CN206848301U - A kind of piezoelectric type high-frequency vibrating table - Google Patents
A kind of piezoelectric type high-frequency vibrating table Download PDFInfo
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- CN206848301U CN206848301U CN201720464093.2U CN201720464093U CN206848301U CN 206848301 U CN206848301 U CN 206848301U CN 201720464093 U CN201720464093 U CN 201720464093U CN 206848301 U CN206848301 U CN 206848301U
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Abstract
The utility model discloses a kind of piezoelectric type high-frequency vibrating table, including pedestal, the first piezoelectric stack and table top, pedestal is fixedly installed, first piezoelectric stack is stacked and placed on pedestal, table top is stacked and placed on the first piezoelectric stack, in addition to the second piezoelectric stack, and the second piezoelectric stack is stacked and placed under pedestal or on table top, the opposite face opposite polarity of first piezoelectric stack and the second piezoelectric stack is so that the two produces amplitude identical, the motion of opposite in phase.For the electrode surface that two groups of piezoelectric stacks are connected with table top for the opposite sex, the electrode surface being connected with pedestal is also the opposite sex.Same wire connects the different in nature input of two groups of piezoelectric stacks respectively.During by same pumping signal, one group of piezoelectric stack elongation, another group of contraction, i.e. amplitude is identical, and phase differs 180 °, the structure being arranged in parallel using piezoelectric stack, piezoelectric stack is reduced the table top distortion factor by constant compression.
Description
Technical field
It the utility model is related to and belong to vibration measurement calibration field, more particularly to a kind of piezoelectric type high-frequency vibrating table.
Background technology
High-frequency vibrating table is the core component of dither benchmark, partly common with signal source, power amplifier etc.
Form the driver unit of dither benchmark.Dither benchmark is mainly used in the vibration measurement of high frequency, nanoscale amplitude.
High-frequency vibrating table more common at present mainly uses piezoelectric type principle, and the piezo stack formed is bonded by piezoelectric crystal plate
Heap is fixed on pedestal, piezoelectric stack top fixed mesa.The characteristics of this structure is that piezoelectric stack is by multi-disc piezoelectric crystal plate
Bonded and formed using epoxy resin, and piezoelectric stack is also adhesively fixed with pedestal and table top using epoxy resin, during work, piezoelectricity
Crystal wafer tension, the influence for pressing alternate stress, the destruction of easy recurring structure.Meanwhile epoxy resin is over time with environment etc.
Aging phenomenon can occur for factor, and so as to influence the performance of high-frequency vibrating table, and epoxy resin hardness and intrinsic frequency are relatively low, make height
The distortion factor is big in the course of the work for frequency vibration platform, in the range of working frequency range the shortcomings of generation resonance peak.
Therefore it is small to develop a kind of distortion factor, resonance free peak, it is thirsty for a long time that the high high-frequency vibrating table of reliability turns into industry
Hope the problem solved.
The content of the invention
In order to solve the above technical problems, the purpose of this utility model is to provide a kind of piezoelectric type high-frequency vibrating table, distortion
Small, resonance free peak is spent, reliability is high, overcome the deficiencies in the prior art, can realize the vibration measurement of high frequency, nanoscale amplitude.
To achieve the above object, the utility model provides following technical scheme：A kind of piezoelectric type high-frequency vibrating table, including
Pedestal, the first piezoelectric stack and table top, pedestal fixed setting, first piezoelectric stack be stacked and placed on the pedestal it
On, the table top is stacked and placed on first piezoelectric stack, in addition to the second piezoelectric stack, and second piezoelectric stack is stacked
Under the pedestal or on the table top, the opposite face polarity phase of first piezoelectric stack and second piezoelectric stack
Instead so that the two generation amplitude is identical, the motion of opposite in phase.
Further, the piezoelectric stack includes piezoelectric crystal plate and the conduction as the piezoelectric crystal plate conductive electrode
Piece, the piezoelectric crystal plate are arranged at least two layers, and the opposite face polarity of adj acent piezoelectric crystal wafer is identical.
Further, the opposite face of adj acent piezoelectric crystal wafer shares same conducting strip.
Further, the pedestal, first piezoelectric stack, the table top and second piezoelectric stack pass through outer
The pretension bolt that side is arranged with insulation sleeve is worn and connects fixation.
