CN206757415U - Flow control system - Google Patents
Flow control system Download PDFInfo
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- CN206757415U CN206757415U CN201720406198.2U CN201720406198U CN206757415U CN 206757415 U CN206757415 U CN 206757415U CN 201720406198 U CN201720406198 U CN 201720406198U CN 206757415 U CN206757415 U CN 206757415U
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Abstract
The utility model provides a kind of flow control system, and it includes mass flow controller, communication unit and man-machine interface, wherein, communication unit is used to realize the information transfer between mass flow controller and man-machine interface；Man-machine interface is used to show the display information from mass flow controller, and receives the set information being manually entered, and sends it to mass flow controller；Mass flow controller is used to send display information to man-machine interface；And the mass flow of fluid is adjusted according to the set information from man-machine interface, or connect stream or disconnect stream.Flow control system provided by the utility model, it can meet to device miniaturization and intelligentized requirement.
Description
Technical field
Flow control technique field is the utility model is related to, in particular it relates to a kind of flow control system.
Background technology
Mass flow controller (Mass Flow Controller, MFC) is mainly used in the quality stream to gas or liquid
Amount carries out accurate measurement and control, semiconductor microelectronic industry, special material development, chemical industry, petroleum industry, medicine,
Important role in the scientific research and life of multiple fields such as environmental protection and vacuum.
Mass flow controller is by parts such as mass flowmenter, controller, separator passage, flow sensor and regulating valves
Composition, it not only has the function of flowmeter, moreover it is possible to automatic control fluid flow.
But current mass flow controller needs to arrange Flow Measurement Display Meter in addition and for controlling mass flow control
The flow control system of device processed, to realize the visualization of flow and automation, therefore, the build of equipment is larger, automatically processes energy
Power is poor, can not meet to device miniaturization and intelligentized requirement.
Utility model content
The utility model is intended at least solve one of technical problem present in prior art, it is proposed that a kind of flow control
System, it can meet to device miniaturization and intelligentized requirement.
To realize that the purpose of this utility model provides a kind of flow control system, including mass flow controller, communication
Unit and man-machine interface, wherein,
The communication unit is used to realize the information transfer between the mass flow controller and the man-machine interface；
The man-machine interface is used to show the display information from the mass flow controller, and receives and be manually entered
Set information, and send it to the mass flow controller；
The mass flow controller is used to send the display information to the man-machine interface；And according to from institute
The mass flow of the set information regulation fluid of man-machine interface is stated, or connects stream or disconnects stream.
Preferably, the mass flow controller includes flow sensor, flow control valve and control unit, wherein,
The flow sensor is used for the real-time quality flow for detecting fluid, and sends it to described control unit；
The flow control valve is used for the mass flow for adjusting fluid, or connects stream or disconnect stream；
Described control unit is used to control the flow control valve according to the set information from the man-machine interface
Work.
Preferably, the mode of operation of the mass flow controller includes flow adjustable mode, stream close pattern and stream
Road cleaning model；
The man-machine interface receives the set information for the mode of operation on the mass flow controller being manually entered,
And send it to described control unit；
Described control unit switches the mode of operation of the mass flow controller according to the set information.
Preferably, the man-machine interface includes being used for showing the real-time quality flow of fluid, the mass flow respectively
The four of the mode of operation of full scale, the mode of operation of the current mass flow controller and the current flow control valve
Individual display module.
Preferably, the set information includes aimed quality flow；
Described control unit carries out poor calculating according to the real-time quality flow of the fluid and the aimed quality flow, and
The mass flow of flow control valve regulation fluid is controlled according to result of calculation so that the real-time quality flow of the fluid and
The aimed quality flow is consistent.
Preferably, described control unit includes analog-to-digital conversion module, microprocessor and D/A converter module, wherein,
The real-time quality flow of the flow sensor detection fluid, and the analog signal of the real-time quality flow is sent out
Deliver to the analog-to-digital conversion module；
The analog-to-digital conversion module is used to the analog signal of the real-time quality flow being converted to data signal, and sends
To the microprocessor；
The microprocessor is used to carry out poor calculating, and root according to the real-time quality flow and the aimed quality flow
Data signal according to the result of calculation to D/A converter module transmission on controlling the flow control valve；
The D/A converter module is used to the data signal on controlling the flow control valve being converted to simulation
Signal, and send to the flow control valve；
The flow control valve according to the analog signal throttle body mass flow.
Preferably, the flow control system also includes alarm unit；
The alarm unit is used to judge whether the mass flow controller operation irregularity situation occurs, if so, then sending out
Go out alarm.
Preferably, the alarm unit is when judging that operation irregularity situation occurs in the mass flow controller, to described
Man-machine interface sends alarm display information；
The man-machine interface includes being used for the display module for showing the alarm display information.
