includes carrying platform
10 and the block tool 20 located at carrying platform 10, block tool 20 has one to keep out face 211, and carrying platform 10 is light-permeable knot
Structure, further, carrying platform 10 are used to carry workpiece 60, and the generally light-permeable structure of carrying platform 10, or carrying is put down
The loading end that platform 10 carries workpiece 60 is light-permeable structure, and when measurement apparatus measures workpiece 60, it is flat that workpiece 60 is positioned over into carrying
On platform 10, and make workpiece 60 be adjacent to that side 61 is close to block tool 20 keep out face 211, then, workpiece 60 is by from carrying
The light of platform 10 over and under irradiates, after the light below carrying platform 10 passes through carrying platform 10, further by saturating
Light groove 2111 irradiates upwards through block tool 20, so that workpiece 60 is adjacent to the light of side 61, and causes being adjacent to for workpiece 60
Side 61 is high-visible, and so as to clearly measure the size for being adjacent to side 61, workpiece 60, which is put, can once complete to measure,
Without further calibration of workpieces 60, therefore measurement accuracy is improved, reduce time of measuring, improve measurement efficiency.
The measurement apparatus of another preferred embodiment in the utility model embodiment, applied to projective measuring instrument 100, measurement
Device includes carrying platform 10 and the block tool 20 located at carrying platform 10, and carrying platform 10 has light-permeable structure, block
Tool 20 has one to keep out face 211;Block tool 20 has light-permeable structure.
Measurement apparatus is applied to projective measuring instrument 100 in technical solutions of the utility model, and measurement apparatus includes carrying platform
10 and the block tool 20 located at carrying platform 10, block tool 20 has one to keep out face 211, and carrying platform 10 has light-permeable
Structure, further, carrying platform 10 are used to carry workpiece 60, and the generally light-permeable structure of carrying platform 10, or carrying
The loading end that platform 10 carries workpiece 60 is light-permeable structure, and when measurement apparatus measures workpiece 60, workpiece 60 is positioned over into carrying
On platform 10, and make workpiece 60 be adjacent to that side 61 is close to block tool 20 keep out face 211, then, workpiece 60 is carried out self-supporting
The light irradiation of carrying platform 10 over and under, because block tool 20 has light-permeable structure, further, block tool 20
Generally light-permeable structure, or block tool 20 form that to keep out the part in face 211 be light-permeable structure, under carrying platform 10
After the light of side passes through carrying platform 10, further pass through block tool 20 and irradiate upwards so that workpiece 60 to be adjacent to side 61 bright
Light, and cause workpiece 60 is adjacent to that side 61 is high-visible, so as to clearly measure the size for being adjacent to side 61, workpiece 60
Putting can once complete to measure, and without further calibration of workpieces 60, therefore measurement accuracy be improved, when reducing measurement
Between, improve measurement efficiency.
The measurement apparatus of another preferred embodiment in the utility model embodiment, applied to projective measuring instrument 100, measurement
Device includes carrying platform 10 and the block tool 20 located at carrying platform 10, and carrying platform 10 has light-permeable structure, block
Tool 20 has one to keep out face 211;Keep out face 211 and be arranged with some printing opacity grooves 2111, and block tool 20 has light-permeable
Structure.
Measurement apparatus is applied to projective measuring instrument 100 in technical solutions of the utility model, and measurement apparatus includes carrying platform
10 and the block tool 20 located at carrying platform 10, block tool 20 has one to keep out face 211, and carrying platform 10 is light-permeable knot
Structure, further, carrying platform 10 are used to carry workpiece 60, and the generally light-permeable structure of carrying platform 10, or carrying is put down
The loading end that platform 10 carries workpiece 60 is light-permeable structure, and when measurement apparatus measures workpiece 60, it is flat that workpiece 60 is positioned over into carrying
On platform 10, and make workpiece 60 be adjacent to that side 61 is close to block tool 20 keep out face 211, then, workpiece 60 is by from carrying
The light irradiation of platform 10 over and under, because the face of keeping out 211 is arranged with some printing opacity grooves 2111, the lower section of carrying platform 10
Light pass through carrying platform 10 after, further irradiated upwards through block tool 20 by printing opacity groove 2111, so that workpiece
60 are adjacent to the light of side 61, and because block tool 20 has light-permeable structure, further, block tool 20 generally can be saturating
Photo structure, or block tool 20 form that to keep out the part in face 211 be light-permeable structure, further improve translucent effect,
And cause workpiece 60 is adjacent to that side 61 is high-visible, so as to clearly measure the size for being adjacent to side 61, workpiece 60 is put
Putting can once complete to measure, and without further calibration of workpieces 60, therefore improve measurement accuracy, reduce time of measuring,
Improve measurement efficiency.
