CN206894985U - A kind of device for quickly elevating temperature - Google Patents

A kind of device for quickly elevating temperature Download PDF

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Publication number
CN206894985U
CN206894985U CN201720648204.5U CN201720648204U CN206894985U CN 206894985 U CN206894985 U CN 206894985U CN 201720648204 U CN201720648204 U CN 201720648204U CN 206894985 U CN206894985 U CN 206894985U
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CN
China
Prior art keywords
plasma chamber
reaction unit
water pump
circulation water
thermal medium
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Active
Application number
CN201720648204.5U
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Chinese (zh)
Inventor
郑志伟
廖文晗
陈磊
李志华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhuhai Hengge microelectronics equipment Co.,Ltd.
Original Assignee
Zhuhai Double Power Hi Tech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN201720648204.5U priority Critical patent/CN206894985U/en
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Publication of CN206894985U publication Critical patent/CN206894985U/en
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Abstract

The utility model discloses a kind of device for quickly elevating temperature, including:Plasma chamber, electrode is provided with the plasma chamber body, the plasma chamber is connected with thermal medium reaction unit and cold media reaction unit respectively, and first circulation water pump and the first magnetic valve are provided between the plasma chamber and the thermal medium reaction unit;Second circulation water pump and second solenoid valve are provided between the plasma chamber and the cold media reaction unit.The structure is by setting thermal medium reaction unit, cold media reaction unit, first circulation water pump and second circulation water pump, when needing heating, second solenoid valve and second circulation water pump are closed, first magnetic valve and first circulation water pump are opened, so that thermal vector enters plasma chamber and carries out heat temperature raising, plasma chamber is heated up in the form of ionizing simultaneously, is effectively shortened the heating-up time, is improved the production efficiency of equipment.

Description

A kind of device for quickly elevating temperature
Technical field
Plasma apparatus technical field is the utility model is related to, especially, is related to a kind of device for quickly elevating temperature.
Background technology
With the continuous progress of science and technology, the application of plasma in daily life is also more and more extensive, prior art In, plasma machine heating mode mainly carries out electric reason with electrode and gas, and produces plasma and heated up, still, this Mode programming rate is slow, and operating efficiency is low.
Utility model content
The utility model purpose is to provide a kind of device for quickly elevating temperature, to solve plasma machine heating speed in the prior art Spend slow technical problem.
To achieve the above object, the utility model provides a kind of device for quickly elevating temperature, including:Plasma chamber, described etc. Electrode is provided with ion chamber body, the plasma chamber is connected with thermal medium reaction unit and cold media reaction unit respectively Connect, first circulation water pump and the first magnetic valve are provided between the plasma chamber and the thermal medium reaction unit;It is described Second circulation water pump and second solenoid valve are provided between plasma chamber and the cold media reaction unit.
Further, it is provided with thermal vector in the thermal medium reaction unit.
Further, the thermal vector is water or hot coal oil.
Further, first magnetic valve is at least provided with two.
Further, the second solenoid valve is at least provided with two.
The utility model has the advantages that:A kind of device for quickly elevating temperature of the present utility model, the structure is by setting Thermal medium reaction unit, cold media reaction unit, first circulation water pump and second circulation water pump are put, when needing heating, second Magnetic valve and second circulation water pump are closed, and the first magnetic valve and first circulation water pump are opened so that thermal vector enters plasma Cavity carries out heat temperature raising, while plasma chamber is heated up in the form of ionizing, and effectively shortens the heating-up time, improves equipment Production efficiency.
Brief description of the drawings
Below with reference to figure, the utility model is described in further detail.Form the accompanying drawing of the part of the application Further understood for providing to of the present utility model, schematic description and description of the present utility model is used to explain this reality With new, do not form to improper restriction of the present utility model.In the accompanying drawings:
Fig. 1 is structural representation of the present utility model;
Description of reference numerals:1st, plasma chamber;2nd, electrode;3rd, thermal medium reaction unit;4th, cold media reaction unit;5、 First circulation water pump;6th, the first magnetic valve;7th, second circulation water pump;8th, second solenoid valve.
Embodiment
Embodiment of the present utility model is described in detail below in conjunction with accompanying drawing.
Referring to Fig. 1, preferred embodiment of the present utility model provides a kind of device for quickly elevating temperature, including:Plasma chamber Body 1, is provided with electrode 2 in the plasma chamber 1, the plasma chamber 1 respectively with thermal medium reaction unit 3 and cold media Reaction unit 4 is connected, be provided between the plasma chamber 1 and the thermal medium reaction unit 3 first circulation water pump 5 and First magnetic valve 6;Second circulation water pump 7 and second is provided between the plasma chamber 1 and the cold media reaction unit 4 Magnetic valve 8.The structure is by setting thermal medium reaction unit 3, cold media reaction unit 4, first circulation water pump 5 and second circulation Water pump 7, when needing heating, second solenoid valve 8 and second circulation water pump 7 are closed, the first magnetic valve 6 and first circulation water pump 5 Open so that thermal vector enters plasma chamber 1 and carries out heat temperature raising, while plasma chamber 1 is risen in the form of ionization Temperature, effectively shorten the heating-up time, improve the production efficiency of equipment.
Preferably, thermal vector is provided with the thermal medium reaction unit 3, auxiliary heating is carried out using thermal vector. Preferably, thermal vector can be water or hot coal oil, and when medium is hot coal oil, temperature can be much larger than 100c °.
Preferably, for first magnetic valve 6 at least provided with two, control medium enters the time of plasma chamber 1.
Preferably, for the second solenoid valve 8 at least provided with two, control medium enters the time of plasma chamber 1.
As can be seen from the above description, the utility model the above embodiments realize following technique effect:The knot Structure works as needs by setting thermal medium reaction unit 3, cold media reaction unit 4, first circulation water pump 5 and second circulation water pump 7 During heating, second solenoid valve 8 and second circulation water pump 7 are closed, and the first magnetic valve 6 and first circulation water pump 5 are opened so that heating agent Jie's thing enters plasma chamber 1 and carries out heat temperature raising, while plasma chamber 1 is heated up in the form of ionization, effective to shorten Heating-up time, improve the production efficiency of equipment.
Preferred embodiment of the present utility model is the foregoing is only, is not limited to the utility model;For this For the technical staff in field, the utility model can have various modifications and variations.It is all in the spirit and principles of the utility model Within, any modification, equivalent substitution and improvements made etc., it should be included within the scope of protection of the utility model.

