CN206774498U - A kind of float electrode of plasma material modified device - Google Patents
A kind of float electrode of plasma material modified device Download PDFInfo
- Publication number
- CN206774498U CN206774498U CN201720257707.XU CN201720257707U CN206774498U CN 206774498 U CN206774498 U CN 206774498U CN 201720257707 U CN201720257707 U CN 201720257707U CN 206774498 U CN206774498 U CN 206774498U
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- CN
- China
- Prior art keywords
- insulating base
- electrode
- modified device
- material modified
- conduction copper
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of float electrode of plasma material modified device, including double-rod cylinder, the double-rod cylinder lower end is provided with insulating base, the insulating base includes upper insulating base and lower insulating base, Top electrode piece is provided between the upper insulating base and the lower insulating base, the lower insulating base middle inside is inlaid with conduction copper column, and the conduction copper column upper end is provided with locating dowel, and the conduction copper column lower end is provided with brush electrode.Beneficial effect is：The float electrode can give the vacuum chambers of two alternations reliably feed-in high frequency, the discharge power supply of high pressure, it is sufficient to competent all power frequency occasion work, great application value.
Description
Technical field
The float electrode field of plasma material modified device is the utility model is related to, more particularly to a kind of plasma material
Expect the float electrode of modified device.
Background technology
Float electrode is to refer exclusively to need the plasma apparatus discharge power supply access device for adding special working gas in work, such as
The discharge power supply access device of the equipment such as plasma cleaner, plasma material surface modifying apparatus.It can see in the market
The said equipment be substantially (only a vacuum chamber) of single-chamber, without float electrode, the access of its discharge power supply is exactly
Connecting line is locked on access terminal, still, the cut-in method of this single-chamber plasma apparatus discharge power supply is in two-chamber
Or can not be used in the access of multi-cavity plasma apparatus discharge power supply, for the above situation, a kind of plasma material can be designed
The float electrode of modified device solves the above problems.
Utility model content
The purpose of this utility model is that to solve the above problems and provides a kind of plasma material modified device
Float electrode.
The utility model is achieved through the following technical solutions above-mentioned purpose：
A kind of float electrode of plasma material modified device, including double-rod cylinder, the double-rod cylinder lower end are provided with
Insulating base, the insulating base include upper insulating base and lower insulating base, are provided between the upper insulating base and the lower insulating base
Top electrode piece, the lower insulating base middle inside are inlaid with conduction copper column, and the conduction copper column upper end is provided with locating dowel, described
Conduction copper column lower end is provided with brush electrode.
In order to further improve the practicality of the float electrode of plasma material modified device, the upper insulating base and described
Lower insulating base is bolted connection, wherein, the upper insulating base upper surface offers one and is used to install the double-rod cylinder
The recess of piston, the recess size and the double-rod cylinder piston are equal in magnitude, the double-rod cylinder by the recess with
The upper insulating base is fixedly connected.
In order to further improve the practicality of the float electrode of plasma material modified device, opened up on the Top electrode piece
There are the positioning hole for installing the locating dowel and the connecting hole for connecting plasma discharge power supply.
In order to further improve the practicality of the float electrode of plasma material modified device, the locating dowel is led with described
Electrolytic copper post is structure as a whole.
In order to further improve the practicality of the float electrode of plasma material modified device, the conduction copper column lower surface
A groove is offered, the groove is rectangular slot, and the brush electrode is embedded in the groove, and under the brush electrode
End is stretched out immediately below the groove to the conduction copper column.
In order to further improve the practicality of the float electrode of plasma material modified device, the brush electrode is by least
A piece copper wire composition.
Beneficial effect is：The float electrode can give the vacuum chambers of two alternations reliably feed-in high frequency, high pressure
Discharge power supply, it is sufficient to competent all power frequency occasion work, great application value.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the float electrode of plasma material modified device described in the utility model；
Fig. 2 is a kind of partial enlarged drawing of the float electrode of plasma material modified device described in the utility model；
Fig. 3 is that a kind of structure of the Top electrode piece of the float electrode of plasma material modified device described in the utility model is shown
It is intended to.
Description of reference numerals is as follows：
1st, double-rod cylinder；2nd, upper insulating base；3rd, Top electrode piece；4th, brush electrode；5th, conduction copper column；6th, lower insulating base；7、
Locating dowel；8th, positioning hole；9th, connecting hole；10th, groove；11st, recess.
