CN206925459U - The system for keeping workpiece surface not have liquid to gather during laser processing of materials - Google Patents

Abstract

The utility model discloses a kind of system for keeping workpiece surface not have liquid to gather when laser processing of materials.Including the laser for launching laser beam；Liquid spray nozzle assembly；Nozzle assembly is configured to connect to liquid supply line to form liquid jet；For the optical element for coupling laser beam with liquid jet；Air injection modules；The air injection modules are connected to the liquid spray nozzle assembly；There is provided an air-flow to be used to surround the hydrojet, and run with hydrojet identical direction.Air-flow can remove the liquid of accumulation, so as to improve the efficiency of hydrojet guiding Laser Processing.Air-flow and liquid jet can project in two nozzles separated, can be with independent control gas flow characteristic, such as pressure or flow velocity.

Description

The system for keeping workpiece surface not have liquid to gather during laser processing of materials

Technical field

Liquid injection guiding technical field of laser processing is the utility model is related to, more particularly to is swashed using liquid injection guiding The system for keeping workpiece surface not have liquid to gather during light rapidoprint.

Background technology

Laser technology is processed suitable for various types of materials, is such as cut, and is drilled, and is welded, mark, engraving and ablation material Material.Almost all of material can be processed, such as metal, metal alloy, ceramics, diamond, rhinestone, and carbon fiber is blue Jewel, quartz, glass, plastics etc..In almost all cases, using condenser lens by Laser Focusing into a very small point On act on above workpiece, be processed with the energy for producing enough.Therefore workpiece must be accurate in whole process Ground is directed at Laser Focusing point.

The laser technology of liquid injection guiding, such as in patent EP 1940579B1 and U.S. 8859988B1, pass through one The laser coupled of focusing is entered a thin liquid spray by condenser lens.This coupling can be carried out in coupling unit.Coupling Can be included by closing unit, and condenser lens is placed in the side of can and closed with laser protection window.It is opposite in box Opposite side placement nozzle.Liquid is provided to coupling unit between window and nozzle, liquid sprays to form liquid from jet hole Beam.Enter in liquid spray and be reflected by internally reflective in the energy of focussing plane laser spots and be directed on workpiece.Now because adding Energy required for work is all identical in any length aspect of whole liquid spray, therefore this method eliminates accurate control The operation of workpiece distance processed.Any liquid with suitable light-transmitting capacity can be used for forming liquid spray.

In order to increase the length of liquid spray and nozzle and operating distance, auxiliary gas can be such as patent EP 1940579B1 Or it is incorporated into liquid injection described in patent EP 1833636B1.Auxiliary gas is penetrated in the form of jet flow as liquid The boundary layer of beam can reduce the resistance between liquid and surrounding air, so as to improve the laminar flow length of liquid jet.Therefore, liquid Body injection is to be surrounded to separate out coupling unit by identical outlet spray by auxiliary gas.In the inside of coupling unit, the auxiliary The flow direction of gas is perpendicular to liquid jet direction.For example, the auxiliary gas is that liquid spray is hit in horizontal plane direction, and Liquid spray is in the injection of the direction of vertical plane.Liquid spray is sprayed by auxiliary gas around from same outlet afterwards.

Fig. 1 shows the prior art of the liquid injection guiding laser beam formed with auxiliary gas.A kind of liquid injection The laser beam systems 100 of guiding can include a coupling unit 130 with nozzle 135, such as liquid, water 120, Ke Yiti Nozzle 135 is supplied to, and liquid jet 140 is formed in cavity 160 by the hole of coupling unit.Laser beam 110 can be focused Into in hydrojet 140, for example, by lens 115.Internal reflection can limit laser beam and keep in hydrojet.Liquid injection guiding swashs Light beam can directive body surface 190, the laser beam can complete to process by the excision of one or many materials.

Auxiliary gas 150 can be transported in the cavity 160 of coupling unit 130.Aid in gas 150 can be perpendicular to liquid The direction operation of jet 140, but do not intersect with hydrojet.Auxiliary gas 155 can surround hydrojet, and it is empty with the external world to reduce hydrojet Gas friction, and it is possible to expand the laminar flow length of liquid jet.The property of auxiliary gas may be selected that liquid jet can be optimized The gas of laminar flow length, such as the gas of low viscosity is presented during middle pressure.

Because auxiliary gas 150 and liquid jet 140 mix in same chamber 160, gas and liquid injection are aided in There may be influence between each other.For example, the pressure and flow behavior of auxiliary gas can be chosen to optimize liquid jet Laminar flow.Other operating conditions of auxiliary gas may have a negative impact to hydrojet.For example, the high pressure of auxiliary gas can shorten The laminar flow length of liquid jet, if auxiliary gas is higher pressure, liquid spray may be destroyed.

Improvement liquid injection laser technology in need, for example, during using liquid injection guiding Materialbearbeitung mit Laserlicht, Workpiece surface is kept not have liquid accumulation.

Utility model content

The purpose of this utility model is；For the drawbacks described above of prior art, there is provided one kind is guided using liquid injection The system for keeping workpiece surface not have liquid to gather during laser processing of materials.

A kind of liquid injection guiding laser system is provided, including：For launching the laser of laser beam；Fluid injector group Part；It is characterized in that：Nozzle assembly is configured to connect to liquid supply line to form liquid jet；For by laser beam and liquid The optical element of body jet coupling；Air injection modules；The air injection modules are connected to the liquid spray nozzle assembly；It is described Air injection modules include inner and outer wall；The inwall forms the first conduit, passes through for receiving liquid jet；It is described The inwall of outer wall and other parts forms the second pipe around the first pipeline；The outer wall includes a gas access to connect To gas supply pipeline with formed circulation second pipe gas injection；Penetrated by the air-flow of air injection modules around liquid Stream；Air is sprayed and liquid jet is configured to towards workpiece；The air injection modules inwall is constructed such that air-flow is basic It is upper parallel with liquid jet；The inwall is constructed such that the air-flow dissipates from the liquid jet.

Guiding laser system is sprayed in aforesaid liquid, the angle of divergence is less than 30 degree, and the inwall includes at least one hole, To form the fluid communication between the first pipeline and the second conduit to carry out vacuum compensation；One end of other part inwalls Outwards it is tapered.

In aforesaid liquid sprays guiding laser system, one end of the air injection modules outer wall is outwards tapered； The inwall is longer than outer wall.

In aforesaid liquid sprays guiding laser system, the inwall includes an entrance for being used to receive secondary air；, The gas feed line includes the compressed gas no more than 10 pa pressure, and the gas feed line road is used including a compressed gas 10 bars of maximum pressure.

In aforesaid liquid sprays guiding laser system, the gas flows substantially parallel with liquid jet, gas stream Dissipated from hydrojet；Wherein inwall includes at least one hole, to provide the fluid communication between the first pipeline and the second conduit.For Vacuum compensation.

A kind of liquid injection guiding laser system is provided, including：

A kind of laser for being used to launch laser beam；

It is a kind of to be used to supply the nozzle to form hydrojet from liquid；

For laser beam to be coupled to the optical element of liquid injection；

Air sprays support member；

The air injection support member is connected to the nozzle；Wherein air injection support member includes being used to connect gas confession Pipeline is answered to form the gas access of air-flow；Air injection nozzle；The middle air nozzle is constructed such that liquid jet passes through； The air nozzle is configured to from the injection of physically fluid partitioning and air-flow；The air injection nozzle includes gas stream Fluid connection channels between liquid injection, the air nozzle are substantially parallel with liquid jet with the air-flow.

In aforesaid liquid sprays guiding laser system, the air nozzle is constructed such that the gas stream from described Liquid jet dissipates；The air injection nozzle includes at least one hole, to provide the stream between the first conduit and the second conduit Body is connected for vacuum compensation；The gas supply pipeline includes the compressed gas no more than 10 pas.