Preferably, the flow control system also includes timing unit；
The man-machine interface is received from the time set information on connecting stream or disconnection stream being manually entered, and
Send it to the setup unit；
The timing unit carries out timing according to the time set information, and reaches connection stream or disconnecting stream
During the time, control signal is sent to the mass flow controller；
The mass flow controller connects stream according to the control signal or disconnects stream.
Preferably, the communication unit includes wireless transport module and/or wire transmission module.
The utility model has the advantages that：
Flow control system provided by the utility model, it by communication unit by realizing mass flow controller and people
Information transfer between machine interface, and the display information from mass flow controller is shown by man-machine interface, and receive
The set information being manually entered, and mass flow controller is sent it to, the visualization and automation of flow can realized
On the basis of, reduce equipment build, improve automatic processing capabilities, so as to meet to device miniaturization and intelligentized
It is required that.
Brief description of the drawings
Fig. 1 is the theory diagram for the flow control system that the utility model embodiment provides；
Fig. 2 is the theory diagram of mass flow controller in the utility model embodiment；
Fig. 3 is the display module figure of man-machine interface in the utility model embodiment；
Fig. 4 is the theory diagram of control unit in the utility model embodiment；
Fig. 5 is the fundamental diagram for the flow control system that the utility model embodiment provides.
Embodiment
To make those skilled in the art more fully understand the technical solution of the utility model, come below in conjunction with the accompanying drawings to this
The flow control system that utility model provides is described in detail.
Fig. 1 is the theory diagram for the flow control system that the utility model embodiment provides.Referring to Fig. 1, flow controls
System includes mass flow controller 3, communication unit 2 and man-machine interface 1, wherein, communication unit 2 is used to realize mass flow control
Information transfer between device 3 processed and man-machine interface 1.The communication unit 2 includes wireless transport module and/or wire transmission module.
Wherein, communication interface includes at least one in network interface, IEE1394 interfaces and USB interface used by wire transmission module
Kind wired communication interface.Communication mode includes bluetooth, 2.4G radio communications, infrared ray, wireless used by wireless transport module
At least one of network communication, worldwide interoperability for microwave accesses and no-load wave communication communication.
Man-machine interface 1 is used to show the display information from mass flow controller 3, and receives the setting being manually entered
Information, and send it to mass flow controller 3.Above-mentioned display information can include real-time quality flow, the quality of fluid
Full scale (including higher limit of range and/or mass flow) of flow etc..Above-mentioned set information can include aimed quality stream
Amount, connect stream or disconnect stream etc..Man-machine interface 1 can be with display, the user interface of input function, guidance panel or
Person's terminal etc..
Mass flow controller 3 is in the mass flow of the real-time quality flow with detection fluid, regulation fluid, Huo Zhejie
On the basis of the function such as through-flow road or disconnection stream, it is additionally operable to send above-mentioned display information to man-machine interface 1；And according to next
The mass flow of fluid is adjusted from the above-mentioned set information of man-machine interface 1, or connects stream or disconnects stream.Above-mentioned fluid bag
Include gas or liquid.Stream for example can be each pipeline in pipeline diverter.
Thus, flow control system provided by the utility model can be achieved by above-mentioned man-machine interface 1 and communication unit 2
The visualization and automation of flow, the flow without individually arranging Flow Measurement Display Meter and for controlling mass flow controller
Control system, so as to reduce equipment build, improve automatic processing capabilities, so as to meet to device miniaturization and intelligence
The requirement of change.
Fig. 2 is the theory diagram of mass flow controller in the utility model embodiment.Referring to Fig. 2, in the present embodiment
In, mass flow controller 3 includes flow sensor 31, flow control valve 33 and control unit 32, wherein, flow sensor 31
For detecting the real-time quality flow of fluid, and send it to control unit 32.Flow control valve 33 is used to adjust fluid
Mass flow, or connect stream or disconnect stream.Flow control valve 33 for example can be solenoid valve.Control unit 32 is used
In the work according to the above-mentioned set information control flow control valve 33 from man-machine interface 1.
By flow sensor 31, flow control valve 33 and control unit 32, it is possible to achieve the mass flow of convection body
Closed-loop control, so as to realize the accurate control to mass flow.Specifically, above-mentioned man-machine interface 1 receives what is be manually entered
Aimed quality flow, i.e. it is expected the mass flow value reached, and sent by communication unit 2 to control unit 32；Control unit
32 carry out poor calculating according to the real-time quality flow and the aimed quality flow of the fluid that acquisition is detected by flow sensor 31, and
The mass flow of the regulation fluid of flow control valve 33 is controlled according to result of calculation, so that the real-time quality flow and target matter of fluid
It is consistent to measure flow, it is achieved thereby that the closed-loop control of mass flow.