Further, in the lump referring to Figures 1 and 2, carrying platform 10 includes bearing base 11 and fixed frame 12, bearing base
11 periphery is equipped on fixed frame 12.
Carrying platform 10 includes being used for bearing base 11 and the use for carrying measured workpiece 60 in technical solutions of the utility model
In the fixed frame 12 of fixed bearing base 11, by setting the periphery of bearing base 11 to be equipped on fixed frame 12, so that carrying
The periphery of pedestal 11 is securely fastened to fixed frame 12 or is steadily positioned over fixed frame 12, bearing base when avoiding placing workpiece 60
11 occur rocking or displacement and influence the measurement result of workpiece 60, it has higher stability and higher structural reliability.
Further, in the lump referring to figs. 1 to Fig. 5, block tool 20 includes the fixed part 22 for being fixed on fixed frame 12, fixed
The end in portion 22 is convexly equipped with an extension 21, and extension 21 is oppositely arranged with bearing base 11, and extension 21 is away from fixed part 22
One end formed keep out face 211.
Fixed part 22 is fixed on fixed frame 12 in technical solutions of the utility model, so that block tool 20 is securely fastened to admittedly
Determine frame 12, when avoiding the workpiece 60 from ajusting the face 211 of keeping out due to workpiece 60 thrust and so that there is position in block tool 20
Skew, has further ensured the accuracy of measurement, and the one end away from fixed part 22 of extension 21 forms face 211 of keeping out, during measurement
Workpiece 60 is positioned on bearing base 11, workpiece 60 keeps out face 211, and extension 21 is oppositely arranged with bearing base 11,
Specifically, the height of the bottom wall of extension 21 is higher than the height of the bottom wall of fixed part 22, and extension 21 is not direct in installation or use
Bearing base 11 is contacted, scratch bearing base 11, causes bearing base 11 to leave and scrape when can avoid the extension 21 from installing or use
Trace.
Further, in the lump referring to Figures 1 and 2, measurement apparatus also includes some connectors (not shown), and fixed part 22 is opened
Provided with some mounting holes 221, one end penetrating mounting holes 221 of connector, and it is connected with fixed frame 12, the other end is connected to installation
The periphery in hole 221.
Fixed part 22 offers some mounting holes 221 in technical solutions of the utility model, and one end of connector is fixed on
Determine the outer wall in portion 22, other end penetrating mounting holes 221, and be connected with fixed frame 12, it is by connector that fixed part 22 is firmly solid
Surely be connected frame 12, and specifically, connector can be the attachment structures such as screw, bolt or alignment pin.
Further, reference picture 4 and Fig. 5 in the lump, when keeping out face 211 and being arranged with some printing opacity grooves 2111, printing opacity groove
2111 width W scopes are 5-10mm.Specifically, when the width W scopes of printing opacity groove 2111 are 5-10mm so that block tool
20 have preferable translucent effect.It should be understood that the utility model embodiment is not carried out to the width W of printing opacity groove 2111
Specific to limit, the width W of the printing opacity groove 2111 of other numerical value is also within the scope of protection of the utility model.
Further, reference picture 4, the depth D scopes of printing opacity groove 2111 are 5-15mm.Specifically, printing opacity groove 2111
Depth D scopes when being 5-15mm so that block tool 20 has preferable translucent effect.It should be understood that the utility model
Embodiment is not limited specifically the depth D of printing opacity groove 2111, and the depth D of the printing opacity groove 2111 of other numerical value also exists
Within the scope of protection of the utility model.