System provided by the utility model, laser beam rapidoprint is guided using liquid injection, while keep the workpiece Surface does not have the method and system that liquid gathers.With applying an air-flow together with laser beam.Air-flow can be air-spray, and it is used To clear up the surface of liquid injection guiding laser beam processing object.It can blow to the working region of laser beam, so as to reduce by In the liquid that liquid injection is gathered on the surface of the workpiece.Air-spray is can be configured to when leaving gas nozzle as with certain Gas pressure and flowing velocity are to remove the liquid of body surface, such as the liquid that blows off is to expose workpiece surface.In addition, air is penetrated Stream is configurable to not disturb mutually with liquid jet, so as to reduce any influence on liquid jet to greatest extent.

In the following description, term air-spray can include gas stream, such as air stream or any other gas are such as The stream of nitrogen, argon gas or oxygen.Therefore, " air injection " word is not limited to penetrating for air in description of the present utility model Stream, in addition to the jet of gas or fluid, such as nitrogen stream, or the stream of aerosol.

Air-spray can be used for the hydrojet guiding laser beam for being with or without auxiliary gas.Air-spray can provide auxiliary Help the function that gas is unable to reach.For example, the concave surface that the auxiliary gas can not be removed, such as the cavity of accumulating liquid.Air is penetrated Stream, because pressure can be with separately adjustable, can blow off liquid on various working surfaces, for example, on concave surface or convex surface.Due to auxiliary Help gas and be to increase the laminar flow length of liquid jet, auxiliary gas can only in limited scope adjusting work pressure and stream Amount, therefore the liquid of workpiece surface can not be removed.Because secondary air and liquid jet are related, they are formed from each other The auxiliary gas of an angle of 90 degrees, this high pressure and big incidence angle can destroy liquid jet.

Air-spray of the present utility model can be configured to surround and liquid jet and run in the same direction, as and liquid Jet is parallel or substantially parallel.In the following description, the detailed description of parallel jet is by as typical air injection direction Example.But the utility model does not limit to and this, air-spray direction can be identical with liquid jet direction such as parallel, or The angle that person can also be formed between -90 to+90 degree, such as -15 degree (towards 15 degree of hydrojet) to+45 degree (separate liquid spray Penetrate 45 degree), including -10, -5,0,5,10,15,20,25, and 35 degree.Air-spray can each be distinguished with liquid jet Produce, for example, air-spray can be parallel while be again mutually divided them by the solid separator of coupling unit around the hydrojet From.Therefore, air-spray can independent control and operated for hydrojet without influenceing or influence minimum.Air-spray and liquid are penetrated During open system of wandering about as a refugee, for example, coupling unit, can be two separated outlets, such as one is central exit, for hydrojet, one Individual is outlet around, for jet.In some embodiments, auxiliary gas can be included, for example, liquid jet is by auxiliary gas Body wraps up, and aids in gas and liquid jet to merge in systems, such as coupling unit, then is sprayed from same outlet.

Air-spray in the utility model can allow the laser beam directly to handle material, because not had in workspace There is any liquid to produce potential interference.Air-spray can reduce liquid on the surface of the workpiece, as holding surface dry, with optimization Liquid injection guides the operating efficiency of laser beam.For example, by reducing the amount in surface liquid, can be by processing head export direction Minimum back reflections or elimination.Furthermore, it is possible to increase amount of the liquid spray in contact point liquid on surface, and without worrying liquid Know from experience and accumulate and have adverse effect on surface.

Air-spray in the utility model can be by removing because liquid jet is and caused liquid fog, or by liquid The drop of fog accumulation, so as to improve the operating effect of liquid injection guiding laser beam.For example, in the process of workpiece, liquid Mist can appear in the exit site of laser cutting head connection part.Liquid mist can accumulate and drop in droplets.Due to The surface tension of liquid, this drop can be pulled to, such as close to liquid spray.Liquid jet can moment in this case Interrupt, cause Laser Processing to be normally carried out.The outlet side of coupling unit can cause gravity by liquid using mechanical means Drop separates with liquid spray, but some drops remain able to be pulled to liquid spray, for example, for the strong liquid of surface tension Body.

Air-spray in the utility model can improve the liquid injection guiding Laser Processing inside 3 D workpiece chamber. During processing, such chamber can quickly fill with the liquid from liquid spray.Actual hydrojet reach workpiece surface it Before need through liquid permeable membrane.This liquid film can be several millimeters to several cm thicks.This liquid film can destroy liquid The barrier of body beam and external environment, and internal reflection of the laser in liquid spray needs this barrier.The kinetic energy of liquid jet It is not enough to keep the barrier of this liquid and environment.Air-spray can be optimized to remove the liquid film in cavity, at least exist The working region of hydrojet.Hydrojet laser is allowd to process the workpiece of three-dimensional structure, and it is unaffected.In order to reach this mesh , the pressure of liquid jet and the pressure of air-spray need independently to control.

Brief description of the drawings

There are the liquid injection guiding laser beam systems of the prior art of auxiliary gas composition shown in Fig. 1.

Fig. 2A-Fig. 2 B are the effects of the air injection shown in the utility model embodiment.

Fig. 3 A-3C are the effects of the air injection shown in the utility model embodiment.

Fig. 4 A-4C are the behaviour of the liquid injection guiding laser beam with air injection shown in the utility model embodiment Make.

Fig. 5 A-5C are the different configurations that the utility model embodiment shows air injection.

Fig. 6 A- Fig. 6 C are the different flow directions of the air injection shown in the utility model embodiment.

Fig. 7 A-7B are that the utility model embodiment shows the flow chart that laser beam is guided using liquid injection.

Fig. 8 is the flow chart that the utility model embodiment shows operating liquid injection guiding laser system.

Fig. 9 A-9C are that the utility model embodiment shows different air-spray schematic diagrames.

Figure 10 is that the utility model embodiment shows that liquid injection guides laser system, including with air injection nozzle Coupling unit.

Figure 11 A-11D are that the coupling unit for being used for liquid injection guiding Laser Processing shown in the utility model embodiment shows It is intended to.

Figure 12 is the flow chart that the utility model embodiment shows operating liquid injection guiding laser system.

Figure 13 is the flow chart that the utility model embodiment shows operating liquid injection guiding laser system.

Figure 14 A-14B are that the utility model embodiment shows the coupling list that laser system is guided for a kind of liquid injection Member.

Figure 15 is that the utility model embodiment shows the coupling unit schematic diagram laser machined for liquid injection guiding.

Figure 16 A-16B are that the utility model embodiment is shown using the liquid jet guiding laser beam sprayed with air Flow chart.

Figure 17 A-17B are that the utility model embodiment shows another coupling laser machined for liquid injection guiding Cell schematics.

Figure 18 is that the utility model embodiment shows another coupling unit laser machined for liquid injection guiding Schematic diagram.

Figure 19 A-19B are the flow charts that the utility model embodiment shows operating liquid injection guiding laser system.

Embodiment

Fig. 2A-Fig. 2 B are the effects of the air injection shown in the utility model embodiment.In fig. 2, liquid 290 can be with Gathered in a chamber 292 of workpiece 294.Laser beam 270 can the internal reflection in liquid spray 240.Due to the accumulation of liquid 290, air-liquid interfacial necessary to forming internal reflection is destroyed, laser beam is by diverging 277 into accumulating liquid 290.Diverging Laser beam can reduce laser towards workpiece surface be used for process energy.Such as cut.

