CN206788552U - Full-automatic yield production type nano-imprinting device - Google Patents
Full-automatic yield production type nano-imprinting device Download PDFInfo
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- CN206788552U CN206788552U CN201720557058.5U CN201720557058U CN206788552U CN 206788552 U CN206788552 U CN 206788552U CN 201720557058 U CN201720557058 U CN 201720557058U CN 206788552 U CN206788552 U CN 206788552U
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Abstract
The utility model discloses a kind of full-automatic yield production type nano-imprinting device, including：Base, base are provided with guide rail；Multiple nano impression mechanisms, nano impression mechanism are arranged on base and are distributed in the both sides in rail length direction；Feeding machanism, including tablet feeding machanism and mantle plate feeding machanism, tablet feeding machanism and mantle plate feeding machanism are arranged on base and positioned at the side in rail length direction；Material transfer mechanism, the movement of material transfer mechanism is arranged on guide rail, for tablet and mantle plate to be carried between feeding structure and nano impression mechanism.The utility model is compared to prior art, material transfer mechanism carries tablet and mantle plate between feeding structure and nano impression mechanism, it is rational in infrastructure, save manpower, realize automatic transporting tablet and mantle plate and automatic impressing, multiple nano impression mechanisms work simultaneously, greatly improve operating efficiency.
Description
Technical field
It the utility model is related to a kind of full-automatic yield production type nano-imprinting device.
Background technology
Nanometer embossing is an important technology in micro-nano device making technics, nanometer embossing earliest by
Stephen Y Chou teach and take the lead in proposing in nineteen ninety-five, and this is a kind of brand-new pattern transfer skill different from conventional lithographic techniques
Art.The definition of nanometer embossing is：Make the photosensitive shaping of photoetching without using light or irradiation, but directly in silicon substrate or
The mechanism construction nanometer-scale pattern of physics is utilized on other substrates.
When nano impression makes at present, tablet and mantle plate are mainly carried by the way of artificial, labor intensity is big, work
Efficiency is low, easily influences later stage impressing effect.
Utility model content
In order to solve the above-mentioned technical problem, the utility model provides a kind of full-automatic yield production type nano-imprinting device.
In order to achieve the above object, the technical solution of the utility model is as follows：
The utility model provides a kind of full-automatic yield production type nano-imprinting device, including：
Base, base are provided with guide rail；
Multiple nano impression mechanisms, nano impression mechanism are arranged on base and are distributed in the both sides in rail length direction；
Feeding machanism, including tablet feeding machanism and mantle plate feeding machanism, tablet feeding machanism and mantle plate feeding machine
Structure is arranged on base and positioned at the side in rail length direction；
Material transfer mechanism, the movement of material transfer mechanism are arranged on guide rail, for tablet and mantle plate to be tied in feed
Carried between structure and nano impression mechanism.
The utility model is compared to prior art, and material transfer mechanism is by tablet and mantle plate in feeding structure and nanometer pressure
Carried between printing mechanism, it is rational in infrastructure, manpower is save, realizes automatic transporting tablet and mantle plate and automatic impressing, Duo Gena
Rice eindruckwerk works simultaneously, greatly improves operating efficiency.
Wherein, above-mentioned nano impression mechanism includes impressing cabinet and eindruckwerk, and impressing cabinet is arranged on base, pressed
Tablet detent mechanism and mantle board positioning mechanism are provided with print cabinet, the side for imprinting cabinet is provided with tablet inlet and outlet and mantle
Plate is imported and exported, and eindruckwerk, which is arranged in impressing cabinet, to be used to mantle plate being stamped into tablet.
