CN206920358U - Stacked film detection machine - Google Patents
Stacked film detection machine Download PDFInfo
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- CN206920358U CN206920358U CN201720809585.0U CN201720809585U CN206920358U CN 206920358 U CN206920358 U CN 206920358U CN 201720809585 U CN201720809585 U CN 201720809585U CN 206920358 U CN206920358 U CN 206920358U
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Abstract
A kind of stacked film detection machine, including：Light source, for detecting light to stacked film transmitting to be detected；Multiple imaging devices, the imaging region of multiple imaging devices at least partly overlaps, the intersection of the imaging region can cover the stacked film to be detected, to receive the detection light through the stacked film transmission or reflection to be detected, the direction that multiple imaging devices receive detection light is different.Above-mentioned stacked film detection machine, including light source and multiple detection zones overlap imaging device, and multiple imaging devices are different to the imaging angle of same detection zone；Same detection zone, the stacked film detection machine of multi-angle, the detection light through the transmission or reflection of stacked film 400 of multi-angle can be received simultaneously, not only increase Detection accuracy, and artificial real-time adjustment is not needed, so as to avoid manually adjust caused by testing result it is unstable the problem of, while improve detection efficiency.
Description
Technical field
Stacked film defect detecting technique field is the utility model is related to, more particularly to a kind of stacked film detection machine.
Background technology
Stacked film is widely used in the every field such as optical element, semiconductor devices in recent years, the species of stacked film
And its application is also constantly expanding, but there may be the defects of impression, bright spot, bubble in stacked film.Stacked film into
In the detection process of product, the big detection camera in a pixel height, the visual field is typically installed on to the surface of stacked film finished product, detection
System is imaged and then analyzed to the surface of stacked film by camera；Because the different defects in stacked film have to light
There is different angles of reflection, and light often can also reflect through a tunic, to improve the accuracy rate of stacked film finished product detection, lead to
Often light source can be installed additional manually according to relevant position of the species of stacked film above stacked film finished product, and passed through in detection process
Manually adjust the angles and positions of light source.The defects of this stacked film detection method is：Testing result can because the experience by worker,
Skilled degree, tired degree etc. influence and it is inaccurate, and because in real time setting light source position and angle and caused by detection imitate
Rate is low；The Detection accuracy that single imaging angle also results in stacked film finished product is not high.
Utility model content
Based on this, it is necessary to for imaging angle Detection accuracy single in existing stacked film detection means it is not high,
Because testing result is unstable and the problem of efficiency is low caused by artificial participate in, there is provided a kind of stacked film detection of multi-direction detection
Machine.
A kind of stacked film detection machine, including：
Light source, for detecting light to stacked film transmitting to be detected；
Multiple imaging devices, the imaging region of multiple imaging devices at least partly overlap, the weight of the imaging region
The stacked film to be detected can be covered by closing part, to receive the detection light through the stacked film transmission or reflection to be detected
Line, the direction that multiple imaging devices receive detection light are different.
In one of the embodiments, the light source is arranged at the homonymy of stacked film, the imaging with the imaging device
Device receives the detection light reflected through the stacked film to be detected.
In one of the embodiments, the imaging device includes center imaging device and surrounding imaging device, the week
Enclose imaging device to be arranged at around the center imaging device, the surrounding imaging device receives the direction of detection light to institute
State the direction inclination that center imaging device receives detection light.
In one of the embodiments, the imaging axis of the center imaging device is perpendicular to flat where the stacked film
Face, the angle of the imaging axis of the surrounding imaging device and the imaging axis of the center imaging device is 35 ° to 55 °.
In one of the embodiments, the imaging axis of the center imaging device and the stacked film place to be detected
Plane intersection point for the stacked film to be detected circumscribed circle the center of circle.
In one of the embodiments, the center imaging device is one, and the surrounding imaging device is four, described
Surrounding imaging device annular centered on the center imaging device is uniformly distributed.
In one of the embodiments, the corresponding light source of each imaging device, each light source are sent
Detection light after the plane reflection where the stacked film to be detected enter it is corresponding with the light source it is described imaging dress
In putting.
In one of the embodiments, five light sources are respectively arranged at the bottom of five imaging devices.
In one of the embodiments, the imaging device can be along the axle of the plane where the stacked film to be detected
Line moves.
