CN206940523U

CN206940523U - Anti-static device

Info

Publication number: CN206940523U
Application number: CN201720795167.0U
Authority: CN
Inventors: 周席仪; 陈宽政
Original assignee: MANZ CHINA SUZHOU Ltd
Current assignee: MANZ CHINA SUZHOU Ltd
Priority date: 2017-07-03
Filing date: 2017-07-03
Publication date: 2018-01-30
Anticipated expiration: 2027-07-03

Abstract

The utility model discloses a kind of anti-static device, including oral siphon road, outlet pipeline and enter air pipe, the outlet pipeline and oral siphon road and enter air pipe and be connected, the oral siphon road mixes with air pipe difference infusion fluid and gas is entered to outlet pipeline is interior, and the oral siphon road transfers out liquids and gases after mixing.The utility model is mainly used in during basal plate making process, under the use environment with ultra-pure water transfer pipeline, by reducing pure water impedance, so as to reduce the generation of electrostatic during processing procedure.

Description

Anti-static device

Technical field

A kind of antistatic technique is the utility model is related to, is realized more particularly, to a kind of by changing the impedance matter of pure water The device of antistatic.

Background technology

During basal plate making process produced, a large amount of ultra-pure waters are often needed to use, ultra-pure water has high impedance (i.e. low conduction in itself Degree) characteristic, electrostatic can be all produced in conveying friction and processing procedure in pipeline, electrostatic can cause the circuit on substrate to be damaged, and then Yield is caused to reduce, it is necessary to reduce impedance matter by special pure water modifying machine.

The existing substrate electrostatic that reduces need to rely on the special machine of manufacturer's production, and volume is larger, and breakdown maintenance need to rely on manufacturer.

Utility model content

The defects of the purpose of this utility model is to overcome prior art, there is provided a kind of anti-static device is pure by changing The impedance matter of water realizes antistatic.

To achieve the above object, the utility model proposes following technical scheme：A kind of anti-static device, including oral siphon Road, outlet pipeline and enter air pipe, the outlet pipeline and oral siphon road and enter air pipe and be connected, the oral siphon road and enter Air pipe distinguishes infusion fluid and gas to mixing in outlet pipeline, and the oral siphon road transfers out liquids and gases after mixing Go.

Preferably, in addition to the non-return valve that is arranged on air pipe.

Preferably, in addition to the liquid air mixer that is arranged in outlet pipeline.

Preferably, the one end on the oral siphon road is water inlet, and the other end communicates with entering air pipe and outlet pipeline.

Preferably, it is described enter air pipe one end be air inlet joint, the other end communicates with oral siphon road and outlet pipeline.

Preferably, described outlet pipeline one end and oral siphon road and enter air pipe and communicate, the other end is delivery port.

Preferably, the oral siphon road, outlet pipeline and the T-shaped distribution of air pipe is entered.

Preferably, both the oral siphon road, outlet pipeline are linearly distributed and communicated, it is described enter air pipe access both It is middle and vertical with both.

Preferably, the liquid of the oral siphon road input is pure water.

Preferably, it is described enter air pipe input gas be CO₂。

The beneficial effects of the utility model are：

1st, by being passed through carbon dioxide in pure water, the impedance of pure water is reduced, that is, prevents from conveying in pure water pipeline Friction and processing procedure in caused electrostatic, so as to avoid the circuit on substrate because electrostatic is damaged, improve substrate yield, for substrate system The more maintenance spaces of manufacturing apparatus outflow, reduce material cost.

2nd, the utility model being made by manufacturers or users production, without reducing pure water impedance by special pure water modifying machine, save The device space is saved, production cost is reduced and is facilitated with maintenance.

Brief description of the drawings

Fig. 1 is the structural representation of the utility model anti-static device.

Reference：

1st, oral siphon road, 2, water inlet, 3, enter air pipe, 4, air inlet joint, 5, outlet pipeline, 6, delivery port, 7, check Valve, 8, liquid air mixer.

Embodiment

Below in conjunction with accompanying drawing of the present utility model, the technical scheme of the utility model embodiment is carried out clear, complete Description.

A kind of anti-static device disclosed in the utility model embodiment, is mainly used in during basal plate making process, with super Under the use environment of pure water transfer pipeline, by reducing pure water impedance, so as to reduce the generation of electrostatic during processing procedure.