On the basis of above-mentioned technical proposal, following improvement can be also done：
As preferable scheme, above-mentioned material transfer mechanism includes installation pedestal, drive mechanism, two connecting crank mechanisms
And positioning component, installation pedestal movement are arranged on guide rail, two connecting crank mechanisms are symmetricly set in installation pedestal, two connections
Crank mechanism includes the first linking arm and the second linking arm, and one end of the first linking arm length direction, which rotates, is arranged at installation pedestal
On, one end of the second linking arm length direction, which rotates, to be arranged on the first linking arm, and positioning component includes positioning base, tablet takes
Material component and mantle plate take-off assembly, the free end of positioning base and 2 second linking arms are hinged, tablet take-off assembly, mantle plate
Take-off assembly is arranged on positioning base, and drive mechanism is connected to driving 2 first with the first linking arm, the second linking arm and connected
Connect arm rotated around the tie point of itself and installation pedestal along same circumferencial direction and for drive two the second linking arms around its with
The tie point of first linking arm rotates along opposite circumferencial direction.
Using above-mentioned preferable scheme, the rotation of two the first linking arms causes tablet and mantle plate in feeding machanism and received
Rice eindruckwerk is switched over when the not homonymy of rail length direction, and feeding machanism is completed in the rotation of two the second linking arms
Feeding and the feeding work of nano impression mechanism.
As preferable scheme, above-mentioned positioning base is cylindrical structure, tablet take-off assembly, mantle plate take-off assembly phase
To being arranged on the side of cylindrical structure.
Using above-mentioned preferable scheme, tablet take-off assembly, mantle plate take-off assembly are arranged on relative side, are passed through
The rotation of two the first linking arms drives positioning base to rotate, and realizes tablet take-off assembly, the feeding of mantle plate take-off assembly.
As preferable scheme, above-mentioned positioning base is cylindrical structure, and tablet take-off assembly, mantle plate take-off assembly are set
It is placed on the side of cylinder knot the same side or the two may be contained within the relative two side faces of cylinder knot, tablet take-off assembly is arranged at
The top of mantle plate take-off assembly.Wherein, above-mentioned installation pedestal includes top base, bottom base and connection cylinder, bottom base shifting
Dynamic to be arranged on guide rail, connection cylinder is arranged on bottom base and its output end is connected with top base.
Using above-mentioned preferable scheme, tablet take-off assembly, mantle plate take-off assembly are arranged at the side of cylinder knot the same side
On face, by top base in the movement of vertical direction, tablet take-off assembly, the feeding of mantle plate take-off assembly are realized.
As preferable scheme, above-mentioned tablet take-off assembly includes two feeding bars, and feeding bar is dress material-handling rod or absorption
Expect bar.
Using above-mentioned preferable scheme, feeding bar is dress material-handling rod, grips tablet；Feeding bar is absorption material bar, draws material
Piece, so as to realize the feeding of tablet.
As preferable scheme, above-mentioned mantle plate take-off assembly includes sucker finger, and sucker finger is electromagnet machine
Structure or vacuum adsorption mechanism.
According to actual conditions, it can select, above-mentioned sucker finger includes sucker bottom plate and magnet coil, in sucker bottom plate
Installation cavity is offered, magnet coil is arranged in installation cavity body, and magnet coil is connected with variable-frequency power sources；On it is also an option that
The sucker finger stated includes sucker bottom plate, and the bottom of sucker bottom plate offers absorption stomata, and connection is offered in sucker bottom plate and is inhaled
The interface channel of attached stomata, interface channel are connected with vavuum pump.
Using above-mentioned preferable scheme, mantle plate take-off assembly is electromagnet mechanism or vacuum adsorption mechanism, is realized soft
The feeding of diaphragm plate.
As preferable scheme, tablet centering mechanism is additionally provided with, tablet centering mechanism is arranged at tablet feeding machanism
Lower section.
Using above-mentioned preferable scheme, increase tablet centre of location mechanism, positioning inspection is carried out to tablet, avoids tablet from producing
Raw skew, ensure the stability carried.
Brief description of the drawings
Fig. 1 is overall structure diagram of the present utility model.
Fig. 2 is structure top view of the present utility model.
Embodiment
Describe preferred embodiment of the present utility model in detail below in conjunction with the accompanying drawings.