Further, under the pedestal, the pretension bolt upper end is fixedly connected on second piezoelectric stack
The table top, the pretension bolt head are located under second piezoelectric stack.
Further, on the table top, the pretension bolt lower end is fixedly connected on second piezoelectric stack
The pedestal, the pretension bolt head are located on second piezoelectric stack.
Further, washer plate, the washer plate are provided between the pretension bolt head and second piezoelectric stack
Cross section be more than or equal to the second piezoelectric stack cross section so that the pretightning force of the pretension bolt be uniformly distributed in it is described
Second piezoelectric stack.
Further, including one or more groups of piezoelectric structures, every group of piezoelectric structure include the first overlapping pressure of vertical projection
Electricity is stacked with the second piezoelectric stack, the centre of oscillation caused by one or more groups of piezoelectric structures and table top central coaxial.
Further, the table top is high rigidity table top, and the modulus of elasticity of its material is not less than 100GPa.
Further, the pretension bolt is high strength steel bolt, and its tensile strength is not less than 1GPa, and the washer plate is
High strength steel washer plate, its tensile strength are not less than 1GPa.
Because above-mentioned technical proposal is used, the utility model has following advantages compared with prior art：
(1) piezoelectric type high-frequency vibrating table disclosed in the utility model, by setting the first piezoelectric stack and the second piezo stack
Heap, the two connects table top and pedestal simultaneously, and the electrode surface that is connected with table top of two groups of piezoelectric stacks be the opposite sex (one group is positive pole,
Another group is negative pole), the electrode surface being connected with pedestal is also the opposite sex.Same wire connects the opposite sex of two groups of piezoelectric stacks respectively
Input.During by same pumping signal, one group of piezoelectric stack elongation, another group of contraction, i.e. amplitude is identical, and phase differs 180 °,
The structure being arranged in parallel using piezoelectric stack, piezoelectric stack is set to be reduced the table top distortion factor by constant compression；
(2) piezoelectric type high-frequency vibrating table disclosed in the utility model, by the way that piezoelectric crystal plate is arranged at least two layers, phase
The opposite face polarity of adjacent piezoelectric crystal plate is identical so that the vibration frequency of piezoelectric crystal plate can faster, adj acent piezoelectric crystal wafer
A piece of conducting strip can be shared.
(3) piezoelectric type high-frequency vibrating table disclosed in the utility model, piezoelectric stack and platform are fixed by using pretension bolt
Face, piezoelectric stack is set to be avoided piezoelectric stack tension stress by constant compression and damaged.Insulation is also set up on the outside of pretension bolt
Set, insulation sleeve are made up of insulating materials, prevent piezoelectric stack contact pretension bolt and short circuit occurs；
(4) piezoelectric type high-frequency vibrating table disclosed in the utility model, table top are made up of high rigidity material, ensure the frequency of table top
Rate responds, the centrally disposed installation screw of table top, for installing measured object.
Brief description of the drawings
Fig. 1 is a kind of structural representation of single column piezoelectric type high-frequency vibrating table of one of the utility model preferred embodiment
Figure；
Fig. 2 is the antiparallel structural representation of a kind of piezoelectric stack in the preferred embodiment of the utility model one
Fig. 3 is a kind of structural representation of Double-pillar piezoelectric type high-frequency vibrating table of one of the utility model preferred embodiment
Figure；
Fig. 4 is the structural representation of three column type piezoelectric type high-frequency vibrating tables of one of the utility model preferred embodiment
Fig. 5 is the structural representation of four column type piezoelectric type high-frequency vibrating tables of one of the utility model preferred embodiment
Fig. 6 is the structural representation of six column type piezoelectric type high-frequency vibrating tables of one of the utility model preferred embodiment.
Wherein, 1, pedestal, the 2, first piezoelectric stack；3rd, table top；4th, the second piezoelectric stack；5th, wire；6th, power amplifier；
7th, signal source；8th, insulation sleeve；9th, pretension bolt；10th, washer plate；11st, piezoelectric crystal plate；12nd, conducting strip.
Embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is described in further detail.Below
For for illustrating a preferred embodiment of the present utility model, but it is not limited to the scope of the utility model.
