CN206990742U - The test machine and its earth detector of semiconductor devices - Google Patents
The test machine and its earth detector of semiconductor devices Download PDFInfo
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- CN206990742U CN206990742U CN201720777634.7U CN201720777634U CN206990742U CN 206990742 U CN206990742 U CN 206990742U CN 201720777634 U CN201720777634 U CN 201720777634U CN 206990742 U CN206990742 U CN 206990742U
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Abstract
The utility model discloses the test machine and its earth detector of a kind of semiconductor devices, and the earth detector includes：High pressure access interface, electrically connected with the high-voltage output circuit of test machine；Partial pressure mu balanced circuit, its input electrically connect with high pressure access interface；Leakage control circuit, its input electrically connects with the output end of partial pressure mu balanced circuit, the contact of first relay of leakage control circuit and the coil of the control relay for cutoff high input form a control loop, the contact of control relay is arranged in the high input voltage circuit of test machine, when partial pressure mu balanced circuit exports a level signal, the first relay works and controls control relay to disconnect.The test machine of semiconductor devices includes above-mentioned earth detector.The test machine and its earth detector of semiconductor devices of the present utility model are able to detect that whether the high-voltage output circuit of test machine leaks electricity, and in the case where detecting electric leakage, the supply of cutoff high power supply, protect the safety of tester.
Description
Technical field
It the utility model is related to technical field of semiconductor device, the test machine of more particularly to a kind of semiconductor devices and its leakage
Electric detection means.
Background technology
To semiconductor devices（For example, diode, triode etc.）Progress performance test is semiconductor devices in production process
Middle indispensable process, to reject underproof semiconductor devices, particularly the semiconductor devices after encapsulation is tested, favorably
In raising ex factory pass rate.Some current test machines mainly by manually being operated, i.e., hold test machine by tester
Measuring head each semiconductor devices is tested, still, if the disconnecting relay in the high-voltage output circuit of test machine is short
Road, then high-tension electricity can be caused to be directly output to the measuring head of test machine, security threat is caused to tester.
Utility model content
High voltage output relay short circuit be present to solve test machine of the prior art and easily cause the safe prestige of tester
The problem of side of body, the utility model provide a kind of earth detector of the test machine of semiconductor devices.
The utility model separately provides a kind of semiconductor devices with above-mentioned earth detector.
The utility model provides a kind of earth detector of the test machine of semiconductor devices, including：
High pressure access interface, electrically connected with the high-voltage output circuit of test machine；
Partial pressure mu balanced circuit, its input electrically connect with the high pressure access interface, and the high pressure access interface is defeated
The high tension voltage entered carries out partial pressure and voltage stabilizing；
Leakage control circuit, its input electrically connect with the output end of the partial pressure mu balanced circuit, the electric leakage control electricity
The contact of first relay on road and the coil of the control relay for cutoff high input form a control loop, the control
The contact of relay processed is arranged in the high input voltage circuit of the test machine, and the partial pressure mu balanced circuit exports a level signal
When, first relay works and controls the control relay to disconnect.
Optionally, the leakage control circuit also includes LED alarm lamp, described point of the negative pole connection of the LED alarm lamp
Mu balanced circuit is pressed, the positive pole of the LED alarm lamp connects the coil of first relay.
Optionally, the leakage control circuit also includes being used for the self-locking relay for keeping the LED alarm lamp constant conduction
Device, the coil of the latching relay, the LED alarm lamp, the contact of latching relay form a self-locking circuit, the LED
Alarm lamp is connected by the coil of latching relay with the first power supply, and LED described in the contact portion of the latching relay alarms
The negative pole and ground of lamp, the coil of first relay connect with the coils from parallel connection of coils of the latching relay.
Optionally, the control loop also includes triode, and the coil of the control relay is connect by the triode
Ground, the power supply of contact portion first that the coil of the controller passes through first relay.
Optionally, the earth detector also includes control signal access interface, the control signal access interface with
The central controller electrical connection of test machine；
The leakage control circuit also includes the second relay, one end and the control of the coil of second relay
Signal access port is connected, and the other end is connected with the first power supply, and the contact portion of second relay accesses in the high pressure
Between the input of port and the partial pressure mu balanced circuit, the central controller of the test machine is accessed by the control signal
Port sends control signal to second relay, to control the opening and closing of the contact of second relay.