In one of the embodiments, the stacked film detection machine also includes analysis system, the analysis system with it is described
Imaging device connects, and the analysis system is used to handle the image that the imaging device obtains.
Above-mentioned stacked film detection machine, including light source and multiple detection zones overlap imaging device, multiple imaging devices
It is different to the imaging angle of same detection zone；Same detection zone, the stacked film detection machine of multi-angle, can be received simultaneously
The detection light through stacked film transmission or reflection of multi-angle, not only increases Detection accuracy, and do not need artificial reality
When adjust, so as to avoid manually adjust caused by testing result it is unstable the problem of, while improve detection efficiency.
Brief description of the drawings
Fig. 1 is the stacked film detection machine structural representation that the embodiment of the utility model one provides；
Fig. 2 is the stacked film detection machine structure of the main view that the embodiment of the utility model one provides；
Fig. 3 is the stacked film detection machine close-up schematic view that the embodiment of the utility model one provides.
Wherein：
100- imaging devices
110- centers imaging device
Imaging device around 120-
200- light sources
300- installing frames
310- frameworks
320- intermediate beams
400- stacked films
A- angles
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, by the following examples, and tie
Accompanying drawing is closed, stacked film detection machine of the present utility model is further elaborated.
It should be noted that when element is referred to as " being fixed on " another element, it can be directly on another element
Or there may also be element placed in the middle.When an element is considered as " connection " another element, it can be directly connected to
To another element or it may be simultaneously present centering elements.On the contrary, when element be referred to as " directly existing " another element " on " when,
In the absence of intermediary element.Term as used herein " vertically ", " horizontal ", "left", "right" and similar statement are
For illustrative purposes.Various different objects are drawn in the ratio for being easy to enumerate explanation in embodiment accompanying drawing, rather than by actual group
The ratio of part is drawn.
As shown in figure 1, the stacked film detection machine that the embodiment of the utility model one provides, mainly including multiple imaging devices
100 and light source 200, light source 200 is used for the transmitting detection light of stacked film 400 to be detected；The imaging of multiple imaging devices 100
Region at least partly overlaps, and the intersection of imaging region can cover stacked film 400 to be detected, so that multiple imaging dresses
Detection light of 100 receptions through the transmission or reflection of stacked film 400 to be detected is put, multiple imaging devices 100 receive detection light
Direction it is different.
Above-mentioned stacked film detection machine, including light source 200 and multiple detection zones overlap imaging device 100, multiple imaging dresses
The imaging angle for putting 100 pairs of same detection zones is different；Same detection zone, the stacked film detection machine of multi-angle, Ke Yitong
When receive the detection light through the transmission or reflection of stacked film 400 of multi-angle, not only increase Detection accuracy, and need not
Artificial real-time adjustment, so as to avoid manually adjust caused by testing result it is unstable the problem of, while improve detection effect
Rate.
As shown in figure 1, filled in the present embodiment using the method for the reflection detection light of stacked film 400, light source 200 with imaging
100 homonymies for being arranged at stacked film 400 to be detected are put, imaging device 100 receives the inspection through the reflection of stacked film 400 to be detected
Light-metering line.The method of detection light is reflected using stacked film 400, light source 200 and imaging device 100 are arranged at stacked film 400
The same side, this arrangement is simple in construction, and the installation of detection device can be completed in the side of stacked film 400.In others
In embodiment, light source 200 and imaging device 100 are respectively arranged at the both sides of stacked film 400 to be detected, now imaging device
100 receive the detection light transmitted through stacked film 400 to be detected；Or part imaging device 100 is arranged at light source 200 and treated
The same side of the stacked film 400 of detection, the imaging device 100 of another part are arranged at the opposite side of stacked film 400 to be detected,
In this case, part imaging device 100 receives the detection light through the reflection of stacked film 400 to be detected, another part into
As device 100 receives the detection light through the transmission of stacked film 400 to be detected.