As shown in Figure 2 B, air-spray 230 can be sprayed together with liquid injection 240.Air-spray can be gas Or the stream of gas/liquid mixture.Air-spray can remove accumulating liquid, such as liquid 295 is blown off into hydrojet with so that spraying The finished surface of liquid does not have liquid accumulation.Laser power, which can be reflected by internally reflective, to be reached on workpiece, so as to keep minimum or not have The loss of laser power.Air-spray can be independently of liquid jet, and pressure or flow adjustment range are very big, without influenceing liquid The operation of body jet.

In some embodiments, air injection can be configured to surround liquid jet.The air injection of encirclement can be clear Except the liquid in liquid jet and working laser beam area, the laser beam being embedded in liquid jet needs to touch the table of workpiece Face can just act.Blow off liquid when air-spray can be used for profoundly cutting, and such case liquid is easy to accumulate.

Fig. 3 A-3C are the influences that the utility model embodiment shows air injection.Fig. 3 A show the cavity of workpiece 394 The short side vertical cross-section diagram of otch 310 in 392.Fig. 3 B show 310 corresponding top view of otch.Fig. 3 C are shown along otch 310 corresponding viewgraph of cross-section, otch 310 is shown, hydrojet 340 reaches the bottom side of cavity 392, by cutting workpiece 394 material is to form otch 310.The air-spray 320 for surrounding hydrojet 340 is run along hydrojet 340, by liquid injection and laser The liquid of beam working region 345 blows off.Air-spray can even remove the liquid in otch 310, to expose workspace 345, Laser beam is enabled to reach workpiece surface, without being dissipated in hydrops.

In some embodiments, air-spray can use together with auxiliary gas.Auxiliary gas is configured that liquid can be optimized The laminar flow length of body jet, and jet is configured that the removing surface of workpiece can be optimized.Because it is difficult to prevented with auxiliary gas empty Chamber is flooded by liquid, because the auxiliary gas pressure of optimum state is also not enough to remove liquid from cavity.Aid in gas Situation, such as increase auxiliary gas pressure exceed best effort scope, can destroy or reduce strongly the length of liquid injection laminar flow.

In some embodiments, when carrying out material processing using liquid injection guiding laser, workpiece surface is kept not have There is liquid accumulation so that liquid injection directly reaches workpiece surface.It can be penetrated using one with the air of control pressure and flow Workpiece surface near beam impact liquid spray, to reduce or remove any liquid of accumulation on the surface.Air-spray can quilt Construct to reduce or eliminate any liquid injection interruption or splash, this injection is interrupted or splashing is due to surface tension and is pulled to Caused by the liquid mist drop of liquid spray.For example, with the liquid spray equidirectional and surrounding the air of the liquid spray The liquid mist drop can be attracted in air beam by beam.In addition, surrounding and parallel air beam can also assist Improve the laminar flow length of hydrojet.

Fig. 4 A-4C are the operations that the utility model embodiment shows the liquid injection guiding laser beam with air injection Schematic diagram.In Fig. 4 A, fluid supply 400, such as aqueous stream source, it is configured to produce a hydrojet 440.Laser beam can enter liquid In jet 440, it can irradiate body surface 490 and be processed, and such as cut object.Gas source 410, such as compression are empty Gas, gas or fluid source, it is configured to produce a gas beam 420.As discussed above, air injection is also referred to as One gas injection or fluid injection, including gas stream or gas/liquid mixture stream.Using separator 460 by liquid jet 440 and the separation of air injection 420, at least they are separated in the beginning that hydrojet and air spray.Dividing plate can to spray The respective independent control of liquid and air-spray, for example, the injection of the air of high pressure and high flow capacity can without or minimum influence hydrojet Operation.

As shown in Figure 4 B, a fluid supply 402 and gas source 412 can be two independent and separated units.For example, By a coupling unit to produce liquid injection 442, lasing light emitter is used to focus on laser beam to the liquid jet fluid supply 402 Neutralize and body surface 492 is directed into by liquid jet.Aid in source of the gas to may be selected to use, surround liquid in same outlet and penetrate Beam is simultaneously launched together.The parameter of auxiliary gas can be chosen to optimize the laminar flow length of liquid jet.Gas source can be with There is provided an air beam 422, can near hydrojet impacted object surface.

As shown in Figure 4 C, gas source 414 can be embedded into fluid supply but can be with independent operation, and air injection 424 can be with With liquid jet 444 in equidirectional operation.Therefore can be on a region impacted object surface close to liquid spray.

In certain embodiments, the parameter of air ejector 424 is selected to remove the liquid of body surface accumulation.Example Such as, the object with 3-dimensional size 494 has the chamber of a receiving liquid sometimes.Therefore the liquid in liquid injection beam holds very much Easily accumulate in this chamber, form the liquid film that can be hindered or disturb liquid jet, for example, destroying the liquid for carrying laser beam Post.Air-spray 424 can remove liquid film, and liquid 450 is blown off workspace 455.Air injection 424 is appointed it is possible thereby to remove The liquid of what accumulation, laser beam is guided to provide a suitable surface 414 for liquid.

Fig. 5 A-5C are the different configurations that the utility model embodiment shows air injection.System 500 can produce liquid Beam is to guide laser beam 540 towards body surface 590.System 500 can selectively produce auxiliary gas flow and surround liquid spray Penetrate guiding laser beam 540.The laminar flow for improving liquid injection can be optimized by aiding in the configuration of gas, and can be with liquid injection System 500 is left in same outlet.

Fig. 5 A, gas source 520 are desirably integrated into system 500 to produce air beam 530.Air injection 530 can be Identical direction, such as run parallel with liquid jet 540, and liquid jet 540 can be surrounded, formed same with hydrojet 540 The garden ring of the heart.Air injection 530 and hydrojet 540 can from respective outlet spray from system 500, for example, using liquid jet and Two single nozzles of jet, air nozzle is around liquid ejecting nozzle.The concentric character of hydrojet and air-spray can carry Configured for radial symmetric, so as to effectively improve the operation of liquid injection guiding laser beam.Concentric walls can be used to Air-spray 530 and liquid injection 540 are kept apart, at least air-spray 530 and liquid injection 540 leave system 500 it Before.Fig. 5 B and 5C show other options of jet.Air-spray can be configured in identical direction such as parallel to liquid injection. As shown in Figure 5 B, single air jet source 522 can be used for producing an air-spray 532 for liquid spray 540.Such as Fig. 5 C Shown, air jet source 524 is desirably integrated into system 500, and it can produce a parallel air-spray 534..Different Conduit can be used for separating jet 532/534 and hydrojet 540, at least before air-spray and liquid injection leave system 500 It is so.

In some embodiments, air-spray can optimize liquid injection guiding at an angle with liquid injection shape and swash The operation of light.In general, air injection can be constructed so that the position on air-spray striking work surface is in or leaned on The surface of the nearly liquid injection.Because air injection and liquid injection have potential interference after respective nozzle is left, Air-spray can select to dissipate from liquid jet.

Fig. 6 A- Fig. 6 C are the different flow directions of the air injection of the utility model embodiment.Fig. 6 A, due to workpiece 691 can close to placing, such as, short distance 651 (being less than 2 centimetres, less than 1 centimetre, or less than 0.5 centimetre) sprays to liquid Penetrate guiding laser system 601, air injection 631 can towards liquid injection beam 641 angle 0 to -20 spend between, or between Between 0 and -10 degree.On the direction of laser system to workpiece if air-spray towards liquid spray as shown in Figure 6A, then Angle between air-spray and liquid jet can be defined as negative angle.If workpiece is protrusion or flat, laser system Can be moved above with unrestricted in whole workpiece, short distance 651 can be used, now air nozzle can have low pressure and Low discharge, the operating parameter (such as pressure and flow) of gas source is adjustable to be sprayed with producing the air of low-pressure and low discharge.

