CN206855269U - Abrasive blast equipment for photoelectricity parts - Google Patents

Abrasive blast equipment for photoelectricity parts Download PDF

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Publication number
CN206855269U
CN206855269U CN201720370036.8U CN201720370036U CN206855269U CN 206855269 U CN206855269 U CN 206855269U CN 201720370036 U CN201720370036 U CN 201720370036U CN 206855269 U CN206855269 U CN 206855269U
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sand
collection
bucket
pipe
box
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CN201720370036.8U
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范银波
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Anhui High Core Semiconductor Co Ltd
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Anhui High Core Semiconductor Co Ltd
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Abstract

The utility model discloses the abrasive blast equipment for photoelectricity parts, including work box, silt box, dust cleaning case, the work box has control device, form, gathering hole, time sand hopper, bottom connection sand-returning pipe;The silt box includes collection sand bucket, sand collecting hopper, the collection sand bucket top connection sand-returning pipe, sand-returning pipe has sand pumping device with collection sand bucket junction, the inside of collection sand bucket has sieves, returns sand chamber and fine sand chamber, collection sand bucket connects downwards sand collecting hopper, sand collecting hopper lower end, which passes through, to be interconnected air inlet pipe and goes out sandpipe, it is described go out sandpipe extend to inside work box and be connected with sand-blasting gun;The dust cleaning case includes sweep-up pipe, dust absorption fan, dust box.The utility model is transformed on the basis of existing sand-blasting machine, add screening plant and natural separation goes out roughing sand, and the circulate operation of sandblasting is not influenceed, enhance the particle size uniformity for spraying sand, the problem of alleviating the surface roughness inequality of processed photoelectricity parts significantly.