Embodiment one：
Referring to Fig. 1, as shown in legend therein, a kind of piezoelectric type high-frequency vibrating table, including pedestal 1, the first piezoelectric stack
2nd, the piezoelectric stack 4 of table top 3 and second, pedestal 1 are fixedly installed, and the first piezoelectric stack 2 is stacked and placed on pedestal 1, and table top 3 is stacked
On the first piezoelectric stack 1, the second piezoelectric stack 4 is stacked and placed under pedestal 1, the first piezoelectric stack 2 and the second piezoelectric stack 4
Opposite face opposite polarity, wire 5 connects the first piezoelectric stack 2, the second piezoelectric stack 4 and power amplifier 6, power amplifier
6 connecting signal sources 7.
During work, signal source 7 sends high-frequency signal after the amplification of power amplifier 6, is inputted simultaneously by two wires 5
First piezoelectric stack 2 and the second piezoelectric stack 4, make the first piezoelectric stack 2 and the second piezoelectric stack 4 generation amplitude identical, phase
The motion of 180 ° of difference, so as to drive table top 1 to move, that is, realizes dither.
In a kind of embodiment, the second piezoelectric stack 4, pedestal 1, the first piezoelectric stack 2 and table top 3 are arranged by outside
The pretension bolt 9 for having insulation sleeve 8, which is worn, connects fixation, and the upper end of pretension bolt 9 is fixedly connected on table top 3, and the head of pretension bolt 8 is positioned at the
Under two piezoelectric stacks 4.
In a kind of embodiment, washer plate 10, washer plate 10 are provided between the head of pretension bolt 9 and the second piezoelectric stack 4
Cross section is more than or equal to the cross section of the second piezoelectric stack 4 so that the pretightning force of pretension bolt 9 is uniformly distributed in the second piezo stack
Heap 4.
In a kind of embodiment, piezoelectric stack includes piezoelectric crystal plate 11 and the conduction as the conductive electrode of piezoelectric crystal plate 11
Piece 12, piezoelectric crystal plate 11 are arranged at least two layers, and the opposite face polarity of adj acent piezoelectric crystal wafer 11 is identical.
In a kind of embodiment, the opposite face of adj acent piezoelectric crystal wafer 11 shares same conducting strip 12.
Embodiment two
Referring to Fig. 3, as shown in legend therein, remaining is identical with embodiment one, and difference is, the second piezoelectric stack
4 are stacked and placed on table top 2, including two groups of piezoelectric structures, and every group of piezoelectric structure includes the first overlapping piezoelectric stack 2 of vertical projection
With the second piezoelectric stack 4, the centre of oscillation caused by two groups of piezoelectric structures and table top central coaxial, the lower end of pretension bolt 8, which is fixed, to be connected
Pedestal 1 is connected on, the head of pretension bolt 8 is located on the second piezoelectric stack 4.
Embodiment three
Referring to Fig. 4, as shown in legend therein, remaining is identical with embodiment two, and difference is, including including three groups
Piezoelectric structure, every group of piezoelectric structure include overlapping the first piezoelectric stack 2 and the second piezoelectric stack 4 of vertical projection, three groups of piezoelectricity
The centre of oscillation caused by structure and table top central coaxial.
Example IV
Referring to Fig. 5, as shown in legend therein, remaining is identical with embodiment two, and difference is, including including four groups
Piezoelectric structure, every group of piezoelectric structure include overlapping the first piezoelectric stack 2 and the second piezoelectric stack 4 of vertical projection, four groups of piezoelectricity
The centre of oscillation caused by structure and table top central coaxial.
Embodiment five
Referring to Fig. 6, as shown in legend therein, remaining is identical with embodiment two, and difference is, including including six groups
Piezoelectric structure, every group of piezoelectric structure include overlapping the first piezoelectric stack 2 and the second piezoelectric stack 4 of vertical projection, six groups of piezoelectricity
The centre of oscillation caused by structure and table top central coaxial.
It is above the description to the utility model embodiment, by the foregoing description of the disclosed embodiments, makes ability
Domain professional and technical personnel can realize or using the utility model.The professional skill of a variety of modifications to these embodiments to this area
Will be apparent for art personnel, generic principles defined herein can not depart from it is of the present utility model spirit or
In the case of scope, realize in other embodiments.Therefore, the utility model is not intended to be limited to these realities shown in this article
Example is applied, and is to fit to the most wide scope consistent with principles disclosed herein and features of novelty.