As shown in Figure 6B, workpiece 692 can be placed a little further, for example, middle distance 652 (is approximately less than 6 centimetres, less than 2 lis Rice, or less than 1 centimetre) be arranged essentially parallel to liquid to liquid injection guiding laser system 602, the direction of air injection 632 and penetrate Stream 642, or deviate parallel direction and be less than 1 or 2 degree.If workpiece is flat, laser system is set to be advanced on whole workpiece And be not limited, can distance 652 in use.Can have middle pressure and flow apart from air injection for middle.For example, The operating parameter (such as pressure and flow) of gas source is adjustable to have middle pressure (such as less than 6 pas or less than 2 to produce Pa) and the injection of intermediate flow (such as less than 6 or less than 2 standard liters per minute) air.

As shown in Figure 6 C, workpiece 693 needs to place at a distance, such as, one remote 653 (1 centimetre is approximately more than, more than 6 Centimetre, or more than 10 centimetres) to liquid injection guiding laser system 603, the direction that air sprays 633 may exit off hydrojet 643 Direction, for example, between 0 and 30 degree or 0 to 45 degree between.On the direction of laser system to workpiece if air-spray from Liquid jet is outside, and at this moment the angle between air-spray and liquid jet can be defined as positive-angle, as shown in Figure 6 C.Such as When fruit workpiece has irregular three-dimensional surface, for example workpiece surface has the cavity of a depression, should use remote 653.It is right In remote 653, air injection pressure may need to increase, because injection remote 653 will also remove from a chamber simultaneously Liquid.For example, the operating parameter (such as pressure and flow) of gas source is adjustable, to produce, with high pressure, (such as larger than 10 pas are big In the pressure of 6 pas) and high fluidity (being greater than 10 or more than 6 standard liters per minute).High pressure and flow can be with potential The hydrojet of interference, such as when parallel or the laminar flow length of liquid jet can be shortened during towards hydrojet.

In some embodiments, the utility model discloses a kind of laser system of operating liquid injection guiding, including Produce the method and system of the individual air stream around hydrojet.Independent air-flow can be air-flow or containing gas and a kind of liquid The stream of mixture, such as aerosol stream.Independent air-flow can be configured it is independent with liquid jet, for example, in the work bar of wide scope The operation of hydrojet is not significantly affected under part.For example, the independence can have high pressure, such as can be in 10 pas or higher pressure Laminar flow length of the lower operation without significantly shortening liquid jet.Individual flow structure can configure a wall or air-flow and liquid Isolation between jet realizes, such as in the inside of coupling unit, so that gas jet and liquid jet can each divide Evolution is to operation, such as angle (for example, less than 30 degree) almost parallel or that formation is small.

Fig. 7 A-7B are the flow charts that the utility model embodiment shows operation hydrojet guiding laser beam.As shown in Figure 7 A, Operation 700 provides the laser beam being embedded in liquid injection, such as focuses the laser beam into liquid injection by a system. The system may be selected to include an auxiliary gas for optimizing hydrojet laminar flow.Liquid injection can be directed towards object and to touch object On surface.Operation 710 provides gas streams, such as air-spray on the surface of object.Air-flow is configured to blow off liquid from thing Body surface face.For example, the pressure and flow velocity of gas stream can set any liquid contacted liquid spray with object on surface to blow From.Air-flow can be configured not influence hydrojet, if do not intersected with hydrojet.Air-flow can be configured as independently of liquid injection, example Such as, adjustment operating parameter can not significantly affect liquid injection.

As shown in Figure 7 B, operation 730 sends the laser beam on directed towards object surface.Laser beam is guided by a liquid injection. Operation 740 provides gas stream directed towards object surface.Air-flow is configured as running in a same direction, is such as basically parallel to liquid Spray and do not intersect with liquid injection, and the liquid injection can be surrounded.Using separator so that gas jet and liquid Also keep being separated from each other while jet runs parallel, for example, gas stream and liquid flow are left from two independent nozzles respectively System.Flow parameter is chosen to blow off liquid body surface.In some embodiments, the utility model discloses make The system and method for the laser processing of materials guided with liquid injection.This method includes producing to be guided and around spray with one heart The air spray post of liquid.The system, which can be included in inside coupling unit, is divided air-spray and hydrojet using mechanical structure From.Air-spray passes through the vacuum influence for the outlet side for providing a small amount of air to assist liquid injection to overcome nozzle.

In some embodiments, the utility model discloses a kind of laser system of operating liquid injection guiding and side Method, including change the operating condition of air injection, for example, direction, pressure and flow.For example, for flat or sunk work Part, laser system can be run close to workpiece surface, to improve the power that workpiece surface is delivered to from laser.Jet direction can It is parallel with hydrojet, or can be towards hydrojet.Gas pressure can be, for example, less than 5 pas, less than 2 pas, or less than 1 pa with relatively low Pressure.Gas stream can also be low, is, for example, less than 5SLM (standard liter per minute), less than 2SLM, or less than 1SLM.

In some embodiments, different air injection nozzles can be used to different flow directions.For example, Air injection nozzle with parallel walls, such as wall can be used for producing parallel to liquid stream parallel to liquid jet flow direction Jet.Air nozzle with divergent wall, such as wall are separated towards outlet port, and the air that can be used to produce diverging is penetrated Stream, such as leave liquid jet.

Fig. 8 is the flow chart of the laser system of the utility model embodiment operating liquid injection guiding.In operation 800, work What the pit depth of part was to determine.Pit depth can be determined that the basal surface from a cavity reaches the workpiece highest face temperature The ultimate range at top.Basal surface can be the basal surface of the chamber of laser system processing.In some embodiments, design is cut Cut the size that depth is specifically contemplated that pit depth.Therefore, the bottom surface of basal surface, the both most deep space chamber of laser system processing, is arrived The highest face temperature of workpiece can be by the ultimate range as calculating.Operation 810 provides the laser system of a liquid injection guiding, Its liquid injection laminar flow length hydrojet bigger than pit depth is set.For example, using bigger than pit depth with laminar flow length Hydrojet laser system carry out workpieces processing.In general, the setting of the laser system is higher than the highest face temperature of workpiece, together When hydrojet can from the fluid injector of laser system coupling unit towards and reach the cavity basal surface of workpiece.

The pressure of the adjustment gas source of operation 820, is ejected into up to body surface with one air of formation and removes object table The liquid in face.In some embodiments, maximum pressure can be 10 pas or higher.The pressure of source of the gas can the pit based on workpiece The liquid-maintaining capacity of depth and/or workpiece surface is adjusted.It is, for example, less than 1 centimetre for example, if pit depth is small, Workpiece will not accumulate more liquid, such as, an inclined flat workpiece so that the easy draining in surface of liquid, one it is low Pressure, for example, being less than between 1 pa, such as 0.05 to 1 pa, or it can be used between 0.5 to 1 pa.If pit depth is big , for example, more than 0.5cm or 1 centimetre, because the presence workpiece of deep chamber can accumulate liquid, such as in the cavities.High pressure can be with It is used to remove the hydrops of liquid surface, for example, the liquid of hydrojet peripheral region is blown off.Whiff pressure can be less than 10 pas, Such as between 0.5 to 10 pas, or in 1 to 10 pa.

The regulation air of operation 830 is ejected into the direction of body surface, is disturbed with reducing with the liquid injection.Air-spray Angle can be based on workpiece pit depth and/or the liquid-maintaining capacity of workpiece be adjusted.The angle of air-spray can With by changing appropriate air nozzle, such as different types of air nozzle has different gas directions, such as parallel gas Body direction, from the gas direction of liquid injection diverging, or the gas direction assembled towards liquid injection.

