CN206850598U - A kind of motor control assembly - Google Patents

A kind of motor control assembly Download PDF

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Publication number
CN206850598U
CN206850598U CN201720661852.4U CN201720661852U CN206850598U CN 206850598 U CN206850598 U CN 206850598U CN 201720661852 U CN201720661852 U CN 201720661852U CN 206850598 U CN206850598 U CN 206850598U
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CN
China
Prior art keywords
motor
bevel gear
flange
control assembly
power transmission
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Active
Application number
CN201720661852.4U
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Chinese (zh)
Inventor
孙德付
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuxi Teng Teng Semiconductor Technology Co Ltd
Original Assignee
Wuxi Teng Teng Semiconductor Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Wuxi Teng Teng Semiconductor Technology Co Ltd filed Critical Wuxi Teng Teng Semiconductor Technology Co Ltd
Priority to CN201720661852.4U priority Critical patent/CN206850598U/en
Application granted granted Critical
Publication of CN206850598U publication Critical patent/CN206850598U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of motor control assembly, including body, controller, motor, decelerator and ring flange, the controller is arranged in body, motor is additionally provided with the body, the clutch end of the motor is provided with decelerator, the clutch end of the decelerator is provided with ring flange, and the ring flange is connected setting with external carrier.The utility model provides a kind of motor control assembly, is driven using light current, equipment volume is small, simple to operate.