Claims (10)
1. a kind of piezoelectric type high-frequency vibrating table, including pedestal, the first piezoelectric stack and table top, the pedestal fixed setting, institute
State the first piezoelectric stack to be stacked and placed on the pedestal, the table top is stacked and placed on first piezoelectric stack, and its feature exists
In, in addition to the second piezoelectric stack, second piezoelectric stack be stacked and placed under the pedestal or on the table top, described
The opposite face opposite polarity of one piezoelectric stack and second piezoelectric stack is so that the two produces amplitude identical, the fortune of opposite in phase
It is dynamic.
2. piezoelectric type high-frequency vibrating table according to claim 1, it is characterised in that the piezoelectric stack includes piezo-electric crystal
Piece and the conducting strip as the piezoelectric crystal plate conductive electrode, the piezoelectric crystal plate are arranged at least two layers, and adj acent piezoelectric is brilliant
The opposite face polarity of body piece is identical.
3. piezoelectric type high-frequency vibrating table according to claim 2, it is characterised in that the opposite face of adj acent piezoelectric crystal wafer is total to
With same conducting strip.
4. piezoelectric type high-frequency vibrating table according to claim 1, it is characterised in that the pedestal, first piezo stack
Heap, the table top and second piezoelectric stack are worn by pretension bolt of the outer sheath provided with insulation sleeve and connect fixation.
5. piezoelectric type high-frequency vibrating table according to claim 4, it is characterised in that second piezoelectric stack is located at described
Under pedestal, the pretension bolt upper end is fixedly connected on the table top, and the pretension bolt head is located at second piezoelectricity
Under stacking.
6. piezoelectric type high-frequency vibrating table according to claim 4, it is characterised in that second piezoelectric stack is located at described
On table top, the pretension bolt lower end is fixedly connected on the pedestal, and the pretension bolt head is located at second piezoelectricity
On stacking.
7. the piezoelectric type high-frequency vibrating table according to claim 5 or 6, it is characterised in that the pretension bolt head and institute
State and be provided with washer plate between the second piezoelectric stack, the washer plate cross section is more than or equal to the second piezoelectric stack cross section
So that the pretightning force of the pretension bolt is uniformly distributed in second piezoelectric stack.
8. piezoelectric type high-frequency vibrating table according to claim 1, it is characterised in that including one or more groups of piezoelectric structures,
Every group of piezoelectric structure includes overlapping the first piezoelectric stack and the second piezoelectric stack of vertical projection, one or more groups of piezoelectric structure productions
The raw centre of oscillation and table top central coaxial.
9. piezoelectric type high-frequency vibrating table according to claim 1, it is characterised in that the table top is high rigidity table top, its
The modulus of elasticity of material is not less than 100GPa.
10. piezoelectric type high-frequency vibrating table according to claim 7, it is characterised in that the pretension bolt is high strength steel
Bolt, its tensile strength are not less than 1GPa, and the washer plate is high strength steel washer plate, and its tensile strength is not less than 1GPa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720464093.2U CN206848301U (en) | 2017-04-28 | 2017-04-28 | A kind of piezoelectric type high-frequency vibrating table |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720464093.2U CN206848301U (en) | 2017-04-28 | 2017-04-28 | A kind of piezoelectric type high-frequency vibrating table |
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| CN206848301U true CN206848301U (en) | 2018-01-05 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107238730A (en) * | 2017-04-28 | 2017-10-10 | 苏州东菱振动试验仪器有限公司 | A kind of piezoelectric type high-frequency vibrating table |
| CN109632157A (en) * | 2018-12-07 | 2019-04-16 | 哈尔滨工程大学 | A kind of bolt joint surface dynamic stress monitoring device |
| CN111396500A (en) * | 2020-04-09 | 2020-07-10 | 武汉理工大学 | Driving device for active vibration suppression of precision platform |
-
2017
- 2017-04-28 CN CN201720464093.2U patent/CN206848301U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107238730A (en) * | 2017-04-28 | 2017-10-10 | 苏州东菱振动试验仪器有限公司 | A kind of piezoelectric type high-frequency vibrating table |
| CN107238730B (en) * | 2017-04-28 | 2023-08-25 | 苏州东菱振动试验仪器有限公司 | Piezoelectric high-frequency vibration table |
| CN109632157A (en) * | 2018-12-07 | 2019-04-16 | 哈尔滨工程大学 | A kind of bolt joint surface dynamic stress monitoring device |
| CN111396500A (en) * | 2020-04-09 | 2020-07-10 | 武汉理工大学 | Driving device for active vibration suppression of precision platform |
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