Optionally, second relay is two, and the high pressure access interface is two, respectively positive high voltage incoming end
Mouth and negative high voltage access interface, the contact portion of one of them the second relay is in the positive high voltage access interface and the partial pressure
Between the input of mu balanced circuit, the contact portion of another the second relay is in the negative high voltage access interface and the partial pressure
Between the input of mu balanced circuit, the coils from parallel connection of coils of two the second relays is connected to the control signal access interface and described
Between first power supply.
Optionally, the partial pressure mu balanced circuit includes positive partial pressure mu balanced circuit, and the positive partial pressure mu balanced circuit includes first
Diode, the first divider resistance, the first voltage-regulator diode and Darlington driving chip, the positive pole connection institute of first diode
Positive high voltage access interface is stated, the negative pole of first diode connects the Darlington by first divider resistance and drives core
Piece, the plus earth of first zener diode, the negative pole of first zener diode connect the Darlington driving core
The input of piece, the output end of the Darlington driving chip connect the input of the leakage control circuit.
Optionally, the partial pressure mu balanced circuit includes negative partial pressure mu balanced circuit, and the negative partial pressure mu balanced circuit includes second
Diode, the second divider resistance, the second voltage-regulator diode and negative-going signal change-over circuit；
The negative pole of second diode connects the negative high voltage access interface, and the positive pole of second diode passes through institute
State the second divider resistance and connect the negative-going signal change-over circuit.
The negative-going signal change-over circuit includes opto-coupler chip and the 3rd relay, and the switch terminals of the opto-coupler chip pass through
The coil ground connection of 3rd relay, contact and the second source of the 3rd relay are connected and connect to the Darlington and driven
The input of chip, the positive control end connection ground of the opto-coupler chip, opto-coupler chip negative control end connection described second are steady
Press diode cathode, the second voltage-regulator diode negative pole ground connection.
Optionally, the earth detector also includes first manual button and the second hand push button, the first manual
The input of positive high voltage access interface described in button connects and the partial pressure mu balanced circuit, described in the second manual button connects
The input of negative high voltage access interface and the partial pressure mu balanced circuit.
The utility model separately provides a kind of test machine of semiconductor devices, including test main frame, test probe and as described above
The earth detector of the test machine of described semiconductor devices, the test main frame include high input voltage circuit and High voltage output
Circuit, the earth detector is used for the high pressure electric leakage for detecting the high-voltage output circuit, and controls the high input voltage electricity
It is used for the disconnection of the relay of cutoff high input in road.
The technical scheme that embodiment of the present utility model provides can include the following benefits：
The utility model is by the way that the high-voltage signal in the high-voltage output circuit of the test machine of semiconductor devices is linked into Lou
In electric detection means, and high-voltage signal is converted to by suitable signal by partial pressure mu balanced circuit and is input to leakage control circuit
In, it is defeated by being used for cutoff high in the high input voltage circuit of the first Control test machine when leakage control circuit works
The control relay entered, thereby, when the disconnecting relay short circuit in the high-voltage output circuit of test machine, earth detector energy
High-voltage signal is enough detected, and is used for the control relay of cutoff high input by the first Control, makes control relay
Device disconnects, and to cut off the supply of the high voltage power supply of test machine, protects the safety of tester.
The test machine of semiconductor devices of the present utility model is able to detect that test machine because including above-mentioned earth detector
Whether leak electricity, and in the case of electric leakage, to cut off the supply of the high voltage power supply of test machine, protect the safety of tester.
It should be appreciated that the general description and following detailed description of the above are only exemplary, this can not be limited
Utility model.
Brief description of the drawings
Accompanying drawing herein is merged in specification and forms the part of this specification, show meet it is of the present utility model
Embodiment, and in specification together for explaining principle of the present utility model.
Fig. 1 is the high input voltage circuit of the utility model test machine and the structural representation of high-voltage output circuit.