Further, when keeping out face 211 and being arranged with some printing opacity grooves 2111, printing opacity groove 2111 is "u"-shaped groove, " V "
Shape groove, semi-circular groove or dovetail groove etc..Specifically, printing opacity groove 2111 is "u"-shaped groove, " V " shape groove, semi-circular groove or trapezoidal
Groove so that block tool 20 has preferable translucent effect.It should be understood that the utility model embodiment is not to printing opacity groove
2111 shape is specifically limited, and the printing opacity grooves 2111 of other shapes is also within the scope of protection of the utility model.
Further, reference picture 4, the length L scopes that block tool 20 forms the end for keeping out face 211 are 150-200mm.
Specifically, the length L scopes that block tool 20 forms the end for keeping out face 211 are 150-200mm so that block tool 20 can
Preferably it is adapted to the workpiece 60 of different sizes.It should be understood that the utility model embodiment is not to the shape of block tool 20
Length L into the end in the face of keeping out 211 is specifically limited, and the length L of other numerical value is also in the scope of protection of the utility model
Within.
Further, reference picture 5, the thickness H scopes of block tool 20 are 15-20mm.Specifically, the thickness of block tool 20
It is 15-20mm to spend H scopes so that block tool 20 can preferably be adapted to the workpiece 60 of different sizes.It should be understood that
The utility model embodiment is not limited specifically the thickness H of block tool 20, and the thickness H of other numerical value is also in this practicality
Within new protection domain.
Further, the material of bearing base 11 is clear glass, transparent plastic or pebble etc..Specifically, carry
The material of pedestal 11 is clear glass, transparent plastic or pebble so that bearing base 11 has preferable translucent effect.Can
With understanding, the utility model embodiment is not limited specifically the material of bearing base 11, the carrying base of other materials
Seat 11 is also within the scope of protection of the utility model.
Alternatively, the material of block tool 20 is alternatively clear glass, transparent plastic or pebble etc., not another herein
One repeats.
The utility model also proposes a kind of projective measuring instrument 100, and the projective measuring instrument 100 includes measurement apparatus, the measurement
The concrete structure of device is with reference to above-described embodiment, because this projective measuring instrument 100 employs whole skills of above-mentioned all embodiments
Art scheme, therefore all beneficial effects at least caused by the technical scheme with above-described embodiment, this is no longer going to repeat them.
Wherein, projective measuring instrument 100 also includes the overhead illumination device 40 positioned at the top of carrying platform 10, positioned at the lower section of carrying platform 10
Soffit lighting device 50.
Specifically, carrying platform 10 includes bearing base 11 and fixed frame 12, and the periphery of bearing base 11 is equipped on admittedly
Determine frame 12, projective measuring instrument 100 is included positioned at the overhead illumination device 40 of the top of bearing base 11 and under bearing base 11
The soffit lighting device 50 of side, when measurement apparatus measures workpiece 60, workpiece 60 is positioned over bearing base 11, and workpiece 60 is adjacent to side
61 keep out face 211, and overhead illumination device 40 and soffit lighting device 50 irradiate towards workpiece 60, and soffit lighting device
50 irradiations towards workpiece 60 irradiate when, its light is further transmitted through block tool 20, so that workpiece 60 through after bearing base 11
Be adjacent to the light of side 61, and cause workpiece 60 to be adjacent to side 61 high-visible, be adjacent to side 61 so as to clearly measure
Size, workpiece 60, which is put, can once complete to measure, and without further calibration of workpieces 60, therefore improve measurement accuracy,
Reduce time of measuring, improve measurement efficiency.
Further, projective measuring instrument 100 also includes the camera positioned at the top of bearing base 11, camera and carrying base
Seat 11 is oppositely arranged.Camera is controlled by background control system, and background control system is by setting software program, to control shooting
Head automated imaging simultaneously measures the size of measured workpiece 60.
Preferred embodiment of the present utility model is the foregoing is only, not thereby limits the scope of the claims of the present utility model,
Every equivalent structure change under inventive concept of the present utility model, made using the utility model specification and accompanying drawing content
Change, or directly/be used in other related technical areas indirectly and be included in scope of patent protection of the present utility model.
Claims (10)
1. a kind of measurement apparatus, applied to projective measuring instrument, it is characterised in that the measurement apparatus includes carrying platform and is located at
The block tool of the carrying platform, the carrying platform have light-permeable structure, and the block tool has one to keep out face;
The face of keeping out is arranged with some printing opacity grooves;
And/or block tool has light-permeable structure.
