CN206891615U - A kind of multi-direction micro-nano force measuring device - Google Patents
A kind of multi-direction micro-nano force measuring device Download PDFInfo
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- CN206891615U CN206891615U CN201720524588.XU CN201720524588U CN206891615U CN 206891615 U CN206891615 U CN 206891615U CN 201720524588 U CN201720524588 U CN 201720524588U CN 206891615 U CN206891615 U CN 206891615U
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Abstract
The utility model discloses a kind of multi-direction micro-nano force measuring device, including load maintainer, standard micro-nano force value generating means, elastic supporting mechanism and position-measurement device, the end of the elastic supporting mechanism is connected with position-measurement device, and the standard micro-nano force value generating means and load maintainer are separately mounted to the both sides of elastic supporting mechanism.The utility model includes load maintainer, standard micro-nano force value generating means, elastic supporting mechanism and position-measurement device, the micro-nano force value of extraneous application is measured based on the standard micro-nano force value on elastic supporting mechanism and tested micro-nano the force value principle that balances each other, it is unrelated with the measurement direction of micro-nano force value, the micro-nano power measurement of space any direction can be carried out, the defects of prior art can not carry out non-vertical direction micro-nano force measurement is overcome, meets high request of the people to the non-vertical direction micro-nano magnitude force measurement in space.The utility model can be widely applied to power fields of measurement.
Description
Technical field
Power fields of measurement is the utility model is related to, especially a kind of multi-direction micro-nano force measuring device.
Background technology
With the rapid development of modern science and technology, the ability in the human knowledge world enters microscopic fields from macroscopic arts,
The particularly rise of MEMS technology in recent years, the measurement for minimum force value physical quantity have become more and more important.Such as micro-
It is used for the MEMS micro-thrusters of gesture stability in Nano satellite, accuracy of micro- ox magnitude force value will directly affect micro-nano caused by it
The attitude control accuracy of satellite；And the micro- ox applied during nanoindentation is directly determined to the force value precision of milli ox magnitude
Determine the result of calculation of material nano hardness.Measurement for micro-nano magnitude force value at present is concentrated mainly on vertical direction, but
The measurement of non-vertical direction micro-nano force value can be related to when many in application process, such as in MEMS micro-thruster performance tests
Just need to measure the micro-nano force value in horizontal direction and other directions of space in field.Therefore, current micro-nano newton
The measurement apparatus of magnitude force value can not carry out the measurement of non-vertical direction micro-nano force value, can not meet people to micro-nano newton magnitude
The high request of force measurement, it would be highly desirable to further improve and improve.
Utility model content
In order to solve the above technical problems, the purpose of this utility model is：Non-vertical direction micro-nano can be carried out by providing one kind
Force measurement, multi-direction micro-nano force measuring device.
Technical solution adopted in the utility model is：
A kind of multi-direction micro-nano force measuring device, including load maintainer, standard micro-nano force value generating means, resilient support machine
Structure and position-measurement device, the end of the elastic supporting mechanism are connected with position-measurement device, the standard micro-nano force value hair
Generating apparatus and load maintainer are separately mounted to the both sides of elastic supporting mechanism.
Further, in addition to fixed plate, the front end of the elastic supporting mechanism are fixed in fixed plate.
Further, the standard micro-nano force value generating means is interdigitated capacitive means, the interdigitated capacitive means
Structure between two pole plates is interdigitated configuration.
Further, the position-measurement device is capacitive position measuring apparatus, inductive position measuring apparatus, resistance-type
Position measurement apparatus or optics aided location measuring apparatus.
The beneficial effects of the utility model are：Including load maintainer, standard micro-nano force value generating means, elastic supporting mechanism
And position-measurement device, measured based on the standard micro-nano force value on elastic supporting mechanism and tested micro-nano the force value principle that balances each other
The micro-nano force value that the external world applies, it is unrelated with the measurement direction of micro-nano force value, the micro-nano power measurement of space any direction can be carried out, gram
The defects of prior art can not carry out non-vertical direction micro-nano force measurement has been taken, it is micro- to the non-vertical direction in space to meet people
Receive the high request of magnitude force measurement.Further, standard micro-nano force value generating means is interdigitated capacitive means, is employed interdigital
Standard force source of the shape capacitive means as micro-nano force value, simplifies measurement structure, reduces measurement cost, is convenient for integrating.