Fig. 2 is the circuit theory diagrams of the earth detector of the test machine of the utility model semiconductor devices.
Embodiment
In order to further illustrate principle and structure of the present utility model, it is preferable to carry out in conjunction with accompanying drawing to of the present utility model
Example is described in detail.
As shown in figure 1, its structural representation for the high input voltage circuit and high-voltage output circuit of the utility model test machine
Figure.After test machine is powered, 220V exchange is boosted, after rectification by transformer, the rectifier of high input voltage circuit 10, is turned
It is changed to 1.1KV positive or negative voltage.Control source after conversion is defeated in high pressure into the high-voltage output circuit 20 of test machine
Go out the input in circuit 20 for positive high voltage and negative high voltage and be respectively arranged with corresponding disconnecting relay 22,21.High input voltage electricity
It is provided with control relay K1 in road 10 to be used to control 220V alternating current to be fed to transformer 11, i.e., when control relay K1 breaks
When opening, the supply of test machine high voltage power supply will be cut off.When disconnecting relay 21（Or disconnecting relay 22）When short-circuit, high-tension electricity
Source is by direction signified arrow A to external circuit（Such as the probe of test machine）Output, threaten the safety of tester.In order to
Prevent that the utility model proposes a kind of detection of electrical leakage of test machine of semiconductor devices dress to outside circuit output for high voltage power supply
Put, the earth detector is by the output end 23 of disconnecting relay 21 and disconnecting relay 22 of the high-voltage output circuit 20 of test machine
Output end 24 be linked into earth detector as test point.When earth detector has detected control source, table
Bright disconnecting relay 21（Or disconnecting relay 22）Short circuit, earth detector will be prompted and disconnect control relay
K1, cut away the supply of high voltage power supply.
Specifically, the circuit of the earth detector is as shown in Fig. 2 it is the test machine of the utility model semiconductor devices
Earth detector circuit theory diagrams.The earth detector includes high pressure access interface 31, partial pressure mu balanced circuit 32, leakage
Electric control circuit 33 and control signal access interface 34.
High pressure access interface 31 can be multiple, as shown in Fig. 2 the high pressure access interface used in the present embodiment is two,
Respectively positive high voltage access interface 311 and negative high voltage access interface 312.Positive high voltage access interface 311 and disconnecting relay 21 are defeated
Go out the electrical connection of end 23, negative high voltage access interface 311 electrically connects with the output end 24 of disconnecting relay 22.Earth detector passes through
Positive high voltage access interface 311 and negative high voltage access interface 312 access the positive high voltage of the high-voltage output circuit 20 of test machine and negative height
Pressure.When disconnecting relay 21（Or disconnecting relay 22）When short-circuit, positive high voltage access interface 311 by high-voltage output circuit 20 just
High-voltage signal is linked into the earth detector.When disconnecting relay 22 is short-circuit, negative high voltage access interface 312 is defeated by high pressure
The negative high voltage signal for going out circuit 20 is linked into the earth detector.When disconnecting relay 21（Or disconnecting relay 22）It is not short
Lu Shi, the earth detector do not have control source, and the earth detector does not trigger.
Partial pressure mu balanced circuit 32 includes the positive partial pressure mu balanced circuit 321 being connected with positive high voltage access interface 311, the positive partial pressure
Mu balanced circuit 321 includes the first diode D4, the first divider resistance R1, resistance R2, the first voltage-regulator diode D1 and Darlington and driven
Dynamic chip IC 1.First diode D4 is connected by the first divider resistance R1 with Darlington driving chip IC1, and the first diode
D4 positive pole connection positive high voltage access interface 311, its negative pole connects the first divider resistance R1.It is high that first diode D4 is used for negative sense
Pressure isolation, prevents reverse current from puncturing subsequent conditioning circuit.First voltage-regulator diode D1 and resistance R2 is in parallel, the first zener diode D1
Plus earth, its negative pole connect the first divider resistance R1.Darlington driving chip IC1 input（That is pin 1）Connection the
One zener diode D1 negative pole, Darlington driving chip IC1 pin 9 are grounded.Darlington driving chip IC1 pin 18 is
Output end.The high-voltage signal of partial pressure mu balanced circuit 32 is inputted through the first divider resistance R1, resistance R2 partial pressures and the pole of the first voltage stabilizing two
After pipe D1 voltage stabilizings, suitable signal output is obtained to Darlington driving chip IC1 input, makes Darlington driving chip IC1
Output signal is pulled into low level, and is connected to by pin 18 in leakage control circuit 33.
