CN206925096U - Dust collect plant - Google Patents

Dust collect plant Download PDF

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Publication number
CN206925096U
CN206925096U CN201720468346.3U CN201720468346U CN206925096U CN 206925096 U CN206925096 U CN 206925096U CN 201720468346 U CN201720468346 U CN 201720468346U CN 206925096 U CN206925096 U CN 206925096U
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CN
China
Prior art keywords
working cavity
collect plant
dust collect
shell
fan component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201720468346.3U
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Chinese (zh)
Inventor
许海渐
申凡平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nantong Excellent Semiconductor Co Ltd
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Nantong Excellent Semiconductor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Priority to CN201720468346.3U priority Critical patent/CN206925096U/en
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Publication of CN206925096U publication Critical patent/CN206925096U/en
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Abstract

The utility model discloses a kind of dust collect plant, and it includes:The working cavity (1) gone along with sb. to guard him by shell;The extraction fan component (2) being installed on working cavity top shell, its fan inlet scoop connect with working cavity;The disposal box (3) being arranged at below working cavity bottom shell, the outlet of the disposal box and extraction fan component.Dust collect plant provided by the utility model is simple for structure, easy to use.

Description

Dust collect plant
Technical field
Dust collecting technique field is the utility model is related to, more particularly, to a kind of dust collect plant.
Background technology
Generally require to avoid the media such as dust from adversely affecting product in semiconductor product process, so Dust-collecting equipment is used in semiconductor product process, still, traditional dust-collecting equipment is complicated, and use is more inconvenient.
Utility model content
The purpose of this utility model is to provide a kind of dust collect plant, and its is simple for structure, easy to use.
In order to solve the above technical problems, embodiment of the present utility model provides a kind of dust collect plant, it includes:By outer The working cavity (1) that shell is gone along with sb. to guard him, shell are provided with the cleaning door that can be opened and closed;It is installed on working cavity top shell On extraction fan component (2), its fan inlet scoop connects with working cavity;The dust being arranged at below working cavity bottom shell Case (3), the outlet of the disposal box and extraction fan component.
Compared with prior art, dust collect plant provided by the utility model is simple for structure, easy to use.
Further, the bottom of the disposal box is provided with Handleset (4).
Further, the extraction fan component is removably installed on the working cavity top shell.
Further, the extraction fan component is installed on the working cavity top shell by bolt.
Further, the working cavity is provided with pressure sensor, and the pressure sensor is connected to controller, the control Device is connected to the extraction fan component.
Further, the side wall of the working cavity is provided with transparent windows.
Brief description of the drawings
Fig. 1 is dust collect plant structural representation;
Fig. 2 is dust collect plant top view.
Embodiment
In order that technological means, creation characteristic, reached purpose and effect that the utility model is realized are easy to understand, under In conjunction with specific embodiments, the utility model is expanded on further in face.
Embodiment of the present utility model provides a kind of dust collect plant, and referring to shown in Fig. 1-2, it includes:Enclosed by shell The working cavity 1 formed is protected, places the product for treating dedusting in the working cavity, shell is provided with the work that can be opened and closed Door.The extraction fan component 2 being installed on working cavity top shell, its fan inlet scoop connect with working cavity, open this and take out Fan component then can carry out exhausting operation to working cavity, so as to which the materials such as the dust in working cavity be extracted out.It is arranged at Disposal box 3 below working cavity bottom shell, the outlet of the disposal box and extraction fan component, the disposal box are collected and taken out The media such as the dust that fan is extracted out.
Referring to Fig. 1, the bottom of the disposal box is provided with Handleset 4, and the Handleset is removably pacified by screw On the shell of disposal box.
In addition, the extraction fan component is removably installed on the working cavity top shell, for example, the exhausting Fan component is installed on the working cavity top shell by bolt.
It is as to further improvement of the utility model, the working cavity is provided with pressure sensor, the pressure Force snesor is connected to controller, and the controller is connected to the extraction fan component.
It is as to further improvement of the utility model, the side wall of the working cavity is provided with transparent windows, So as to allow staff intuitively to observe internal condition, so as to be worked accordingly.
It will be understood by those skilled in the art that the respective embodiments described above are to realize specific implementation of the present utility model Example, and in actual applications, can to it, various changes can be made in the form and details, without departing from spirit of the present utility model And scope.

Claims (5)

1. a kind of dust collect plant, it is characterised in that it includes:
The working cavity (1) gone along with sb. to guard him by shell, shell are provided with the cleaning door that can be opened and closed;
The extraction fan component (2) being installed on working cavity top shell, its fan inlet scoop connect with working cavity;
The disposal box (3) being arranged at below working cavity bottom shell, the outlet of the disposal box and extraction fan component;
The side wall of the working cavity is provided with transparent windows.
2. dust collect plant according to claim 1, it is characterised in that the bottom of the disposal box is provided with Handleset (4)。
3. dust collect plant according to claim 1, it is characterised in that the extraction fan component is removably installed in described On working cavity top shell.
4. dust collect plant according to claim 3, it is characterised in that the extraction fan component is installed on described by bolt On working cavity top shell.
5. dust collect plant according to claim 1, it is characterised in that the working cavity is provided with pressure sensor, institute State pressure sensor and be connected to controller, the controller is connected to the extraction fan component.
CN201720468346.3U 2017-04-30 2017-04-30 Dust collect plant Active CN206925096U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720468346.3U CN206925096U (en) 2017-04-30 2017-04-30 Dust collect plant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720468346.3U CN206925096U (en) 2017-04-30 2017-04-30 Dust collect plant

Publications (1)

Publication Number Publication Date
CN206925096U true CN206925096U (en) 2018-01-26

Family

ID=61352295

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720468346.3U Active CN206925096U (en) 2017-04-30 2017-04-30 Dust collect plant

Country Status (1)

Country Link
CN (1) CN206925096U (en)

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