Description

Abrasive blast equipment for photoelectricity parts
Technical field
The utility model belongs to photoelectricity processing machinery field, in particular for the abrasive blast equipment of photoelectricity parts.
Background technology
The parts that field of photoelectric technology uses, often to cleannes, surface evenness, technology stability requirement compared with Height, small impurity and dust, uneven granular size can all influence the performance of semiconductor.Therefore it is clear in photoelectric field It is a series of very important technologies the process such as to wash, polish, cleaning, and many techniques need nonstandard by being carried out to existing equipment Customization could meet its requirement.
The principle of sandblasting processing is to utilize the abrasive grain accelerated(Conventional diamond dust, quartz sand, glass sand, resin sand etc. Sand material)The surface of machined object is hit, makes to reach machined object derusting, oxide layer, clear carbon-coating, flash, or even atomization work The effect on part surface.Sand-blasting machine is divided into a variety of patterns such as direct press type, suction-type, penetration type, no matter which kind of pattern, the motion of abrasive material Essentially identical with changing, after abrasive material ejection, most of abrasive material maintains the original state substantially, and small part is polished to thinner even powder It is broken;If abrasive material does not circulate all, use can be continued without influenceing process performance, but abrasive material price is not low, does not circulate completely It is uneconomic, if circulation is enough for a long time, there certainly will be increasing abrasive material to be polished carefully, thus has quite a few Abrasive material is not original form, has deflected away from prior predetermined blasting craft processing target yet.
For photoelectricity parts, blasting treatment is mainly removed to material flashes such as semiconductor/metals, surface is entered Row sanding and polishing, that is, be surface-treated, and wherein surface roughness is a very important index, and sand-blasting machine abrasive material is in pipeline After interior phase mutual friction or abrasive material recycle a period of time, a part of abrasive material attenuates, and photoelectricity component surface certainly will be caused thick Rugosity is uneven, largely effects on properties of product.Therefore, it is necessary to existing sand-blasting machine structure is transformed to sieve out different-grain diameter grade Abrasive material, so as to optimize the performance of photovoltaic.
Utility model content
Purpose of utility model:In order to improve the structure of existing abrasive blast equipment, weaken the photoelectricity zero for causing and being polished, polishing The uneven factor of part surface roughness, the utility model provide a kind of sandblasting for photoelectricity parts of structure optimization and set It is standby, to solve problems of the prior art.
Utility model content:For the abrasive blast equipment of photoelectricity parts, including work box, silt box, dust cleaning case, the work The shell upper for making case is provided with control device, middle part with form and gathering hole, bottom with time sand hopper, described time sand material Bucket bottom is connected with sand-returning pipe;
The silt box includes collection sand bucket, sand collecting hopper, the collection sand bucket top connection sand-returning pipe, and sand-returning pipe connects with collection sand bucket There is sand pumping device at the place of connecing, and collecting the inside of sand bucket has sieves, returns sand chamber and fine sand chamber, and the sieves is installed in collection sand bucket Side and set obliquely, end is hanging and face returns the opening of sand chamber, below the fine sand chamber face sieves, through dividing plate with Return sand chamber to separate, collection sand bucket connects downwards sand collecting hopper, and sand collecting hopper lower end, which passes through, to be interconnected air inlet pipe and go out sandpipe, the air inlet Pipe connection external compression air source of the gas, lower end be equipped with regulating valve, and time sand chamber is connected by lower sandpipe with going out sandpipe, it is described go out sandpipe Extend to inside work box and be connected with sand-blasting gun, the sand-blasting gun is located near the gathering hole of work box;