Further, Fig. 4 is the theory diagram of control unit in the utility model embodiment.Referring to Fig. 4, control unit
32 include analog-to-digital conversion module 321, microprocessor 322 and D/A converter module 323, wherein, flow sensor 31 detects fluid
Real-time quality flow, and the analog signal of the real-time quality flow is sent to analog-to-digital conversion module 321；Analog-to-digital conversion module
321 are used to the analog signal of real-time quality flow being converted to data signal, and send to microprocessor 322；Microprocessor 322
For carrying out poor calculating according to real-time quality flow and aimed quality flow, and according to the result of calculation to D/A converter module
323 send the data signal on controlling flow control valve 33；D/A converter module 323 is used for will be on controlling flow control valve
Data signal be converted to analog signal, and send to flow control valve 33；Flow control valve 33 throttles according to the analog signal
The mass flow of body.Here, flow sensor 321 and the flow control valve 33 required electric energy that works are driven by sensor respectively
Circuit is realized with (electronic) control valve-driving circuit.
Preferably, it is clear to include flow adjustable mode, stream close pattern and stream for the mode of operation of mass flow controller 3
Mold cleaning formula.Wherein, flow adjustable mode is the pattern for referring to adjust the mass flow of fluid by flow control valve 33；Stream
Close pattern refers to the pattern that flow control valve 33 is closed；Stream cleaning model refers to that flow path is cleaned, to remove stream
The gas of middle residual or the pattern of liquid.Man-machine interface 1 receives the mode of operation on mass flow controller 3 being manually entered
Set information, and send it to control unit 32；Control unit 32 is according to the set information quality of handoff flow controller 3
Mode of operation.
Fig. 3 is the display module figure of man-machine interface in the utility model embodiment.Referring to Fig. 3, man-machine interface 1 includes using
In the mode of operation for showing the real-time quality flow of fluid, the full scale of mass flow, current mass flow controller respectively
With four display modules (11,12,13,14) of the mode of operation of current flow control valve.It is readily appreciated that, this four display moulds
Display information shown by block (11,12,13,14), obtained by above-mentioned control unit 32 by communication unit 2.In addition, above-mentioned stream
The mode of operation of control valve generally includes the flow adjustable mode of flow control valve 33, off/on pattern etc..
Preferably, flow control system also includes alarm unit.Alarm unit is used for whether judging mass flow controller 3
There is operation irregularity situation, if so, then sending alarm.Above-mentioned operation irregularity situation can include the voltage mistake of flow control valve 33
High, short circuit, the abnormal signal of flow sensor 31 etc..The alarm can be sound or light.It is further preferred that above-mentioned report
Alert unit sends alarm display letter when judging that above-mentioned operation irregularity situation occurs in mass flow controller 3, to man-machine interface 1
Breath；Man-machine interface 1 includes being used for the display module for showing the alarm display information.By alarm unit, operating personnel can be made
The operation irregularity situation of mass flow controller 3 is found in time, can effectively carry out corresponding measure.
Additionally, it is preferred that, flow control system also includes timing unit.Man-machine interface 1 is received from the pass being manually entered
In connection stream or the time set information of disconnection stream, and send it to setup unit；Timing unit is set according to the time
Determine information and carry out timing, and when reaching the time connected stream or disconnect stream, control letter is sent to mass flow controller 3
Number；Mass flow controller 3 connects stream according to the control signal or disconnects stream.
A specific embodiment of flow control system provided by the utility model is described in detail below.Specifically
Ground, Fig. 5 are the fundamental diagram for the flow control system that the utility model embodiment provides.Referring to Fig. 5, flow control system
Including mass flow controller, communication unit 407, alarm unit 408, timing unit 411 and man-machine interface 5, wherein, quality stream
Amount controller further comprises pipeline diverter 401, flow sensor 402, microprocessor 403, flow control valve 404, modulus
Converter 405, digital analog converter 406, sensor drive driving circuit 409 and control valve-driving circuit 410.Preferably, above-mentioned communication
Unit 407, alarm unit 408 and timing unit 411 can be integrated in the body of mass flow controller, with further excellent
Change equipment build.
Flow can be achieved by above-mentioned man-machine interface 1 and communication unit 2 in flow control system provided by the utility model
Visualization and automation, without individually arranging Flow Measurement Display Meter and for controlling the flow of mass flow controller to control
System, so as to reduce equipment build, improve automatic processing capabilities, so as to meet to device miniaturization and intelligentized
It is required that.
It is understood that embodiment of above is merely to illustrate that principle of the present utility model and used exemplary
Embodiment, but the utility model is not limited thereto.For those skilled in the art, this is not being departed from
In the case of the spirit and essence of utility model, various changes and modifications can be made therein, and these variations and modifications are also considered as this reality
With new protection domain.