Fig. 9 A-9C are that the utility model embodiment shows different air-spray schematic diagrames.Coupling unit can be constructed Spray from different conduits and pass through into liquid injection and air is allowed.For example, physically it can will guide leading for hydrojet The conduit separation of pipe and guiding air-spray.Therefore, air injection and liquid jet can merge and not have in the outlet of coupling unit There is any interference.For example, air injection and liquid jet can run parallel, or angle can be formed so that air sprays and liquid Body jet is in coupling unit to will not intersect on this segment distance between workpiece surface.

In some embodiments, the utility model discloses a kind of liquid injection guiding laser system for being used to handle workpiece System.Liquid injection guiding laser system may include the laser of a transmitting laser beam, and even same optical element, such as reflects Mirror and/or lens, for laser beam to be coupled with liquid environment.Liquid environment may include a component, to produce liquid jet. Laser beam can be coupled into the liquid jet and carry out internal reflection in the jet.One nozzle module can be connected to one Individual liquid feed line is used to form liquid jet.Liquid feed line may include fluid supply, such as water source or alcohol source, and this is one Kind pressure fluid can enter nozzle module.

The laser system of liquid injection guiding may include an air injection modules, and to produce gas stream, (it can be gas The flowing of body stream or gas/liquid mixture).Air-flow can be configured to remove the liquid injection guiding laser system working surface On liquid, such as the surface region around liquid jet.Due to liquid jet carrying of liquids, when liquid jet contacts workpiece table During face, some liquid can accumulate in workpiece surface.The liquid of accumulation can disturb the operation of the laser system of liquid injection guiding, The boundary condition of air-liquid interfacial is such as eliminated or changes, this can change the direction of laser beam.

Fig. 9 A, coupling unit 900 may include a window (not shown), nozzle assembly 910 and air injection modules 950. Nozzle assembly may include a hole to form liquid jet 940.Window can be configured to isolate the liquid jet from nozzle The dry environment of liquid environment caused by 940 and laser beam.

Air injection modules connect liquid in nozzle module, are penetrated for example, receiving the caused liquid from fluid injector module Stream 940, while the gas stream 930 that can be also formed around but be separated with liquid injection.For example, air injection modules 950 can So that including a double pipe structure, such as an inner tube 952 and outer tube 954, inner tube can form the first conduit 922, for receiving spray Liquid passes through.For example, inner tube can have hollow circle tube, the diameter of the hollow bulb is more than the liquid spray diameter passed through.It is hollow Barrel top can have a larger open to be used to connect the chamber 952 in fluid injector module.Hollow circular cylinder can have straight tube Portion is used to guide liquid injection to form laminar flow.

The inner and outer tubes of air injection modules can form the second conduit 926 around first conduit.Second leads Pipe can be configured as receiving gas stream, for example, outer tube may include the gas access for being connected to a gas supply pipeline. Gas stream from feeding pipe produces gas jet by second pipe.Gas jet can surround liquid injection.Air-flow 930, such as can be air-spray, it can be flowed with the same direction of liquid injection 940, for example, parallel to liquid jet 940. For example, the outer tube can be arranged such that the air-flow is substantially parallel with liquid jet.For example, outer tube can construct so that Gas is arranged essentially parallel to liquid jet, such as the outer surface of inner tube can construct and be arranged essentially parallel to liquid jet, so as to work as Direction when air-flow leaves air nozzle is also substantially parallel to liquid injection direction.Air-spray 930 can be in object table Liquid 995 blow off with so that liquid jet 940 may be made directly to body surface, without running into any liquid film in face 990.It is empty Gas jet can be produced by gas supply pipeline, and it can include the compressed gas that a pressure is less than or equal to 10 pas.Gas The pressure of body supply line is configured to can be with Independent adjustable relative to the liquid injection.

In some embodiments, inner tube can include at least one hole 923, with provide the first conduit and the second conduit it Between fluid passage.For example, a small amount of gas can enter the cavity 952 of nozzle assembly, with compensation because liquid jet is formed Vacuum.Other configurations can also be incorporated into cavity 952 using a single air-flow and carry out vacuum compensation.

In some embodiments, the end of inner tube 952 and/or outer tube 954 can be externally exposed in environment to profile It is tapered.For example, the end 965 of inner tube 952 forms an inclined plane or taper exterior surface, it can guide drop to leave spray Liquid 940.The end 960 of outer tube 954 can also form inclined plane or taper exterior surface so that air nozzle 930, which can guide, to be enclosed Liquid fog around liquid spray is away from hydrojet, so as to help to prevent liquid drop to be pulled to liquid spray.

In some embodiments, inner tube can be than outer pipe range.For example, conical surface 965 can protrude from conical surface 960.Alternatively, outer tube can also be longer than inner tube.For example, conical surface 960 can protrude past conical surface 965.

In some embodiments, inner tube can be configured so that the gas stream diverging or converge at liquid injection.Example Such as, the outer surface of inner tube can be the taper being outwardly away from from liquid injection, so as to air-flow can when leaving air nozzle shape Into the direction with one angle of divergence of liquid injection.The angle of divergence can be small less than 20 degree less than 25 degree less than 30 degree less than 45 ° In 15 degree, less than 10 degree, or less than 5 degree.In some embodiments, multiple sprays with different dispersion angles can be provided Mouth, it is easy to select the air nozzle of the appropriate angle of divergence.

In Fig. 9 B, the inner tube 952A of air injection nozzle can have outside taper, for example, taper inner tube 952A outer surfaces It can be adapted so that dispersion angle is presented in the air-spray 930A of outside and the liquid jet 940 of the inside.Inner tube 952A There can be a via intermedia to be used for liquid jet 940, there can be an annular channels to be used for jet 930A.Jet 930A can be with Flowed in the same direction with liquid injection 940, for example, being exhaled from liquid jet 940, the angle of divergence i.e. the circle Conical surface and the angle of liquid jet flow direction are smaller than 45 degree, are, for example, less than 10,20,30 or 40 degree.

As shown in Figure 9 C, inner tube 952B can have an inside conical by its shape, for example, conical inner tube 952B appearance Face can be constructed such that the air-spray 930B of the outside converges to the liquid jet 940 of the inside..Inner tube 952B can be with There is a via intermedia to be used for liquid jet 940, there can be an annular channels to be used for jet 930B.Jet 930B can be with liquid Body injection 940 is flowed in the same direction, for example, being assembled to liquid jet 940, convergent angle i.e. the trochoidal surface 45 degree are smaller than with the angle of liquid jet flow direction, is, for example, less than 10,20,30 or 40 degree.

Coupling unit can be configured to guiding jet using different.The end surface of coupling unit and air nozzle can Be it is flat or taper be used for discharge drop (for example, leaving hydrojet).Can have for air-spray of different shapes Conduit, as concentric tubes for parallel air spray, be bent outwardly conduit and outwards dissipated for air-spray.

In some embodiments, there is plug-in type air nozzle for workpieces processing the utility model discloses a kind of Liquid injection guiding laser system.Air nozzle plug-in unit may be disposed at a coupling unit and be used for liquid injection and air Jet separates.Insert has all styles of to change, and can produce different air injection structures.

Figure 10 is that the utility model embodiment shows that liquid injection guides laser system, and the system includes having air spray Penetrate the coupling unit of nozzle.Liquid injection guiding laser system may include a laser 1010, and for by laser beam and liquid The coupling unit 1000 that body injection is coupled.Coupling unit 1000 can include optical element, such as a window 1050 For liquid 1045 and laser system 1010 to be kept apart.Laser system 1010 includes laser beam, and it can be focused onto liquid, Such as partially liq or partially liq injection, so as to form internal reflection in hydrojet.

Coupling unit 1000 can include a nozzle 1060, and it can be arranged to produce towards the surface of workpiece 1090 Liquid jet, while also can be by laser coupled to the liquid jet.Such as, a fluid supply a kind of liquid can be provided 1045 arrive liquid inlet 1046.The liquid can form liquid jet 1040, for example, passing through nozzle or nozzle assembly 1060.Spray Nozzle assembly 1060 can include a chamber or cavity 1052 is used to stablize hydrojet.