The dust cleaning case includes sweep-up pipe, dust absorption fan, dust box, and described sweep-up pipe one end is connected to work box one Side, the other end are connected to dedusting upper box part, and dust absorption fan is installed on dedusting upper box part, outside has air outlet;It is described to take out sand dress Put, the connection of dust absorption fan and control module.
Preferably, the sieves also has some oscillators with collection sand bucket junction, oscillator is formed with sieves to shake Screen plate moving mechanism, oscillator are connected with control device, and the sieves is 5 ~ 20 ° with angle of inclination formed by horizontal direction.Oscillator with The separation of fine sand and roughing sand is more efficient after sieves formation vibratory sieve mechanism, and 5 ~ 20 ° of oblique angles are advantageous to mixed sand side sieve While making roughing sand flow to back sand chamber, simply cleverly design.
Preferably, the fine sand chamber is provided with fine sand opening in collection sand bucket side wall.The fine sand that fine sand opening is conveniently sifted out is received Reclaim in time used for other purposes after collection, be unlikely to fill up fine sand chamber.
Preferably, the inlet scoop face sweep-up pipe of the dust absorption fan, and the top of dust cleaning case is in cylinder, bottom Inverted truncated cone-shaped.This stereochemical structure of dust cleaning case ensure that the cross section of all level heights is all circular, in favor of inhaling The dirt come is for the helical movement downwards, and now dust cleaning case has actually constituted the structure of similar cyclone separator.
Preferably, the sand pumping device is to take out sand blower fan, the sand in sand-returning pipe enters collection sand bucket by extracting mode.Take out The sand that sand blower fan extracts in sand-returning pipe is that one kind is routinely efficiently set.
Further, described time sand hopper lower end has agitating device or fluidizer, agitating device or fluidizer It is connected with control module.Corresponding blower fan takes out sand mode, and fluidisation or vibration are advantageous to sand motion and extracted so as to convenient, because of sand Heap is not in itself fluid and decentralized/fluidization processing is carried out to it.
Preferably, the air inlet pipe also has the air intake branch of lateral communication sand collecting hopper side, air intake branch and lower sand Pipe connects, and the regulating valve is solenoid valve, is connected with control device.Air intake branch is advantageous to the sand flow state in lower sandpipe Change, be allowed to be driven by air-flow after easily entering sandpipe;Solenoid valve control device easy to operation and carry out automation behaviour Make.
Compared to the prior art, the beneficial effects of the utility model are:It is of the present utility model for photoelectricity parts Abrasive blast equipment, it is exquisite composition, easy to operate.Work box, silt box, the layer of structure of dust cleaning case is clearly demarcated and contacts compact;Collect sand The angularly disposed convenience of sieves in case sieves fine sand while automatic conveying roughing sand, the vibration of oscillator strengthen the effect of screening Rate;The sand chamber sand different with the convenient collection granularity of setting of fine sand chamber is returned, time sand chamber connects with the volume to originate from facilitates subsequent operation; Air inlet pipe, regulating valve, go out sandpipe and its mutual connection and coordinate simple and efficient, realize and flow during being mixed with sand State, it is easy to the operation of sand-blasting gun;Dust cleaning case separates thinner sand dust or dust.The utility model is on the basis of existing sand-blasting machine On transformed, add screening plant and natural separation go out roughing sand, and do not influence the circulate operation of sandblasting, enhance ejection sand Particle size uniformity, the problem of alleviating the surface roughness inequality of processed photoelectricity parts significantly.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model embodiment 1, and Fig. 2 is the utility model sieves and its periphery thin portion Structural representation, Fig. 3 are the structural representations of the utility model embodiment 2.
