CN206920194U - Silane gas sample control system - Google Patents
Silane gas sample control system Download PDFInfo
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- CN206920194U CN206920194U CN201720759362.8U CN201720759362U CN206920194U CN 206920194 U CN206920194 U CN 206920194U CN 201720759362 U CN201720759362 U CN 201720759362U CN 206920194 U CN206920194 U CN 206920194U
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Abstract
The utility model discloses a kind of silane gas sample control system, including sampling system, sampling system passes through PLC control system attended operation computer.The utility model uses total closed type, controlled by PLC control system, PC is operated, reduce the artificial danger for directly using sample operation, sampling when, purged with nitrogen, every time sampling before need purging, pressurize, displacement, purging, pressurize, vacuumize after the completion of gather again, the oxygen in pipeline is removed, prevents the oxygen in pipeline from carrying out being blended to produce danger with silane gas sample product.
Description
Technical field
A kind of silane gas sample control system is the utility model is related to, belongs to sampling experimental rig technical field.
Background technology
, it is necessary to carry out the collection under stable condition and qualitative point to silane gas in the practical operation of sampling experimental rig
Analysis, and the gatherer process of sample should not influence the operation of sampling system.Meanwhile the sample after collection is directly analyzed, with
Obtain the constituent of sample.In order to ensure the sample of collection is representative and noiseless to preceding system, gatherer process requirement
Voltage stabilizing, current stabilization.
In order to save the waste of silane gas, collection and analysis to silane gas have used the control of gap section.But silane
The sample of gas has certain danger, and silane gas, which meets oxygen, to burn, and substantial amounts of leakage can explode.
The content of the invention
The technical problems to be solved in the utility model is：Provide one kind avoid oxygen from being mixed with silane gas sample product,
The dangerous silane gas sample control system of reduction, when solving the sample of collection silane gas, a large amount of leakage chance oxygen can burn quick-fried
The problem of fried.
In order to solve the above-mentioned technical problem, the technical solution of the utility model there is provided a kind of silane gas sample product control system
System, including sampling system, sampling system include sample inlet, sample by PLC control system attended operation computer, sampling system
Import is respectively turned on analyzer mouth by the first pipeline, is set successively according to the flow direction of sample inlet to analyzer mouth on the first pipeline
There are switch valve, second check-valve, the first pneumatic operated valve, first filter, the first pressure-reducing valve, the 3rd check-valves, the 3rd pneumatic operated valve,
Eight pneumatic operated valves, first flowmeter, the second filter, pass through second on the first pipeline between the 3rd pneumatic operated valve and the 8th pneumatic operated valve
Pipeline connects drain, and the second pipeline is provided with safety valve, and pressure biography is connected between the second pipeline rear end and the 8th pneumatic operated valve
Sensor, recovery port is connected by the 3rd pipeline between the 3rd pneumatic operated valve and the 8th pneumatic operated valve, on the 3rd pipeline according to recovery port
The distance between by as far as being closely sequentially provided with the 7th pneumatic operated valve, the second pressure-reducing valve, second flowmeter, the 6th check-valves, its feature
It is, the first pipeline between the first described pneumatic operated valve and first filter connects the first helium import by the 4th pipeline,
On 4th pipeline first check-valve, the second pneumatic operated valve are sequentially provided with according to the first helium import to the flow direction of the first pipeline, the 3rd
Pneumatic operated valve connects the second helium import by the 5th pipeline, according to the stream of the second helium import to the 3rd pneumatic operated valve on the 5th pipeline
To the 4th check-valves, the 5th pneumatic operated valve is sequentially provided with, the first pipeline between the 8th pneumatic operated valve and first flowmeter passes through the 6th
Pipeline connects the second helium import, and being sequentially provided with the 5th to the flow direction of the first pipeline according to the second helium import on the 6th pipeline stops
Valve, the 9th pneumatic operated valve are returned, the first pipeline between the first pressure-reducing valve and the 3rd check-valves connects vacuum orifice by the 7th pipeline,
On 7th pipeline the 6th pneumatic operated valve, the 4th pneumatic operated valve, the second pipeline are sequentially provided with according to the flow direction of vacuum orifice to the first pipeline
The 7th pipeline that the front end of upper 7th pneumatic operated valve is connected between the 6th pneumatic operated valve, the 4th pneumatic operated valve by the 8th pipeline.
Preferably, the first described pipeline, the second pipeline, the 3rd pipeline, the 4th pipeline, the 5th pipeline, the 6th pipeline,
Seven pipelines, the 8th pipeline sample inlet, the first helium import, the second helium import, vacuumize in the sampling box of sealing
Mouth, drain, analyzer mouth, recovery port are located at the outside of sampling box, and the inflated with nitrogen in sampling box is additionally provided with sampling box
Nitrogen inlet and nitrogen outlet.