As shown in figure 1, the anti-static device includes oral siphon road 1, water inlet 2, enters air pipe 3, air inlet joint 4, goes out Water lines 5 and delivery port 6, the one end of oral siphon road 1 and outlet pipeline 5 and enter air pipe 3 and communicate, for infusion fluid to outlet pipe In road 5, the other end on oral siphon road 1 is arranged on for input ultra-pure water, water inlet 2 in the present embodiment, ultra-pure water enters water by this Mouth 2 enters in oral siphon road 1.

Enter the one end of air pipe 3 to communicate with outlet pipeline 5 and oral siphon road 1, air inlet joint 4 is arranged on into the another of air pipe 3 One end.Enter air pipe 3 to be used to input gas to outlet pipeline 5, there is provided the direction of gas conveying；Air inlet joint 4 enters for gas Enter position, for accessing corresponding source of the gas.In the present embodiment, the gas of input is CO₂, because of CO₂For insulating gas, mixed with pure water After conjunction, the impedance of pure water can be reduced, prevents the generation of electrostatic in pure water course of conveying.In practical application, it is not limited to use CO₂ Gas, other insulating properties gases are equally applicable to the utility model.

Preferably, in order to prevent ultra-pure water from being entered in course of conveying in air pipe 3, set on air pipe 3 is entered One non-return valve 7, non-return valve 7 are to prevent pure water from pouring in down a chimney to CO₂In pipeline.

The one end of outlet pipeline 5 communicates with entering air pipe 3 and oral siphon road 1, and delivery port 6 is arranged on the another of outlet pipeline 5 End.Outlet pipeline 5 is mixed with CO2 pure water for output and gone out, there is provided is mixed with the direction of CO2 pure water conveying.

Preferably, a liquid air mixer 8 is set in outlet pipeline 5, for accelerating the mixing of pure water and CO2.

In the present embodiment, oral siphon road 1, outlet pipeline 5 and enter 3 T-shaped distribution of air pipe.Specifically, oral siphon road 1, Both are linearly distributed and communicated outlet pipeline 5, and entering the access of air pipe 3, both are middle and vertical with both.Certainly, practical application In, three is not necessarily T-shaped distribution here, and the other shapes of formation are also applied for the utility model, as long as three can be realized Communicate.

The utility model drops low-impedance function by carrying out the optimization of structure to substrate processing equipment, and Can being made by manufacturers or users production, save the device space, reduce production cost with maintenance facilitate.

Technology contents and technical characteristic of the present utility model are had revealed that as above, but those skilled in the art still may be used A variety of replacements and modification without departing substantially from the utility model spirit can be made based on teaching of the present utility model and announcement, therefore, this Utility model protection scope should be not limited to the content disclosed in embodiment, and should include various without departing substantially from replacement of the present utility model And modification, and covered by present patent application claim.

Claims

1. a kind of anti-static device, it is characterised in that including oral siphon road, outlet pipeline and enter air pipe, the outlet pipeline With oral siphon road and entering air pipe and being connected, the oral siphon road and enter air pipe difference infusion fluid and gas to outlet pipeline Interior mixing, the oral siphon road transfer out liquids and gases after mixing.

2. anti-static device according to claim 1, it is characterised in that also include the check being arranged on air pipe Valve.

3. anti-static device according to claim 1, it is characterised in that the liquid gas for also including being arranged in outlet pipeline mixes Clutch.

4. anti-static device according to claim 1, it is characterised in that the one end on the oral siphon road is water inlet, separately One end communicates with entering air pipe and outlet pipeline.

5. anti-static device according to claim 1, it is characterised in that it is described enter air pipe one end be air inlet joint, separately One end communicates with oral siphon road and outlet pipeline.

6. anti-static device according to claim 1, it is characterised in that described outlet pipeline one end and oral siphon road and enter Air pipe communicates, and the other end is delivery port.

7. anti-static device according to claim 1, it is characterised in that the oral siphon road, outlet pipeline and enter tracheae The T-shaped distribution in road.

8. anti-static device according to claim 7, it is characterised in that both the oral siphon road, outlet pipeline are in straight Line be distributed and communicate, it is described enter air pipe access both among and it is vertical with both.

9. anti-static device according to claim 1, it is characterised in that the liquid of the oral siphon road input is pure water.

10. the anti-static device according to claim 1 or 9, it is characterised in that it is described enter air pipe input gas be CO₂。