In order to reach the purpose of this utility model, as shown in Figure 1 to Figure 2, in one of which embodiment party of the present utility model
A kind of full-automatic yield production type nano-imprinting device is provided in formula, including：
Base, base are provided with guide rail；
Three nano impression mechanisms 1, nano impression mechanism are arranged on base and are distributed in the both sides in rail length direction；
Feeding machanism, including tablet feeding machanism 3 and mantle plate feeding machanism 4, tablet feeding machanism 3 and mantle plate feed
Mechanism 4 is arranged on base and positioned at the side in rail length direction；
Material transfer mechanism 2, the movement of material transfer mechanism 2 is arranged on guide rail, for tablet and mantle plate to be fed
Carried between structure and nano impression mechanism.
Present embodiment is compared to prior art, and material transfer mechanism 2 is by tablet and mantle plate in feeding structure and nanometer
Carried between eindruckwerk, it is rational in infrastructure, manpower is save, realizes automatic transporting tablet and mantle plate and automatic impressing, it is multiple
Nano impression mechanism works simultaneously, greatly improves operating efficiency.
Wherein, above-mentioned nano impression mechanism 1 includes impressing cabinet and eindruckwerk, and impressing cabinet is arranged on base,
Impressing cabinet in is provided with tablet detent mechanism and mantle board positioning mechanism, imprint cabinet side be provided with tablet inlet and outlet with it is soft
Diaphragm plate is imported and exported, and eindruckwerk, which is arranged in impressing cabinet, to be used to mantle plate being stamped into tablet.
In order to further optimize implementation result of the present utility model, in another embodiment of the present utility model,
On the basis of foregoing teachings, above-mentioned material transfer mechanism 2 include installation pedestal, drive mechanism, two connecting crank mechanisms and
Positioning component, installation pedestal movement are arranged on guide rail, and two connecting crank mechanisms are symmetricly set in installation pedestal, and two connections are bent
Handle mechanism includes the first linking arm and the second linking arm, and one end of the first linking arm length direction, which rotates, is arranged at installation pedestal
On, one end of the second linking arm length direction, which rotates, to be arranged on the first linking arm, and positioning component includes positioning base, tablet takes
Material component and mantle plate take-off assembly, the free end of positioning base and 2 second linking arms are hinged, tablet take-off assembly, mantle plate
Take-off assembly is arranged on positioning base, and drive mechanism is connected to driving 2 first with the first linking arm, the second linking arm and connected
Connect arm rotated around the tie point of itself and installation pedestal along same circumferencial direction and for drive two the second linking arms around its with
The tie point of first linking arm rotates along opposite circumferencial direction.
Using above-mentioned preferable scheme, the rotation of two the first linking arms causes tablet and mantle plate in feeding machanism and received
Rice eindruckwerk is switched over when the not homonymy of rail length direction, and feeding machanism is completed in the rotation of two the second linking arms
Feeding and the feeding work of nano impression mechanism.
In order to further optimize implementation result of the present utility model, in another embodiment of the present utility model,
On the basis of foregoing teachings, above-mentioned positioning base is cylindrical structure, and tablet take-off assembly, mantle plate take-off assembly are relative to be set
It is placed on the side of cylindrical structure.
Using above-mentioned preferable scheme, tablet take-off assembly, mantle plate take-off assembly are arranged on relative side, are passed through
The rotation of two the first linking arms drives positioning base to rotate, and realizes tablet take-off assembly, the feeding of mantle plate take-off assembly.
In order to further optimize implementation result of the present utility model, in another embodiment of the present utility model,
On the basis of foregoing teachings, above-mentioned positioning base is cylindrical structure, and tablet take-off assembly, mantle plate take-off assembly are arranged at
On the side of cylinder knot the same side or the two may be contained within the relative two side faces of cylinder knot, and tablet take-off assembly is arranged at mantle
The top of plate take-off assembly.Wherein, above-mentioned installation pedestal includes top base, bottom base and connection cylinder, and bottom base movement is set
It is placed on guide rail, connection cylinder is arranged on bottom base and its output end is connected with top base.