1- work boxs, 10- sand-returning pipes, 11- forms, 12- gathering holes, 13- return sand hopper, 14- fluidizers, 2- collection sand Case, 21- collection sand buckets, 210- sand pumping devices, 211- sieves, 212- return sand chamber, 213- fine sand chambers, 2130- fine sand openings, 214- Oscillator, 22- sand collecting hoppers, 220- sand-blasting guns, the straight mouths of 2201-, the oblique sand inlets of 2202-, 221- air inlet pipe, 2210- air intake branches, 222- goes out sandpipe, 223- regulating valves(Solenoid valve), sandpipe under 224-, 3- dust cleaning cases, 31- sweep-up pipes, 32- dust absorption fans, 33- dust box, 34- air outlets.
Embodiment
, below will be to embodiment or existing in order to illustrate more clearly of the embodiment of the present application or technical scheme of the prior art There is the required accompanying drawing used in technology description to be briefly described, drawings in the following description are only described in the application Some embodiments, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to this A little accompanying drawings obtain other accompanying drawings.
With reference to Fig. 1 ~ 3 and specific embodiment, the utility model is furtherd elucidate.
Embodiment 1
Such as Fig. 1 ~ 2, including work box 1, silt box 2, dust cleaning case 3, the shell upper of the work box 1 is provided with control dress It is based on PLC control circuits with sand hopper 13, the control device is returned that 4, middle part, which is put, with form 11 and gathering hole 12, bottom Device, described time the bottom side of sand hopper 13 is connected with sand-returning pipe 10, return the lower end of sand hopper 13 there is fluidizer 14, fluidize The mechanism that device 14 can be blower fan and small-sized fluidized bed forms, fluidizer 14 is obliquely against sand-returning pipe 10;
The silt box 2 includes collection sand bucket 21, sand collecting hopper 22, the collection sand bucket 21 top connection sand-returning pipe 10, sand-returning pipe 10 have sand pumping device 210 with collection sand bucket 21 junction, and for sand pumping device 201 to take out sand blower fan, the inside of collection sand bucket 21 has filtering Sieve 211, sand chamber 212 and fine sand chamber 213 are returned, the sieves 211 is installed on side in collection sand bucket 21 and set obliquely, end Hanging and face returns the opening of sand chamber 212, and the sieves 211 also has some oscillators 214 with collection sand bucket 21 junction, shaken Son 214 forms vibratory sieve mechanism with sieves 211, and the sieves 211 is 12 ° with angle of inclination formed by horizontal direction;Institute State the lower section of 213 face sieves of fine sand chamber 211, separated through dividing plate with returning sand chamber 212, fine sand chamber 213 is opened in the collection side wall of sand bucket 21 There is fine sand opening 2130, collection sand bucket 21 connects downwards sand collecting hopper 22, and the lower end of sand collecting hopper 22 passes through interconnected air inlet pipe 221 and gone out Sandpipe 222, the air inlet pipe 221 connects external compression air source of the gas, lower end is equipped with regulating valve 223, and regulating valve 223 is adjusted for electromagnetism Valve is saved, sand chamber 212 is returned and is connected by lower sandpipe 224 with going out sandpipe 222, air inlet pipe 221 also has lateral communication sand collecting hopper 22 1 The air intake branch 2210 of side, air intake branch 2210 are connected with lower sandpipe 224, it is described go out sandpipe 222 extend to inside work box simultaneously Sand-blasting gun 220 is connected with, the sand-blasting gun 220 is located near the gathering hole 12 of work box 1;
The dust cleaning case 3 includes sweep-up pipe 31, dust absorption fan 32, dust box 33, and described one end of sweep-up pipe 31 is connected to The side of work box 1, the other end are connected to the top of dust cleaning case 3, and dust absorption fan 32, which is installed on the top of dust cleaning case 3, outside, has air-out Mouthfuls 34, the inlet scoop face sweep-up pipe 31 of dust absorption fan 32, the top of dust box 33 is in inverted round platform in cylinder, bottom Shape;The solenoid valve 223, oscillator 214, fluidizer 14, sand pumping device 210, dust absorption fan 32 and control module 4 connect Connect.
Embodiment 2
Such as Fig. 2 ~ 3, including work box 1, silt box 2, dust cleaning case 3, the shell upper of the work box 1 is provided with control dress It is based on PLC control circuits with sand hopper 13, the control device is returned that 4, middle part, which is put, with form 11 and gathering hole 12, bottom Device, described time the bottom side of sand hopper 13 is connected with sand-returning pipe 10, return the lower end of sand hopper 13 there is fluidizer 14, fluidize The mechanism that device 14 can be blower fan and small-sized fluidized bed forms, fluidizer 14 is obliquely against sand-returning pipe 10;