Claims (5)

  1. A kind of 1. device for quickly elevating temperature, it is characterised in that including:Plasma chamber (1), the plasma chamber (1) is interior to be set There is electrode (2), the plasma chamber (1) is connected with thermal medium reaction unit (3) and cold media reaction unit (4) respectively, First circulation water pump (5) and the first magnetic valve are provided between the plasma chamber (1) and the thermal medium reaction unit (3) (6);Second circulation water pump (7) and the second electricity are provided between the plasma chamber (1) and the cold media reaction unit (4) Magnet valve (8).
  2. A kind of 2. device for quickly elevating temperature according to claim 1, it is characterised in that:In the thermal medium reaction unit (3) It is provided with thermal vector.
  3. A kind of 3. device for quickly elevating temperature according to claim 2, it is characterised in that:The thermal vector is water or hot coal Oil.
  4. A kind of 4. device for quickly elevating temperature according to claim 1, it is characterised in that:First magnetic valve (6) at least sets Put two.
  5. A kind of 5. device for quickly elevating temperature according to claim 1, it is characterised in that:The second solenoid valve (8) at least sets Put two.
CN201720648204.5U 2017-06-06 2017-06-06 A kind of device for quickly elevating temperature Active CN206894985U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720648204.5U CN206894985U (en) 2017-06-06 2017-06-06 A kind of device for quickly elevating temperature

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720648204.5U CN206894985U (en) 2017-06-06 2017-06-06 A kind of device for quickly elevating temperature

Publications (1)

Publication Number Publication Date
CN206894985U true CN206894985U (en) 2018-01-16

Family

ID=61318147

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720648204.5U Active CN206894985U (en) 2017-06-06 2017-06-06 A kind of device for quickly elevating temperature

Country Status (1)

Country Link
CN (1) CN206894985U (en)

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Date Code Title Description
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20200713

Address after: Room 105-63474, No. 6, Baohua Road, Hengqin New District, Zhuhai City, Guangdong Province

Patentee after: ZHUHAI HENGGE ELECTRONIC TECHNOLOGY Co.,Ltd.

Address before: 519000 Guangdong Province, Zhuhai city Xiangzhou District Nanping Technology Industrial Park West Road No. 1 screen five office building 1 floor A-1 District

Patentee before: ZHUHAI BEILI HIGH-TECH Co.,Ltd.

TR01 Transfer of patent right
CP01 Change in the name or title of a patent holder

Address after: 519000 room 105-63474, No.6 Baohua Road, Hengqin New District, Zhuhai City, Guangdong Province (centralized office area)

Patentee after: Zhuhai Hengge microelectronics equipment Co.,Ltd.

Address before: 519000 room 105-63474, No.6 Baohua Road, Hengqin New District, Zhuhai City, Guangdong Province (centralized office area)

Patentee before: ZHUHAI HENGGE ELECTRONIC TECHNOLOGY Co.,Ltd.

CP01 Change in the name or title of a patent holder