The utility model uses total closed type, is controlled by PLC control system, and PC is operated, and reduction manually directly uses sample
The danger of product operation, when sampling, purged with nitrogen, need purging, pressurize, displacement, purging, guarantor before sampling every time
Press, vacuumize after the completion of gather again, remove pipeline in oxygen, prevent the oxygen in pipeline mixed with silane gas sample product and
Produce dangerous.
Brief description of the drawings
Fig. 1 is the structural representation of sampling system；
Fig. 2 is a kind of schematic diagram of silane gas sample control system.
Embodiment
To become apparent the utility model, hereby with preferred embodiment, and accompanying drawing is coordinated to be described in detail below.
The utility model during the use between need the protection of nitrogen, be required for nitrogen before and after each sample collection,
Helium purge and pressurize, need to vacuumize pipeline before analysis, in order to avoid the danger that manual operation and silane gas are brought,
Whole system uses total closed type, controlled by PLC, and PC is operated.
The utility model is a kind of silane gas sample control system, as shown in Fig. 2 it includes sampling system, sampling system
Pass through PLC control system attended operation computer.As shown in figure 1, sampling system includes sample inlet, sample inlet passes through the first pipe
Road is respectively turned on analyzer mouth, on the first pipeline according to the flow direction of sample inlet to analyzer mouth be sequentially provided with switch valve MV-1,
Second check-valve CK-2, the first pneumatic operated valve XV-1, first filter F-1, the first pressure-reducing valve PR-1, the 3rd check-valves CK-3,
Three pneumatic operated valve XV-3, the 8th pneumatic operated valve XV-8, first flowmeter FI-1, the pneumatic operated valve XV-3 of second filter F -2, the three and the 8th
Drain is connected by the second pipeline on the first pipeline between pneumatic operated valve XV-8, the second pipeline is provided with safety valve RV-1, the
Pressure sensor PT-1, the 3rd pneumatic operated valve XV-3 and the 8th pneumatic operated valve are connected between two pipeline rear ends and the 8th pneumatic operated valve XV-8
Recovery port is connected by the 3rd pipeline between XV-8, on the 3rd pipeline according to the distance between recovery port by as far as closely setting successively
There are the 7th pneumatic operated valve XV-7, the second pressure-reducing valve PR-2, second flowmeter FI-2, the 6th check-valves CK-6, the first pneumatic operated valve XV-1
The first pipeline between first filter F-1 connects the first helium import by the 4th pipeline, according to first on the 4th pipeline
Helium import to the flow direction of the first pipeline is sequentially provided with first check-valve CK-1, the second pneumatic operated valve XV-2, the 3rd pneumatic operated valve XV-3
Second helium import is connected by the 5th pipeline, according to the flow direction of the second helium import to the 3rd pneumatic operated valve XV-3 on the 5th pipeline
The 4th check-valves CK-4, the 5th pneumatic operated valve XV-5 are sequentially provided with, between the 8th pneumatic operated valve XV-8 and first flowmeter FI-1
One pipeline connects the second helium import by the 6th pipeline, according to the flow direction of the second helium import to the first pipeline on the 6th pipeline
The 5th check-valves CK-5, the 9th pneumatic operated valve XV-9 are sequentially provided with, between the first pressure-reducing valve PR-1 and the 3rd check-valves CK-3
One pipeline connects vacuum orifice by the 7th pipeline, is sequentially provided with the 7th pipeline according to the flow direction of vacuum orifice to the first pipeline
6th pneumatic operated valve XV-6, the 4th pneumatic operated valve XV-4, the 7th pneumatic operated valve XV-7 front end is connected by the 8th pipeline on the second pipeline
The 7th pipeline between 6th pneumatic operated valve XV-6, the 4th pneumatic operated valve XV-4.
First pipeline, the second pipeline, the 3rd pipeline, the 4th pipeline, the 5th pipeline, the 6th pipeline, the 7th pipeline, the 8th pipe
Road located at sealing sampling box in, sample inlet, the first helium import, the second helium import, vacuum orifice, drain, point
Analyzer mouth, recovery port are located at the outside of sampling box, and the nitrogen inlet and nitrogen of the inflated with nitrogen in sampling box are additionally provided with sampling box
Gas exports.