The silt box 2 includes collection sand bucket 21, sand collecting hopper 22, the collection sand bucket 21 top connection sand-returning pipe 10, sand-returning pipe 10 have sand pumping device 210 with collection sand bucket 21 junction, and for sand pumping device 201 to take out sand blower fan, the inside of collection sand bucket 21 has filtering Sieve 211, sand chamber 212 and fine sand chamber 213 are returned, the sieves 211 is installed on side in collection sand bucket 21 and set obliquely, end Hanging and face returns the opening of sand chamber 212, and the sieves 211 also has some oscillators 214 with collection sand bucket 21 junction, shaken Son 214 forms vibratory sieve mechanism with sieves 211, and the sieves 211 is 15 ° with angle of inclination formed by horizontal direction;Institute State the lower section of 213 face sieves of fine sand chamber 211, separated through dividing plate with returning sand chamber 212, fine sand chamber 213 is opened in the collection side wall of sand bucket 21 There is fine sand opening 2130, collection sand bucket 21 connects downwards sand collecting hopper 22, and the lower end of sand collecting hopper 22 passes through interconnected air inlet pipe 221 and gone out Sandpipe 222, the air inlet pipe 221 connects external compression air source of the gas, lower end is equipped with regulating valve 223, and regulating valve 223 is adjusted for electromagnetism Valve is saved, sand chamber 212 is returned and is connected by lower sandpipe 224 with going out sandpipe 222, the side of air inlet pipe 221 also has air intake branch 2210, enters Gas branch pipe 2210 also has a flow control valve, it is described go out sandpipe 222 extend to inside work box and connect sand-blasting gun 220, it is described Sand-blasting gun 220 is located near the gathering hole 12 of work box 1, sand-blasting gun 220 except itself with straight mouth 2201 in addition to also with tiltedly Sand inlet 2202, the straight mouth 2201 connect air intake branch 2210, and the tiltedly sand inlet connects out sandpipe 222;
The dust cleaning case 3 includes sweep-up pipe 31, dust absorption fan 32, dust box 33, and described one end of sweep-up pipe 31 is connected to The side of work box 1, the other end are connected to the top of dust cleaning case 3, and dust absorption fan 32, which is installed on the top of dust cleaning case 3, outside, has air-out Mouthfuls 34, the inlet scoop face sweep-up pipe 31 of dust absorption fan 32, the top of dust box 33 is in inverted round platform in cylinder, bottom Shape;The solenoid valve 223, oscillator 214, fluidizer 14, sand pumping device 210, dust absorption fan 32 and control module 4 connect Connect.
Application method:Manually operated control module 4, setup parameter, the opening lid of silt box 2, unlatching sand pumping device 210, The electric equipments such as dust absorption fan 32, fluidizer 14, collect in sand bucket 21 and dust box 33 and form negative pressure, sand or dirt can be extracted; Put enough abrasive sands on sieves 211, without fine sand under original state, abrasive sand passes through back sand chamber 212, lower sandpipe 224, into going out Sandpipe 222, solenoid valve 223 control air inlet pipe 221, the air inflow of air intake branch 2210, and sand and air-flow are mixed into sandblasting Rifle 220, sand-blasting gun 220 then is operated in gathering hole 12 manually, after handling photoelectricity parts, tiny sand dust, dust are by dust cleaning case 3 Siphon away, abrasive sand enters sand-returning pipe 10, is being again introduced into 211 through sand pumping device 210, and oscillator 214 acts on, the constant roughing sand of particle diameter Into sand chamber is returned, the fine sand that particle diameter diminishes enters fine sand chamber 213 by vibratory sieve mechanism.So circulation, constantly operates sand-blasting gun The sand for handling photoelectricity parts will not be made constantly to attenuate during 220, the sand to attenuate enters fine sand chamber 213 and accumulated Handled when closely completely by fine sand opening 2130.
Finally, it is also necessary to illustrate, term " comprising ", "comprising" or its any other variant are intended to nonexcludability Comprising so that process, method, article or equipment including a series of elements not only include those key elements, but also wrapping Include the other element being not expressly set out, or also include for this process, method, article or equipment intrinsic want Element.