Description

A kind of motor control assembly
Technical field
It the utility model is related to a kind of motor control assembly.
Background technology
ULTIMA is the equipment that high-density plasma is done in semiconductor film film device, because device structure is complicated, CHAMBER LID is very heavy, because CHAMBER LID are currently to realize lifting using rotation handwheel manually, when causing CHAMBER PM and maintenance Open and close CHAMBER LID on devote a tremendous amount of time and muscle power, cause labour low value export and it is relatively low Operating efficiency.
The content of the invention
Goal of the invention:In order to overcome the deficiencies in the prior art, the utility model provides a kind of motor control assembly, Driven using light current, equipment volume is small, simple to operate.
Technical scheme:To achieve the above object, the technical solution of the utility model is as follows:
A kind of motor control assembly, including body, controller, motor, decelerator and ring flange, the control Device is arranged in body, and motor is additionally provided with the body, and the controller is electrically connected with motor, the drive The clutch end of dynamic motor is provided with decelerator, and the clutch end of the decelerator is provided with ring flange, the ring flange Setting is connected with external carrier.
Further, the decelerator includes the first power transmission shaft, second driving shaft and the 3rd power transmission shaft, first transmission Axle is located along the same line with the 3rd power transmission shaft, and the second driving shaft is arranged on decelerator body, and second driving shaft with First power transmission shaft is vertically arranged;One end of first power transmission shaft and the clutch end connection of motor are set, the other end Include the first spiral bevel gear, the second spiral bevel gear and the 3rd spiral bevel gear, institute are included on the second driving shaft State the 3rd power transmission shaft one end and include the 4th spiral bevel gear, the other end is connected setting, the first screw conic tooth with ring flange Wheel is set with the second spiral bevel gear engaged transmission, and the 3rd spiral bevel gear is set with the 4th spiral bevel gear engaged transmission Put;The spiral bevel gear is that integral type is set with corresponding power transmission shaft.
Further, the spiral angle of the spiral bevel gear is 12 °~20 °.
Further, the axis hole set with motor power output axis connection, institute are offered on first power transmission shaft State and inner spline groove is provided with axis hole, be evenly arranged with the outer surface of first power transmission shaft for positioning the power output 3 radial direction pin-and-holes of axle.
Further, the ring flange includes flange cavity, flange plate, flange cavity plate and pressure block, the blind flange Plate is arranged on the open side of flange cavity, and the flange cavity plate is arranged in flange cavity, and two are offered in the flange cavity plate Individual symmetrical U-shaped groove, the center of the flange cavity plate are provided with connecting hole, spline are offered in the connecting hole, The fast gap setting corresponding with two U-shaped grooves respectively of two pressure, and the pressure block is fixedly installed on flange cavity On inwall.
Further, in addition to disk spring, the disk spring are arranged on two relative with U-shaped recess sidewall of pressure block In side wall.
Further, in addition to torsion torque sensor, the torsion torque sensor are arranged in U-shaped recess sidewall.
Further, the motor is light current motor.
Beneficial effect:Gear and power transmission shaft of the present utility model are that integral type is set, and connected mode connects for spline, The stability for improving transmission is connected compared to existing flat key, the service life of equipment is added, flange is provided with ring flange Cavity plate and torsion torque sensor, transmission stability can be lifted and detect the change of moment of torsion, and equipment is driven using light current, safety Reliably, equipment volume is small, simple to operate.
Brief description of the drawings
Accompanying drawing 1 is overall structure diagram of the present utility model;
Accompanying drawing 2 is that decelerator of the present utility model is driven schematic diagram;
Accompanying drawing 3 is the first transmission shaft structure schematic diagram of the present utility model;
Accompanying drawing 4 is flange plate structure schematic diagram of the present utility model.
Embodiment
The utility model is further described below in conjunction with the accompanying drawings.
Such as accompanying drawing 1, a kind of motor control assembly, including body 1, controller 3, motor 2, decelerator 6 and ring flange 8, the controller 3 is arranged in body 1, and motor 2, the controller 3 and driving are additionally provided with the body 1 Motor 2 is electrically connected with, and the clutch end of the motor 2 is provided with decelerator 6, the clutch end of the decelerator 6 Ring flange 8 is provided with, the ring flange 8 is connected setting with external carrier.The motor 2 is light current motor.In machine The top of body 1 is provided with forward-reverse switch 4 and power control switch 5, and dust cap 7 is additionally provided with above decelerator.
Such as accompanying drawing 2, the decelerator 6 includes the first power transmission shaft 60, the power transmission shaft 66 of second driving shaft 64 and the 3rd, and described the One power transmission shaft 60 is located along the same line with the 3rd power transmission shaft 66, and the second driving shaft 64 is arranged on decelerator body, and Second driving shaft 64 is vertically arranged with the first power transmission shaft 60;One end of first power transmission shaft 60 and the power of motor 2 are defeated Go out end connection to set, the other end includes the first spiral bevel gear 61, includes the second screw conic on the second driving shaft 64 The spiral bevel gear 63 of gear 62 and the 3rd, described one end of 3rd power transmission shaft 66 include the 4th spiral bevel gear 65, the other end with The connection of ring flange 8 is set, and the engaged transmission of 61 and second spiral bevel gear of the first spiral bevel gear 62 is set, the 3rd spiral shell Revolve bevel gear 63 and the engaged transmission of the 4th spiral bevel gear 65 is set;The spiral bevel gear is integrated with corresponding power transmission shaft Formula is set.The spiral angle of the spiral bevel gear is 12 °~20 °.Helical Bevel Gear efficiency under this angle is best, Bearing capacity is larger, and drive noise is low.
Such as accompanying drawing 3, the axis hole set with motor power output axis connection is offered on first power transmission shaft 60 602, inner spline groove 603 is provided with the axis hole 602, is evenly arranged with the outer surface of first power transmission shaft 60 for fixed 3 radial direction pin-and-holes 601 of the position power output shaft.Connected mode connects for spline, connects, improves compared to existing flat key The stability of transmission, and spline drived power, make uniform force, add the service life of equipment.
Such as accompanying drawing 4, the ring flange 8 includes flange cavity 81, flange plate 22, flange cavity plate 87 and pressure block 82, institute The open side that flange plate 22 is arranged on flange cavity 81 is stated, and setting, the flange are connected with screwed hole 86 by bolt 21 Cavity plate 87 is arranged in flange cavity 81, and two symmetrical U-shaped grooves 88, the flange chamber are offered in the flange cavity plate 87 The center of plate 87 is provided with connecting hole 85, and spline, two fast 82 difference of pressure are offered in the connecting hole 85 With two U-shaped 88 corresponding gap settings of groove, and the pressure block 82 is fixedly installed on the inwall of flange cavity 81.Flange chamber Some fixing holes 9 are provided with the bottom surface of plate 87, the fixing hole 9 is connected setting with external carrier, is shaken manually instead of traditional Arm assembly.Also include disk spring 83, the disk spring 83 is arranged on two relative with U-shaped recess sidewall 881 of pressure block 82 In side wall.Also include torsion torque sensor 84, the torsion torque sensor 84 is arranged in U-shaped recess sidewall 881.In rotating, Disk spring is contacted with torsion torque sensor 84, and torsion torque sensor 84 is electrically connected with controller, and when torsion is excessive, controller is cut Power-off source.
Described above is only preferred embodiment of the present utility model, it should be pointed out that:For the common skill of the art For art personnel, on the premise of the utility model principle is not departed from, some improvements and modifications can also be made, these improve and Retouching also should be regarded as the scope of protection of the utility model.