Coupling unit may include air injection nozzle 1021, and it can lead to including an inner catheter 1022 for liquid injection Cross.Air nozzle 1021 is configured to hydrojet physically separate air-spray 1020, such as shielding liquid injection 1040 is not Do not influenceed by external action, such as shielding liquid injection 1040 by air injection 1020.Air injection nozzle can have a sky The shape of heart cylinder, the diameter of hollow space are more than the liquid injection diameter to cause liquid injection to pass through.Hollow cylinder top Portion can have a larger open to be used to connect the chamber 1052 in nozzle module.Hollow circular cylinder can have straight-tube portion to be used to draw Lead liquid injection and form laminar flow.Coupling unit may include air nozzle support member 1025, and it is also used as the master of coupling unit Body or support member.Air nozzle 1021 and air nozzle support member 1025 are collectively forming an outer catheter 1026, and it can be surrounded Inner catheter 1022.Gas or gas/liquid mixture 1024 can be provided to outer catheter 1026, such as pass through gas access 1027, to form air-spray 1020.Because air injection and liquid injection form separating physically by dividing plate, such as One wall, such as air nozzle 1021, air injection and liquid jet can be independent of one another, it means that can each have one wide The operating condition of scope, including the pressure of air injection and flow can be adjusted with wide scope and be unlikely to or little effect hydrojet simultaneously Operation.In addition, the direction of air injection can adjust, and it is such as outward-dipping so that air-spray dissipates from liquid injection, this When elevated pressures and flow air injection can not influence hydrojet.

In some embodiments, fluid injector 1060 can have a chamber 1052 in the outlet of nozzle, to optimize liquid Jet, for example, liquid injection can be stablized.Chamber 1052 can have low pressure, such as less than ambient exterior atmospheric pressure.Low pressure, Such as under vacuum, some turbulent flows can be produced when liquid jet is formed.

In some embodiments, the utility model discloses chamber of the gas to the fluid injector is provided, to compensate very Pneumatics power.The gas can be provided to from source of the gas, or from air-spray.For example, it can be dropped in the hole 1023 of air nozzle Low vacuum level, for example, the pressure in the region of increase fluid injector cavity 1052.Air-spray can be produced by gas supply pipeline Raw, it can include the compressed gas that a pressure is less than or equal to 10 pas.The pressure of gas supply pipeline is configurable to Relative to the liquid injection Independent adjustable.

In certain embodiments, one end 1070 of air injection nozzle can be outward-dipping to male-tapered, formation one Surface or conical surface, it can cause any drop to be fallen from away from the position of hydrojet 1040.Air nozzle support member One end 1072 can also form an outward-dipping surface or conical surface to male-tapered, it can cause any drop from Position away from hydrojet 1040 is fallen.Air nozzle can be more longer than air nozzle support member, for example, in air nozzle There can be a distance 1075. between end and the end of air nozzle support member.

Figure 11 A-11D are that the utility model embodiment shows that the coupling unit for liquid injection guiding Laser Processing is former Manage schematic diagram.Figure 11 A show the cross-sectional view of coupling unit.11B-11D shows the different air nozzles in coupling unit 1170,1172,1174 perspective view.Transparent window 1120 can be used to the liquid by laser beam 1110 and liquid injection 1140 Part keeps apart.Lens (not shown) can be used for focusing on laser beam 1110 in hydrojet.Fluid injector 1150 may be connected to window Mouth 1120, and a small gap is left, for receptive liquid, such as the water from fluid supply 1145.Among coupling unit There is one to be open for liquid outlet to produce liquid jet 1140.Nozzle is expanded in opposite other end to form a chamber 1152, the laminar flow of hydrojet 1140 can be improved.

Air injection nozzle 1170 is connected with fluid injector 1150 to form closing chamber 1152 so as to by hydrojet 1140 It is directed to outlet.Air nozzle 1170 can be externally formed with gas stream, and gas source 1135 produces gas stream by the air nozzle 1130.Air nozzle can surround liquid jet, and form an air-spray 1130 parallel to liquid jet direction.Therefore Air nozzle 1170 is configured to produce one independently of hydrojet 1140 while air-spray also parallel and around the hydrojet 1130.Air nozzle can form isolation between air-spray 1130 and hydrojet 1140, for example, hydrojet and air are injected in coupling The outlet for closing unit is two outlets being individually separated.Air nozzle can provide a kind of isolation so that air-spray can be with Individually control, such as control pressure and flow velocity, to reach optimal surface elimination effect, while do not influence the behaviour of liquid jet Make.

Different air nozzles is shown in Figure 11 B-11D.As shown in Figure 11 B, air injection nozzle 1170 can be vertical with one Outer surface, such as surface is parallel to liquid jet direction so that the angle of outer surface and hydrojet flow direction is about zero.Such as Shown in Figure 11 C, air injection nozzle 1172 can have vertical outside outer surface, for example, the direction shape of surface and liquid jet Into the angle of divergence so that the angle 1192 of outer surface and liquid jet flow direction is more than zero.Such angle direction, which to work as, to be hit Air-spray exhales from hydrojet when hitting body surface.Figure 11 D, air nozzle 1174 can have one it is perpendicularly inward Outer surface, for example, surface and liquid jet direction, which are formed, polymerize angle so that the angle of outer surface and liquid jet flow direction 1194 are less than zero.Such angle direction make it that air-spray converges at liquid injection when impacting object surface.Work as liquid During impinging jet body surface, the air-spray of convergence can be close to hydrojet, but not disturbs hydrojet.

The bottom 1157 of air nozzle can be male-tapered, for example, guiding remote drop of any drop from liquid injection Fall so as to least interference liquid injection.Similarly, the bottom 1159 of coupling unit 1155 can also be to male-tapered, for example away from spray The central portion that liquid passes through.

In some embodiments, air-spray 1130 can be constructed to attract or guide liquid fog to leave liquid injection 1140.For example, conical surface 1157 and 1159 pairs big drop are effective, but it is less effective to small drop, such as appear in cone The liquid mist on shape surface.And air-spray can guide liquid mist away from liquid injection, so as to prevent the accumulation of liquid mist and potential Destroy hydrojet operation.

Figure 12 is the flow chart of the laser system of the utility model embodiment operating liquid injection guiding.The supply of operation 1200 Liquid to nozzle module to form liquid jet, the hydrojet be configured to by formed by the inner tube of air injection modules One conduit.Operation 1210 focuses on laser beam, at least forms internal reflection in a part for liquid jet.The supply air-flow of operation 1220 To the second conduit to form air-spray, wherein, the second conduit is formed between the inner and outer tubes of the air injection modules, its Described in air-spray be configured to surround liquid jet, wherein the air-spray and liquid jet are directed toward workpiece.

Figure 13 is the flow chart that the utility model embodiment shows operating liquid injection guiding laser system.Operation 1300 Supply liquid and form liquid jet to nozzle, the hydrojet is configured to by the first conduit in air nozzle.Operation 1310 Focus on laser beam and at least form internal reflection in a part for liquid jet.The supply gas of operation 1320 flows to the second conduit to be formed Air-spray, wherein, second conduit is by being formed between the outside of air nozzle and the inner side of air nozzle support member.Its In, air injection is configured to surround liquid jet, wherein, the air injection nozzle sprays air and liquid injection Shield and, wherein, the air injection and liquid injection are directed toward workpiece.