Partial pressure mu balanced circuit 32 also includes the negative partial pressure mu balanced circuit 322 being connected with negative high voltage access interface 312, this negative point
Mu balanced circuit 322 is pressed to include the second diode D5, the second divider resistance R3, the second voltage-regulator diode D3 and negative-going signal conversion electricity
Road 323.The negative high voltage access interface 312 of second diode D5 negative pole connection high pressure access interface 31, its positive pole connection second
Divider resistance R3.Second diode D5 is connected to the second zener diode D3 by the second divider resistance R3 and negative-going signal is changed
The input of circuit 323.Second diode D5 is used for positive high_voltage isolation, prevents reverse current from puncturing subsequent conditioning circuit.Second is steady
Diode D3 negative pole ground connection is pressed, positive pole connects the second divider resistance R3.Negative-going signal change-over circuit 323 includes opto-coupler chip
IC2 and the 3rd relay.Opto-coupler chip IC2 switch terminals connect the coil K2-B of the 3rd relay and are grounded, opto-coupler chip IC2
Positive control end is grounded, and opto-coupler chip IC2 negative control end connects the second voltage-regulator diode D3 positive poles.When high-voltage signal is through second point
After piezoresistance R3 and the second voltage-regulator diode D3 voltage stabilizings, being converted to suitable drive signal makes opto-coupler chip IC2 work, so as to drive
The coil K2-B work of dynamic 3rd relay, closes the contact K2-A of the 3rd relay, after contact K2-A closures, 5V voltage
Darlington driving chip IC1 pin 1 is linked into by contact K2-A, Islington driving chip IC1 is worked, and make the pin 18 be
Low level.
First divider resistance R1 resistance value can be 1M, and resistance R2 resistance value can be 10 K, second point
Piezoresistance R3 resistance value can be with 50K.
The first input end of leakage control circuit 33 and Darlington driving chip IC1 output end（Pin 18）Connection, the
Two inputs are connected with control signal access interface 34.As shown in Fig. 2 earth detector of the present utility model is additionally provided with one
External connection end oral area J2, external connection end oral area J2 include four access interface, and one of access interface is control signal incoming end
Mouth 34, other three access interface are respectively used to be connected with 5V power supplys, 12V power supplys and ground.Control signal access interface 34 passes through
Pin 3 exports the control signal that the central controller of test machine exports to leakage control circuit 33.
Leakage control circuit 33 includes first relay, two the second relays, latching relay, LED alarm lamps
D2 and control relay K1 coil K1-B.
Coil K4-B, K5-B of two second relays are connected in parallel between 12V power supplys and control signal access interface 34.
When the central controller of test machine exports a control signal to control signal access interface 34, the coil of two second relays
K4-B, K5-B work, and make contact K4-A, K5-A closure being connected between high pressure access interface 31 and partial pressure mu balanced circuit, make
High pressure access interface 31 exports high-voltage signal into partial pressure mu balanced circuit 32, partial pressure mu balanced circuit 32 is started working.
The coil K3A-B of latching relay one end connection 12V power supplys, other end connection LED alarm lamp D2 positive pole,
The contact K3A-A connections that LED alarm lamp D2 negative pole passes through latching relay, when in contact, K3A-A is closed, latching relay
A self-locking circuit is formed with LED alarm lamp D2.
The coil K3B-B of first relay and the coil K3A-B of latching relay are connected in parallel.LED alarm lamp D2 is just
Pole connects coil K3B-B, the output end of negative pole connection partial pressure mu balanced circuit 32.The normally-closed contact K3B-A connections of first relay
The coil K1-B of 12V power supplys and control relay K1, coil K1-B are grounded by triode NPN, control relay K1 contact
It is arranged in the high input voltage circuit 10 of test machine.Normally-closed contact K3B-A, the control relay K1 coil of first relay
K1-B and triode NPN forms a control loop, and the control loop is used to control being opened or closed for control relay K1.