Further, imaging device 100 includes center imaging device 110 and surrounding imaging device 120 in the present embodiment, surrounding
Imaging device 120 is arranged at around center imaging device 110, and surrounding imaging device 120 receives the direction of detection light in
The direction that heart imaging device 110 receives detection light tilts, the imaging area of surrounding imaging device 120 and center imaging device 110
Domain is partially overlapped, and in other embodiments, the imaging region of all imaging devices 100 is completely superposed.Will imaging
Device 100 is arranged in the way of center-surrounding, same region to stacked film 400 of realization that can be easy, multidirectional inspection
Survey scheme, surrounding imaging device 120 are arranged around center imaging device 110, are advantageous to the model as big as possible of imaging device 120 around
Detection light after the reflection that the reception center imaging device 110 enclosed is not received.
As shown in figure 3, the imaging axis of center imaging device 110 is imaged perpendicular to the plane where stacked film 400, surrounding
The imaging axis of device 120 is identical with the included angle A of the imaging axis of center imaging device 110, is 45 °；Center imaging device
110 are arranged at the surface of stacked film 400, coordinate and it is imaged imaging device 120 around axis angle identical, this imaging
The arrangement form of device 100 is more beneficial for being imaged especially the defects of its of stacked film 400.
Further, the imaging axis of center imaging device 110 and the intersection point of the plane where stacked film 400 to be detected are
The center of circle of the circumscribed circle of stacked film 400 to be detected, center imaging device is arranged above the center of circle of the circumscribed circle of stacked film 400
110 so that whole imaging device 100 is more uniformly imaged to the surface of stacked film 400.
As shown in Figures 1 and 2, center imaging device 110 is one, and surrounding imaging device 120 is four, surrounding imaging dress
Put 120 centered on center imaging device 110 annular be uniformly distributed, the projection of four surrounding imaging devices 120 in the horizontal plane
The distance of the projection of distance center imaging device 110 in the horizontal plane is identical, and two relative surrounding imaging devices 120 are with center
The imaging axis of imaging device 110 is distributed for axial symmetry；The form of this multiple imaging devices 100 of arrangement not only has preferable
Imaging effect, and its is simple in construction, cost of implementation is low.The total number of imaging device 100 can be with other embodiments
For four or six, center imaging device 110 can also be two or more quantity.
In the present embodiment, the corresponding light source 200 of each imaging device 100, the detection light that each light source 200 is sent
Enter after the plane reflection where stacked film 400 to be detected in imaging device 100 corresponding with light source 200, each imaging
The corresponding light source 200 of device 100 so that imaging device 100 becomes apparent to the imaging results of stacked film 400, is advantageous to carry
The high Detection accuracy to stacked film 400.
As shown in figure 1, five light sources 200 are respectively arranged at the bottom of five imaging devices 100, directly light source 200 is set
The bottom of imaging device 100 is placed in, eliminates special light source installation position so that the overall structure of stacked film detection machine is more
Simply；And due to around imaging device 120 centered on center imaging device 110 annular spread and surrounding imaging device 120
It is identical with the included angle A of the imaging axis of center imaging device 110 to be imaged axis, is 45 °, therefore be fixed on imaging device around
Four light sources 200 of 120 bottoms send the angle of the axis direction of detection light and the imaging axis of center imaging device 110
Also it is 45 °, the light source 200 for being fixed on the bottom of center imaging device 110 sends axis direction and the center imaging of detection light
The imaging diameter parallel of device 110.
Further, imaging device 100 can move along the axis of the plane where stacked film 400 to be detected, be easy into
As device 100 is focused to stacked film 400 so that imaging results are more clear, and the detection for improving stacked film detection machine is accurate
Rate.
The stacked film detection machine that the present embodiment provides also includes analysis system (not shown), and analysis system fills with imaging
100 connections are put, analysis system is used for the image for handling the acquisition of imaging device 100.
As shown in Figures 1 and 3, five imaging devices 100 are fixed on installing frame 300, and installing frame 300 includes rectangular in cross-section
Framework 310 and an intermediate beam 320, the both ends of intermediate beam 320 be fixed on two relative sides of rectangular box 310；One
Center imaging device 110 is fixed on the centre position of intermediate beam 320, and four surrounding imaging devices 120 are individually fixed in rectangle frame
The centre position of the four edges of body 310；Fixation of the imaging device 100 on installing frame 300 is realized by way of neck.Installation
Frame 300 can be realized by way of track or hoisting platform to be risen along the axis of the plane where stacked film 400 to be detected
Or decline, imaging device 100 is with the synchronizing moving of installing frame 300.