Claims (8)

  1. A kind of 1. motor control assembly, it is characterised in that:Including body (1), controller (3), motor (2), decelerator (6) With ring flange (8), the controller (3) is arranged in body (1), and motor (2), institute are additionally provided with the body (1) Controller (3) to be stated to be electrically connected with motor (2), the clutch end of the motor (2) is provided with decelerator (6), The clutch end of the decelerator (6) is provided with ring flange (8), and the ring flange (8) is connected setting with external carrier.
  2. A kind of 2. motor control assembly according to claim 1, it is characterised in that:The decelerator (6) includes first and passed Moving axis (60), second driving shaft (64) and the 3rd power transmission shaft (66), first power transmission shaft (60) and the 3rd power transmission shaft (66) position In on same straight line, the second driving shaft (64) is arranged on decelerator body, and second driving shaft (64) and the first transmission Axle (60) is vertically arranged;One end of first power transmission shaft (60) is connected setting with the clutch end of motor (2), another End includes the first spiral bevel gear (61), includes the second spiral bevel gear (62) and the 3rd on the second driving shaft (64) Spiral bevel gear (63), described 3rd power transmission shaft (66) one end include the 4th spiral bevel gear (65), the other end and ring flange (8) connection is set, and first spiral bevel gear (61) is set with the second spiral bevel gear (62) engaged transmission, the 3rd spiral shell Bevel gear (63) is revolved to set with the 4th spiral bevel gear (65) engaged transmission;The spiral bevel gear is with corresponding power transmission shaft Integral type is set.
  3. 3. according to claim 2 kind of motor control assembly, it is characterised in that:The spiral angle of the spiral bevel gear is equal For 12 °~20 °.
  4. A kind of 4. motor control assembly according to claim 2, it is characterised in that:Opened up on first power transmission shaft (60) There is the axis hole (602) set with motor power output axis connection, inner spline groove (603) be provided with the axis hole (602), 3 radial direction pin-and-holes for positioning the power output shaft are evenly arranged with the outer surface of first power transmission shaft (60) (601)。
  5. A kind of 5. motor control assembly according to claim 1, it is characterised in that:The ring flange (8) includes flange chamber Body (81), flange plate (22), flange cavity plate (87) and pressure block (82), the flange plate (22) are arranged on flange cavity (81) open side, the flange cavity plate (87) are arranged in flange cavity (81), and two are offered on the flange cavity plate (87) Individual symmetrical U-shaped groove (88), the center of the flange cavity plate (87) is provided with connecting hole (85), the connecting hole (85) Inside offer spline, two pressure blocks (82) gap setting corresponding with two U-shaped grooves (88), and the pressure respectively Block (82) is fixedly installed on the inwall of flange cavity (81).
  6. A kind of 6. motor control assembly according to claim 5, it is characterised in that:Also include disk spring (83), it is described Disk spring (83) is arranged on pressure block (82) and the relative two side of U-shaped recess sidewall (881).
  7. A kind of 7. motor control assembly according to claim 5, it is characterised in that:Also include torsion torque sensor (84), institute Torsion torque sensor (84) is stated to be arranged in U-shaped recess sidewall (881).
  8. A kind of 8. motor control assembly according to claim 1, it is characterised in that:The motor (2) is driven for light current Dynamic motor.
CN201720661852.4U 2017-06-08 2017-06-08 A kind of motor control assembly Active CN206850598U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720661852.4U CN206850598U (en) 2017-06-08 2017-06-08 A kind of motor control assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720661852.4U CN206850598U (en) 2017-06-08 2017-06-08 A kind of motor control assembly

Publications (1)

Publication Number Publication Date
CN206850598U true CN206850598U (en) 2018-01-05

Family

ID=60799327

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720661852.4U Active CN206850598U (en) 2017-06-08 2017-06-08 A kind of motor control assembly

Country Status (1)

Country Link
CN (1) CN206850598U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112619952A (en) * 2020-11-16 2021-04-09 重庆大学 Spraying robot shoulder joint

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112619952A (en) * 2020-11-16 2021-04-09 重庆大学 Spraying robot shoulder joint
CN112619952B (en) * 2020-11-16 2023-01-24 重庆大学 Spraying robot shoulder joint

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