When the output end of partial pressure mu balanced circuit 32（That is Darlington driving chip IC1 pin 18）When exporting low level, LED
Alarm lamp D2 conductings are luminous, coil K3B-B and coil K3A-B work so that contact K3A-A is closed, and normally-closed contact K3B-A breaks
Open, coil K1-B is stopped, and control relay K1 contact disconnects, and the high voltage power supply supply of test machine is cut off.Contact
After K3A-A closures, LED alarm lamp D2 forms a self-locking circuit with coil K3A-B, contact K3A-A, keeps LED alarm lamp D2 normal
It is bright.
12V power supplys described above are the first power supply, and 5V power supplys are second source.
The work of the circuit diagram of the earth detector of the test machine of semiconductor devices of the present utility model as shown in Figure 2
Principle is as follows：
In the practical work process of test machine, high input voltage circuit 10 exports positive high voltage or negative to high-voltage output circuit 20
High pressure.
When high input voltage circuit 10 exports positive high voltage 1.1KV, earth detector detection is that disconnecting relay 22 is defeated
Go out the voltage signal at end 24.During detection, the controller of test machine sent to the second relay start detection control signal, second
The coil K4-B work of relay, closes contact K4-A.If disconnecting relay 22 is in short-circuit condition, 1.1KV high pressure
Accessed from positive high voltage access interface 311, high-voltage signal flows through the first diode D4, the first divider resistance R1 and the pole of the first voltage stabilizing two
After pipe D1, obtain suitable signal and input the pin for Darlington driving chip IC1 pin 1, making Darlington driving chip IC1
18 output low levels.When the level of Darlington driving chip IC1 pin 18 is low level, LED alarm lamp D2 is turned on and lighted
Alarm, while the coil K3A-B of the coil K3B-B of the first relay and latching relay works so that contact K3A-A is closed,
Normally-closed contact K3B-A disconnects, and coil K1-B is stopped, and control relay K1 contact disconnects, and the high voltage power supply of test machine supplies
It should be cut off.After contact K3A-A closures, coil K3A-B, the contact K3A-A of LED alarm lamp D2 and latching relay form one certainly
Lock loop, even if control relay K1 disconnects high pressure access interface 31 and does not have a control source, Darlington driving chip IC1 not works
Make, self-locking circuit can also make LED alarm lamp D2 keep Chang Liang.
When high input voltage circuit 10 exports negative high voltage 1.1KV, earth detector detection is that disconnecting relay 21 is defeated
Go out the voltage signal at end 23.During detection, the controller of test machine sent to the second relay start detection control signal, second
The coil K5-B work of relay, contact K5-A closures, if disconnecting relay 21 is in short-circuit condition, bears 1.1KV high pressure
Accessed from negative high voltage access interface 312, high-voltage signal flows through the second diode D5, the second divider resistance R3 and the pole of the second voltage stabilizing two
Suitable signal is obtained after pipe D3, opto-coupler chip IC2 is worked and the coil K2-B of the 3rd relay is worked, make the 3rd relay
The contact K2-A closures of device, 5V voltage access Darlington driving chip IC1 pin 1, make Darlington driving chip IC1 pipe
Pin 18 is low level, and electric current flows through the coil K3B-B, latching relay K3A-B and LED alarm lamp D2 of the first relay, makes report
Warning lamp D2 conductings and luminous alarm, while latching relay K3A-B works so that contact K3A-A is closed over the ground, makes self-locking relay
The coil K3A-B and contact K3A-A of device realize that self-locking keeps function.Meanwhile first relay coil K3B-B work, make often
Closed contact K3B-A is opened, and coil K1-B is stopped, and disconnects control relay K1 contact, and the high voltage power supply of test machine supplies
It should be cut off.
After the high voltage power supply of test machine is cut off, it can be ensured that the external circuit of test machine is not charged.When disconnecting relay 21
（Or disconnecting relay 22）When not short-circuit, the earth detector does not have control source, the earth detector not cutoff high
Input.