In second embodiment provided by the utility model, the section of framework 310 is circle.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope that this specification is recorded all is considered to be.
Embodiment described above only expresses several embodiments of the present utility model, and its description is more specific and detailed,
But therefore it can not be interpreted as the limitation to utility model patent scope.It should be pointed out that the common skill for this area
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (10)
- A kind of 1. stacked film detection machine, it is characterised in that including：Light source, for detecting light to stacked film transmitting to be detected；Multiple imaging devices, the imaging region of multiple imaging devices at least partly overlap, the coincidence part of the imaging region The stacked film to be detected can be covered by dividing, to receive the detection light through the stacked film transmission or reflection to be detected, The direction that multiple imaging devices receive detection light is different.
- 2. stacked film detection machine according to claim 1, it is characterised in that the light source is arranged at the imaging device The homonymy of the stacked film to be detected, the imaging device receive the detection light reflected through the stacked film to be detected.
- 3. stacked film detection machine according to claim 2, it is characterised in that the imaging device includes center imaging device Imaging device around, the surrounding imaging device are arranged at around the center imaging device, the surrounding imaging device The direction for receiving detection light receives the direction inclination of detection light to the center imaging device.
- 4. stacked film detection machine according to claim 3, it is characterised in that the imaging axis of the center imaging device hangs down Directly in the plane where the stacked film, the imaging axis of the imaging axis and the center imaging device of the surrounding imaging device The angle of line is 35 ° to 55 °.
- 5. stacked film detection machine according to claim 4, it is characterised in that the imaging axis of the center imaging device with The intersection point of plane where the stacked film to be detected is the center of circle of the circumscribed circle of the stacked film to be detected.
- 6. stacked film detection machine according to claim 4, it is characterised in that the center imaging device is one, described Surrounding imaging device is four, and surrounding imaging device annular centered on the center imaging device is uniformly distributed.
- 7. according to the stacked film detection machine described in claim any one of 2-6, it is characterised in that each imaging device is corresponding One light source, the detection light that each light source is sent are laggard through the plane reflection where the stacked film to be detected Enter in the imaging device corresponding with the light source.
- 8. stacked film detection machine according to claim 7, it is characterised in that five light sources are respectively arranged at five institutes State the bottom of imaging device.
- 9. stacked film detection machine according to claim 1, it is characterised in that the imaging device can be along described to be detected Stacked film where plane axis movement.
- 10. stacked film detection machine according to claim 1, it is characterised in that also including analysis system, the analysis system It is connected with the imaging device, the analysis system is used to handle the image that the imaging device obtains.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720809585.0U CN206920358U (en) | 2017-07-05 | 2017-07-05 | Stacked film detection machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720809585.0U CN206920358U (en) | 2017-07-05 | 2017-07-05 | Stacked film detection machine |
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| Publication Number | Publication Date |
|---|---|
| CN206920358U true CN206920358U (en) | 2018-01-23 |
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ID=61335605
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| Application Number | Title | Priority Date | Filing Date |
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| CN201720809585.0U Expired - Fee Related CN206920358U (en) | 2017-07-05 | 2017-07-05 | Stacked film detection machine |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110658201A (en) * | 2019-09-30 | 2020-01-07 | 苏州精濑光电有限公司 | Optical detection mechanism of diaphragm |
| CN112666168A (en) * | 2020-12-29 | 2021-04-16 | 尚越光电科技股份有限公司 | Rapid detection system for roll-to-roll surface of stainless steel substrate of CIGS battery piece |
-
2017
- 2017-07-05 CN CN201720809585.0U patent/CN206920358U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110658201A (en) * | 2019-09-30 | 2020-01-07 | 苏州精濑光电有限公司 | Optical detection mechanism of diaphragm |
| CN112666168A (en) * | 2020-12-29 | 2021-04-16 | 尚越光电科技股份有限公司 | Rapid detection system for roll-to-roll surface of stainless steel substrate of CIGS battery piece |
| CN112666168B (en) * | 2020-12-29 | 2022-08-05 | 尚越光电科技股份有限公司 | Rapid detection system for roll-to-roll surface of stainless steel substrate of CIGS battery piece |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180123 Termination date: 20200705 |
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| CF01 | Termination of patent right due to non-payment of annual fee |