2. measurement apparatus as claimed in claim 1, it is characterised in that the carrying platform includes bearing base and fixed frame,
The periphery of the bearing base is equipped on the fixed frame.
3. measurement apparatus as claimed in claim 2, it is characterised in that the block tool includes being fixed on the fixed frame
Fixed part, the end of the fixed part are convexly equipped with an extension, and the extension is oppositely arranged with the bearing base, described to prolong
Face is kept out described in being formed in the one end of extending portion away from the fixed part.
4. measurement apparatus as claimed in claim 3, it is characterised in that the measurement apparatus also includes some connectors, described
Fixed part offers some mounting holes, and the mounting hole is run through in one end of the connector, and is connected with the fixed frame, another
End is connected to the periphery of mounting hole.
5. such as the measurement apparatus any one of claim 1-4, it is characterised in that the face of keeping out is arranged with some printing opacities
During groove, the width range of the printing opacity groove is 5-10mm;And/or the depth bounds of the printing opacity groove is 5-15mm.
6. such as the measurement apparatus any one of claim 1-4, it is characterised in that the face of keeping out is arranged with some printing opacities
During groove, the printing opacity groove is "u"-shaped groove, " V " shape groove, semi-circular groove or dovetail groove.
7. such as the measurement apparatus any one of claim 1-4, it is characterised in that the block tool forms described keep out
The length range of the end in face is 150-200mm;And/or the thickness range of the block tool is 15-20mm.
8. such as the measurement apparatus any one of claim 2-4, it is characterised in that the material of the bearing base is transparent
Glass, transparent plastic or pebble.
9. a kind of projective measuring instrument, it is characterised in that including the measurement apparatus as described in claim any one of 1-8, the throwing
Shadow measuring instrument also includes the overhead illumination device above the carrying platform and the bottom below the carrying platform
Lighting device.
10. projective measuring instrument as claimed in claim 9, it is characterised in that the projective measuring instrument also includes holding positioned at described
Camera above carrying platform, the camera are oppositely arranged with the carrying platform.
Priority Applications (1)
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CN201721015661.7U CN207019633U (en) | 2017-08-14 | 2017-08-14 | Measurement apparatus and projective measuring instrument |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201721015661.7U CN207019633U (en) | 2017-08-14 | 2017-08-14 | Measurement apparatus and projective measuring instrument |
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CN207019633U true CN207019633U (en) | 2018-02-16 |
Family
ID=61477578
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108871138A (en) * | 2018-06-25 | 2018-11-23 | 广州铮高精密机械有限公司 | A kind of device for fast detecting and its detection method of components |
CN109186459A (en) * | 2018-10-14 | 2019-01-11 | 西安航天动力测控技术研究所 | It is a kind of based on PMMA material without chamfering optical detection tooling and preparation method thereof |
CN115031633A (en) * | 2022-08-11 | 2022-09-09 | 长春光华微电子设备工程中心有限公司 | On-board detection system of laser scribing machine and detection method thereof |
-
2017
- 2017-08-14 CN CN201721015661.7U patent/CN207019633U/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108871138A (en) * | 2018-06-25 | 2018-11-23 | 广州铮高精密机械有限公司 | A kind of device for fast detecting and its detection method of components |
CN109186459A (en) * | 2018-10-14 | 2019-01-11 | 西安航天动力测控技术研究所 | It is a kind of based on PMMA material without chamfering optical detection tooling and preparation method thereof |
CN109186459B (en) * | 2018-10-14 | 2020-04-28 | 西安航天动力测控技术研究所 | Chamfer-free optical detection tool based on PMMA material and preparation method thereof |
CN115031633A (en) * | 2022-08-11 | 2022-09-09 | 长春光华微电子设备工程中心有限公司 | On-board detection system of laser scribing machine and detection method thereof |
CN115031633B (en) * | 2022-08-11 | 2022-11-08 | 长春光华微电子设备工程中心有限公司 | On-board detection system of laser scribing machine and detection method thereof |
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Granted publication date: 20180216 Termination date: 20190814 |