In another embodiment, earth detector of the present utility model also includes first manual button SB1 and second
The input of hand push button SB2, first manual button SB1 connection positive high voltages access interface 311 and partial pressure mu balanced circuit, second-hand
The input of dynamic button SB2 connection negative high voltages access interface 312 and partial pressure mu balanced circuit.Hand push button SB1 or hand push button SB2
When pressing, it can start to detect.
The utility model separately provides a kind of test machine, and the test machine includes test main frame, test probe and above-mentioned electric leakage
Detection means, test main frame include high input voltage circuit and high-voltage output circuit, and earth detector is used to detect High voltage output
The high pressure electric leakage of circuit, and control the disconnection for the relay for being used for cutoff high input in high input voltage circuit.
The utility model is by the way that the high-voltage signal in the high-voltage output circuit of the test machine of semiconductor devices is linked into Lou
In electric detection means, and high-voltage signal is converted to by suitable signal by partial pressure mu balanced circuit and is input to leakage control circuit
In, it is defeated by being used for cutoff high in the high input voltage circuit of the first Control test machine when leakage control circuit works
The control relay entered, thereby, when the disconnecting relay short circuit in the high-voltage output circuit of test machine, earth detector energy
High-voltage signal is enough detected, and is used for the control relay of cutoff high input by the first Control, makes control relay
Device disconnects, and to cut off the supply of the high voltage power supply of test machine, protects the safety of tester.
In addition, the utility model is also provided with LED alarm lamp in leakage control circuit, when the output of partial pressure mu balanced circuit is low
During level, LED alarm lamp conducting and luminous alarm, remind tester to pay attention to, prevent from getting an electric shock.
Preferable possible embodiments of the present utility model are these are only, not limit the scope of protection of the utility model, all fortune
Changed with the equivalent structure made by the utility model specification and accompanying drawing content, be all contained in the scope of protection of the utility model
It is interior.
Claims (10)
- A kind of 1. earth detector of the test machine of semiconductor devices, it is characterised in that including：High pressure access interface, electrically connected with the high-voltage output circuit of test machine；Partial pressure mu balanced circuit, its input electrically connect with the high pressure access interface, and the high pressure access interface is inputted High tension voltage carries out partial pressure and voltage stabilizing；Leakage control circuit, its input electrically connect with the output end of the partial pressure mu balanced circuit, the leakage control circuit The contact of first relay with for cutoff high input control relay coil formed a control loop, it is described control after The contact of electrical equipment is arranged in the high input voltage circuit of the test machine, when the partial pressure mu balanced circuit exports a level signal, First relay works and controls the control relay to disconnect.
- 2. the earth detector of the test machine of semiconductor devices according to claim 1, it is characterised in that the electric leakage Control circuit also includes LED alarm lamp, and the negative pole of the LED alarm lamp connects the partial pressure mu balanced circuit, the LED alarm lamp Positive pole connect the coil of first relay.
- 3. the earth detector of the test machine of semiconductor devices according to claim 2, it is characterised in that the electric leakage Control circuit also includes being used for keeping the latching relay of the LED alarm lamp constant conduction, the coil of the latching relay, The LED alarm lamp, the contact of latching relay form a self-locking circuit, the line that the LED alarm lamp passes through latching relay Circle is connected with the first power supply, the negative pole and ground of LED alarm lamp described in the contact portion of the latching relay, first relay The coil of device connects with the coils from parallel connection of coils of the latching relay.
- 4. the earth detector of the test machine of semiconductor devices according to claim 1, it is characterised in that the control Loop also includes triode, and the coil of the control relay is grounded by the triode, the coil of the control relay Pass through the power supply of contact portion first of first relay.
- 5. the earth detector of the test machine of semiconductor devices according to claim 1, it is characterised in that the electric leakage Detection means also includes control signal access interface, and the central controller of the control signal access interface and test machine is electrically connected Connect；The leakage control circuit also includes the second relay, one end and the control signal of the coil of second relay Access interface is connected, and the other end is connected with the first power supply, and the contact portion of second relay is in the high pressure access interface Between the input of the partial pressure mu balanced circuit, the central controller of the test machine passes through the control signal access interface Control signal is sent to second relay, to control the opening and closing of the contact of second relay.