Claims (7)

1. the abrasive blast equipment for photoelectricity parts, it is characterised in that including work box, silt box, dust cleaning case, the work box Shell upper control device, middle part are installed with form and gathering hole, bottom with returning sand hopper, under described time sand hopper Portion is connected with sand-returning pipe;
The silt box includes collection sand bucket, sand collecting hopper, the collection sand bucket top connection sand-returning pipe, sand-returning pipe and collection sand bucket junction There is sand pumping device, collecting the inside of sand bucket has sieves, returns sand chamber and fine sand chamber, and the sieves is installed on side in collection sand bucket And set obliquely, end is hanging and face returns the opening of sand chamber, with returning sand below the fine sand chamber face sieves, through dividing plate Chamber separates, and collection sand bucket connects downwards sand collecting hopper, and sand collecting hopper lower end, which passes through, to be interconnected air inlet pipe and go out sandpipe, and the air inlet pipe connects Logical external compression air source of the gas, lower end be equipped with regulating valve, return sand chamber and are connected by lower sandpipe with going out sandpipe, it is described go out sandpipe extend Inside to work box and sand-blasting gun is connected with, the sand-blasting gun is located near the gathering hole of work box;
The dust cleaning case includes sweep-up pipe, dust absorption fan, dust box, and described sweep-up pipe one end is connected to work box side, another One end is connected to dedusting upper box part, and dust absorption fan is installed on dedusting upper box part, outside has air outlet;The sand pumping device, suction Dirt blower fan is connected with control module.
2. the abrasive blast equipment according to claim 1 for photoelectricity parts, it is characterised in that the sieves with collection Sand bucket junction also has some oscillators, and oscillator forms vibratory sieve mechanism with sieves, and oscillator is connected with control device, the mistake Screen is 5 ~ 20 ° with angle of inclination formed by horizontal direction.
3. the abrasive blast equipment according to claim 1 for photoelectricity parts, it is characterised in that the fine sand chamber is in collection sand Barrel side wall is provided with fine sand opening.
4. the abrasive blast equipment according to claim 1 for photoelectricity parts, it is characterised in that the suction of the dust absorption fan Air port face sweep-up pipe, and the top of dust cleaning case is in inverted truncated cone-shaped in cylinder, bottom.
5. the abrasive blast equipment according to claim 1 for photoelectricity parts, it is characterised in that the sand pumping device is to take out Sand blower fan, the sand in sand-returning pipe enter collection sand bucket by extracting mode.
6. the abrasive blast equipment according to claim 5 for photoelectricity parts, it is characterised in that described time sand hopper lower end With agitating device or fluidizer, agitating device or fluidizer are connected with control module.
7. the abrasive blast equipment according to claim 1 for photoelectricity parts, it is characterised in that the air inlet pipe also has The air intake branch of lateral communication sand collecting hopper side, air intake branch are connected with lower sandpipe, and the regulating valve is solenoid valve, with controlling Device connection processed.
CN201720370036.8U 2017-04-11 2017-04-11 Abrasive blast equipment for photoelectricity parts Active CN206855269U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108972358A (en) * 2018-08-09 2018-12-11 蚌埠淮畔精密机械有限公司 Double-sided glass sand-blasting machine
CN109434695A (en) * 2018-12-18 2019-03-08 江苏富技腾机电科技有限公司 A kind of water cutting machine for husky device and water cutting machine
CN111002231A (en) * 2019-12-19 2020-04-14 缙云台杏电子科技有限公司 Abrasive material injection apparatus
CN112171521A (en) * 2020-09-23 2021-01-05 冯金喜 Sand blasting circulation system
CN112192450A (en) * 2020-09-14 2021-01-08 杭州盾源聚芯半导体科技有限公司 Silicon ring sand blasting device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108972358A (en) * 2018-08-09 2018-12-11 蚌埠淮畔精密机械有限公司 Double-sided glass sand-blasting machine
CN109434695A (en) * 2018-12-18 2019-03-08 江苏富技腾机电科技有限公司 A kind of water cutting machine for husky device and water cutting machine
CN111002231A (en) * 2019-12-19 2020-04-14 缙云台杏电子科技有限公司 Abrasive material injection apparatus
CN111002231B (en) * 2019-12-19 2021-08-20 苏州知云创宇信息科技有限公司 Abrasive material injection apparatus
CN112192450A (en) * 2020-09-14 2021-01-08 杭州盾源聚芯半导体科技有限公司 Silicon ring sand blasting device
CN112171521A (en) * 2020-09-23 2021-01-05 冯金喜 Sand blasting circulation system

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GR01 Patent grant
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PE01 Entry into force of the registration of the contract for pledge of patent right
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of utility model: Sand blasting equipment for photoelectric parts

Effective date of registration: 20210330

Granted publication date: 20180109

Pledgee: Chizhou Jiuhua Hengxin financing Company limited by guarantee

Pledgor: ANHUI GAOXIN ZHONGKE SEMICONDUCTOR Co.,Ltd.

Registration number: Y2021980002274

PC01 Cancellation of the registration of the contract for pledge of patent right
PC01 Cancellation of the registration of the contract for pledge of patent right

Date of cancellation: 20220826

Granted publication date: 20180109

Pledgee: Chizhou Jiuhua Hengxin financing Company limited by guarantee

Pledgor: ANHUI GAOXIN ZHONGKE SEMICONDUCTOR CO.,LTD.

Registration number: Y2021980002274