Using above-mentioned preferable scheme, tablet take-off assembly, mantle plate take-off assembly are arranged at the side of cylinder knot the same side
On face, by top base in the movement of vertical direction, tablet take-off assembly, the feeding of mantle plate take-off assembly are realized.
In order to further optimize implementation result of the present utility model, in another embodiment of the present utility model,
On the basis of foregoing teachings, above-mentioned tablet take-off assembly includes two feeding bars, and feeding bar is dress material-handling rod or absorption material bar.
Using above-mentioned preferable scheme, feeding bar is dress material-handling rod, grips tablet；Feeding bar is absorption material bar, draws material
Piece, so as to realize the feeding of tablet.
In order to further optimize implementation result of the present utility model, in another embodiment of the present utility model,
On the basis of foregoing teachings, above-mentioned mantle plate take-off assembly includes sucker finger, sucker finger be electromagnet mechanism or
Vacuum adsorption mechanism.
According to actual conditions, it can select, above-mentioned sucker finger includes sucker bottom plate and magnet coil, in sucker bottom plate
Installation cavity is offered, magnet coil is arranged in installation cavity body, and magnet coil is connected with variable-frequency power sources；On it is also an option that
The sucker finger stated includes sucker bottom plate, and the bottom of sucker bottom plate offers absorption stomata, and connection is offered in sucker bottom plate and is inhaled
The interface channel of attached stomata, interface channel are connected with vavuum pump.
Using above-mentioned preferable scheme, mantle plate take-off assembly is electromagnet mechanism or vacuum adsorption mechanism, is realized soft
The feeding of diaphragm plate.
In order to further optimize implementation result of the present utility model, in another embodiment of the present utility model,
On the basis of foregoing teachings, tablet centering mechanism 5 is additionally provided with, tablet centering mechanism 5 is arranged at tablet feeding machanism
Lower section.
Using above-mentioned preferable scheme, increase tablet centre of location mechanism 5, positioning inspection is carried out to tablet, avoids tablet
Skew is produced, ensures the stability carried.
Above-described is only preferred embodiment of the present utility model, it is noted that for the ordinary skill of this area
For personnel, on the premise of not departing from the utility model and creating design, various modifications and improvements can be made, these all belong to
In the scope of protection of the utility model.
Claims (10)
1. full-automatic yield production type nano-imprinting device, it is characterised in that including：
Base, base are provided with guide rail；
Multiple nano impression mechanisms, nano impression mechanism are arranged on base and are distributed in the both sides in rail length direction；
Feeding machanism, including tablet feeding machanism and mantle plate feeding machanism, tablet feeding machanism and mantle plate feeding machanism are set
It is placed on base and positioned at the side in rail length direction；
Material transfer mechanism, the movement of material transfer mechanism are arranged on guide rail, for by tablet and mantle plate in feeding structure and
Carried between nano impression mechanism.
2. full-automatic yield production type nano-imprinting device according to claim 1, it is characterised in that material transfer mechanism includes
Installation pedestal, drive mechanism, two connecting crank mechanisms and positioning component, installation pedestal movement are arranged on guide rail, and two connections are bent
Handle mechanism is symmetricly set in installation pedestal, and two connecting crank mechanisms include the first linking arm and the second linking arm, the first connection
The one end in arm lengths direction rotates and is arranged in installation pedestal, and one end of the second linking arm length direction, which rotates, is arranged at the first company
Connect on arm, positioning component includes positioning base, tablet take-off assembly and mantle plate take-off assembly, and positioning base is connected with 2 second
The free end of arm is hinged, and tablet take-off assembly, mantle plate take-off assembly are arranged on positioning base, and drive mechanism is connected with first
Arm, the second linking arm are connected to drive 2 first linking arms around the tie point of itself and installation pedestal along same circumferencial direction to turn
Move and for driving two the second linking arms to be rotated around it with the tie point of the first linking arm along opposite circumferencial direction.