Embodiment
The utility model is described in further detail below in conjunction with the accompanying drawings：
As shown in Figure 1-Figure 3, a kind of float electrode of plasma material modified device, including double-rod cylinder 1, double-rod cylinder
1 is mainly used in controlling brush electrode 4 to move up and down, and after some vacuum chamber, which moves into working position, exhausts vacuum, system computerized meeting is certainly
Dynamic control double-rod cylinder 1 pushes, and brush electrode 4 is kept good electrical contact with vacuum chamber cabin climax disk, to be discharged to finish
Computer control double-rod cylinder 1 resets, and the lower end of double-rod cylinder 1 is provided with insulating base, and insulating base both can guarantee that double-rod cylinder 1 and brush
Mechanical coupling strength between electrode 4, and can ensure the electrical insulation strength between double-rod cylinder 1 and brush electrode 4, insulating base
By good mechanical performance, 3240 high fiberglass resin materials of electrical insulation strength are process, and insulating base includes the upper He of insulating base 2
Lower insulating base 6, is provided with Top electrode piece 3 between upper insulating base 2 and lower insulating base 6, Top electrode piece 3 made by 2mm copper sheet and
Into for the electrical connection between plasma discharge power supply and brush electrode 4, the lower middle inside of insulating base 6 is inlaid with conductive copper
Post 5, conduction copper column 5 are used to fix brush electrode 4, during use by numerous copper wires be put into the groove 10 of conduction copper column 5 again by
Special hydraulic jaw tightens up both, and the upper end of conduction copper column 5 is provided with locating dowel 7, and the lower end of conduction copper column 5 is provided with brush
Electrode 4, electric good contact under dynamic situation is mainly ensured using the electrode of brush-like structure.
In order to further improve the practicality of the float electrode of plasma material modified device, upper insulating base 2 and lower insulation
Seat 6 is bolted connection, wherein, the upper upper surface of insulating base 2 offers a recess for being used to install the piston of double-rod cylinder 1
11, the size of recess 11 and the piston of double-rod cylinder 1 are equal in magnitude, and double-rod cylinder 1 is fixedly connected by recess 11 with upper insulating base 2,
The positioning hole 8 for installing locating dowel 7 and the connecting hole 9 for connecting plasma discharge power supply are offered on Top electrode piece 3, it is fixed
Position post 7 is structure as a whole with conduction copper column 5, and the lower surface of conduction copper column 5 offers a groove 10, and groove 10 is rectangular slot, brush
Shape electrode 4 is embedded in groove 10, and the lower end of brush electrode 4 is stretched out immediately below groove 10 to conduction copper column 5, brush electrode 4 by
Some thin copper wire compositions.
General principle, principal character and advantage of the present utility model has been shown and described above.The technical staff of the industry
It should be appreciated that the utility model is not restricted to the described embodiments, the simply explanation described in above-described embodiment and specification is originally
The principle of utility model, on the premise of the spirit and scope of the utility model is not departed from, the utility model also has various change
And improvement, these changes and improvements are both fallen within claimed the scope of the utility model.The utility model requires protection scope
Defined by appended claims and its effect thing.
Claims (6)
- A kind of 1. float electrode of plasma material modified device, it is characterised in that：Including double-rod cylinder, under the double-rod cylinder End is provided with insulating base, and the insulating base includes upper insulating base and lower insulating base, the upper insulating base and the lower insulating base it Between be provided with Top electrode piece, the lower insulating base middle inside is inlaid with conduction copper column, and the conduction copper column upper end is provided with fixed Position post, the conduction copper column lower end is provided with brush electrode.
- A kind of 2. float electrode of plasma material modified device according to claim 1, it is characterised in that：It is described exhausted Edge seat and the lower insulating base are bolted connection, wherein, the upper insulating base upper surface offers one and is used to install institute The recess of double-rod cylinder piston is stated, the recess size and the double-rod cylinder piston are equal in magnitude, and the double-rod cylinder passes through The recess is fixedly connected with the upper insulating base.
- A kind of 3. float electrode of plasma material modified device according to claim 1, it is characterised in that：The upper electricity The positioning hole for installing the locating dowel and the connecting hole for connecting plasma discharge power supply are offered on pole piece.
- A kind of 4. float electrode of plasma material modified device according to claim 1, it is characterised in that：The positioning Post is structure as a whole with the conduction copper column.
- A kind of 5. float electrode of plasma material modified device according to claim 1, it is characterised in that：The conduction Copper post lower surface offers a groove, and the groove is rectangular slot, and the brush electrode is embedded in the groove, and described Brush electrode lower end is stretched out immediately below the groove to the conduction copper column.
- A kind of 6. float electrode of plasma material modified device according to claim 1, it is characterised in that：The brush Electrode is made up of some thin copper wires.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720257707.XU CN206774498U (en) | 2017-03-16 | 2017-03-16 | A kind of float electrode of plasma material modified device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720257707.XU CN206774498U (en) | 2017-03-16 | 2017-03-16 | A kind of float electrode of plasma material modified device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206774498U true CN206774498U (en) | 2017-12-19 |
Family
ID=60632728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720257707.XU Expired - Fee Related CN206774498U (en) | 2017-03-16 | 2017-03-16 | A kind of float electrode of plasma material modified device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206774498U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108856170A (en) * | 2018-05-12 | 2018-11-23 | 合肥杰硕真空科技有限公司 | A kind of intermediate frequency plasma body cleaning device |
-
2017
- 2017-03-16 CN CN201720257707.XU patent/CN206774498U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108856170A (en) * | 2018-05-12 | 2018-11-23 | 合肥杰硕真空科技有限公司 | A kind of intermediate frequency plasma body cleaning device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171219 Termination date: 20190316 |