Brief description of the drawings
Fig. 1 is knot when multi-direction micro-nano force measuring device of the present utility model carries out the measurement of space any direction micro-nano power
Structure schematic diagram；
Fig. 2 is that structure when multi-direction micro-nano force measuring device of the present utility model carries out the measurement of horizontal direction micro-nano power is shown
It is intended to；
Fig. 3 is Fig. 2 stress diagram；
Fig. 4 is Fig. 2 stress and deformation schematic diagram；
Fig. 5 is the structural parameters schematic diagram of the utility model interdigitated capacitive means；
Fig. 6 is the graph of a relation of interdigitated capacitive means output force value and interdigital spacing.
Embodiment
Reference picture 1, a kind of multi-direction micro-nano force measuring device, including：
Load maintainer 4, for loading the tested micro-nano force value of extraneous application；
Standard micro-nano force value generating means 2, for producing the standard micro-nano force value to be balanced each other with tested micro-nano force value；
Elastic supporting mechanism 1, for receiving tested micro-nano force value and standard micro-nano force value and producing corresponding deformation；
Position-measurement device 3, for measuring the change in location of elastic supporting mechanism；
The end of the elastic supporting mechanism 1 is connected with position-measurement device 3, the standard micro-nano force value generating means 2
The both sides of elastic supporting mechanism 1 are separately mounted to load maintainer 4.
Reference picture 1, is further used as preferred embodiment, in addition to fixed plate 5, before the elastic supporting mechanism 1
End is fixed in fixed plate 5.
Wherein, the front end of elastic supporting mechanism 1 is fixed by fixed plate 5, and the utility model is elastic supporting mechanism 1
The point being in contact with fixed plate 5 is referred to as elastic supporting mechanism fixing point.
It is further used as preferred embodiment, the standard micro-nano force value generating means is interdigitated capacitive means, institute
It is interdigitated configuration to state the structure between two pole plates of interdigitated capacitive means.
Preferred embodiment is further used as, the position-measurement device is capacitive position measuring apparatus, inductance type
Position measurement apparatus, resistive position measuring apparatus or optics aided location measuring apparatus.
The utility model is further explained and illustrated with reference to Figure of description and specific embodiment.
Embodiment 1
Reference picture 2,3,4 and 5, first embodiment of the present utility model：
By the utility model carry out horizontal direction micro-nano power measurement when measurement apparatus exemplified by, the measurement apparatus mainly by
Five parts form, and 1 is elastic supporting mechanism, are mainly used in receiving extraneous the micro-nano force value applied and standard micro-nano force value and occur
Miniature deformation；2 be standard micro-nano force value generating means, mainly as the standard micro-nano power produced and tested micro-nano force value balances each other
It is worth power source；3 be position-measurement device, is mainly used in determining the change in location of elastic supporting mechanism 1；4 be load maintainer, for quilt
The loading of force value is received in micrometer；5 be fixed plate, for fixing the front end of elastic supporting mechanism.
Wherein, elastic supporting mechanism 1 of the present utility model can use the elastic element of Fig. 2 shapes, but be not limited in Fig. 2
Shape, also using other elastic support structures.
Position-measurement device 3, capacitive position measuring apparatus, inductive position measuring apparatus, resistive position can be used
Measuring apparatus or other optics subsidiary equipment etc..
Micro-nano force measuring device of the present utility model is using the principle of micro-nano force value and electrostatic dynamic balance to being carried in elasticity
Micro-nano force value on supporting mechanism measures.
So that standard micro-nano force value generating means is interdigitated capacitive means as an example, if micro-nano force measuring device is not affected by external force
During effect, elastic supporting mechanism 1 is in equilbrium position (as shown in Figures 2 and 3).When outer bound pair load maintainer 4 applies micro-nano force value F
When, micro-strain (its position is as indicated with broken lines in fig. 4) will occur for the elastic supporting mechanism 1 being connected with load maintainer 4.Simultaneously
The test of position-measurement device 3 installed in the end of elastic supporting mechanism 1 deviates equilbrium position to elastic supporting mechanism 1, now exists
The both ends of standard micro-nano force value generating means 2 apply voltage, standard micro-nano force value generating means 2 is produced the micro-nano to attract each other
Force value Fin.And the effect of micro-nano force value caused by standard micro-nano force value generating means 2, will cause elastic supporting mechanism 1 gradually to
Move equilbrium position.The voltage for being applied to the both ends of standard micro-nano force value generating means 2 is incrementally increased, standard micro-nano force value occurs
Fill micro-nano force value caused by 2 gradually to increase, elastic supporting mechanism 1 will be moved constantly to equilbrium position, until position-measurement device 3
Detect that elastic supporting mechanism 1 has been completely recovered to equilbrium position, now show the stress balance on elastic supporting mechanism 1,
The suffered extraneous micro-nano power applied and micro-nano power caused by standard micro-nano power generating means 2 i.e. on elastic supporting mechanism 1
Balance.