Figure 14 A-14B are that the utility model embodiment shows the coupling guided for a kind of liquid injection in laser system Unit.Coupling unit 1401 can be the metal parts that numerical control milling makes.There is the taper for receiving laser beam at the top of it Entrance 1402.It is laser window 1403 below it.There is drilling between laser window 1403 and fluid injector 1404, liquid leads to Cross the gap that this drilling is filled between laser window 1403 and fluid injector 1404.Fluid injector 1404 is by one from coupling The support of reverse thread part 1406 for closing unit bottom installation is fixed.Between reverse thread part 1406 and fluid injector 1404 One fluid conduit systems shape insert 1407, such as air injection nozzle are installed.There is one to drill out with one heart on the insert Centre bore 1408, liquid injection 1409 flows through the centre bore, and is mechanically separated with air injection 1410.The air Injection 1410 is as caused by the independent drilling 1415 in coupling unit 1401.Mechanical separation mechanism inside coupling unit 1401 One is generated around liquid injection 1409 and concentric equidirectional annulus columnar gas injection 1410, liquid spray therein Penetrate and inside sprayed simultaneously below coupling unit outside for one with gas injection one.In addition, fluid conduit systems shape inserts The entrance of part 1407 is connected to the air injection that a drilling 1415 is used to produce in coupling unit, the shape of fluid conduit systems shape insert Shape is constructed such that the air injection 1410 and liquid injection 1409 are all same downwardly directions.

Both reverse thread part 1406 and fluid conduit systems shape insert 1407 are all convex or cone in exit.It is convex Shape or cone can be used for guiding the liquid mist of accumulation to be dripped from the place away from liquid injection 1409.Downward air injection 1410 as the annulus cylindricality barrier around liquid injection 1409, can be timely by the immediate vicinity of reverse thread part 1406 Liquid mist drop blow off.Hole 1411 above fluid conduit systems shape insert 1407 is used to balance the pressure in the chamber of fluid injector 1404 Power.

In some embodiments, air-spray can be used together with auxiliary gas.Auxiliary gas can optimize hydrojet layer Length, such as the stability of increase liquid jet are flowed, so that liquid jet is longer and stably.Auxiliary gas can surround liquid Body jet, produce, and can be sprayed in same outlet inside same chamber.Air-spray can handle body surface, Such as the liquid of any accumulation is removed from surface.Air-spray can also surround hydrojet (and auxiliary gas), and can be in coupling A single region in unit is closed to produce and project from different outlets make it that mutual interference is minimum.

Figure 15 is the schematic diagram that the utility model embodiment is used for liquid injection guiding laser system coupling unit.Transparency window Mouth 1520 can be used to keep apart the liquid portion of the drying nest of laser beam 1510 and liquid jet 1540.Lens (not shown) is used to focus the laser beam into liquid spray.Fluid injector 1550 may be coupled to window 1520, and leave One small gap is used to receive the liquid from fluid supply, such as water.The centre of fluid injector has a hole to be used to produce liquid Body sprays.The other end of nozzle forms a chamber 1552, and this chamber is used for the laminar flow conditions for improving hydrojet 1540.

Auxiliary gas flow 1580 can be introduced in cavity 1552, for example, coming from a source of the gas 1585.Secondary air 1580 can To flow to hydrojet beam, then surround liquid spray and together sprayed towards outlet.Auxiliary gas can adjust, for example, having Relatively low pressure and/or flow, to carry out the vacuum compensation in the chamber in time.Vacuum is due to the liquid injection in chamber 1552 Caused by pressure, this may influence hydrojet operation, such as cause unstable liquid injection.

Air nozzle 1570 may be connected to coupling unit, for example, forming a chamber 1552 and guiding hydrojet 1540 to outlet. The outside of air nozzle 1570 is shaped to that the jet 1530 from gas source 1535 can be received.Air nozzle can surround liquid Body jet, and receive the air-spray 1530 in a parallel direction.Therefore, it is flat can be configured as generation one for air nozzle Row is with circular cylindrical and independently of the air-spray 1530 of hydrojet 1540.Air nozzle can be in air-spray 1530 and hydrojet A solid portion is formed between 1540, so that liquid jet and air, which are injected in two separated nozzles, leaves coupling list Member.Air nozzle can form the separation of solid so that air sprays, such as independent control pressure and flow velocity, with up to To optimal surface cleaning effect, while the operation of liquid jet is not disturbed again.

As illustrated, there is air nozzle 1570 parallel outer surface to provide parallel air-spray, such as air is penetrated Flow and flowed with liquid jet in parallel direction.Other configurations can use, such as diverging or convergent outer surface, to provide diverging Or the air-spray assembled, air, which is injected in same direction, to be flowed, but is not parallel to liquid injection.

Figure 16 A-16B be the utility model embodiment show using air spraying liquid injection guide laser beam Flow chart.Figure 16 A, operation 1600 make liquid flow to a coupling unit to form liquid jet.Operation 1610 focuses on laser Beam is to the liquid jet, so as to form the laser beam of a liquid injection guiding.Run in the formation same direction of operation 1620 , such as parallel to the air-flow of liquid jet.Air-flow and liquid stream are isolated by solid portion.Air-flow is configured to removing liquid jet and connect Tactile surface.In certain embodiments, air-flow is configured to surround liquid jet, and is flowed with liquid jet identical direction It is dynamic.

Figure 16 B, operation 1630 sets an air injection nozzle on coupling unit, wherein the coupling unit is operable For forming liquid jet.Operation 1640 forms the laser beam guided by liquid injection.Operation 1650 forms one and penetrated with liquid Flow equidirectional, such as parallel air-flow.The air-flow is isolated by air nozzle with hydrojet.

In some embodiments, the utility model discloses a kind of method, laser system is guided when using liquid injection When carrying out material processing, workpiece surface is kept not have liquid accumulation.This method can use one with one heart and around liquid The annulus cylindrical air injection of injection.Air injection is guided by a fluidic structures causes and direction phase concentric with liquid jet Together, air is sprayed and kept apart with liquid jet by the fluidic structures from mechanical realization.Liquid jet and air injection are led to respectively Cross respective outlet and leave the coupling unit.During workpiece is ejected into, air injection liquid jet between every From (outside coupling unit) be also all after coupling unit is left with flow direction be always maintained at it is intact.The pressure of air injection Power can be with independent control and regulation, for example, the shape according to workpiece.Any gas be used as air injection, such as air or Clean dry air.Air injection can be operated for reducing liquid jet, such as water, and environmental gas as between air Dynamic friction.Air injection can be configured to avoid to drip because liquid fog accumulates and enter liquid jet.

In some embodiments, the utility model discloses a kind of device, when the laser system guided using liquid injection When carrying out material processing, workpiece surface is kept not have liquid accumulation.The device can include an air ejection mechanism, and it can be with Including replaceable air nozzle, it is located at the lower section of the fluid injector.Replaceable air nozzle can allow using not With the fluidic structures of length, to adapt to the processing request of each different workpieces.

Mechanical fluid structure can be configured as guiding air injection, and it is isolated with liquid injection.Mechanical fluid Structure can include one or more steam vents, so as to which air injection is connected into the fluid injector chamber, to be sprayed using air Vacuum in the compensated with air fluid injector chamber hit, the vacuum are due to that liquid injection pressure is sprayed less than air in coupling unit Caused by mouth pressure.Air is pulled to nozzle chambers by vacuum.

In some embodiments, all it is in exit both reverse thread part and air ejection mechanism in coupling unit Convex or cone, for guiding the liquid mist of accumulation from the place drippage away from centre-drilling hole and liquid injection.