Claims (10)
- A kind of 1. flow control system, it is characterised in that including mass flow controller, communication unit and man-machine interface, wherein,The communication unit is used to realize the information transfer between the mass flow controller and the man-machine interface；The man-machine interface be used for show the display information from the mass flow controller, and receive be manually entered set Determine information, and send it to the mass flow controller；The mass flow controller is used to send the display information to the man-machine interface；And according to from the people The mass flow of the set information regulation fluid at machine interface, or connect stream or disconnect stream.
- 2. flow control system according to claim 1, it is characterised in that the mass flow controller passes including flow Sensor, flow control valve and control unit, wherein,The flow sensor is used for the real-time quality flow for detecting fluid, and sends it to described control unit；The flow control valve is used for the mass flow for adjusting fluid, or connects stream or disconnect stream；Described control unit is used for the work that the flow control valve is controlled according to the set information from the man-machine interface Make.
- 3. flow control system according to claim 2, it is characterised in that the mode of operation of the mass flow controller Including flow adjustable mode, stream close pattern and stream cleaning model；The man-machine interface receives the set information for the mode of operation on the mass flow controller being manually entered, and will It is sent to described control unit；Described control unit switches the mode of operation of the mass flow controller according to the set information.
- 4. flow control system according to claim 3, it is characterised in that the man-machine interface includes being used to show respectively The real-time quality flow of fluid, the full scale of the mass flow, the current mass flow controller mode of operation and Four display modules of the mode of operation of the current flow control valve.
- 5. flow control system according to claim 2, it is characterised in that the set information includes aimed quality stream Amount；Described control unit carries out poor calculating according to the real-time quality flow of the fluid and the aimed quality flow, and according to Result of calculation controls the mass flow of flow control valve regulation fluid, so that the real-time quality flow of the fluid and described Aimed quality flow is consistent.
- 6. flow control system according to claim 5, it is characterised in that described control unit includes analog-to-digital conversion mould Block, microprocessor and D/A converter module, wherein,The real-time quality flow of flow sensor detection fluid, and by the analog signal of the real-time quality flow send to The analog-to-digital conversion module；The analog-to-digital conversion module is used to the analog signal of the real-time quality flow being converted to data signal, and sends to institute State microprocessor；The microprocessor is used to carry out poor calculating according to the real-time quality flow and the aimed quality flow, and according to this Result of calculation sends the data signal on controlling the flow control valve to the D/A converter module；The D/A converter module is used to the data signal on controlling the flow control valve being converted to analog signal, And send to the flow control valve；The flow control valve according to the analog signal throttle body mass flow.
- 7. according to the flow control system described in claim 1-6 any one, it is characterised in that the flow control system is also Including alarm unit；The alarm unit is used to judge whether the mass flow controller operation irregularity situation occurs, if so, then sending police Report.
- 8. flow control system according to claim 7, it is characterised in that the alarm unit is judging the quality stream When operation irregularity situation occurs in amount controller, alarm display information is sent to the man-machine interface；The man-machine interface includes being used for the display module for showing the alarm display information.
- 9. according to the flow control system described in claim 1-6 any one, it is characterised in that the flow control system is also Including timing unit；The man-machine interface is received from being manually entered on connecting stream or disconnecting the time set information of stream, and by its Send to the setup unit；The timing unit carries out timing according to the time set information, and reaches connection stream or disconnecting the time of stream When, send control signal to the mass flow controller；The mass flow controller connects stream according to the control signal or disconnects stream.
- 10. flow control system according to claim 1, it is characterised in that the communication unit includes being wirelessly transferred mould Block and/or wire transmission module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720406198.2U CN206757415U (en) | 2017-04-18 | 2017-04-18 | Flow control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720406198.2U CN206757415U (en) | 2017-04-18 | 2017-04-18 | Flow control system |
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| Publication Number | Publication Date |
|---|---|
| CN206757415U true CN206757415U (en) | 2017-12-15 |
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| CN201720406198.2U Active CN206757415U (en) | 2017-04-18 | 2017-04-18 | Flow control system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109555674A (en) * | 2018-12-28 | 2019-04-02 | 苏州鼎威新能源有限公司 | A kind of solar powered photovoltaic water pump flow control system |
| CN111794327A (en) * | 2020-07-23 | 2020-10-20 | 台州市卫卓智能科技有限公司 | Automatic flow regulating system of intelligent closestool |
-
2017
- 2017-04-18 CN CN201720406198.2U patent/CN206757415U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109555674A (en) * | 2018-12-28 | 2019-04-02 | 苏州鼎威新能源有限公司 | A kind of solar powered photovoltaic water pump flow control system |
| CN111794327A (en) * | 2020-07-23 | 2020-10-20 | 台州市卫卓智能科技有限公司 | Automatic flow regulating system of intelligent closestool |
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