According to the equilibrium principle of power, have：
Fin×l1=F × l (1)
The extraneous micro-nano power F applied, which can be obtained, is：
F=Fin×l1/l (2)
And standard micro-nano power F caused by standard micro-nano force value generating means 2inCan be according to on-load voltage U and interdigitated electricity
The structural parameters of capacitance device are calculated, and are shown below：
Each parameter in formula (3) is as shown in figure 5, N is total number interdigital in interdigitated capacitive means, ε0For air dielectric
Constant, g are the half of adjacent two interdigital lateral distance in interdigitated capacitive means, x0For adjacent two fork in interdigitated capacitive means
Refer to the half of intersection length.
The micro-nano power F that extraneous application can be obtained according to formula (1) (2) (3) is：
In formula (4) in addition to on-load voltage U, remaining parameter is interdigitated capacitive means design processing or encapsulation process
In fixed parameter, therefore need to only measure and be carried in the voltage U at interdigitated capacitive means both ends and can obtain resilient support machine
Extraneous loading micro-nano power suffered by structure.
Embodiment 2
Reference picture 1,5 and 6, second embodiment of the present utility model：
For micro-nano force measuring device of the present utility model in the micro-nano power of measurement space any direction, its operation principle is as schemed
Shown in 1.
So that standard micro-nano force value generating means is interdigitated capacitive means as an example, due to micro-nano force measuring device own wt
Presence, will cause elastic supporting mechanism 1 that miniature deformation occurs, its position is changed into position B from position A.Elastic bearing knot simultaneously
The miniature deformation of structure 1 causes the position of standard electrostatic micro-nano power generating means 2 liang interdigital that minor variations occur.Now, this reality
Initial rest position with novel micro nanometer force measuring device is that the position of miniature deformation occurs for elastic supporting mechanism 1 (in such as Fig. 1
Shown in dotted line B), that is to say, that when micro-nano force measuring device is not affected by external force effect, elastic supporting mechanism 1 is in as Fig. 1 is empty
Equilbrium position shown in line B.
When outer bound pair load maintainer 4 applies micro-nano force value F, the elastic supporting mechanism 1 being connected with load maintainer 4 will be sent out
Raw micro-strain.The test of position-measurement device 3 installed in the end of elastic supporting mechanism 1 deviates to elastic supporting mechanism 1 simultaneously
Equilbrium position as shown in dotted line B in Fig. 1, until the position of elastic supporting mechanism 1 is offset at C (dotted line C institutes in such as Fig. 1
Show).Now apply voltage at the both ends of standard micro-nano force value generating means 2, standard micro-nano force value generating means 2 is produced mutual suction
The micro-nano force value F drawnin.And the effect of micro-nano force value caused by standard micro-nano force value generating means 2, elastic supporting mechanism will be caused
1 gradually moves to equilbrium position.The voltage for being applied to the both ends of standard micro-nano force value generating means 2 is incrementally increased, makes standard micro-nano
Force value fills micro-nano force value caused by 2 and gradually increased, and elastic supporting mechanism 1 will be moved constantly to equilbrium position, until position
Measurement apparatus 3 detects that elastic supporting mechanism 1 has been completely recovered to equilbrium position, now shows on elastic supporting mechanism 1
Stress balance, i.e., on elastic supporting mechanism 1 the suffered extraneous micro-nano power applied with produced by standard micro-nano power generating means 2
Micro-nano dynamic balance.Now the extraneous micro-nano power applied can still be calculated according to the formula (4) of embodiment 1.
The deadweight of micro-nano force measuring device is smaller, therefore it causes the position offset of elastic supporting mechanism 1 also minimum, makes
The location variation for obtaining standard electrostatic micro-nano power generating means 2 liang interdigital is also minimum.Simultaneously because the utility model employs
The standard electrostatic power apparatus of interdigitated, according to the design feature of the device, even if interdigital spacing varies widely in device,
It still is able to keep preferable output result, that is to say, that the shadow that the interdigital spacing of device changes for device output electrostatic force
Sound is minimum.
When Fig. 6 is that standard electrostatic micro-nano power generating means uses interdigitated capacitive means, its output force value and interdigital spacing
Graph of relation.Wherein, line illustration (i.e. x0Corresponding figure) represent to work as interdigital cross distance x0Respectively 4mm, 5mm, 6mm
When, export the calculated value of small force value；Scattergram (i.e. Exp.x0Corresponding figure) for distance x between interdigital0Respectively 4mm,
When 5mm, 6mm, the experiment value of small force value is exported.