In some embodiments, the cavity of coupling unit can form a vacuum for being less than outlet pressure, and this goes out Mouth flows through for liquid and forms liquid jet.Vacuum can influence the operation of liquid injection, such as cause unstable liquid Injection.In order to avoid the appearance of the vacuum below nozzle, path can be set with external environment condition UNICOM to balance pressure in the chamber.Example Such as, multiple vertically-oriented small bores can be made at the top of air nozzle, they spray air is connected with nozzle chambers.Bradawl The direction in hole can be between -45 ° to+45 ° relative to the angle of the normal air nozzle.So that air-spray is not strong Property processed is injected to nozzle chambers, and is merely possible to a passage, can be inhaled air using vacuum effect by the channel nozzle chamber Enter.

Figure 17 A-17B are another couplings for being used for liquid injection guiding laser system shown in the utility model embodiment Cell schematics.Figure 17 A show the sectional view of coupling unit.Figure 17 B show the saturating of air nozzle 1770 in coupling unit View.Transparent window can be used for isolating the liquid portion of the drying nest of laser beam and liquid jet 1740.Fluid injector 1750 may be connected to window 1720, and leave a small gap, for from fluid supply receptive liquid.In above the nozzle Between have one be open for liquid flow out and form liquid jet 1740, there is an expanded shape to be formed in following centre Cavity 1752, for improving the laminar flow of hydrojet 1740.

Air nozzle 1770 may be connected to fluid injector, and forms closing chamber 1752 and be directed to out hydrojet 1740 Mouthful.The shape design of the outer surface of air nozzle 1770 is into can receive the jet 1730 from gas source 1735.Air nozzle can To surround liquid jet, and produce the air-spray 1730 of a parallel direction.Air nozzle 1770 can have one or more Aperture 1775, air-spray 1730 is connected to chamber 1752.Can be with counter balance pocket and outside pressure differential, so as to reduce or disappear Except the vacuum in chamber.

As illustrated, air nozzle 1770 has parallel outer surface to provide parallel air-spray, such as air spray Penetrate in the direction flowing parallel to liquid injection.Other configurations can use, the outer surface for such as dissipating or assembling, to provide diverging Or the air-spray assembled, such as air injection runs in the same direction, but is not parallel to liquid injection.

Figure 18 is that the utility model embodiment shows another coupling unit laser machined for liquid injection guiding Schematic diagram.Transparent window can be used for isolating the liquid portion of the drying nest of laser beam and liquid jet 1840.Nozzle 1850 Window 1820 is may be connected to, and leaves a small gap, for receiving the liquid from fluid supply.In above the nozzle Between have one be open for liquid flow out and form liquid jet 1840, there is an expanded shape to be formed in following centre Cavity 1852, for improving the laminar flow of hydrojet 1840.

Auxiliary gas flow 1880 can be introduced in cavity 1852, for example, from a source of the gas.Auxiliary gas flow 1880 can flow To liquid jet, liquid jet is then surrounded and together towards output flow.Auxiliary gas can adjust, for example, with compared with Low pressure and/or flow so that can carry out timely vacuum compensation in the chamber.Vacuum is due to the liquid in chamber 1852 Spray caused by pressure, this may influence hydrojet operation, such as cause unstable liquid injection.

Air injection nozzle 1870 may be connected to fluid injector, and form a closing chamber 1852 and guiding hydrojet 1840 To outlet.Air nozzle can surround liquid jet, and receive the jet 1830 in equidirectional flowing, such as parallel direction. Therefore, air nozzle can be configured as producing a parallel and circular air injection 1830, and air injection is sprayed with liquid It is independent mutually to penetrate 1840.Air nozzle 1870 can have one or more apertures 1875, and it connects air-spray 1830 and chamber 1852, the hole 1875 can balanced chamber and outside pressure differential, so as to reduce or eliminate the vacuum in cavity area.

As illustrated, there is air nozzle 1870 parallel outer surface to provide parallel air-spray, such as air is penetrated Flow in the direction flowing parallel to liquid jet.Other configurations can also use, such as diverging or convergent outer surface, to provide hair The air-spray for dissipating or assembling, such as air injection are run in the same direction, but are not parallel to liquid jet.

Figure 19 A-19B are the flow charts that the utility model embodiment shows operating liquid injection guiding laser system. Figure 19 A, operation 1900 flows liquid into cavity area, then is sprayed from the outlet of cavity in the form of liquid jet.In hydrojet There is laser beam in portion.Operation 1910 utilizes the pressure in the fluid passage equilibrium chamber between chamber and air-flow.

In Figure 19 B, operation 1930 provides a kind of air injection nozzle to coupling unit.Coupling unit can be used to be formed Liquid jet.Operation 1940 forms the laser beam of a liquid injection guiding.Operation 1950 is formed for example parallel to liquid jet The air-flow in direction.Air-flow is isolated by air nozzle with hydrojet.Operation 1960 utilizes the fluid passage between coupling unit and air-flow Pressure in balanced coupling unit.

Claims (7)

1. the system for keeping workpiece surface not have liquid to gather during a kind of laser processing of materials, including：For launching laser beam Laser, liquid spray nozzle assembly；It is characterized in that：Nozzle assembly is configured to connect to liquid supply line and penetrated with forming liquid Stream；For the optical element and air injection modules for coupling laser beam with liquid jet；The air injection modules are connected to The liquid spray nozzle assembly；The air injection modules include inner and outer wall；The inwall forms the first conduit, is used for Liquid jet is received to pass through；The inwall of the outer wall and part forms the second pipe around the first pipeline；The outer wall includes One gas access, for be connected to gas supply pipeline with formed circulation second pipe gas injection；Sprayed by air The air-flow of module is around liquid jet；Air is sprayed and liquid jet is configured to towards workpiece；The air injection modules Inwall is constructed such that air-flow is parallel with liquid jet；The inwall is constructed such that the air-flow is penetrated from the liquid Stream diverging.

2. the system for keeping workpiece surface not have liquid to gather during laser processing of materials according to claim 1, the hair Dissipate angle and be less than 30 degree, the inwall includes at least one hole, to form the fluid communication between the first pipeline and the second conduit To carry out vacuum compensation；One end of the part inwall is outwards tapered.

3. the system for keeping workpiece surface not have liquid to gather during laser processing of materials according to claim 2, the sky One end of gas jet module outer wall is outwards tapered；The inwall is longer than outer wall.

4. the system for keeping workpiece surface not have liquid to gather during laser processing of materials according to claim 3, described interior Wall includes an entrance for being used to receive secondary air；The gas feed line includes the compressed gas no more than 10 pa pressure Body, the gas feed line road include the pressure of 10 pas of a compressed gas.

5. the system for keeping workpiece surface not have liquid to gather during laser processing of materials according to claim 4, the gas Body flowing is parallel with liquid jet, and gas stream dissipates from hydrojet；Wherein inwall includes at least one hole, with provide the first pipeline and Fluid communication between second conduit.

6. the system for keeping workpiece surface not have liquid to gather during a kind of laser processing of materials, including：

A kind of laser for being used to launch laser beam；

It is a kind of to be used to supply the nozzle to form hydrojet from liquid；

For laser beam to be coupled to the optical element of liquid injection；

Air sprays support member；

It is characterized in that：The air injection support member is connected to the nozzle；Wherein air injection support member includes being used to connect Gas supply pipeline is connect to form the gas access of air-flow；Air injection nozzle；The middle air nozzle is constructed such that liquid Jet passes through；The air nozzle is configured to from the injection of physically fluid partitioning and air-flow；The air injection nozzle Including the fluid connection channels between gas stream and liquid injection, the air nozzle and the air-flow are parallel with liquid jet.

7. the system for keeping workpiece surface not have liquid to gather during laser processing of materials according to claim 6, its feature It is：The air nozzle is constructed such that the gas stream dissipates from the liquid jet；The air injection nozzle bag At least one hole is included, is used for vacuum compensation to provide the fluid communication between the first conduit and the second conduit；The gas supply Pipeline includes the compressed gas no more than 10 pas.