CN206899543U - Silicon single crystal rod slice getting device end to end - Google Patents
Silicon single crystal rod slice getting device end to end Download PDFInfo
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- CN206899543U CN206899543U CN201720448708.2U CN201720448708U CN206899543U CN 206899543 U CN206899543 U CN 206899543U CN 201720448708 U CN201720448708 U CN 201720448708U CN 206899543 U CN206899543 U CN 206899543U
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- single crystal
- silicon single
- crystal rod
- getting device
- slice getting
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Abstract
The slice getting device, including connected sucker and vacuum elements end to end of silicon single crystal rod disclosed in the utility model, negative pressure is formed in chuck surface using vacuum elements, so as to adsorb oxygen carbon test piece.Silicon single crystal rod of the present utility model end to end slice getting device solve the problems, such as it is easily damaged when existing silicon single crystal rod head and afterbody clamping are cut.Slice getting device forms negative pressure to silicon single crystal rod of the present utility model using air extractor in chuck surface end to end, so as to which oxygen carbon is tested into piece absorption on sucker using air pressure, realizes the safe cutting of oxygen carbon test piece and takes piece to work.
Description
Technical field
The utility model belongs to monocrystalline silicon machining technology field, and in particular to a kind of silicon single crystal rod takes on chip end to end
Put.
Background technology
Silicon rod is needed to carry out slicing treatment using cutter device after the completion of drawing, and existing Buddha's warrior attendant line cut-off machine is being cut
After crystal bar, to be removed on silicon rod head and tail position cutting monocrystalline silicon piece and go to be detected as oxygen carbon test piece, and
By the silicon chip surface product as oxygen carbon test piece cut is big, thickness of thin, when being cut under existing technical conditions after clamping
It is very easy to cause oxygen carbon test piece damaged.
Utility model content
The purpose of this utility model is to provide a kind of silicon single crystal rod slice getting device end to end solve existing silicon single crystal rod
The problem of head and afterbody clamping are easily damaged when cutting.
Technical scheme is used by the utility model:Silicon single crystal rod slice getting device end to end, including connected sucker and take out
Pneumatic module, negative pressure is formed in chuck surface using vacuum elements, so as to adsorb oxygen carbon test piece.
The characteristics of the utility model, also resides in,
Vacuum elements are vavuum pump.
Also include being used for the controlling switch for controlling the vacuum elements work.
The beneficial effects of the utility model are:Slice getting device solves existing list to silicon single crystal rod of the present utility model end to end
The problem of crystal silicon club head and afterbody clamping are easily damaged when cutting.Slice getting device utilizes silicon single crystal rod of the present utility model end to end
Air extractor forms negative pressure in chuck surface, so as to adsorb oxygen carbon test piece on sucker using air pressure, realizes that oxygen carbon is tested
The safe cutting of piece and piece is taken to work.
Brief description of the drawings
Fig. 1 is the structural representation of silicon single crystal rod of the present utility model slice getting device end to end.
In figure, 1. suckers, 2. air extractors, 3. controlling switches.
Embodiment
The utility model is described in detail with reference to the accompanying drawings and detailed description.
The structure of silicon single crystal rod provided by the utility model slice getting device end to end is as shown in figure 1, including the connected He of sucker 1
Vacuum elements 2, negative pressure is formed on the surface of sucker 1 using vacuum elements 2, so as to adsorb oxygen carbon test piece.Example, pumping group
Part 2 can be vavuum pump.
Also include being used for the controlling switch 3 for controlling vacuum elements 2 to work.
In use, can by silicon single crystal rod of the present utility model, slice getting device is fixed on band saw shear end to end, also may be used
So that it is individually fixed.The head for the silicon single crystal rod that Buddha's warrior attendant line cut-off machine is scaled off and afterbody are placed on sucker position, open
Controlling switch 3, negative pressure is formed by the head of silicon single crystal rod or afterbody absorption in sucker 1 on the surface of sucker 1 using vacuum elements 2
On, knife is opened and cut using band saw shear according to the thickness of taken oxygen carbon detection lug;After cutting, it will first exit, stop with saw
Saw, is then shut off controlling switch 3, and the absorption affinity on sucker 1 is eliminated, and oxygen carbon detection lug is taken out from board and sends to detection,
Completing silicon single crystal rod, silicon chip takes the piece to work end to end.
Claims (3)
1. silicon single crystal rod slice getting device end to end, it is characterised in that including connected sucker (1) and vacuum elements (2), utilize pumping
Component (2) forms negative pressure on sucker (1) surface, so as to adsorb oxygen carbon test piece.
2. silicon single crystal rod as claimed in claim 1 slice getting device end to end, it is characterised in that the vacuum elements (2) are vacuum
Pump.
3. silicon single crystal rod as claimed in claim 1 or 2 slice getting device end to end, it is characterised in that also include being used for controlling described
The controlling switch (3) of vacuum elements (2) work.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201720448708.2U CN206899543U (en) | 2017-04-26 | 2017-04-26 | Silicon single crystal rod slice getting device end to end |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201720448708.2U CN206899543U (en) | 2017-04-26 | 2017-04-26 | Silicon single crystal rod slice getting device end to end |
Publications (1)
Publication Number | Publication Date |
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CN206899543U true CN206899543U (en) | 2018-01-19 |
Family
ID=61291391
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201720448708.2U Active CN206899543U (en) | 2017-04-26 | 2017-04-26 | Silicon single crystal rod slice getting device end to end |
Country Status (1)
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CN (1) | CN206899543U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110435026A (en) * | 2019-08-11 | 2019-11-12 | 赫晓苓 | A kind of photovoltaic slice device that can cut conversion and break-resistance in real time |
CN112497534A (en) * | 2020-11-30 | 2021-03-16 | 宇泽半导体(云南)有限公司 | Sampling method of single crystal oxygen sample wafer |
-
2017
- 2017-04-26 CN CN201720448708.2U patent/CN206899543U/en active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110435026A (en) * | 2019-08-11 | 2019-11-12 | 赫晓苓 | A kind of photovoltaic slice device that can cut conversion and break-resistance in real time |
CN110435026B (en) * | 2019-08-11 | 2021-06-04 | 安徽伟迈信息技术有限公司 | Photovoltaic section device capable of cutting, converting and preventing breakage in real time |
CN112497534A (en) * | 2020-11-30 | 2021-03-16 | 宇泽半导体(云南)有限公司 | Sampling method of single crystal oxygen sample wafer |
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