As seen from Figure 6, when interdigital spacing changes, the change of its output micro-nano force value is smaller, and in practical application
In due to device deadweight caused by standard micro-nano power generating means 2 liang interdigital location variation will be much smaller than Fig. 6 in away from
From variable quantity, it can be considered that the output electrostatic force of standard micro-nano power generating means 2 is barely affected, this is also this micro-nano
Force measuring device selects the main reason for capacitive means of the shape are as standard micro-nano power source.
Compared with prior art, the utility model has advantages below：
(1) balanced each other principle, realized each based on the standard micro-nano force value on elastic supporting mechanism and tested micro-nano force value
The micro-nano power measurement that direction applies, solves the problems, such as non-vertical direction micro-nano power measurement.Current most of micro-nano force measurements
Device can only in the vertical direction measure, seriously hinder the application of micro-nano force value, and use dress of the present utility model
Putting can realize the micro-nano power suffered by all directions of space is measured.
(2) directly measured using the equilibrium principle of power on elastic supporting mechanism, be not related to the effect of frictional force, solved
The problem of existing micro-nano power measurement is easily by friction effects, completely eliminate shadow of the frictional force to micro-nano force measurement process
Ring.
(3) standard force source of the interdigitated capacitive means as micro-nano force value is employed, it is micro- caused by the standard force source device
The precision of force value standard force source received is solely dependent upon its interdigital machining accuracy and the loading accuracy of installation accuracy and voltage, greatly
Ground simplify during existing micro-nano force measurement for superhigh precision subsidiary equipment high request (such as laser interferometer,
High precision displacement control platform etc.), the structure of measurement apparatus is enormously simplify, the cost of measurement apparatus is reduced, is convenient for
It is integrated.
(4) load maintainer, standard micro-nano force value generating means, elastic supporting mechanism and position-measurement device, structure are included
Simply, miniaturization and portability are easy to implement, solves the problems, such as that current micro-nano force measuring device is complicated.The utility model
Measurement apparatus involved by structure it is less, while be not related to the processing of complex geometry, therefore simple in construction, be easy to process
Encapsulation, simultaneously because measurement apparatus of the present utility model is not related to other large-scale auxiliary equipments, therefore is easy to minimize, is miniaturized
And portability.
(5) electrostatic force and the measuring method balanced by dynamometry value are employed, the measurement of mechanical quantity is converted into electrical quantities
Measurement, the mechanical meaurement value of micro-nano force measurement can be traced to the source to electrical quantities or quality, solve micro-nano force measurement process
In its own measured value the problem of tracing to the source.
(6) it is not related to the measurement of elastic supporting mechanism deformation numerical value, therefore completely eliminates elastomer creep for measurement
As a result influence, long-time stability are preferable.Current various micro-nano force measuring devices are typically by elastomer deformation values and outside
The functional relation that boundary applies micro-nano power measures, and because elastomer is inevitably present creep, causes it in measurement process
In due to the influence of elastomer itself creep cause the error of measurement result larger, make the long-time stability of device poor.And
The position-measurement device that the utility model uses only need to measure whether elastomer restores in measurement process, therefore in the absence of elasticity
Influence of the body creep for measurement result, long-time stability are preferable.
Above is preferably implement to be illustrated to of the present utility model, but the utility model is not limited to the reality
Example is applied, those skilled in the art can also make a variety of equivalent changes on the premise of without prejudice to the utility model spirit
Shape or replacement, these equivalent deformations or replacement are all contained in the application claim limited range.
Claims (4)
- A kind of 1. multi-direction micro-nano force measuring device, it is characterised in that：Including load maintainer, standard micro-nano force value generating means, Elastic supporting mechanism and position-measurement device, the end of the elastic supporting mechanism are connected with position-measurement device, the standard Micro-nano force value generating means and load maintainer are separately mounted to the both sides of elastic supporting mechanism.
- A kind of 2. multi-direction micro-nano force measuring device according to claim 1, it is characterised in that：Also include fixed plate, institute The front end for stating elastic supporting mechanism is fixed in fixed plate.
- A kind of 3. multi-direction micro-nano force measuring device according to claim 1, it is characterised in that：The standard micro-nano force value Generating means is interdigitated capacitive means, and the structure between two pole plates of the interdigitated capacitive means is interdigitated configuration.
- A kind of 4. multi-direction micro-nano force measuring device according to claim 1,2 or 3, it is characterised in that：The position is surveyed Amount device is capacitive position measuring apparatus, inductive position measuring apparatus, resistive position measuring apparatus or optics service bit Put measuring apparatus.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720524588.XU CN206891615U (en) | 2017-05-11 | 2017-05-11 | A kind of multi-direction micro-nano force measuring device |
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| CN201720524588.XU CN206891615U (en) | 2017-05-11 | 2017-05-11 | A kind of multi-direction micro-nano force measuring device |
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