The analysis of silane gas is semi-automatic collection sample analysis, and whole system is total closed type, is purged with nitrogen, adopted every time
Needed before sample purging, pressurize, displacement, purging, pressurize, vacuumize after the completion of gather again.The utility model is in use, specifically include
Following steps：
Step 1：When silane gas samples, the second pneumatic operated valve XV-2 is first turned on, the 3rd pneumatic operated valve XV-3, the 4th is pneumatic
Valve XV-4, the 8th pneumatic operated valve XV-8, the 7th pneumatic operated valve XV-7, whole pipeline is purged with helium, the time of purging is about
At 30 minutes；
Step 2：After having purged, start pressurize, close the second pneumatic operated valve XV-2, the 8th pneumatic operated valve XV-8, the 7th pneumatic operated valve
Whether XV-7, observation pressure sensor PT-1 pressure value change, pressure be considered as in the case where setting value is constant pressurize into
Work(, repeat pressurize and take an average value 10 times, as pressurize success value；
Step 3：Vacuumize, open the 6th pneumatic operated valve XV-6, all pipelines are vacuumized, observation pressure sensor PT-1
Pressure value changes, pressure is considered as success at -1；
Step 4：For safety, do not operate closely manually, but by operating computer PC control PLC control systems,
So as to control the implementation of sampling system.
Claims (2)
1. a kind of silane gas sample control system, including sampling system, sampling system passes through PLC control system attended operation electricity
Brain, sampling system include sample inlet, and sample inlet is respectively turned on analyzer mouth by the first pipeline, according to sample on the first pipeline
Product import to the flow direction of analyzer mouth be sequentially provided with switch valve (MV-1), second check-valve (CK-2), the first pneumatic operated valve (XV-1),
First filter (F-1), the first pressure-reducing valve (PR-1), the 3rd check-valves (CK-3), the 3rd pneumatic operated valve (XV-3), the 8th pneumatic operated valve
(XV-8), first flowmeter (FI-1), the second filter (F-2), the 3rd pneumatic operated valve (XV-3) and the 8th pneumatic operated valve (XV-8) it
Between the first pipeline on drain connected by the second pipeline, the second pipeline is provided with safety valve (RV-1), the second pipeline rear end
Pressure sensor (PT-1), the 3rd pneumatic operated valve (XV-3) and the 8th pneumatic operated valve (XV- are connected between the 8th pneumatic operated valve (XV-8)
8) recovery port is connected by the 3rd pipeline between, on the 3rd pipeline according to the distance between recovery port by as far as being closely sequentially provided with
7th pneumatic operated valve (XV-7), the second pressure-reducing valve (PR-2), second flowmeter (FI-2), the 6th check-valves (CK-6), its feature exist
In the first pipeline between described the first pneumatic operated valve (XV-1) and first filter (F-1) connects first by the 4th pipeline
Helium import, on the 4th pipeline according to the first helium import to the flow direction of the first pipeline be sequentially provided with first check-valve (CK-1),
Second pneumatic operated valve (XV-2), the 3rd pneumatic operated valve (XV-3) connect the second helium import by the 5th pipeline, on the 5th pipeline according to
Second helium import to the flow direction of the 3rd pneumatic operated valve (XV-3) is sequentially provided with the 4th check-valves (CK-4), the 5th pneumatic operated valve (XV-
5), the first pipeline between the 8th pneumatic operated valve (XV-8) and first flowmeter (FI-1) is entered by the 6th pipeline the second helium of connection
Mouthful, it is sequentially provided with the 5th check-valves (CK-5), the 9th gas according to the second helium import to the flow direction of the first pipeline on the 6th pipeline
Dynamic valve (XV-9), the first pipeline between the first pressure-reducing valve (PR-1) and the 3rd check-valves (CK-3) is connected by the 7th pipeline to be taken out
Vacuum port, the 6th pneumatic operated valve (XV-6), the 4th gas are sequentially provided with according to the flow direction of vacuum orifice to the first pipeline on the 7th pipeline
Dynamic valve (XV-4), on the second pipeline the front end of the 7th pneumatic operated valve (XV-7) by the 8th pipeline connect the 6th pneumatic operated valve (XV-6),
The 7th pipeline between 4th pneumatic operated valve (XV-4).
2. a kind of silane gas sample control system as claimed in claim 1, it is characterised in that described the first pipeline, second
Pipeline, the 3rd pipeline, the 4th pipeline, the 5th pipeline, the 6th pipeline, the 7th pipeline, the 8th pipeline are located at the sampling box of sealing
Interior, sample inlet, the first helium import, the second helium import, vacuum orifice, drain, analyzer mouth, recovery port are located at and adopted
The outside of sample case, the nitrogen inlet and nitrogen outlet of the inflated with nitrogen in sampling box are additionally provided with sampling box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720759362.8U CN206920194U (en) | 2017-06-27 | 2017-06-27 | Silane gas sample control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720759362.8U CN206920194U (en) | 2017-06-27 | 2017-06-27 | Silane gas sample control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206920194U true CN206920194U (en) | 2018-01-23 |
Family
ID=61322812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720759362.8U Active CN206920194U (en) | 2017-06-27 | 2017-06-27 | Silane gas sample control system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206920194U (en) |
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2017
- 2017-06-27 CN CN201720759362.8U patent/CN206920194U/en active Active
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