- 6. the earth detector of the test machine of semiconductor devices according to claim 5, it is characterised in that described second Relay is two, and the high pressure access interface is two, respectively positive high voltage access interface and negative high voltage access interface, wherein The contact portion of one the second relay is between the input of the positive high voltage access interface and the partial pressure mu balanced circuit, separately The contact portion of one the second relay is between the input of the negative high voltage access interface and the partial pressure mu balanced circuit, and two The coils from parallel connection of coils of individual second relay is connected between the control signal access interface and first power supply.
- 7. the earth detector of the test machine of semiconductor devices according to claim 6, it is characterised in that the partial pressure Mu balanced circuit includes positive partial pressure mu balanced circuit, and the positive partial pressure mu balanced circuit includes the first diode, the first divider resistance, first Voltage-regulator diode and Darlington driving chip, the positive pole of first diode connect the positive high voltage access interface, and described the The negative pole of one diode connects the Darlington driving chip by first divider resistance, first zener diode Plus earth, the negative pole of first zener diode connect the input of the Darlington driving chip, and the Darlington drives The output end of dynamic chip connects the input of the leakage control circuit.
- 8. the earth detector of the test machine of semiconductor devices according to claim 7, it is characterised in that the partial pressure Mu balanced circuit includes negative partial pressure mu balanced circuit, and the negative partial pressure mu balanced circuit includes the second diode, the second divider resistance, second Voltage-regulator diode and negative-going signal change-over circuit；The negative pole of second diode connects the negative high voltage access interface, and the positive pole of second diode passes through described the Two divider resistances connect the negative-going signal change-over circuit；The negative-going signal change-over circuit includes opto-coupler chip and the 3rd relay, and the switch terminals of the opto-coupler chip pass through the 3rd The coil ground connection of relay, contact and the second source of the 3rd relay are connected and connect to the Darlington driving chip Input, positive control end connection ground, the opto-coupler chip negative control end of the opto-coupler chip connect second voltage stabilizing two Pole pipe positive pole, the second voltage-regulator diode negative pole ground connection.
- 9. the earth detector of the test machine of semiconductor devices according to claim 6, it is characterised in that the electric leakage Detection means also includes first manual button and the second hand push button, positive high voltage incoming end described in the first manual button connects The input of mouth and the partial pressure mu balanced circuit, negative high voltage access interface and the partial pressure described in the second manual button connects The input of mu balanced circuit.
- A kind of 10. test machine of semiconductor devices, it is characterised in that including test main frame, test probe and as claim 1 to The earth detector of the test machine of 9 any described semiconductor devices, the test main frame include high input voltage circuit and height Voltage follower circuit, the earth detector is used for the high pressure electric leakage for detecting the high-voltage output circuit, and controls the high pressure It is used for the disconnection of the relay of cutoff high input in input circuit.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720777634.7U CN206990742U (en) | 2017-06-30 | 2017-06-30 | The test machine and its earth detector of semiconductor devices |
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| CN201720777634.7U CN206990742U (en) | 2017-06-30 | 2017-06-30 | The test machine and its earth detector of semiconductor devices |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110297156A (en) * | 2019-08-15 | 2019-10-01 | 山东凌宝智能科技有限公司 | A kind of circuit and method by electrical leakage voltage detection electric leakage |
| CN113687219A (en) * | 2021-09-15 | 2021-11-23 | 上海华岭集成电路技术股份有限公司 | On-line detection method of test board |
-
2017
- 2017-06-30 CN CN201720777634.7U patent/CN206990742U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110297156A (en) * | 2019-08-15 | 2019-10-01 | 山东凌宝智能科技有限公司 | A kind of circuit and method by electrical leakage voltage detection electric leakage |
| CN110297156B (en) * | 2019-08-15 | 2024-04-05 | 山东凌宝智能科技有限公司 | Circuit and method for detecting electric leakage through electric leakage voltage |
| CN113687219A (en) * | 2021-09-15 | 2021-11-23 | 上海华岭集成电路技术股份有限公司 | On-line detection method of test board |
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