3. full-automatic yield production type nano-imprinting device according to claim 2, it is characterised in that positioning base is cylinder knot
Structure, tablet take-off assembly, mantle plate take-off assembly are relatively arranged on the side of cylindrical structure.
4. full-automatic yield production type nano-imprinting device according to claim 2, it is characterised in that positioning base is cylinder knot
Structure, tablet take-off assembly, mantle plate take-off assembly are arranged on the side of cylinder knot the same side or the two may be contained within cylinder knot
On relative two side faces, tablet take-off assembly is arranged at the top of mantle plate take-off assembly.
5. full-automatic yield production type nano-imprinting device according to claim 1, it is characterised in that installation pedestal includes upper base
Seat, bottom base and connection cylinder, bottom base movement be arranged on guide rail, connection cylinder be arranged on bottom base and its output end with
Top base connects.
6. full-automatic yield production type nano-imprinting device according to claim 1, it is characterised in that tablet take-off assembly includes
Two feeding bars, feeding bar are dress material-handling rod or absorption material bar.
7. full-automatic yield production type nano-imprinting device according to claim 1, it is characterised in that mantle plate take-off assembly bag
Sucker finger is included, sucker finger is electromagnet mechanism or vacuum adsorption mechanism.
8. full-automatic yield production type nano-imprinting device according to claim 7, it is characterised in that sucker finger includes sucker
Bottom plate and magnet coil, installation cavity is offered in sucker bottom plate, magnet coil is arranged in installation cavity body, and magnet coil is with becoming
Frequency power connects；Or sucker finger includes sucker bottom plate, the bottom of sucker bottom plate offers absorption stomata, opened up in sucker bottom plate
There is the interface channel of connection absorption stomata, interface channel is connected with vavuum pump.
9. full-automatic yield production type nano-imprinting device according to claim 1, it is characterised in that nano impression mechanism includes
Cabinet and eindruckwerk are imprinted, impressing cabinet is arranged on base, is provided with tablet detent mechanism in impressing cabinet and mantle plate is determined
Position mechanism, the side for imprinting cabinet are provided with tablet inlet and outlet and mantle plate inlet and outlet, and eindruckwerk is arranged in impressing cabinet
For mantle plate to be stamped into tablet.
10. full-automatic yield production type nano-imprinting device according to claim 1 centers characterized in that, being additionally provided with tablet
Mechanism, tablet centering mechanism are arranged at the lower section of tablet feeding machanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720557058.5U CN206788552U (en) | 2017-05-18 | 2017-05-18 | Full-automatic yield production type nano-imprinting device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720557058.5U CN206788552U (en) | 2017-05-18 | 2017-05-18 | Full-automatic yield production type nano-imprinting device |
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| CN206788552U true CN206788552U (en) | 2017-12-22 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107132728A (en) * | 2017-05-18 | 2017-09-05 | 苏州光舵微纳科技股份有限公司 | Full-automatic yield production type nano-imprinting device |
-
2017
- 2017-05-18 CN CN201720557058.5U patent/CN206788552U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107132728A (en) * | 2017-05-18 | 2017-09-05 | 苏州光舵微纳科技股份有限公司 | Full-automatic yield production type nano-imprinting device |
| CN107132728B (en) * | 2017-05-18 | 2024-03-26 | 苏州光舵微纳科技股份有限公司 | Full-automatic volume production type nano imprinting device |
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| CP02 | Change in the address of a patent holder |
Address after: 215000 floors 1 and 2, building 7C, Changshu advanced manufacturing science and Technology Park, No. 2 Jianye Road, Yushan high tech Zone, Changshu, Suzhou, Jiangsu Patentee after: SUZHOU GUANGDUO MICRO, NANO-DEVICE Co.,Ltd. Address before: 215500 102, building 2, kechuangyuan, Changshu Economic and Technological Development Zone, Suzhou City, Jiangsu Province Patentee before: SUZHOU GUANGDUO MICRO, NANO-DEVICE Co.,Ltd. |